FR2326038A1 - Procede de fabrication de circuits integres auto-alignes et dispositifs en resultant - Google Patents
Procede de fabrication de circuits integres auto-alignes et dispositifs en resultantInfo
- Publication number
- FR2326038A1 FR2326038A1 FR7626312A FR7626312A FR2326038A1 FR 2326038 A1 FR2326038 A1 FR 2326038A1 FR 7626312 A FR7626312 A FR 7626312A FR 7626312 A FR7626312 A FR 7626312A FR 2326038 A1 FR2326038 A1 FR 2326038A1
- Authority
- FR
- France
- Prior art keywords
- integrated circuits
- resulting devices
- manufacturing self
- aligned integrated
- aligned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/111—Field plates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/24—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using capacitors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/35—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices with charge storage in a depletion layer, e.g. charge coupled devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/113—Isolations within a component, i.e. internal isolations
- H10D62/115—Dielectric isolations, e.g. air gaps
- H10D62/116—Dielectric isolations, e.g. air gaps adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/811—Combinations of field-effect devices and one or more diodes, capacitors or resistors
- H10D84/813—Combinations of field-effect devices and capacitor only
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Non-Volatile Memory (AREA)
- Element Separation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/617,462 US4021789A (en) | 1975-09-29 | 1975-09-29 | Self-aligned integrated circuits |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2326038A1 true FR2326038A1 (fr) | 1977-04-22 |
| FR2326038B1 FR2326038B1 (fr) | 1979-07-06 |
Family
ID=24473746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7626312A Granted FR2326038A1 (fr) | 1975-09-29 | 1976-08-25 | Procede de fabrication de circuits integres auto-alignes et dispositifs en resultant |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4021789A (fr) |
| JP (1) | JPS5242382A (fr) |
| CA (1) | CA1043467A (fr) |
| DE (1) | DE2642303A1 (fr) |
| FR (1) | FR2326038A1 (fr) |
| GB (1) | GB1496119A (fr) |
| IT (1) | IT1070004B (fr) |
| NL (1) | NL7609377A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0538792A3 (en) * | 1991-10-21 | 1993-06-02 | Rohm Co., Ltd. | Multiple narrow-line-channel fet having improved noise characteristics |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598065B2 (ja) * | 1976-01-30 | 1984-02-22 | 松下電子工業株式会社 | Mos集積回路の製造方法 |
| US4183040A (en) * | 1976-02-09 | 1980-01-08 | International Business Machines Corporation | MOS RAM with implant forming peripheral depletion MOSFET channels and capacitor bottom electrodes |
| US4398207A (en) * | 1976-08-24 | 1983-08-09 | Intel Corporation | MOS Digital-to-analog converter with resistor chain using compensating "dummy" metal contacts |
| JPS5447488A (en) * | 1977-09-21 | 1979-04-14 | Hitachi Ltd | Production of silicon gate type mis semiconductor device |
| US4455737A (en) * | 1978-05-26 | 1984-06-26 | Rockwell International Corporation | Process for and structure of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines |
| US4277881A (en) * | 1978-05-26 | 1981-07-14 | Rockwell International Corporation | Process for fabrication of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines |
| US4587711A (en) * | 1978-05-26 | 1986-05-13 | Rockwell International Corporation | Process for high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines |
| US4506437A (en) * | 1978-05-26 | 1985-03-26 | Rockwell International Corporation | Process for and structure of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines |
| DE2832388C2 (de) * | 1978-07-24 | 1986-08-14 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen von MNOS- und MOS-Transistoren in Silizium-Gate-Technologie auf einem Halbleitersubstrat |
| US4230954A (en) * | 1978-12-29 | 1980-10-28 | International Business Machines Corporation | Permanent or semipermanent charge transfer storage systems |
| JPS5598852A (en) * | 1979-01-23 | 1980-07-28 | Nec Corp | Memory device |
| JPS55153368A (en) * | 1979-05-18 | 1980-11-29 | Fujitsu Ltd | Semiconductor memory device |
| US4287571A (en) * | 1979-09-11 | 1981-09-01 | International Business Machines Corporation | High density transistor arrays |
| US4240845A (en) * | 1980-02-04 | 1980-12-23 | International Business Machines Corporation | Method of fabricating random access memory device |
| JPS57134963A (en) * | 1981-02-16 | 1982-08-20 | Fujitsu Ltd | Semiconductor memory |
| US4456888A (en) * | 1981-03-26 | 1984-06-26 | Raytheon Company | Radio frequency network having plural electrically interconnected field effect transistor cells |
| JPS57194567A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Semiconductor memory device |
| US4652898A (en) * | 1984-07-19 | 1987-03-24 | International Business Machines Corporation | High speed merged charge memory |
| US5087591A (en) * | 1985-01-22 | 1992-02-11 | Texas Instruments Incorporated | Contact etch process |
| US4679302A (en) * | 1986-05-12 | 1987-07-14 | Northern Telecom Limited | Double polysilicon integrated circuit process |
| JPH0828473B2 (ja) * | 1988-09-29 | 1996-03-21 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| US5204545A (en) * | 1989-11-22 | 1993-04-20 | Mitsubishi Denki Kabushiki Kaisha | Structure for preventing field concentration in semiconductor device and method of forming the same |
| US5495121A (en) * | 1991-09-30 | 1996-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| KR950034754A (ko) * | 1994-05-06 | 1995-12-28 | 윌리엄 이. 힐러 | 폴리실리콘 저항을 형성하는 방법 및 이 방법으로부터 제조된 저항 |
| KR100308871B1 (ko) * | 1998-12-28 | 2001-11-03 | 윤덕용 | 동축 구조의 신호선 및 그의 제조 방법 |
| US9614266B2 (en) | 2001-12-03 | 2017-04-04 | Microfabrica Inc. | Miniature RF and microwave components and methods for fabricating such components |
| US7239219B2 (en) * | 2001-12-03 | 2007-07-03 | Microfabrica Inc. | Miniature RF and microwave components and methods for fabricating such components |
| US7259640B2 (en) | 2001-12-03 | 2007-08-21 | Microfabrica | Miniature RF and microwave components and methods for fabricating such components |
| TWI238513B (en) | 2003-03-04 | 2005-08-21 | Rohm & Haas Elect Mat | Coaxial waveguide microstructures and methods of formation thereof |
| US10297421B1 (en) | 2003-05-07 | 2019-05-21 | Microfabrica Inc. | Plasma etching of dielectric sacrificial material from reentrant multi-layer metal structures |
| US8395199B2 (en) * | 2006-03-25 | 2013-03-12 | 4D-S Pty Ltd. | Systems and methods for fabricating self-aligned memory cell |
| US7932548B2 (en) * | 2006-07-14 | 2011-04-26 | 4D-S Pty Ltd. | Systems and methods for fabricating self-aligned memory cell |
| JP4364226B2 (ja) * | 2006-09-21 | 2009-11-11 | 株式会社東芝 | 半導体集積回路 |
| KR101476438B1 (ko) | 2006-12-30 | 2014-12-24 | 누보트로닉스, 엘.엘.씨 | 3차원 미세구조 및 그 형성방법 |
| US7898356B2 (en) | 2007-03-20 | 2011-03-01 | Nuvotronics, Llc | Coaxial transmission line microstructures and methods of formation thereof |
| EP3104450A3 (fr) | 2007-03-20 | 2016-12-28 | Nuvotronics, LLC | Composants électroniques intégrés et leurs procédés de formation |
| US20110123783A1 (en) | 2009-11-23 | 2011-05-26 | David Sherrer | Multilayer build processses and devices thereof |
| US8917150B2 (en) * | 2010-01-22 | 2014-12-23 | Nuvotronics, Llc | Waveguide balun having waveguide structures disposed over a ground plane and having probes located in channels |
| KR101796098B1 (ko) * | 2010-01-22 | 2017-11-10 | 누보트로닉스, 인크. | 열관리 |
| US8866300B1 (en) | 2011-06-05 | 2014-10-21 | Nuvotronics, Llc | Devices and methods for solder flow control in three-dimensional microstructures |
| US8814601B1 (en) * | 2011-06-06 | 2014-08-26 | Nuvotronics, Llc | Batch fabricated microconnectors |
| US9993982B2 (en) | 2011-07-13 | 2018-06-12 | Nuvotronics, Inc. | Methods of fabricating electronic and mechanical structures |
| US9325044B2 (en) | 2013-01-26 | 2016-04-26 | Nuvotronics, Inc. | Multi-layer digital elliptic filter and method |
| US9306255B1 (en) | 2013-03-15 | 2016-04-05 | Nuvotronics, Inc. | Microstructure including microstructural waveguide elements and/or IC chips that are mechanically interconnected to each other |
| US9306254B1 (en) | 2013-03-15 | 2016-04-05 | Nuvotronics, Inc. | Substrate-free mechanical interconnection of electronic sub-systems using a spring configuration |
| KR20160133422A (ko) | 2014-01-17 | 2016-11-22 | 누보트로닉스, 인크. | 웨이퍼 규모 테스트 인터페이스 유닛 및 컨택터 |
| US10847469B2 (en) | 2016-04-26 | 2020-11-24 | Cubic Corporation | CTE compensation for wafer-level and chip-scale packages and assemblies |
| WO2016094129A1 (fr) | 2014-12-03 | 2016-06-16 | Nuvotronics, Inc. | Systèmes et procédés de fabrication de circuits et de lignes de transmission empilés |
| US10319654B1 (en) | 2017-12-01 | 2019-06-11 | Cubic Corporation | Integrated chip scale packages |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA974657A (en) * | 1971-12-28 | 1975-09-16 | Matsushita Electric Industrial Co., Ltd. | Switching device equipped with a semiconductor memory element |
| US3893152A (en) * | 1973-07-25 | 1975-07-01 | Hung Chang Lin | Metal nitride oxide semiconductor integrated circuit structure |
| US3889287A (en) * | 1973-12-06 | 1975-06-10 | Motorola Inc | Mnos memory matrix |
| US3836894A (en) * | 1974-01-22 | 1974-09-17 | Westinghouse Electric Corp | Mnos/sos random access memory |
-
1975
- 1975-09-29 US US05/617,462 patent/US4021789A/en not_active Expired - Lifetime
-
1976
- 1976-08-24 NL NL7609377A patent/NL7609377A/xx not_active Application Discontinuation
- 1976-08-25 FR FR7626312A patent/FR2326038A1/fr active Granted
- 1976-08-27 JP JP51101756A patent/JPS5242382A/ja active Granted
- 1976-08-31 GB GB36053/76A patent/GB1496119A/en not_active Expired
- 1976-09-17 IT IT27306/76A patent/IT1070004B/it active
- 1976-09-21 DE DE19762642303 patent/DE2642303A1/de not_active Withdrawn
- 1976-09-27 CA CA262,156A patent/CA1043467A/fr not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0538792A3 (en) * | 1991-10-21 | 1993-06-02 | Rohm Co., Ltd. | Multiple narrow-line-channel fet having improved noise characteristics |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2642303A1 (de) | 1977-04-07 |
| IT1070004B (it) | 1985-03-25 |
| CA1043467A (fr) | 1978-11-28 |
| GB1496119A (en) | 1977-12-30 |
| FR2326038B1 (fr) | 1979-07-06 |
| JPS5242382A (en) | 1977-04-01 |
| NL7609377A (nl) | 1977-03-31 |
| JPS5617830B2 (fr) | 1981-04-24 |
| US4021789A (en) | 1977-05-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |