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USD368802S - 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment - Google Patents

150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment Download PDF

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Publication number
USD368802S
USD368802S US29/029,711 US2971194F USD368802S US D368802 S USD368802 S US D368802S US 2971194 F US2971194 F US 2971194F US D368802 S USD368802 S US D368802S
Authority
US
United States
Prior art keywords
wafer
handling equipment
semi standard
cassette
wafer cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/029,711
Inventor
Gary M. Gallagher
Brian S. Wiseman
Boyd C. Wittman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Empak Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to US29/029,711 priority Critical patent/USD368802S/en
Assigned to EMPAK, INC. reassignment EMPAK, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GALLAGHER, GARY M., WISEMAN, BRIAN S., WITTMAN, BOYD C.
Application granted granted Critical
Publication of USD368802S publication Critical patent/USD368802S/en
Assigned to WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT reassignment WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT SECURITY AGREEMENT Assignors: ENTEGRIS, INC.
Anticipated expiration legal-status Critical
Assigned to ENTEGRIS, INC. reassignment ENTEGRIS, INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: WELLS FARGO BANK NATIONAL ASSOCIATION
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front perspective view of a 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment showing my new design;
FIG. 2 is a right side elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a back elevational view thereof;
FIG. 5 is a top plan view thereof; and,
FIG. 6 is a bottom plan view thereof.

Claims (1)

  1. The ornamental design for a "150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment", as shown and described.
US29/029,711 1994-10-13 1994-10-13 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment Expired - Lifetime USD368802S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/029,711 USD368802S (en) 1994-10-13 1994-10-13 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/029,711 USD368802S (en) 1994-10-13 1994-10-13 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

Publications (1)

Publication Number Publication Date
USD368802S true USD368802S (en) 1996-04-16

Family

ID=71107536

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/029,711 Expired - Lifetime USD368802S (en) 1994-10-13 1994-10-13 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment

Country Status (1)

Country Link
US (1) USD368802S (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD378873S (en) * 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
USD381344S (en) * 1995-07-31 1997-07-22 Kaijo Corporation Disk carrier
US6625898B2 (en) 2001-06-13 2003-09-30 Applied Materials, Inc Variable method and apparatus for alignment of automated workpiece handling systems
US6763281B2 (en) 1999-04-19 2004-07-13 Applied Materials, Inc Apparatus for alignment of automated workpiece handling systems
US20050203664A1 (en) * 1999-04-19 2005-09-15 Applied Materials, Inc. Method and apparatus for aligning a cassette
US20100078867A1 (en) * 2008-09-29 2010-04-01 Tokyo Electron Limited Substrate processing apparatus
USD683542S1 (en) * 2010-06-03 2013-06-04 Eric Blakeman Storage unit for storing combustion engine parts during engine disassembly

Citations (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3467242A (en) 1968-03-04 1969-09-16 Dale E De Rousse Storage unit for wafer-like articles
US3534862A (en) 1968-09-13 1970-10-20 Rca Corp Semiconductor wafer transporting jig
US3850296A (en) 1971-07-21 1974-11-26 Shinetsu Handotai Kk Device and method for accommodating semiconductor wafers
US3918756A (en) 1973-12-26 1975-11-11 Fluoroware Inc Wafer holder
US3923191A (en) 1974-09-11 1975-12-02 Fluoroware Inc Wafer basket and handle
US3923156A (en) 1974-04-29 1975-12-02 Fluoroware Inc Wafer basket
US3926305A (en) 1973-07-12 1975-12-16 Fluoroware Inc Wafer basket
US3939973A (en) 1974-01-14 1976-02-24 Fluoroware, Inc. Wafer basket and easily attached and detached carrier for same
US3961877A (en) 1974-09-11 1976-06-08 Fluoroware, Inc. Reinforced wafer basket
US4043451A (en) 1976-03-18 1977-08-23 Fluoroware, Inc. Shipping container for silicone semiconductor wafers
US4061228A (en) 1976-12-20 1977-12-06 Fluoroware, Inc. Shipping container for substrates
US4248346A (en) 1979-01-29 1981-02-03 Fluoroware, Inc. Shipping container for semiconductor substrate wafers
US4450960A (en) 1982-08-30 1984-05-29 Empak Inc. Package
US4471716A (en) 1981-01-15 1984-09-18 Fluoroware, Inc. Wafer carrier
US4493418A (en) 1983-08-17 1985-01-15 Empak Inc. Wafer processing cassette
US4520925A (en) 1983-08-09 1985-06-04 Empak Inc. Package
US4555024A (en) 1984-04-12 1985-11-26 Wacker-Chemie Gmbh Packaging unit for semiconductor wafers
US4557382A (en) 1983-08-17 1985-12-10 Empak Inc. Disk package
US4623064A (en) 1985-09-03 1986-11-18 Rca Corporation Apparatus for storage of molded discs
US4669612A (en) 1985-02-20 1987-06-02 Empak Inc. Disk processing cassette
US4684021A (en) 1986-06-23 1987-08-04 Fluoroware, Inc. Bottom loading wafer carrier box
US4687097A (en) 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4718552A (en) 1986-12-11 1988-01-12 Fluoroware, Inc. Disk shipper and transfer tray
US4718549A (en) 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US4721207A (en) 1986-04-28 1988-01-26 Tensho Electric Industrial Co., Ltd. Hard disk container
US4752007A (en) 1986-12-11 1988-06-21 Fluoroware, Inc. Disk shipper
US4817795A (en) 1988-03-04 1989-04-04 Fluoroware, Inc. Robotic accessible wafer shipper assembly
US4817799A (en) 1986-10-06 1989-04-04 Empak, Inc. Disk package
US4827110A (en) 1987-06-11 1989-05-02 Fluoroware, Inc. Method and apparatus for monitoring the location of wafer disks
US4833306A (en) 1988-05-18 1989-05-23 Fluoroware, Inc. Bar code remote recognition system for process carriers of wafer disks
US4872554A (en) 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US4880116A (en) 1988-03-04 1989-11-14 Fluoroware, Inc. Robotic accessible wafer shipper assembly
US4930634A (en) 1987-09-29 1990-06-05 Fluoroware, Inc. Carrier for flat panel displays
US4949848A (en) 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier
USRE33361E (en) 1984-06-07 1990-10-02 Substrate and media carrier
US4966284A (en) 1987-07-07 1990-10-30 Empak, Inc. Substrate package
US5025926A (en) 1987-07-07 1991-06-25 Empak, Inc. Package
US5111936A (en) 1990-11-30 1992-05-12 Fluoroware Wafer carrier
US5149244A (en) 1989-08-18 1992-09-22 Applied Materials, Inc. Apparatus for aligning wafers within a semiconductor wafer cassette
US5154301A (en) 1991-09-12 1992-10-13 Fluoroware, Inc. Wafer carrier
US5184723A (en) 1991-05-14 1993-02-09 Fluoroware, Inc. Single wafer robotic package
US5193682A (en) 1991-06-28 1993-03-16 Shin-Etsu Handotai Co., Ltd. Wafer basket
US5273159A (en) 1992-05-26 1993-12-28 Empak, Inc. Wafer suspension box
US5351836A (en) 1992-07-08 1994-10-04 Daifuku Co., Ltd. Container for plate-like objects
US5364144A (en) 1992-08-28 1994-11-15 Motorola, Inc. Cassette transporting apparatus

Patent Citations (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3467242A (en) 1968-03-04 1969-09-16 Dale E De Rousse Storage unit for wafer-like articles
US3534862A (en) 1968-09-13 1970-10-20 Rca Corp Semiconductor wafer transporting jig
US3850296A (en) 1971-07-21 1974-11-26 Shinetsu Handotai Kk Device and method for accommodating semiconductor wafers
US3926305A (en) 1973-07-12 1975-12-16 Fluoroware Inc Wafer basket
US3918756A (en) 1973-12-26 1975-11-11 Fluoroware Inc Wafer holder
US3939973A (en) 1974-01-14 1976-02-24 Fluoroware, Inc. Wafer basket and easily attached and detached carrier for same
US3923156A (en) 1974-04-29 1975-12-02 Fluoroware Inc Wafer basket
US3961877A (en) 1974-09-11 1976-06-08 Fluoroware, Inc. Reinforced wafer basket
US3961877B1 (en) 1974-09-11 1987-11-03
US3923191A (en) 1974-09-11 1975-12-02 Fluoroware Inc Wafer basket and handle
US4043451A (en) 1976-03-18 1977-08-23 Fluoroware, Inc. Shipping container for silicone semiconductor wafers
US4061228A (en) 1976-12-20 1977-12-06 Fluoroware, Inc. Shipping container for substrates
US4248346A (en) 1979-01-29 1981-02-03 Fluoroware, Inc. Shipping container for semiconductor substrate wafers
US4471716A (en) 1981-01-15 1984-09-18 Fluoroware, Inc. Wafer carrier
US4450960A (en) 1982-08-30 1984-05-29 Empak Inc. Package
US4520925A (en) 1983-08-09 1985-06-04 Empak Inc. Package
US4493418A (en) 1983-08-17 1985-01-15 Empak Inc. Wafer processing cassette
US4557382A (en) 1983-08-17 1985-12-10 Empak Inc. Disk package
US4555024A (en) 1984-04-12 1985-11-26 Wacker-Chemie Gmbh Packaging unit for semiconductor wafers
USRE33361E (en) 1984-06-07 1990-10-02 Substrate and media carrier
US4687097A (en) 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4669612A (en) 1985-02-20 1987-06-02 Empak Inc. Disk processing cassette
US4718549A (en) 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US4623064A (en) 1985-09-03 1986-11-18 Rca Corporation Apparatus for storage of molded discs
US4721207A (en) 1986-04-28 1988-01-26 Tensho Electric Industrial Co., Ltd. Hard disk container
US4684021A (en) 1986-06-23 1987-08-04 Fluoroware, Inc. Bottom loading wafer carrier box
US4817799A (en) 1986-10-06 1989-04-04 Empak, Inc. Disk package
US4752007A (en) 1986-12-11 1988-06-21 Fluoroware, Inc. Disk shipper
US4718552A (en) 1986-12-11 1988-01-12 Fluoroware, Inc. Disk shipper and transfer tray
US4827110A (en) 1987-06-11 1989-05-02 Fluoroware, Inc. Method and apparatus for monitoring the location of wafer disks
US4888473B1 (en) 1987-06-11 1996-10-15 Fluoroware Inc Wafer disk location monitoring system and tagged process carrier for use therewith
US4888473A (en) 1987-06-11 1989-12-19 Fluoroware, Inc. Wafer disk location monitoring system and tagged process carriers for use therewith
US4872554A (en) 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US5025926A (en) 1987-07-07 1991-06-25 Empak, Inc. Package
US4966284A (en) 1987-07-07 1990-10-30 Empak, Inc. Substrate package
US4930634A (en) 1987-09-29 1990-06-05 Fluoroware, Inc. Carrier for flat panel displays
US4817795A (en) 1988-03-04 1989-04-04 Fluoroware, Inc. Robotic accessible wafer shipper assembly
US4880116A (en) 1988-03-04 1989-11-14 Fluoroware, Inc. Robotic accessible wafer shipper assembly
US4949848A (en) 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier
US4833306A (en) 1988-05-18 1989-05-23 Fluoroware, Inc. Bar code remote recognition system for process carriers of wafer disks
US5149244A (en) 1989-08-18 1992-09-22 Applied Materials, Inc. Apparatus for aligning wafers within a semiconductor wafer cassette
US5111936A (en) 1990-11-30 1992-05-12 Fluoroware Wafer carrier
US5184723A (en) 1991-05-14 1993-02-09 Fluoroware, Inc. Single wafer robotic package
US5193682A (en) 1991-06-28 1993-03-16 Shin-Etsu Handotai Co., Ltd. Wafer basket
US5154301A (en) 1991-09-12 1992-10-13 Fluoroware, Inc. Wafer carrier
US5273159A (en) 1992-05-26 1993-12-28 Empak, Inc. Wafer suspension box
US5351836A (en) 1992-07-08 1994-10-04 Daifuku Co., Ltd. Container for plate-like objects
US5364144A (en) 1992-08-28 1994-11-15 Motorola, Inc. Cassette transporting apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD381344S (en) * 1995-07-31 1997-07-22 Kaijo Corporation Disk carrier
USD378873S (en) * 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
US6763281B2 (en) 1999-04-19 2004-07-13 Applied Materials, Inc Apparatus for alignment of automated workpiece handling systems
US20050203664A1 (en) * 1999-04-19 2005-09-15 Applied Materials, Inc. Method and apparatus for aligning a cassette
US7158857B2 (en) 1999-04-19 2007-01-02 Applied Materials, Inc. Method and apparatus for aligning a cassette
US6625898B2 (en) 2001-06-13 2003-09-30 Applied Materials, Inc Variable method and apparatus for alignment of automated workpiece handling systems
US20100078867A1 (en) * 2008-09-29 2010-04-01 Tokyo Electron Limited Substrate processing apparatus
US8585030B2 (en) * 2008-09-29 2013-11-19 Tokyo Electron Limited Substrate processing apparatus
USD683542S1 (en) * 2010-06-03 2013-06-04 Eric Blakeman Storage unit for storing combustion engine parts during engine disassembly

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