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GB1268381A - Improvements in and relating to ion pumps - Google Patents

Improvements in and relating to ion pumps

Info

Publication number
GB1268381A
GB1268381A GB1615169A GB1615169A GB1268381A GB 1268381 A GB1268381 A GB 1268381A GB 1615169 A GB1615169 A GB 1615169A GB 1615169 A GB1615169 A GB 1615169A GB 1268381 A GB1268381 A GB 1268381A
Authority
GB
United Kingdom
Prior art keywords
zone
electrodes
passage
ionized
march
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1615169A
Inventor
Erich Jakopic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1268381A publication Critical patent/GB1268381A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,268,381. Ion pumps. E. JAKOPIC. 27 March, 1969 [27 March, 1968], No. 16151/69. Heading H1D. An ion compression pump has a high-pressure zone B and a low-pressure zone A separated by a partition provided with a tubular passage K for conveying ions from zone A to zone B but presenting a high resistance to flow of electrically neutral gas molecules from zone B to zone A, gas from a vessel to be evacuated being ionized in zone A by a discharge between electrodes a and b assisted by a high-frequency voltage applied to electrode E and the resulting ions passing through passage K to zone B under the influence of the potentials applied to electrodes a, b and e. A conical electrode c surrounding a conical portion of passage K provides a focusing effect, and any neutral gas molecules diffusing into the passage K from zone B are re-ionized by the field between electrodes c and d. An additional high-frequency field may be applied between electrodes c and d (Fig. 4, not shown). Gas is removed from zone B by a backing pump.
GB1615169A 1968-03-27 1969-03-27 Improvements in and relating to ion pumps Expired GB1268381A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT298068A AT288066B (en) 1968-03-27 1968-03-27 Single or multi-stage compressing ion pump

Publications (1)

Publication Number Publication Date
GB1268381A true GB1268381A (en) 1972-03-29

Family

ID=3543424

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1615169A Expired GB1268381A (en) 1968-03-27 1969-03-27 Improvements in and relating to ion pumps

Country Status (3)

Country Link
AT (1) AT288066B (en)
DE (1) DE1915367A1 (en)
GB (1) GB1268381A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008052217B3 (en) * 2008-10-17 2011-03-10 Johann Wolfgang Goethe-Universität Electrostatic ion compressor
GB2552071A (en) * 2016-05-31 2018-01-10 Agilent Technologies Inc Ion throughput pump and method

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
JPH05174780A (en) * 1991-02-12 1993-07-13 Ebara Corp High vacuum device and vacuum pump device using the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008052217B3 (en) * 2008-10-17 2011-03-10 Johann Wolfgang Goethe-Universität Electrostatic ion compressor
GB2552071A (en) * 2016-05-31 2018-01-10 Agilent Technologies Inc Ion throughput pump and method
US10455683B2 (en) 2016-05-31 2019-10-22 Agilent Technologies, Inc. Ion throughput pump and method
GB2552071B (en) * 2016-05-31 2022-11-09 Agilent Technologies Inc Ion throughput pump and method

Also Published As

Publication number Publication date
AT288066B (en) 1971-02-25
DE1915367A1 (en) 1969-10-09

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