[go: up one dir, main page]

DE60324231D1 - Verfahren und Vorrichtung zur Behandlung eines Einsatzgases - Google Patents

Verfahren und Vorrichtung zur Behandlung eines Einsatzgases

Info

Publication number
DE60324231D1
DE60324231D1 DE60324231T DE60324231T DE60324231D1 DE 60324231 D1 DE60324231 D1 DE 60324231D1 DE 60324231 T DE60324231 T DE 60324231T DE 60324231 T DE60324231 T DE 60324231T DE 60324231 D1 DE60324231 D1 DE 60324231D1
Authority
DE
Germany
Prior art keywords
treating
feed gas
feed
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60324231T
Other languages
English (en)
Inventor
Mohammad A Kalbassi
Paul Higginbotham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9940847&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60324231(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE60324231D1 publication Critical patent/DE60324231D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0462—Temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/104—Alumina
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B01D2253/1085—Zeolites characterized by a silicon-aluminium ratio
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/25—Coated, impregnated or composite adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/304—Linear dimensions, e.g. particle shape, diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/24—Hydrocarbons
    • B01D2256/245—Methane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/50—Carbon oxides
    • B01D2257/504—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/80—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40007—Controlling pressure or temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40058—Number of sequence steps, including sub-steps, per cycle
    • B01D2259/40062—Four
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40077—Direction of flow
    • B01D2259/40081—Counter-current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B01D2259/4009—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating using hot gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/402—Further details for adsorption processes and devices using two beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/403—Further details for adsorption processes and devices using three beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/404—Further details for adsorption processes and devices using four beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/416—Further details for adsorption processes and devices involving cryogenic temperature treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0431—Beds with radial gas flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/261—Drying gases or vapours by adsorption
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Gases (AREA)
DE60324231T 2002-07-19 2003-07-17 Verfahren und Vorrichtung zur Behandlung eines Einsatzgases Expired - Lifetime DE60324231D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0216914.2A GB0216914D0 (en) 2002-07-19 2002-07-19 Process and apparatus for treating a feed gas

Publications (1)

Publication Number Publication Date
DE60324231D1 true DE60324231D1 (de) 2008-12-04

Family

ID=9940847

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60324231T Expired - Lifetime DE60324231D1 (de) 2002-07-19 2003-07-17 Verfahren und Vorrichtung zur Behandlung eines Einsatzgases

Country Status (10)

Country Link
US (1) US7022159B2 (de)
EP (1) EP1382375B1 (de)
JP (2) JP4917245B2 (de)
CN (1) CN1262332C (de)
AR (1) AR053957A1 (de)
AT (1) ATE411843T1 (de)
AU (1) AU2003213519B2 (de)
DE (1) DE60324231D1 (de)
GB (1) GB0216914D0 (de)
ZA (1) ZA200305526B (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4590287B2 (ja) * 2005-03-15 2010-12-01 大陽日酸株式会社 空気液化分離装置における原料空気の精製方法
JP5566574B2 (ja) * 2005-06-24 2014-08-06 大陽日酸株式会社 ガス精製方法
EP1961477B1 (de) * 2005-12-14 2014-10-15 Taiyo Nippon Sanso Corporation Verfahren und vorrichtung zur reinigung der als ausgangsstoff bei der tieftemperaturzerlegung von luft zu verwendenden luft
FR2896861B1 (fr) * 2006-01-31 2008-07-18 Air Liquide Procede de regulation d'un ensemble d'appareils de separation d'air par distillation cryogenique et ensemble d'appareils de separation d'air operant selon ledit procede
US7799117B1 (en) 2006-09-27 2010-09-21 Uop Llc Gas treatment process by temperature swing adsorption
FR2909899A1 (fr) * 2006-12-14 2008-06-20 Air Liquide Adsorbeurs radiaux installes en parallele
US7744677B2 (en) * 2007-05-25 2010-06-29 Prometheus Technologies, Llc Systems and methods for processing methane and other gases
CN101441023A (zh) * 2007-11-23 2009-05-27 山东科技大学 一种节能型空气分离工艺
ITMI20080115A1 (it) 2008-01-25 2009-07-26 Polaris Srl Apparecchio e metodo per distribuire una pluralita' di correnti di fluido attraverso una pluralita' di camere, in particolare per attuare processi di adsorbimento.
JP2010090860A (ja) * 2008-10-10 2010-04-22 Mitsubishi Heavy Ind Ltd 低カロリーガス燃料を用いたガスエンジン
JP5577044B2 (ja) 2009-03-11 2014-08-20 大陽日酸株式会社 空気の精製方法
CN101596396A (zh) * 2009-06-23 2009-12-09 杨皓 一种深度干燥气体的方法
US20120152116A1 (en) 2010-12-16 2012-06-21 Prometheus Technologies, Llc Rotary fluid processing systems and associated methods
US20110154737A1 (en) * 2011-03-09 2011-06-30 Wexler Ronald M Method and apparatus for accumulating, storing, and releasing thermal energy and humidity
FR2975307A1 (fr) * 2011-05-16 2012-11-23 Air Liquide Procede de purification par adsorption avec regeneration au moyen d'un gaz comprenant un constituant non desire dans le gaz purifie
KR101332265B1 (ko) * 2011-05-17 2013-11-22 주식회사태성씨앤디 알칼리 수전해용 수소 정제장치
US9314731B2 (en) 2013-11-20 2016-04-19 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude RTSA method using adsorbent structure for CO2 capture from low pressure and low concentration sources
US20150139862A1 (en) * 2013-11-20 2015-05-21 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Structured adsorbent bed for capture of co2 from low pressure and low concentration sources
US9308486B2 (en) 2013-11-20 2016-04-12 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Method of using a structured adsorbent bed for capture of CO2 from low pressure and low pressure concentration sources
EP2902087A1 (de) * 2014-02-04 2015-08-05 Linde Aktiengesellschaft Verfahren zur Abscheidung einer Komponente eines Gasgemischs unter Verwendung einer Temperaturwechseladsorption
CN106132508B (zh) * 2014-02-04 2020-02-14 林德股份公司 制备和纯化合成气体的方法
US10619114B2 (en) 2015-08-27 2020-04-14 Jgc Corporation Pretreatment equipment for hydrocarbon gas to be liquefied and shipping base equipment
EP3344370B1 (de) * 2015-09-02 2024-08-07 ExxonMobil Technology and Engineering Company Vorrichtung und system für kombinierte rapid-cycle-temperatur und damit verbundene druckwechseladsorptionsprozesse
US9708188B1 (en) * 2016-02-22 2017-07-18 Air Products And Chemicals, Inc. Method for argon production via cold pressure swing adsorption
EP3216511A1 (de) 2016-03-08 2017-09-13 Casale SA Temperaturwechseladsorptionsverfahren
PL3375517T3 (pl) 2017-03-17 2023-10-02 Air Products And Chemicals, Inc. Adsorbent z aktywowanego tlenku glinu promowanego alkalami
FR3083991B1 (fr) * 2018-07-20 2021-05-14 Engie Systeme de purification d'un melange de gaz, procede et installation associes
US11596895B2 (en) 2020-07-17 2023-03-07 Air Products And Chemicals, Inc. Radial adsorber, adsorption system, and adsorption methods
US11731075B2 (en) * 2020-08-10 2023-08-22 Praxair Technology, Inc. High recovery process for purification of multicomponent gases
US12196486B2 (en) 2021-07-21 2025-01-14 Air Products And Chemicals, Inc. Air separation apparatus, adsorber, and method
JP7509726B2 (ja) * 2021-07-30 2024-07-02 株式会社日立産機システム 除湿装置
WO2023043845A1 (en) * 2021-09-15 2023-03-23 Basf Corporation Adsorbent bed with increased hydrothermal stability
US12247782B2 (en) 2021-09-23 2025-03-11 Air Products And Chemicals, Inc. Pre-purification arrangement for air separation and method of hybrid air purification
WO2024231196A1 (en) 2023-05-11 2024-11-14 Shell Internationale Research Maatschappij B.V. Processes for sorbent regeneration
US20240426547A1 (en) 2023-06-26 2024-12-26 Air Products And Chemicals, Inc. Adsorber, purification system, and purification method
US20250144601A1 (en) 2023-11-03 2025-05-08 Air Products And Chemicals, Inc. Adsorbent Material, Adsorption System, and Adsorption Process
US20250145460A1 (en) 2023-11-03 2025-05-08 Air Products And Chemicals, Inc. Adsorbent Material, Adsorption System, and Adsorption Process For Hydrogen Recovery

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4000990A (en) * 1975-04-16 1977-01-04 Nrg Nufuel Company Adsorption process
US3986849A (en) * 1975-11-07 1976-10-19 Union Carbide Corporation Selective adsorption process
DE2823211A1 (de) * 1978-05-27 1979-12-06 Bayer Antwerpen Nv Verfahren zum betrieb einer druck- wechsel-adsorptionsanlage
US4375363A (en) * 1978-12-05 1983-03-01 Union Carbide Corporation Selective adsorption process for production of ammonia synthesis gas mixtures
US4475929A (en) * 1978-12-05 1984-10-09 Union Carbide Corporation Selective adsorption process
ES507688A0 (es) * 1980-12-09 1982-11-01 Linde Ag Procedimiento de absorcion para descomponer por lo menos dos corrientes de gas crudo .
US4436533A (en) * 1982-12-02 1984-03-13 Shell Oil Company Adsorption process
JPS60246206A (ja) * 1984-05-22 1985-12-05 Seitetsu Kagaku Co Ltd 高濃度酸素の製造方法
US4589888A (en) * 1984-10-05 1986-05-20 Union Carbide Corporation Pressure swing adsorption process
FR2599274B1 (fr) 1986-06-02 1988-08-26 Air Liquide Procede et installation de separation d'un melange gazeux par adsorption.
US5203888A (en) * 1990-11-23 1993-04-20 Uop Pressure swing adsorption process with multiple desorption steps
US5571309A (en) 1995-07-28 1996-11-05 The Boc Group, Inc. Adsorption process
US5938816A (en) 1995-09-14 1999-08-17 Firma Maul & Co. - Chr. Belser Gmbh Process for purifying gases loaded in particular with chemical residues
US5614000A (en) 1995-10-04 1997-03-25 Air Products And Chemicals, Inc. Purification of gases using solid adsorbents
US5656065A (en) 1995-10-04 1997-08-12 Air Products And Chemicals, Inc. Multibed pressure swing adsorption apparatus and method for the operation thereof
US5846295A (en) 1997-03-07 1998-12-08 Air Products And Chemicals, Inc. Temperature swing adsorption
US5853794A (en) 1997-10-31 1998-12-29 Kemet Electronics Corp. Doped polyaniline solutions
US5958109A (en) 1998-05-15 1999-09-28 Fuderer; Andrija Adsorption process for recovery of solvents
JPH11335102A (ja) 1998-05-22 1999-12-07 Iwatani Internatl Corp 高濃度オゾン連続発生方法及びその装置
US6210466B1 (en) * 1999-08-10 2001-04-03 Uop Llc Very large-scale pressure swing adsorption processes
FR2799390B1 (fr) 1999-10-08 2002-06-07 Air Liquide Procede de traitement d'un gaz par adsorption a temperature modulee
US20020139246A1 (en) * 2001-01-03 2002-10-03 Ravi Kumar Multi-bed adsorption process for air purification

Also Published As

Publication number Publication date
EP1382375B1 (de) 2008-10-22
JP4917245B2 (ja) 2012-04-18
AU2003213519B2 (en) 2008-07-10
GB0216914D0 (en) 2002-08-28
JP2004154761A (ja) 2004-06-03
CN1475296A (zh) 2004-02-18
ATE411843T1 (de) 2008-11-15
CN1262332C (zh) 2006-07-05
AU2003213519A1 (en) 2004-02-05
US7022159B2 (en) 2006-04-04
AR053957A1 (es) 2007-05-30
US20040118279A1 (en) 2004-06-24
ZA200305526B (en) 2004-02-11
JP2009241068A (ja) 2009-10-22
EP1382375A1 (de) 2004-01-21

Similar Documents

Publication Publication Date Title
DE60324231D1 (de) Verfahren und Vorrichtung zur Behandlung eines Einsatzgases
DE60310291D1 (de) Verfahren und Vorrichtung zur Gasphasenbeschichtung
DE60211402D1 (de) Verfahren und Vorrichtung zur Gastrocknung
DE60331902D1 (de) Verfahren und vorrichtung zum rührreibschweissen
DE10397004A5 (de) Verfahren und Vorrichtung zum Laden eines vertrauenswürdigen Betriebssystems
DE602004001524D1 (de) Vorrichtung und Verfahren zur Abgasreinigung
DE60322144D1 (de) Verfahren und Vorrichtung zum chemisch-mechanischen Polieren
DE602004018436D1 (de) Vorrichtung und Verfahren zum Herstellen dünner Schichten
DE60307367D1 (de) Verfahren und Vorrichtung zur Reinigung von Abgasen
DE60116035D1 (de) Verfahren und Vorrichtung zur Abwasserbehandlung
DE60033486D1 (de) Verfahren und Vorrichtung zur Behandlung von Perfluorverbindungen enthaltenden Gasen
DE60300845D1 (de) Verfahren und Vorrichtung zur Reinigung von Abgas
DE60306247D1 (de) Vorrichtung und Verfahren zum Sterilisieren
ATE312661T1 (de) Vorrichtung und verfahren zum herstellen von kristallinen teilchen
DE602004010705D1 (de) Vorrichtung und Verfahren zur Behandlung von Mist enthaltendem Abwasser
DE50309662D1 (de) Verfahren zur Entschichtung von Triebwerksbauteilen und Vorrichtung zur Durchführung des Verfahrens
DE602006008698D1 (de) Verfahren und Vorrichtung zur Behandlung eines Teiles
DE102004008900A8 (de) Vorrichtung und Verfahren zum Verarbeiten von Wafern
DE60317748D1 (de) Verfahren und Vorrichtung zum Halten eines Spiegels und Spiegelaustauschverfahren
DE60320303D1 (de) Verfahren und vorrichtung zur behandlung von abgasluminium
DE10392124T5 (de) Verfahren und Vorrichtung zum Formen eines Teigstücks
DE60315540D1 (de) Vorrichtung und Verfahren zum Dispergieren
DE60303556D1 (de) Vorrichtung und Verfahren zur Kontrolle eines Gassacks
DE60306215D1 (de) Verfahren und Vorrichtung zum superplastischen Verformen
DE50309149D1 (de) Verfahren und Vorrichtung zum Waschen eines Gummituches

Legal Events

Date Code Title Description
8363 Opposition against the patent