DE69315665D1 - Ein mechanischer Sensor - Google Patents

Ein mechanischer Sensor

Info

Publication number: DE69315665D1
Authority: DE; Germany
Prior art keywords: mechanical sensor; mechanical; sensor
Prior art date: 1992-10-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69315665T

Other languages

English (en)

Other versions

DE69315665T2 (de

Inventor

Shinji Saito

Hiroyuki Hase

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Panasonic Holdings Corp

Original Assignee

Matsushita Electric Industrial Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-10-21

Filing date

1993-10-21

Publication date

1998-01-22

1993-10-21 Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd

1998-01-22 Application granted granted Critical

1998-01-22 Publication of DE69315665D1 publication Critical patent/DE69315665D1/de

1998-04-09 Publication of DE69315665T2 publication Critical patent/DE69315665T2/de

2013-10-22 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/127—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using inductive means
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0073—Printed inductances with a special conductive pattern, e.g. flat spiral

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Power Engineering (AREA)
Microelectronics & Electronic Packaging (AREA)
Coils Or Transformers For Communication (AREA)
Hall/Mr Elements (AREA)
Measuring Magnetic Variables (AREA)

DE69315665T 1992-10-21 1993-10-21 Ein mechanischer Sensor Expired - Fee Related DE69315665T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP28266392		1992-10-21

Publications (2)

Publication Number	Publication Date
DE69315665D1 true DE69315665D1 (de)	1998-01-22
DE69315665T2 DE69315665T2 (de)	1998-04-09

Family

ID=17655442

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69315665T Expired - Fee Related DE69315665T2 (de)	1992-10-21	1993-10-21	Ein mechanischer Sensor

Country Status (4)

Country	Link
US (1)	US5450755A (de)
EP (1)	EP0594180B1 (de)
KR (1)	KR970000027B1 (de)
DE (1)	DE69315665T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5939966A (en) *	1994-06-02	1999-08-17	Ricoh Company, Ltd.	Inductor, transformer, and manufacturing method thereof
EP0690296A3 (de) *	1994-06-27	1998-04-29	Matsushita Electric Industrial Co., Ltd.	Magnetostriktiver Wandler
US6911887B1 (en)	1994-09-12	2005-06-28	Matsushita Electric Industrial Co., Ltd.	Inductor and method for producing the same
KR100231356B1 (ko)	1994-09-12	1999-11-15	모리시타요이찌	적층형 세라믹칩 인덕터 및 그 제조방법
US5580084A (en) *	1995-09-12	1996-12-03	Artistic Analytical Methods, Inc.	System and method for controlling vehicle safety device
JPH09213530A (ja) *	1996-01-30	1997-08-15	Alps Electric Co Ltd	平面トランス
US5757623A (en) *	1996-12-30	1998-05-26	General Electric Company	Low-noise, high-Q stripline inductor
US5847634A (en) *	1997-07-30	1998-12-08	Lucent Technologies Inc.	Article comprising an inductive element with a magnetic thin film
US6417754B1 (en) *	1997-12-08	2002-07-09	The Regents Of The University Of California	Three-dimensional coil inductor
DE19809794A1 (de) *	1998-03-09	1999-09-16	Gatzen Hans Heinrich	Induktiver Mikrosensor zur Messung von Dehnung
JPH11261325A (ja) *	1998-03-10	1999-09-24	Shiro Sugimura	コイル素子と、その製造方法
US6147582A (en) *	1999-03-04	2000-11-14	Raytheon Company	Substrate supported three-dimensional micro-coil
US6227343B1 (en)	1999-03-30	2001-05-08	Millenium Enterprises Ltd.	Dual coil coin identifier
US6240622B1 (en) *	1999-07-09	2001-06-05	Micron Technology, Inc.	Integrated circuit inductors
DE102004032482B4 (de) *	2004-07-05	2008-01-31	Infineon Technologies Ag	Sensor und Verfahren zum Erfassen einer Verformung
KR100600808B1 (ko) *	2004-12-08	2006-07-18	주식회사 엠디티	자왜효과를 이용한 가변 인덕터형 ｍｅｍｓ 압력센서
US8486545B2 (en) *	2005-09-28	2013-07-16	Southwest Research Institute	Systems and methods for flaw detection and monitoring at elevated temperatures with wireless communication using surface embedded, monolithically integrated, thin-film, magnetically actuated sensors, and methods for fabricating the sensors
US7875955B1 (en)	2006-03-09	2011-01-25	National Semiconductor Corporation	On-chip power inductor
US8250928B2 (en) *	2008-07-09	2012-08-28	The Boeing Company	Measurement of strain in an adhesively bonded joint including magnetostrictive material
US8102236B1 (en) *	2010-12-14	2012-01-24	International Business Machines Corporation	Thin film inductor with integrated gaps
US8717136B2 (en) *	2012-01-10	2014-05-06	International Business Machines Corporation	Inductor with laminated yoke
US9064628B2 (en)	2012-05-22	2015-06-23	International Business Machines Corporation	Inductor with stacked conductors
US9523720B2 (en)	2013-03-15	2016-12-20	Infineon Technologies Ag	Multiple current sensor device, a multiple current shunt device and a method for providing a sensor signal
US9324489B2 (en) *	2014-03-31	2016-04-26	International Business Machines Corporation	Thin film inductor with extended yokes
DE102016209322A1 (de)	2016-05-30	2017-11-30	Robert Bosch Gmbh	Sensorvorrichtung und Verfahren zur Ermittlung einer mechanischen Größe
DE102016219309B4 (de) *	2016-10-05	2024-05-02	Vitesco Technologies GmbH	Vibrationsfeste Schaltungsanordnung zum elektrischen Verbinden zweier Anschlussbereiche sowie Kraftfahrzeug und Verfahren zum Herstellen der Schaltungsanordnung
JP7006216B2 (ja) *	2017-12-13	2022-02-10	株式会社ジェイテクト	触知センサ及びアンドロイド

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4494100A (en) *	1982-07-12	1985-01-15	Motorola, Inc.	Planar inductors
JPH06100444B2 (ja) *	1985-07-09	1994-12-12	住友電気工業株式会社	歪センサーの製造方法
JPS649330A (en) *	1987-06-30	1989-01-12	Toyoda Automatic Loom Works	Torque detector
JPS6474705A (en) *	1987-09-17	1989-03-20	Toshiba Corp	Plane inductor
JPH01173702A (ja) *	1987-12-28	1989-07-10	Matsushita Electric Ind Co Ltd	インダクタンス素子
JPH01212301A (ja) *	1988-02-19	1989-08-25	Toshiba Corp	ひずみセンサ
JPH0210233A (ja) *	1988-06-29	1990-01-16	Mitsubishi Electric Corp	歪検出器
US5070317A (en) *	1989-01-17	1991-12-03	Bhagat Jayant K	Miniature inductor for integrated circuits and devices
US4933209A (en) *	1989-06-28	1990-06-12	Hewlett-Packard Company	Method of making a thin film recording head apparatus utilizing polyimide films
JPH03188607A (ja) *	1989-12-18	1991-08-16	Seiko Epson Corp	トランス
JPH03191802A (ja) *	1989-12-21	1991-08-21	Sumitomo Electric Ind Ltd	感歪素子
KR960006848B1 (ko) *	1990-05-31	1996-05-23	가부시끼가이샤 도시바	평면형 자기소자
JPH0442004A (ja) *	1990-06-07	1992-02-12	Toshiba Corp	ひずみセンサおよびその製造方法
JPH0794965B2 (ja) *	1990-12-28	1995-10-11	ヤマハ株式会社	曲げ検出器
JP3141893B2 (ja) *	1991-06-17	2001-03-07	株式会社東芝	平面インダクタ

1993
- 1993-10-19 KR KR1019930021661A patent/KR970000027B1/ko not_active Expired - Fee Related
- 1993-10-19 US US08/138,744 patent/US5450755A/en not_active Expired - Fee Related
- 1993-10-21 EP EP93117098A patent/EP0594180B1/de not_active Expired - Lifetime
- 1993-10-21 DE DE69315665T patent/DE69315665T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
DE69315665T2 (de)	1998-04-09
KR970000027B1 (ko)	1997-01-04
EP0594180A2 (de)	1994-04-27
US5450755A (en)	1995-09-19
EP0594180B1 (de)	1997-12-10
KR940009681A (ko)	1994-05-20
EP0594180A3 (de)	1995-02-15

Publication	Publication Date	Title
DE69315665D1 (de)	1998-01-22	Ein mechanischer Sensor
DE69325165D1 (de)	1999-07-08	Verschiebungssensor
DE4396033T1 (de)	1996-01-11	Ein Palettierer
DE69308150D1 (de)	1997-03-27	Ein behälter
DE69425465D1 (de)	2000-09-14	Ein anstiegsaktivierter Hall-Spannungssensor
DE69323618D1 (de)	1999-04-01	Pyrheliometrischer sensor
DE59304596D1 (de)	1997-01-09	Sensoranordnung
DK0470290T3 (da)	1997-04-01	Elektrokemisk-enzymatisk føler
EP0469312A3 (en)	1992-09-09	A temperature sensor
DE69310474D1 (de)	1997-06-12	Piezoelektrischer Sensor
FI924849L (fi)	1992-10-26	Ultraljudsgivare
DE69412199D1 (de)	1998-09-10	Weggeber
DE59308671D1 (de)	1998-07-16	Fühler
FI935367A7 (fi)	1995-05-31	Etäluettava tunnistinrakenne
GB9027992D0 (en)	1991-02-13	Piezo-electric sensors
DE69323602D1 (de)	1999-04-01	Piezoelektrische Messfühler
DE69311327D1 (de)	1997-07-10	Mikrotechnologisch hergestellter sensor
FI91564B (fi)	1994-03-31	Anturi
DE69406169D1 (de)	1997-11-20	Mechanischer Sensor
DE69315529D1 (de)	1998-01-15	Mechanischer Sensor
DE69207274D1 (de)	1996-02-15	Bewegungssensor
DE69209132D1 (de)	1996-04-25	Piezoelektrischer Messfühler
DE69316996D1 (de)	1998-03-19	Ein fuhler
DE69316986D1 (de)	1998-03-19	Positionsensoren
EP0537812A3 (en)	1995-03-15	A position-disturbance sensor

Legal Events

Date	Code	Title	Description
1999-01-14	8364	No opposition during term of opposition
2003-08-07	8339	Ceased/non-payment of the annual fee