DE602005027028D1 - Herstellungsverfahren für eine Dünnfilmtransistormatrix - Google Patents
Herstellungsverfahren für eine DünnfilmtransistormatrixInfo
- Publication number
- DE602005027028D1 DE602005027028D1 DE602005027028T DE602005027028T DE602005027028D1 DE 602005027028 D1 DE602005027028 D1 DE 602005027028D1 DE 602005027028 T DE602005027028 T DE 602005027028T DE 602005027028 T DE602005027028 T DE 602005027028T DE 602005027028 D1 DE602005027028 D1 DE 602005027028D1
- Authority
- DE
- Germany
- Prior art keywords
- thin film
- manufacturing process
- film transistor
- transistor matrix
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/01—Manufacture or treatment
- H10D86/021—Manufacture or treatment of multiple TFTs
- H10D86/0231—Manufacture or treatment of multiple TFTs using masks, e.g. half-tone masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
- H10D30/0312—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
- H10D30/0316—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral bottom-gate TFTs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
- H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
-
- H10P50/667—
-
- H10W20/031—
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020040079521A KR101090249B1 (ko) | 2004-10-06 | 2004-10-06 | 박막 트랜지스터 표시판의 제조 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE602005027028D1 true DE602005027028D1 (de) | 2011-05-05 |
Family
ID=36126084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE602005027028T Expired - Lifetime DE602005027028D1 (de) | 2004-10-06 | 2005-09-23 | Herstellungsverfahren für eine Dünnfilmtransistormatrix |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7425476B2 (de) |
| EP (1) | EP1646076B1 (de) |
| JP (1) | JP2006108612A (de) |
| KR (1) | KR101090249B1 (de) |
| CN (1) | CN1767175B (de) |
| DE (1) | DE602005027028D1 (de) |
| TW (1) | TWI395001B (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070009321A (ko) * | 2005-07-15 | 2007-01-18 | 삼성전자주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
| KR101232061B1 (ko) * | 2006-04-24 | 2013-02-12 | 삼성디스플레이 주식회사 | 금속 배선의 제조 방법 및 표시 기판의 제조 방법 |
| KR20080034598A (ko) * | 2006-10-17 | 2008-04-22 | 삼성전자주식회사 | 박막 트랜지스터 표시판의 제조 방법 |
| US8786793B2 (en) * | 2007-07-27 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
| TWI374510B (en) | 2008-04-18 | 2012-10-11 | Au Optronics Corp | Gate driver on array of a display and method of making device of a display |
| CN101266951B (zh) * | 2008-05-05 | 2012-02-01 | 友达光电股份有限公司 | 显示装置的栅极驱动电路以及制作显示装置的器件的方法 |
| KR101582946B1 (ko) * | 2009-12-04 | 2016-01-08 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
| KR101750430B1 (ko) * | 2010-11-29 | 2017-06-26 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판의 제조 방법 |
| KR102063983B1 (ko) * | 2013-06-26 | 2020-02-11 | 엘지디스플레이 주식회사 | 금속 산화물 반도체를 포함하는 박막 트랜지스터 기판 및 그 제조 방법 |
| CN103500764B (zh) | 2013-10-21 | 2016-03-30 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制备方法、阵列基板、显示器 |
| KR102132445B1 (ko) * | 2013-12-31 | 2020-07-09 | 엘지디스플레이 주식회사 | 액정 디스플레이 패널 및 이의 제조 방법 |
| KR102423678B1 (ko) * | 2015-09-25 | 2022-07-21 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
| CN107134460B (zh) * | 2017-04-11 | 2019-08-02 | 深圳市华星光电半导体显示技术有限公司 | 显示装置及其goa电路 |
| JP7063019B2 (ja) * | 2018-03-09 | 2022-05-09 | Tdk株式会社 | 薄膜コンデンサの製造方法及び薄膜コンデンサ |
| CN110729197A (zh) * | 2018-06-29 | 2020-01-24 | 中华映管股份有限公司 | 一种半导体薄膜晶体管的制造方法及显示面板 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4231811A (en) * | 1979-09-13 | 1980-11-04 | Intel Corporation | Variable thickness self-aligned photoresist process |
| US6287899B1 (en) * | 1998-12-31 | 2001-09-11 | Samsung Electronics Co., Ltd. | Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same |
| KR100494683B1 (ko) * | 2000-05-31 | 2005-06-13 | 비오이 하이디스 테크놀로지 주식회사 | 4-마스크를 이용한 박막 트랜지스터 액정표시장치의제조시에 사용하는 할프톤 노광 공정용 포토 마스크 |
| JP2002131886A (ja) * | 2000-10-27 | 2002-05-09 | Hitachi Ltd | 半導体装置の製造方法 |
| JP2002151381A (ja) * | 2000-11-09 | 2002-05-24 | Nec Kagoshima Ltd | パターン形成方法 |
| TW480728B (en) * | 2001-02-02 | 2002-03-21 | Hannstar Display Corp | Polysilicon thin film transistor structure and the manufacturing method thereof |
| JP4462775B2 (ja) * | 2001-03-02 | 2010-05-12 | Nec液晶テクノロジー株式会社 | パターン形成方法及びそれを用いた液晶表示装置の製造方法 |
| JP3871923B2 (ja) * | 2001-11-26 | 2007-01-24 | 鹿児島日本電気株式会社 | パターン形成方法及びそれを用いたアクティブマトリクス基板の製造方法 |
| US7102168B2 (en) * | 2001-12-24 | 2006-09-05 | Samsung Electronics Co., Ltd. | Thin film transistor array panel for display and manufacturing method thereof |
| KR100897505B1 (ko) * | 2002-11-19 | 2009-05-15 | 삼성전자주식회사 | 액정 표시 장치의 박막 트랜지스터 기판 및 이의 제조 방법 |
| TW579604B (en) * | 2002-12-17 | 2004-03-11 | Ind Tech Res Inst | Method of forming a top-gate type thin film transistor device |
-
2004
- 2004-10-06 KR KR1020040079521A patent/KR101090249B1/ko not_active Expired - Lifetime
-
2005
- 2005-01-27 JP JP2005019463A patent/JP2006108612A/ja active Pending
- 2005-07-28 TW TW094125577A patent/TWI395001B/zh not_active IP Right Cessation
- 2005-09-13 CN CN2005101028537A patent/CN1767175B/zh not_active Expired - Lifetime
- 2005-09-23 EP EP05108789A patent/EP1646076B1/de not_active Expired - Lifetime
- 2005-09-23 DE DE602005027028T patent/DE602005027028D1/de not_active Expired - Lifetime
- 2005-10-04 US US11/242,696 patent/US7425476B2/en active Active
-
2008
- 2008-08-15 US US12/192,531 patent/US20080299712A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| EP1646076A1 (de) | 2006-04-12 |
| TW200612140A (en) | 2006-04-16 |
| US20080299712A1 (en) | 2008-12-04 |
| KR20060030664A (ko) | 2006-04-11 |
| TWI395001B (zh) | 2013-05-01 |
| US7425476B2 (en) | 2008-09-16 |
| US20060073645A1 (en) | 2006-04-06 |
| CN1767175B (zh) | 2011-03-16 |
| JP2006108612A (ja) | 2006-04-20 |
| CN1767175A (zh) | 2006-05-03 |
| KR101090249B1 (ko) | 2011-12-06 |
| EP1646076B1 (de) | 2011-03-23 |
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