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DE60318884D1 - Barriererippe und Verfahren zur Herstellung - Google Patents

Barriererippe und Verfahren zur Herstellung

Info

Publication number
DE60318884D1
DE60318884D1 DE60318884T DE60318884T DE60318884D1 DE 60318884 D1 DE60318884 D1 DE 60318884D1 DE 60318884 T DE60318884 T DE 60318884T DE 60318884 T DE60318884 T DE 60318884T DE 60318884 D1 DE60318884 D1 DE 60318884D1
Authority
DE
Germany
Prior art keywords
manufacture
barrier rib
rib
barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60318884T
Other languages
English (en)
Other versions
DE60318884T2 (de
Inventor
Hideyuki Takahashi
Kenji Ishizeki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of DE60318884D1 publication Critical patent/DE60318884D1/de
Application granted granted Critical
Publication of DE60318884T2 publication Critical patent/DE60318884T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/005—Silver halide emulsions; Preparation thereof; Physical treatment thereof; Incorporation of additives therein
    • G03C1/492—Photosoluble emulsions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/108—Polyolefin or halogen containing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
DE60318884T 2002-11-06 2003-10-31 Barriererippe und Verfahren zu deren Herstellung Expired - Lifetime DE60318884T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002322215 2002-11-06
JP2002322215 2002-11-06
PCT/JP2003/014019 WO2004042474A1 (ja) 2002-11-06 2003-10-31 ネガ型感光性樹脂組成物

Publications (2)

Publication Number Publication Date
DE60318884D1 true DE60318884D1 (de) 2008-03-13
DE60318884T2 DE60318884T2 (de) 2009-01-22

Family

ID=32310384

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60318884T Expired - Lifetime DE60318884T2 (de) 2002-11-06 2003-10-31 Barriererippe und Verfahren zu deren Herstellung

Country Status (9)

Country Link
US (2) US7494764B2 (de)
EP (1) EP1560068B1 (de)
JP (4) JP4609071B2 (de)
KR (1) KR101026094B1 (de)
CN (1) CN1711503B (de)
AU (1) AU2003280695A1 (de)
DE (1) DE60318884T2 (de)
TW (1) TW200419310A (de)
WO (1) WO2004042474A1 (de)

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* Cited by examiner, † Cited by third party
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JP4949810B2 (ja) * 2006-11-14 2012-06-13 東京応化工業株式会社 着色感光性樹脂組成物
KR100895352B1 (ko) * 2006-11-15 2009-04-29 다이요 잉키 세이조 가부시키가이샤 흑색 페이스트 조성물, 및 그것을 이용한 블랙 매트릭스패턴의 형성 방법, 및 그 블랙 매트릭스 패턴
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CN104428331B (zh) * 2012-07-11 2019-02-15 东洋油墨Sc控股株式会社 活性能量射线聚合性树脂组合物、以及使用该树脂组合物的层叠体
JP6065915B2 (ja) 2012-09-24 2017-01-25 旭硝子株式会社 ネガ型感光性樹脂組成物、硬化膜、隔壁、及び光学素子
JP6341093B2 (ja) * 2012-10-31 2018-06-13 旭硝子株式会社 ネガ型感光性樹脂組成物、樹脂硬化膜、隔壁および光学素子
KR102235156B1 (ko) * 2013-12-09 2021-04-05 롬엔드하스전자재료코리아유한회사 네거티브형 감광성 수지 조성물
JP5644970B1 (ja) * 2014-02-28 2014-12-24 住友化学株式会社 感光性樹脂組成物
KR102235159B1 (ko) * 2014-04-15 2021-04-05 롬엔드하스전자재료코리아유한회사 감광성 수지 조성물, 및 이를 이용한 절연막 및 전자소자
WO2016010077A1 (ja) * 2014-07-18 2016-01-21 旭硝子株式会社 ネガ型感光性樹脂組成物、樹脂硬化膜、隔壁および光学素子
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KR102656174B1 (ko) * 2019-03-15 2024-04-08 동우 화인켐 주식회사 감광성 수지 조성물, 이로부터 형성된 광경화 패턴 및 이를 포함하는 화상 표시 장치
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JP4488098B2 (ja) 2010-06-23
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CN1711503B (zh) 2010-05-26
JP2010217910A (ja) 2010-09-30
WO2004042474A1 (ja) 2004-05-21
CN1711503A (zh) 2005-12-21
TW200419310A (en) 2004-10-01
US20070003880A1 (en) 2007-01-04
JP4609071B2 (ja) 2011-01-12
JP4609587B2 (ja) 2011-01-12
EP1560068A1 (de) 2005-08-03
US7494764B2 (en) 2009-02-24
JPWO2004042474A1 (ja) 2006-03-09
TWI342982B (de) 2011-06-01
EP1560068A4 (de) 2007-05-02
US7267929B2 (en) 2007-09-11
EP1560068B1 (de) 2008-01-23
JP2009048200A (ja) 2009-03-05
US20050191580A1 (en) 2005-09-01
KR20050074546A (ko) 2005-07-18
DE60318884T2 (de) 2009-01-22

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