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FR2622975B1 - CAPACITIVE ACCELEROMETER AND MANUFACTURING METHOD THEREOF - Google Patents

CAPACITIVE ACCELEROMETER AND MANUFACTURING METHOD THEREOF

Info

Publication number
FR2622975B1
FR2622975B1 FR888814564A FR8814564A FR2622975B1 FR 2622975 B1 FR2622975 B1 FR 2622975B1 FR 888814564 A FR888814564 A FR 888814564A FR 8814564 A FR8814564 A FR 8814564A FR 2622975 B1 FR2622975 B1 FR 2622975B1
Authority
FR
France
Prior art keywords
manufacturing
capacitive accelerometer
accelerometer
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR888814564A
Other languages
French (fr)
Other versions
FR2622975A1 (en
Inventor
Ari Lehto
Kalervo Jaeppinen
Anna-Maija Kaerkkaeinen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FR2622975A1 publication Critical patent/FR2622975A1/en
Application granted granted Critical
Publication of FR2622975B1 publication Critical patent/FR2622975B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
FR888814564A 1987-11-09 1988-11-08 CAPACITIVE ACCELEROMETER AND MANUFACTURING METHOD THEREOF Expired - Lifetime FR2622975B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (en) 1987-11-09 1987-11-09 KAPACITIV ACCELERATIONSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNING DAERAV.

Publications (2)

Publication Number Publication Date
FR2622975A1 FR2622975A1 (en) 1989-05-12
FR2622975B1 true FR2622975B1 (en) 1991-07-12

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
FR888814564A Expired - Lifetime FR2622975B1 (en) 1987-11-09 1988-11-08 CAPACITIVE ACCELEROMETER AND MANUFACTURING METHOD THEREOF

Country Status (10)

Country Link
JP (1) JPH01259265A (en)
KR (1) KR890008569A (en)
CN (1) CN1022136C (en)
DE (1) DE3837883A1 (en)
ES (1) ES2012420A6 (en)
FI (1) FI81915C (en)
FR (1) FR2622975B1 (en)
GB (1) GB2212274A (en)
IT (1) IT1224301B (en)
SE (1) SE468067B (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (en) * 1988-11-15 1994-03-30 株式会社日立製作所 Capacitance type acceleration sensor and semiconductor pressure sensor
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (en) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd Semiconductor acceleration sensor
DE4000903C1 (en) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (en) * 1990-09-07 1998-08-13 株式会社日立製作所 Semiconductor capacitive acceleration sensor and method of manufacturing the same
US5421213A (en) 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
DE4222472C2 (en) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Acceleration sensor
JP2533272B2 (en) * 1992-11-17 1996-09-11 住友電気工業株式会社 Method for manufacturing semiconductor device
FR2698447B1 (en) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Micro-machined measuring cell.
DE10117630B4 (en) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
DE10111149B4 (en) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
EP1243930A1 (en) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Micromechanical capacitive accelerometer
DE10117257A1 (en) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
RU2207658C2 (en) * 2001-07-09 2003-06-27 ФГУП "НИИ физических измерений" Method for producing capacitive micromechanical inertial sensor
JP2005077349A (en) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp Acceleration sensor
CN101400969A (en) 2006-03-10 2009-04-01 康蒂特米克微电子有限公司 Micromechanical rotational speed sensor
EP2259018B1 (en) 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
GB2518050A (en) * 2012-04-30 2015-03-11 Hewlett Packard Development Co Control Signal Based On a Command Tapped By A User
CN106771361B (en) * 2016-12-15 2023-04-25 西安邮电大学 Double-capacitance type micro-mechanical acceleration sensor and temperature self-compensation system based on same
CN106841683B (en) * 2017-04-06 2023-09-01 中国工程物理研究院电子工程研究所 Quartz pendulum accelerometer and preparation method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (en) * 1981-07-02 1984-04-13 Centre Electron Horloger ACCELEROMETER.
JPS6197572A (en) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd Manufacture of semiconductor acceleration sensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
DE3625411A1 (en) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm CAPACITIVE ACCELERATION SENSOR
DE3703793A1 (en) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detector element

Also Published As

Publication number Publication date
FI81915B (en) 1990-08-31
FI874942L (en) 1989-05-10
FI874942A0 (en) 1987-11-09
SE8804039D0 (en) 1988-11-08
SE468067B (en) 1992-10-26
IT1224301B (en) 1990-10-04
GB8826263D0 (en) 1988-12-14
DE3837883A1 (en) 1989-05-18
ES2012420A6 (en) 1990-03-16
GB2212274A (en) 1989-07-19
IT8848532A0 (en) 1988-11-08
CN1033110A (en) 1989-05-24
FR2622975A1 (en) 1989-05-12
CN1022136C (en) 1993-09-15
FI81915C (en) 1990-12-10
JPH01259265A (en) 1989-10-16
KR890008569A (en) 1989-07-12

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