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DE60334153D1 - Kubische speichermatrix und herstellungsverfahren - Google Patents

Kubische speichermatrix und herstellungsverfahren

Info

Publication number
DE60334153D1
DE60334153D1 DE60334153T DE60334153T DE60334153D1 DE 60334153 D1 DE60334153 D1 DE 60334153D1 DE 60334153 T DE60334153 T DE 60334153T DE 60334153 T DE60334153 T DE 60334153T DE 60334153 D1 DE60334153 D1 DE 60334153D1
Authority
DE
Germany
Prior art keywords
manufacturing
storage matrix
cubic storage
cubic
matrix
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60334153T
Other languages
English (en)
Inventor
Peter J Fricke
Brocklin Andrew L Van
Daryl E Anderson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Development Co LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co LP filed Critical Hewlett Packard Development Co LP
Application granted granted Critical
Publication of DE60334153D1 publication Critical patent/DE60334153D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C7/00Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/18Bit line organisation; Bit line lay-out
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B63/00Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/20Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B63/00Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/20Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
    • H10B63/22Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes of the metal-insulator-metal type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B63/00Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/80Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
    • H10B63/84Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
    • H10B63/845Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays the switching components being connected to a common vertical conductor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00Three-dimensional [3D] integrated devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00Three-dimensional [3D] integrated devices
    • H10D88/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20Multistable switching devices, e.g. memristors
    • H10N70/231Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/821Device geometry
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/821Device geometry
    • H10N70/823Device geometry adapted for essentially horizontal current flow, e.g. bridge type devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/881Switching materials
    • H10N70/882Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
    • H10N70/8825Selenides, e.g. GeSe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/881Switching materials
    • H10N70/882Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
    • H10N70/8828Tellurides, e.g. GeSbTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/881Switching materials
    • H10N70/884Switching materials based on at least one element of group IIIA, IVA or VA, e.g. elemental or compound semiconductors
DE60334153T 2003-04-03 2003-04-03 Kubische speichermatrix und herstellungsverfahren Expired - Lifetime DE60334153D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2003/010351 WO2004100267A1 (en) 2003-04-03 2003-04-03 Cubic memory array

Publications (1)

Publication Number Publication Date
DE60334153D1 true DE60334153D1 (de) 2010-10-21

Family

ID=33434298

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60334153T Expired - Lifetime DE60334153D1 (de) 2003-04-03 2003-04-03 Kubische speichermatrix und herstellungsverfahren

Country Status (7)

Country Link
EP (1) EP1609186B1 (de)
JP (1) JP4376191B2 (de)
KR (1) KR101018598B1 (de)
CN (1) CN100539154C (de)
AU (1) AU2003221799A1 (de)
DE (1) DE60334153D1 (de)
WO (1) WO2004100267A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100695168B1 (ko) * 2006-01-10 2007-03-14 삼성전자주식회사 상변화 물질 박막의 형성방법, 이를 이용한 상변화 메모리소자의 제조방법
KR100827697B1 (ko) * 2006-11-10 2008-05-07 삼성전자주식회사 3차원 구조를 가지는 반도체 메모리 장치 및 셀 어레이구조
US7817454B2 (en) * 2007-04-03 2010-10-19 Micron Technology, Inc. Variable resistance memory with lattice array using enclosing transistors
US8679977B2 (en) * 2007-07-25 2014-03-25 Micron Technology, Inc. Method and apparatus providing multi-planed array memory device
US9129845B2 (en) * 2007-09-19 2015-09-08 Micron Technology, Inc. Buried low-resistance metal word lines for cross-point variable-resistance material memories
KR101418434B1 (ko) * 2008-03-13 2014-08-14 삼성전자주식회사 비휘발성 메모리 장치, 이의 제조 방법, 및 이를 포함하는프로세싱 시스템
KR101539697B1 (ko) 2008-06-11 2015-07-27 삼성전자주식회사 수직형 필라를 활성영역으로 사용하는 3차원 메모리 장치,그 제조 방법 및 그 동작 방법
KR20100001260A (ko) * 2008-06-26 2010-01-06 삼성전자주식회사 비휘발성 메모리 소자 및 그 제조 방법
JP5284044B2 (ja) * 2008-11-10 2013-09-11 株式会社東芝 不揮発性半導体記憶装置
KR101489458B1 (ko) * 2009-02-02 2015-02-06 삼성전자주식회사 3차원 반도체 소자
KR20100130419A (ko) 2009-06-03 2010-12-13 삼성전자주식회사 이종접합 다이오드와 그 제조방법 및 이종접합 다이오드를 포함하는 전자소자
US8158967B2 (en) 2009-11-23 2012-04-17 Micron Technology, Inc. Integrated memory arrays
JP5641779B2 (ja) * 2010-05-18 2014-12-17 株式会社日立製作所 不揮発性記憶装置およびその製造方法
CN103247696A (zh) * 2012-02-07 2013-08-14 中国科学院微电子研究所 隧穿二极管整流器件及其制造方法
US20150028280A1 (en) * 2013-07-26 2015-01-29 Micron Technology, Inc. Memory cell with independently-sized elements
CN104978990B (zh) * 2014-04-14 2017-11-10 成都海存艾匹科技有限公司 紧凑型三维存储器
US10515981B2 (en) * 2015-09-21 2019-12-24 Monolithic 3D Inc. Multilevel semiconductor device and structure with memory
CN119479721A (zh) * 2023-08-10 2025-02-18 北京超弦存储器研究院 一种存储器及其读写方法、电子设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE632133A (de) * 1962-05-09
US4287571A (en) * 1979-09-11 1981-09-01 International Business Machines Corporation High density transistor arrays
JPS5837948A (ja) * 1981-08-31 1983-03-05 Toshiba Corp 積層半導体記憶装置
US5969380A (en) * 1996-06-07 1999-10-19 Micron Technology, Inc. Three dimensional ferroelectric memory
US5835396A (en) * 1996-10-17 1998-11-10 Zhang; Guobiao Three-dimensional read-only memory
US6185121B1 (en) * 1998-02-26 2001-02-06 Lucent Technologies Inc. Access structure for high density read only memory
CN1278645A (zh) * 1999-06-22 2001-01-03 张世熹 高密度集成电路之存储器
US6462977B2 (en) 2000-08-17 2002-10-08 David Earl Butz Data storage device having virtual columns and addressing layers
US6646912B2 (en) * 2001-06-05 2003-11-11 Hewlett-Packard Development Company, Lp. Non-volatile memory
US6504742B1 (en) * 2001-10-31 2003-01-07 Hewlett-Packard Company 3-D memory device for large storage capacity
US20030183868A1 (en) * 2002-04-02 2003-10-02 Peter Fricke Memory structures
US6687147B2 (en) * 2002-04-02 2004-02-03 Hewlett-Packard Development Company, L.P. Cubic memory array with diagonal select lines

Also Published As

Publication number Publication date
EP1609186B1 (de) 2010-09-08
KR101018598B1 (ko) 2011-03-04
CN1774807A (zh) 2006-05-17
JP4376191B2 (ja) 2009-12-02
AU2003221799A1 (en) 2004-11-26
KR20060002905A (ko) 2006-01-09
CN100539154C (zh) 2009-09-09
JP2006514781A (ja) 2006-05-11
EP1609186A1 (de) 2005-12-28
WO2004100267A1 (en) 2004-11-18

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