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GB1067475A - Tantalum film resistors - Google Patents

Tantalum film resistors

Info

Publication number
GB1067475A
GB1067475A GB4720363A GB4720363A GB1067475A GB 1067475 A GB1067475 A GB 1067475A GB 4720363 A GB4720363 A GB 4720363A GB 4720363 A GB4720363 A GB 4720363A GB 1067475 A GB1067475 A GB 1067475A
Authority
GB
United Kingdom
Prior art keywords
tantalum film
film resistors
alloy
tantalum
carbode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4720363A
Inventor
Roger George Duckwor Th
Derek Ross Tibbetts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Electronics Ltd
Original Assignee
Ultra Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Electronics Ltd filed Critical Ultra Electronics Ltd
Priority to GB4720363A priority Critical patent/GB1067475A/en
Publication of GB1067475A publication Critical patent/GB1067475A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

A film resistor is made by simultaneously sputtering tantalum and an oxidation resistant alloy (e.g. an iron alloy such as stainless steel) on to a substrate of glass, ceramic, oxidized silicon or anodized metal. The carbode may be in the form of a tantalum disc surrounded by a ring of the alloy.
GB4720363A 1963-11-29 1963-11-29 Tantalum film resistors Expired GB1067475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4720363A GB1067475A (en) 1963-11-29 1963-11-29 Tantalum film resistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4720363A GB1067475A (en) 1963-11-29 1963-11-29 Tantalum film resistors

Publications (1)

Publication Number Publication Date
GB1067475A true GB1067475A (en) 1967-05-03

Family

ID=10444122

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4720363A Expired GB1067475A (en) 1963-11-29 1963-11-29 Tantalum film resistors

Country Status (1)

Country Link
GB (1) GB1067475A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982003458A1 (en) * 1981-04-04 1982-10-14 Burger Kurt Thin layer strain gauge and method for the manufacture thereof
DE4028376A1 (en) * 1990-09-07 1992-03-12 Bosch Gmbh Robert Thin-film expansion measuring strip device mfr. - forming thin film resistance layer and overlying contact layer on surface of glass substrate film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982003458A1 (en) * 1981-04-04 1982-10-14 Burger Kurt Thin layer strain gauge and method for the manufacture thereof
US4522067A (en) * 1981-04-04 1985-06-11 Robert Bosch Gmbh Thin-film strain gauge
US4620365A (en) * 1981-04-04 1986-11-04 Robert Bosch Gmbh Method of making a thin-film strain gauge
DE4028376A1 (en) * 1990-09-07 1992-03-12 Bosch Gmbh Robert Thin-film expansion measuring strip device mfr. - forming thin film resistance layer and overlying contact layer on surface of glass substrate film

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