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DE602004007089D1 - Vorrichtung zur Herstellung von Dünnfilmen - Google Patents

Vorrichtung zur Herstellung von Dünnfilmen

Info

Publication number
DE602004007089D1
DE602004007089D1 DE602004007089T DE602004007089T DE602004007089D1 DE 602004007089 D1 DE602004007089 D1 DE 602004007089D1 DE 602004007089 T DE602004007089 T DE 602004007089T DE 602004007089 T DE602004007089 T DE 602004007089T DE 602004007089 D1 DE602004007089 D1 DE 602004007089D1
Authority
DE
Germany
Prior art keywords
thin films
producing thin
producing
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004007089T
Other languages
English (en)
Other versions
DE602004007089T2 (de
Inventor
Hideo Okada
Takao Imanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003385768A external-priority patent/JP4149363B2/ja
Priority claimed from JP2003401637A external-priority patent/JP2005163079A/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE602004007089D1 publication Critical patent/DE602004007089D1/de
Application granted granted Critical
Publication of DE602004007089T2 publication Critical patent/DE602004007089T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C03C17/256—Coating containing TiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/212—TiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/112—Deposition methods from solutions or suspensions by spraying

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemically Coating (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Spray Control Apparatus (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE602004007089T 2003-11-14 2004-11-12 Vorrichtung zur Herstellung von Dünnfilmen Expired - Lifetime DE602004007089T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003385768 2003-11-14
JP2003385768A JP4149363B2 (ja) 2003-11-14 2003-11-14 薄膜形成装置
JP2003401637A JP2005163079A (ja) 2003-12-01 2003-12-01 薄膜形成装置
JP2003401637 2003-12-01

Publications (2)

Publication Number Publication Date
DE602004007089D1 true DE602004007089D1 (de) 2007-08-02
DE602004007089T2 DE602004007089T2 (de) 2008-02-21

Family

ID=34467815

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004007089T Expired - Lifetime DE602004007089T2 (de) 2003-11-14 2004-11-12 Vorrichtung zur Herstellung von Dünnfilmen

Country Status (3)

Country Link
US (1) US7540922B2 (de)
EP (1) EP1536036B1 (de)
DE (1) DE602004007089T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5248855B2 (ja) * 2005-03-16 2013-07-31 学校法人同志社 成膜装置及び成膜方法
JP5198853B2 (ja) * 2005-03-18 2013-05-15 株式会社堀場製作所 成膜方法及び成膜装置
CN1868941B (zh) * 2005-05-25 2010-07-14 奥林巴斯株式会社 光学元件成形模具及其制造方法以及制造装置
US7846489B2 (en) * 2005-07-22 2010-12-07 State of Oregon acting by and though the State Board of Higher Education on behalf of Oregon State University Method and apparatus for chemical deposition
JP2008007838A (ja) * 2006-06-30 2008-01-17 Horiba Ltd 成膜装置及び成膜方法
JP5295524B2 (ja) * 2007-06-05 2013-09-18 日本電波工業株式会社 光学薄膜成膜方法
CA2705517A1 (en) * 2007-11-16 2009-05-22 Photocat A/S Photocatalytic boards or panels and a method of manufacturing thereof
CA2756075C (en) 2009-03-23 2018-05-15 Valinge Photocatalytic Ab Production of titania nanoparticle colloidal suspensions with maintained crystallinity by using a bead mill with micrometer sized beads
KR101695245B1 (ko) * 2011-05-31 2017-01-11 한화테크윈 주식회사 전자 부품 실장 장치 및 전자 부품 촬상 방법
RU2607558C2 (ru) * 2011-07-05 2017-01-10 Велинге Фотокаталитик Аб Изделия из древесины с покрытием и способ получения изделий из древесины с покрытием
MY167029A (en) 2012-03-20 2018-07-31 Välinge Photocatalytic Ab Aphotocatalytic composition
MX366483B (es) 2012-12-21 2019-07-09 Vaelinge Photocatalytic Ab Un metodo para revestir un panel de construccion y un panel de contruccion.
US9375750B2 (en) 2012-12-21 2016-06-28 Valinge Photocatalytic Ab Method for coating a building panel and a building panel
TW201434535A (zh) * 2013-03-05 2014-09-16 Genesis Photonics Inc 噴塗裝置
US9945075B2 (en) 2013-09-25 2018-04-17 Valinge Photocatalytic Ab Method of applying a photocatalytic dispersion
CN103938459B (zh) * 2014-04-30 2015-11-18 河南永合新材料有限公司 针板定型水性亚光处理生产线
JP6352824B2 (ja) * 2015-01-23 2018-07-04 東芝メモリ株式会社 基板処理装置、制御プログラムおよび制御方法
CN106929836B (zh) * 2015-12-31 2019-05-17 比亚迪股份有限公司 无机粉体的表面处理方法和化学镀活化剂及聚合物制品和聚合物制品表面选择性金属化方法
JP6746339B2 (ja) * 2016-03-28 2020-08-26 住友重機械モダン株式会社 フィルム成形装置
DE102021105560A1 (de) * 2021-03-08 2022-09-08 Docter Optics Se Verfahren zur Herstellung eines optischen Elementes aus Glas

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812336B2 (ja) 1975-04-15 1983-03-08 富士通株式会社 ジヨウチヤクマクアツソクテイホウホウ
US4453151A (en) * 1982-06-07 1984-06-05 Leary David J Semiconductor gas sensor
GB2220679A (en) * 1987-09-09 1990-01-17 Edward William Johnson Apparatus for thin film deposition of aerosol particles by thermolytic decomposition
US5393624A (en) * 1988-07-29 1995-02-28 Tokyo Electron Limited Method and apparatus for manufacturing a semiconductor device
JP2820539B2 (ja) 1990-12-21 1998-11-05 トリニティ工業株式会社 塗装装置
JPH06249620A (ja) 1993-02-23 1994-09-09 Dainippon Screen Mfg Co Ltd 膜厚測定方法
CN1059967C (zh) * 1993-03-25 2000-12-27 东京电子株式会社 形成涂膜的方法和装置
JPH07311020A (ja) 1994-05-19 1995-11-28 Asahi Glass Eng Kk 薄膜の膜厚測定方法および測定装置
JPH0945611A (ja) * 1995-07-27 1997-02-14 Dainippon Screen Mfg Co Ltd 回転式基板塗布装置
JP3516195B2 (ja) * 1996-05-28 2004-04-05 東京エレクトロン株式会社 塗布膜形成方法及びその装置
JP3286954B2 (ja) 1996-10-24 2002-05-27 科学技術振興事業団 錫添加酸化インジウム三元機能膜の製造方法
JPH10158834A (ja) 1996-12-05 1998-06-16 Nikon Corp 膜厚計測光学系および該光学系を備えた成膜装置
US6319317B1 (en) * 1999-04-19 2001-11-20 Tokyo Electron Limited Coating film forming method and coating apparatus
JP2001026885A (ja) 1999-07-16 2001-01-30 Meiku:Kk 薄膜形成装置
JP3700085B2 (ja) * 2001-03-30 2005-09-28 ミネベア株式会社 フェライト薄膜の製造方法
JP2002361121A (ja) 2001-06-07 2002-12-17 Matsushita Electric Ind Co Ltd 粉体塗装方法及びそのための塗装装置
KR100948220B1 (ko) * 2002-03-19 2010-03-18 도쿄엘렉트론가부시키가이샤 도포처리방법 및 도포처리장치

Also Published As

Publication number Publication date
US20050145939A1 (en) 2005-07-07
EP1536036A2 (de) 2005-06-01
EP1536036B1 (de) 2007-06-20
US7540922B2 (en) 2009-06-02
EP1536036A3 (de) 2005-07-27
DE602004007089T2 (de) 2008-02-21

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