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GB1260070A - Furnace tube for processing semiconductor devices - Google Patents

Furnace tube for processing semiconductor devices

Info

Publication number
GB1260070A
GB1260070A GB46783/70A GB4678370A GB1260070A GB 1260070 A GB1260070 A GB 1260070A GB 46783/70 A GB46783/70 A GB 46783/70A GB 4678370 A GB4678370 A GB 4678370A GB 1260070 A GB1260070 A GB 1260070A
Authority
GB
United Kingdom
Prior art keywords
film
furnace tube
semiconductor devices
processing semiconductor
oct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB46783/70A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NCR Voyix Corp
National Cash Register Co
Original Assignee
NCR Corp
National Cash Register Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NCR Corp, National Cash Register Co filed Critical NCR Corp
Publication of GB1260070A publication Critical patent/GB1260070A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0014—Devices wherein the heating current flows through particular resistances
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/006—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/053—Field effect transistors fets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/118—Oxide films

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

1,260,070. Muffles. NATIONAL CASH REGISTER CO. 1 Oct., 1970 [14 Oct., 1969], No. 46783/70. Heading F4B. [Also in Division H1] A furnace tube 12 for processing semiconductors, includes a tubular member formed of a non-metallic refractory material and provided on its inner surface 13 with a coating 14 at least partly formed by a film of metal effective to impede the passage of positive ions into the interior of the tubular member. The film has a thickness of between 600 to 6000 Angstroms, and can be of platinum, rhodium or of tantalum or titanium if a protective layer of silicon nitride is used to inhibit oxidation of the film.
GB46783/70A 1969-10-14 1970-10-01 Furnace tube for processing semiconductor devices Expired GB1260070A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86618569A 1969-10-14 1969-10-14

Publications (1)

Publication Number Publication Date
GB1260070A true GB1260070A (en) 1972-01-12

Family

ID=25347091

Family Applications (1)

Application Number Title Priority Date Filing Date
GB46783/70A Expired GB1260070A (en) 1969-10-14 1970-10-01 Furnace tube for processing semiconductor devices

Country Status (10)

Country Link
US (1) US3645695A (en)
JP (1) JPS4922781B1 (en)
BE (1) BE757500A (en)
CA (1) CA961385A (en)
CH (1) CH515613A (en)
DE (1) DE2049904A1 (en)
ES (1) ES384378A1 (en)
FR (1) FR2064318B1 (en)
GB (1) GB1260070A (en)
ZA (1) ZA706739B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742904A (en) * 1971-06-03 1973-07-03 Motorola Inc Steam generator and gas insertion device
DE2206493C3 (en) * 1972-02-11 1975-01-30 Heraeus-Schott Quarzschmelze Gmbh, 6450 Hanau Multi-layer quartz glass body for use in solid-state technology
JPS5277590A (en) * 1975-12-24 1977-06-30 Toshiba Corp Semiconductor producing device
US4154192A (en) * 1976-12-10 1979-05-15 Mitsubishi Denki Kabushiki Kaisha Manufacturing apparatus for semiconductor devices
US4592307A (en) * 1985-02-28 1986-06-03 Rca Corporation Vapor phase deposition apparatus
JPS63105255U (en) * 1986-12-26 1988-07-07

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2746888A (en) * 1952-07-05 1956-05-22 Du Pont Method of forming titanium coating on refractory body
US3010092A (en) * 1958-08-05 1961-11-21 Bourns Inc Variable resistor
US3112215A (en) * 1959-10-09 1963-11-26 Lonza Ag Preparation of catalytically active coatings
US3507627A (en) * 1964-05-22 1970-04-21 Prototech Inc Heating and catalytic chemical reaction apparatus
US3516850A (en) * 1966-09-16 1970-06-23 Texas Instruments Inc Process for metal coating a hydrogen permeable material
US3446659A (en) * 1966-09-16 1969-05-27 Texas Instruments Inc Apparatus and process for growing noncontaminated thermal oxide on silicon

Also Published As

Publication number Publication date
ZA706739B (en) 1971-05-27
CH515613A (en) 1971-11-15
ES384378A1 (en) 1973-02-16
DE2049904A1 (en) 1971-05-13
FR2064318A1 (en) 1971-07-23
BE757500A (en) 1971-03-16
US3645695A (en) 1972-02-29
CA961385A (en) 1975-01-21
JPS4922781B1 (en) 1974-06-11
FR2064318B1 (en) 1976-09-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee