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DE68906637D1 - Wafertraeger. - Google Patents

Wafertraeger.

Info

Publication number
DE68906637D1
DE68906637D1 DE8989905986T DE68906637T DE68906637D1 DE 68906637 D1 DE68906637 D1 DE 68906637D1 DE 8989905986 T DE8989905986 T DE 8989905986T DE 68906637 T DE68906637 T DE 68906637T DE 68906637 D1 DE68906637 D1 DE 68906637D1
Authority
DE
Germany
Prior art keywords
wafertraber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989905986T
Other languages
English (en)
Other versions
DE68906637T2 (de
Inventor
Robert Kos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fluoroware Inc
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of DE68906637D1 publication Critical patent/DE68906637D1/de
Application granted granted Critical
Publication of DE68906637T2 publication Critical patent/DE68906637T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10P72/50—
    • H10P72/15—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S206/00—Special receptacle or package
    • Y10S206/832—Semiconductor wafer boat
    • Y10S206/833—Apertured side walls
DE89905986T 1988-04-29 1989-03-27 Waferträger. Expired - Fee Related DE68906637T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/188,312 US4949848A (en) 1988-04-29 1988-04-29 Wafer carrier

Publications (2)

Publication Number Publication Date
DE68906637D1 true DE68906637D1 (de) 1993-06-24
DE68906637T2 DE68906637T2 (de) 1993-10-07

Family

ID=22692642

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89905986T Expired - Fee Related DE68906637T2 (de) 1988-04-29 1989-03-27 Waferträger.

Country Status (8)

Country Link
US (1) US4949848A (de)
EP (1) EP0365666B1 (de)
JP (1) JPH0719832B2 (de)
KR (1) KR0131013B1 (de)
CN (1) CN1037616A (de)
CA (1) CA1322999C (de)
DE (1) DE68906637T2 (de)
WO (1) WO1989010629A1 (de)

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EP0365666B1 (de) 1993-05-19
WO1989010629A1 (en) 1989-11-02
KR0131013B1 (ko) 1998-04-14
US4949848A (en) 1990-08-21
DE68906637T2 (de) 1993-10-07
JPH0719832B2 (ja) 1995-03-06
EP0365666A1 (de) 1990-05-02
JPH03500713A (ja) 1991-02-14
CA1322999C (en) 1993-10-12
CN1037616A (zh) 1989-11-29
KR900701036A (ko) 1990-08-17

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