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FI874942L - KAPACITIV ACCELERATIONSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNING DAERAV. - Google Patents

KAPACITIV ACCELERATIONSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNING DAERAV. Download PDF

Info

Publication number
FI874942L
FI874942L FI874942A FI874942A FI874942L FI 874942 L FI874942 L FI 874942L FI 874942 A FI874942 A FI 874942A FI 874942 A FI874942 A FI 874942A FI 874942 L FI874942 L FI 874942L
Authority
FI
Finland
Prior art keywords
kapacitiv
accelerationsgivare
foerfarande foer
foer framstaellning
och foerfarande
Prior art date
Application number
FI874942A
Other languages
Finnish (fi)
Other versions
FI81915C (en
FI874942A0 (en
FI81915B (en
Inventor
Ari Lehto
Kalervo Jaeppinen
Anna-Maija Kaerkkaeinen
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FI874942A0 publication Critical patent/FI874942A0/en
Priority to FI874942A priority Critical patent/FI81915C/en
Priority to ES8803392A priority patent/ES2012420A6/en
Priority to SE8804039A priority patent/SE468067B/en
Priority to FR888814564A priority patent/FR2622975B1/en
Priority to DE3837883A priority patent/DE3837883A1/en
Priority to IT48532/88A priority patent/IT1224301B/en
Priority to KR1019880014655A priority patent/KR890008569A/en
Priority to CN88107822A priority patent/CN1022136C/en
Priority to JP63283533A priority patent/JPH01259265A/en
Priority to GB8826263A priority patent/GB2212274A/en
Publication of FI874942L publication Critical patent/FI874942L/en
Application granted granted Critical
Publication of FI81915B publication Critical patent/FI81915B/en
Publication of FI81915C publication Critical patent/FI81915C/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
FI874942A 1987-11-09 1987-11-09 KAPACITIV ACCELERATIONSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNING DAERAV. FI81915C (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (en) 1987-11-09 1987-11-09 KAPACITIV ACCELERATIONSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNING DAERAV.
SE8804039A SE468067B (en) 1987-11-09 1988-11-08 CAPACITIVE ACCELEROMETER AND SET FOR MANUFACTURING THEM
ES8803392A ES2012420A6 (en) 1987-11-09 1988-11-08 Capacitive accelerometer and its fabrication method
FR888814564A FR2622975B1 (en) 1987-11-09 1988-11-08 CAPACITIVE ACCELEROMETER AND MANUFACTURING METHOD THEREOF
DE3837883A DE3837883A1 (en) 1987-11-09 1988-11-08 CAPACITIVE ACCELEROMETER AND METHOD FOR THE PRODUCTION THEREOF
IT48532/88A IT1224301B (en) 1987-11-09 1988-11-08 CAPACITIVE ACCELEROMETER AND METHOD TO PRODUCE IT
KR1019880014655A KR890008569A (en) 1987-11-09 1988-11-08 Capacitive Accelerometer and Manufacturing Method Thereof
CN88107822A CN1022136C (en) 1987-11-09 1988-11-09 Capacitive accelerometer and its fabrication method
JP63283533A JPH01259265A (en) 1987-11-09 1988-11-09 Capacitive accelerometer and manufacture thereof
GB8826263A GB2212274A (en) 1987-11-09 1988-11-09 Capacitive accelerometer and its fabrication method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI874942 1987-11-09
FI874942A FI81915C (en) 1987-11-09 1987-11-09 KAPACITIV ACCELERATIONSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNING DAERAV.

Publications (4)

Publication Number Publication Date
FI874942A0 FI874942A0 (en) 1987-11-09
FI874942L true FI874942L (en) 1989-05-10
FI81915B FI81915B (en) 1990-08-31
FI81915C FI81915C (en) 1990-12-10

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
FI874942A FI81915C (en) 1987-11-09 1987-11-09 KAPACITIV ACCELERATIONSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNING DAERAV.

Country Status (10)

Country Link
JP (1) JPH01259265A (en)
KR (1) KR890008569A (en)
CN (1) CN1022136C (en)
DE (1) DE3837883A1 (en)
ES (1) ES2012420A6 (en)
FI (1) FI81915C (en)
FR (1) FR2622975B1 (en)
GB (1) GB2212274A (en)
IT (1) IT1224301B (en)
SE (1) SE468067B (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (en) * 1988-11-15 1994-03-30 株式会社日立製作所 Capacitance type acceleration sensor and semiconductor pressure sensor
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (en) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd Semiconductor acceleration sensor
DE4000903C1 (en) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (en) * 1990-09-07 1998-08-13 株式会社日立製作所 Semiconductor capacitive acceleration sensor and method of manufacturing the same
US5421213A (en) 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
DE4222472C2 (en) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Acceleration sensor
JP2533272B2 (en) * 1992-11-17 1996-09-11 住友電気工業株式会社 Method for manufacturing semiconductor device
FR2698447B1 (en) 1992-11-23 1995-02-03 Suisse Electronique Microtech Micro-machined measuring cell.
DE10111149B4 (en) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
DE10117630B4 (en) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
EP1243930A1 (en) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Micromechanical capacitive accelerometer
DE10117257A1 (en) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
RU2207658C2 (en) * 2001-07-09 2003-06-27 ФГУП "НИИ физических измерений" Method for producing capacitive micromechanical inertial sensor
JP2005077349A (en) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp Acceleration sensor
JP2009529697A (en) 2006-03-10 2009-08-20 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング Micro mechanical rotation speed sensor
EP2259018B1 (en) 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
CN104395842A (en) * 2012-04-30 2015-03-04 惠普发展公司，有限责任合伙企业 Control signals based on user-tapping commands
CN106771361B (en) * 2016-12-15 2023-04-25 西安邮电大学 Double-capacitance type micro-mechanical acceleration sensor and temperature self-compensation system based on same
CN106841683B (en) * 2017-04-06 2023-09-01 中国工程物理研究院电子工程研究所 Quartz pendulum accelerometer and preparation method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (en) * 1981-07-02 1984-04-13 Centre Electron Horloger ACCELEROMETER.
JPS6197572A (en) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd Manufacture of semiconductor acceleration sensor
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
DE3625411A1 (en) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm CAPACITIVE ACCELERATION SENSOR
DE3703793A1 (en) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detector element

Also Published As

Publication number Publication date
GB8826263D0 (en) 1988-12-14
SE8804039D0 (en) 1988-11-08
ES2012420A6 (en) 1990-03-16
IT8848532A0 (en) 1988-11-08
GB2212274A (en) 1989-07-19
FI81915C (en) 1990-12-10
SE468067B (en) 1992-10-26
IT1224301B (en) 1990-10-04
FR2622975B1 (en) 1991-07-12
KR890008569A (en) 1989-07-12
FI874942A0 (en) 1987-11-09
FI81915B (en) 1990-08-31
JPH01259265A (en) 1989-10-16
DE3837883A1 (en) 1989-05-18
CN1033110A (en) 1989-05-24
CN1022136C (en) 1993-09-15
FR2622975A1 (en) 1989-05-12

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Date Code Title Description
FG Patent granted

Owner name: VAISALA OY

MA Patent expired