DE60332644D1 - Substratspeicherbehälter - Google Patents

Substratspeicherbehälter

Info

Publication number: DE60332644D1
Authority: DE; Germany
Prior art keywords: storage container; substrate storage; substrate; container; storage
Prior art date: 2002-10-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE60332644T

Other languages

English (en)

Inventor

Atsusi Sumi

Junya Toda

Takayuki Nakayama

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Shin Etsu Polymer Co Ltd

Shin Etsu Chemical Co Ltd

Original Assignee

Shin Etsu Polymer Co Ltd

Shin Etsu Chemical Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-10-25

Filing date

2003-10-01

Publication date

2010-07-01

2002-10-25 Priority claimed from JP2002311275A external-priority patent/JP4204302B2/ja

2002-11-28 Priority claimed from JP2002344954A external-priority patent/JP4201583B2/ja

2003-10-01 Application filed by Shin Etsu Polymer Co Ltd, Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Polymer Co Ltd

2010-07-01 Application granted granted Critical

2010-07-01 Publication of DE60332644D1 publication Critical patent/DE60332644D1/de

2023-10-02 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
- H10P72/1918—
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/02—Check valves with guided rigid valve members
- F16K15/025—Check valves with guided rigid valve members the valve being loaded by a spring
- F16K15/026—Check valves with guided rigid valve members the valve being loaded by a spring the valve member being a movable body around which the medium flows when the valve is open
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/02—Check valves with guided rigid valve members
- F16K15/06—Check valves with guided rigid valve members with guided stems
- F16K15/063—Check valves with guided rigid valve members with guided stems the valve being loaded by a spring
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
- F16K17/04—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
- H10P72/0402—
- H10P72/1926—
- H10P72/50—
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7781—With separate connected fluid reactor surface
- Y10T137/7834—Valve seat or external sleeve moves to open valve

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Packaging Frangible Articles (AREA)

DE60332644T 2002-10-25 2003-10-01 Substratspeicherbehälter Expired - Lifetime DE60332644D1 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2002311275A JP4204302B2 (ja)	2002-10-25	2002-10-25	収納容器
JP2002344954A JP4201583B2 (ja)	2002-11-28	2002-11-28	基板収納容器
PCT/JP2003/012612 WO2004038789A1 (ja)	2002-10-25	2003-10-01	基板収納容器

Publications (1)

Publication Number	Publication Date
DE60332644D1 true DE60332644D1 (de)	2010-07-01

Family

ID=32179103

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE60332644T Expired - Lifetime DE60332644D1 (de)	2002-10-25	2003-10-01	Substratspeicherbehälter

Country Status (6)

Country	Link
US (3)	US7455180B2 (de)
EP (1)	EP1555689B1 (de)
KR (1)	KR100607302B1 (de)
DE (1)	DE60332644D1 (de)
TW (1)	TWI289534B (de)
WO (1)	WO2004038789A1 (de)

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TWI346638B (en) *	2008-12-26	2011-08-11	Gudeng Prec Industral Co Ltd	A purging valve and a wafer container having the purging valve
JP2011018771A (ja) *	2009-07-09	2011-01-27	Shin Etsu Polymer Co Ltd	基板収納容器
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JP5015280B2 (ja) *	2010-02-26	2012-08-29	Ｔｄｋ株式会社	基板収納ポッドおよびその蓋部材並びに基板の処理装置
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JP5901978B2 (ja) *	2011-04-11	2016-04-13	株式会社日立国際電気	基板処理装置、基板処理装置制御プログラム、及び半導体装置の製造方法
JP5887719B2 (ja) *	2011-05-31	2016-03-16	シンフォニアテクノロジー株式会社	パージ装置、ロードポート、ボトムパージノズル本体、ボトムパージユニット
CN103035559B (zh) *	2011-09-29	2015-04-22	中芯国际集成电路制造(北京)有限公司	弹性固定轮及包含其的晶圆适配器
KR101147192B1 (ko) *	2011-11-11	2012-05-25	주식회사 엘에스테크	웨이퍼 표면상의 증착 이물 제거 장치
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JP6226190B2 (ja) *	2014-02-20	2017-11-08	Tdk株式会社	パージシステム、及び該パージシステムに供せられるポッド及びロードポート装置
CN105900226A (zh) *	2014-02-27	2016-08-24	村田机械株式会社	净化装置及净化方法
JP6217977B2 (ja) *	2014-02-27	2017-10-25	Tdk株式会社	ポッド、及び該ポッドを用いたパージシステム
JP6450156B2 (ja) *	2014-11-12	2019-01-09	ミライアル株式会社	ガスパージ用フィルタ
KR20170088411A (ko)	2014-12-01	2017-08-01	엔테그리스, 아이엔씨.	기재 수용기 밸브 조립체
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KR102461290B1 (ko) *	2017-03-27	2022-11-01	신에츠 폴리머 가부시키가이샤	기판 수납 용기
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TWI698608B (zh) *	2018-01-11	2020-07-11	家登精密工業股份有限公司	快拆式氣閥及應用其之基板容器
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JP7125000B2 (ja) *	2018-03-13	2022-08-24	信越ポリマー株式会社	基板収納容器
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2003
- 2003-10-01 WO PCT/JP2003/012612 patent/WO2004038789A1/ja not_active Ceased
- 2003-10-01 DE DE60332644T patent/DE60332644D1/de not_active Expired - Lifetime
- 2003-10-01 US US10/496,932 patent/US7455180B2/en not_active Expired - Fee Related
- 2003-10-01 EP EP20030748661 patent/EP1555689B1/de not_active Expired - Lifetime
- 2003-10-01 KR KR1020047017214A patent/KR100607302B1/ko not_active Expired - Fee Related
- 2003-10-16 TW TW92128740A patent/TWI289534B/zh not_active IP Right Cessation
2008
- 2008-01-29 US US12/021,719 patent/US7658289B2/en not_active Expired - Lifetime
- 2008-02-20 US US12/034,040 patent/US7658290B2/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP1555689A4 (de)	2005-11-02
KR100607302B1 (ko)	2006-07-31
TWI289534B (en)	2007-11-11
US7455180B2 (en)	2008-11-25
US7658289B2 (en)	2010-02-09
EP1555689A1 (de)	2005-07-20
US7658290B2 (en)	2010-02-09
WO2004038789A1 (ja)	2004-05-06
EP1555689B1 (de)	2010-05-19
TW200415092A (en)	2004-08-16
US20080149527A1 (en)	2008-06-26
US20080149528A1 (en)	2008-06-26
US20050077204A1 (en)	2005-04-14
KR20040104636A (ko)	2004-12-10

Publication	Publication Date	Title
DE60332644D1 (de)	2010-07-01	Substratspeicherbehälter
DE60335392D1 (de)	2011-01-27	Substratlagerungsbehälter
DE60311293D1 (de)	2007-03-08	Tragbarer aufbewahrungsbehälter
ATE535457T1 (de)	2011-12-15	Tragbarer vorratsbehälter
DE60308315D1 (de)	2006-10-26	Zusammenfaltbarer behälter
DE60324252D1 (de)	2008-12-04	Zusammenlegbarer behälter
DE60316763D1 (de)	2007-11-22	Aufbewahrungsbeutel
DK1419980T3 (da)	2007-09-10	Lagerbeholder til væsker
EP1679997A4 (de)	2008-10-01	Substratbehälter
DE60308630D1 (de)	2006-11-09	Lagerbehälter
DE60336031D1 (de)	2011-03-24	Entnahmebehälter
ITBO20020024A0 (it)	2002-01-21	Contenitore
DE60212721D1 (de)	2006-08-03	Datenkonservierung
DE60211114D1 (de)	2006-06-08	Speicher
DE60313259D1 (de)	2007-05-31	Behälter
DE60300848D1 (de)	2005-07-21	Behälter
DE60316240D1 (de)	2007-10-25	Flüssigkeitsbehälter
DE10390492D2 (de)	2005-02-10	Behälter
EP1496959A4 (de)	2009-03-18	Behälter
DOS2004000865S (es)	2009-10-31	Contenedor
ES1052537Y (es)	2003-04-16	Envase
ATA1272002A (de)	2003-05-15	Behälter
UY3371Q (es)	2003-01-31	Contenedor
ATE292314T1 (de)	2005-04-15	Münzbehälter
ATA15712003A (de)	2005-04-15	Behälter

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