[go: up one dir, main page]

DE60034401D1 - Herstellungsverfahren einer elektrooptischen Vorrichtung - Google Patents

Herstellungsverfahren einer elektrooptischen Vorrichtung

Info

Publication number
DE60034401D1
DE60034401D1 DE60034401T DE60034401T DE60034401D1 DE 60034401 D1 DE60034401 D1 DE 60034401D1 DE 60034401 T DE60034401 T DE 60034401T DE 60034401 T DE60034401 T DE 60034401T DE 60034401 D1 DE60034401 D1 DE 60034401D1
Authority
DE
Germany
Prior art keywords
electro
manufacturing
optical device
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60034401T
Other languages
English (en)
Other versions
DE60034401T2 (de
Inventor
Shunpei Yamazaki
Mayumi Mizukami
Toshimitsu Konuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Application granted granted Critical
Publication of DE60034401D1 publication Critical patent/DE60034401D1/de
Publication of DE60034401T2 publication Critical patent/DE60034401T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H10K71/441—Thermal treatment, e.g. annealing in the presence of a solvent vapour in the presence of solvent vapors, e.g. solvent vapour annealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/87—Arrangements for heating or cooling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/8794—Arrangements for heating and cooling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/956—Making multiple wavelength emissive device

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)
DE60034401T 1999-06-28 2000-06-27 Herstellungsverfahren einer elektrooptischen Vorrichtung Expired - Lifetime DE60034401T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18259599 1999-06-28
JP18259599 1999-06-28

Publications (2)

Publication Number Publication Date
DE60034401D1 true DE60034401D1 (de) 2007-05-31
DE60034401T2 DE60034401T2 (de) 2007-08-16

Family

ID=16121043

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60034401T Expired - Lifetime DE60034401T2 (de) 1999-06-28 2000-06-27 Herstellungsverfahren einer elektrooptischen Vorrichtung

Country Status (6)

Country Link
US (2) US6440877B1 (de)
EP (1) EP1065724B1 (de)
KR (2) KR100713019B1 (de)
CN (2) CN1197165C (de)
DE (1) DE60034401T2 (de)
TW (1) TW512543B (de)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19755734A1 (de) * 1997-12-15 1999-06-24 Siemens Ag Verfahren zur Herstellung eines oberflächenmontierbaren optoelektronischen Bauelementes
US6274887B1 (en) * 1998-11-02 2001-08-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method therefor
US7141821B1 (en) * 1998-11-10 2006-11-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having an impurity gradient in the impurity regions and method of manufacture
US6277679B1 (en) 1998-11-25 2001-08-21 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing thin film transistor
TW556357B (en) * 1999-06-28 2003-10-01 Semiconductor Energy Lab Method of manufacturing an electro-optical device
TW512543B (en) * 1999-06-28 2002-12-01 Semiconductor Energy Lab Method of manufacturing an electro-optical device
US6876145B1 (en) * 1999-09-30 2005-04-05 Semiconductor Energy Laboratory Co., Ltd. Organic electroluminescent display device
TW468283B (en) 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
TW471011B (en) 1999-10-13 2002-01-01 Semiconductor Energy Lab Thin film forming apparatus
US6646287B1 (en) 1999-11-19 2003-11-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with tapered gate and insulating film
TW587239B (en) * 1999-11-30 2004-05-11 Semiconductor Energy Lab Electric device
TW495808B (en) * 2000-02-04 2002-07-21 Semiconductor Energy Lab Thin film formation apparatus and method of manufacturing self-light-emitting device using thin film formation apparatus
US6879110B2 (en) 2000-07-27 2005-04-12 Semiconductor Energy Laboratory Co., Ltd. Method of driving display device
US6724150B2 (en) * 2001-02-01 2004-04-20 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
EP1237207B1 (de) * 2001-03-02 2012-01-04 FUJIFILM Corporation Herstellungsverfahren einer organischen Dünnschicht-Vorrichtung
JP2002344011A (ja) * 2001-05-15 2002-11-29 Sony Corp 表示素子及びこれを用いた表示装置
JP3969698B2 (ja) * 2001-05-21 2007-09-05 株式会社半導体エネルギー研究所 発光装置の作製方法
JP2002358031A (ja) * 2001-06-01 2002-12-13 Semiconductor Energy Lab Co Ltd 発光装置及びその駆動方法
US20020197393A1 (en) * 2001-06-08 2002-12-26 Hideaki Kuwabara Process of manufacturing luminescent device
JP2003022892A (ja) 2001-07-06 2003-01-24 Semiconductor Energy Lab Co Ltd 発光装置の製造方法
JP2003022058A (ja) * 2001-07-09 2003-01-24 Seiko Epson Corp 電気光学装置、電気光学装置の駆動回路、電気光学装置の駆動方法および電子機器
JP2003123968A (ja) * 2001-10-15 2003-04-25 Univ Toyama 有機電界発光素子の製造方法
JP4101511B2 (ja) * 2001-12-27 2008-06-18 株式会社半導体エネルギー研究所 発光装置及びその作製方法
KR100508296B1 (ko) * 2002-02-01 2005-08-17 세이코 엡슨 가부시키가이샤 회로 기판, 전기 광학 장치 및 전자 기기
TWI275319B (en) * 2002-02-05 2007-03-01 Semiconductor Energy Lab Manufacturing method and method of operating a manufacturing apparatus
TWI286044B (en) 2002-02-22 2007-08-21 Semiconductor Energy Lab Light-emitting device and method of manufacturing the same, and method of operating manufacturing apparatus
JP2004079512A (ja) * 2002-06-17 2004-03-11 Sanyo Electric Co Ltd 有機ｅｌパネルおよびその製造方法
US6642092B1 (en) * 2002-07-11 2003-11-04 Sharp Laboratories Of America, Inc. Thin-film transistors formed on a metal foil substrate
US7098060B2 (en) * 2002-09-06 2006-08-29 E.I. Du Pont De Nemours And Company Methods for producing full-color organic electroluminescent devices
TWI237546B (en) * 2003-01-30 2005-08-01 Osram Opto Semiconductors Gmbh Semiconductor-component sending and/or receiving electromagnetic radiation and housing-basebody for such a component
JP4574127B2 (ja) * 2003-03-26 2010-11-04 株式会社半導体エネルギー研究所 素子基板及び発光装置
KR20050026133A (ko) * 2003-09-09 2005-03-15 엘지.필립스 엘시디 주식회사 액정표시소자 제조방법 및 그 제조장치
US20050100657A1 (en) * 2003-11-10 2005-05-12 Macpherson Charles D. Organic material with a region including a guest material and organic electronic devices incorporating the same
US7374977B2 (en) * 2003-12-17 2008-05-20 Semiconductor Energy Laboratory Co., Ltd. Droplet discharge device, and method for forming pattern, and method for manufacturing display device
JP4082400B2 (ja) * 2004-02-19 2008-04-30 セイコーエプソン株式会社 電気光学装置の製造方法、電気光学装置および電子機器
US7067841B2 (en) * 2004-04-22 2006-06-27 E. I. Du Pont De Nemours And Company Organic electronic devices
WO2005117071A2 (de) * 2004-05-31 2005-12-08 Osram Opto Semiconductors Gmbh Optoelektronisches halbleiterbauelement und gehäuse-grundkörper für ein derartiges bauelement
JP4353153B2 (ja) 2004-11-18 2009-10-28 セイコーエプソン株式会社 表示装置とその製造方法、及び電子機器
US7268006B2 (en) 2004-12-30 2007-09-11 E.I. Du Pont De Nemours And Company Electronic device including a guest material within a layer and a process for forming the same
US20060145598A1 (en) * 2004-12-30 2006-07-06 Macpherson Charles D Electronic devices and process for forming the same
US7469638B2 (en) * 2004-12-30 2008-12-30 E.I. Du Pont De Nemours And Company Electronic devices and processes for forming the same
US20060228466A1 (en) * 2004-12-30 2006-10-12 Gang Yu Solution dispense and patterning process and apparatus
US7584701B2 (en) * 2004-12-30 2009-09-08 E.I. Du Pont De Nemours And Company Processes for printing layers for electronic devices and printing apparatuses for performing the processes
US20060146079A1 (en) * 2004-12-30 2006-07-06 Macpherson Charles D Process and apparatus for forming an electronic device
KR20070015260A (ko) 2005-07-30 2007-02-02 삼성전자주식회사 선형나노선재의 제조방법 및 이에 의한 선형나노선재그리고 선형나노선재를 이용한 박막트랜지스터 기판
US20070096640A1 (en) * 2005-08-19 2007-05-03 Gang Yu Methods for producing full color organic electroluminescent devices
KR20070073457A (ko) * 2006-01-05 2007-07-10 삼성에스디아이 주식회사 유기 전계 발광소자용 도너 필름의 제조 방법 및 이를이용한 유기 전계 발광소자의 제조 방법
US20080166566A1 (en) * 2006-12-29 2008-07-10 Shiva Prakash Process for forming an organic light-emitting diode and devices made by the process
DE102007021904A1 (de) * 2007-02-28 2008-09-04 Osram Opto Semiconductors Gmbh Optoelektronische Vorrichtung mit Gehäusekörper
TWI412125B (zh) * 2007-07-17 2013-10-11 Creator Technology Bv 電子元件及電子元件之製法
KR101629637B1 (ko) * 2008-05-29 2016-06-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 성막방법 및 발광장치의 제조방법
JP5368014B2 (ja) * 2008-06-24 2013-12-18 共同印刷株式会社 フレキシブル有機ｅｌディスプレイの製造方法
JP5368013B2 (ja) * 2008-06-24 2013-12-18 共同印刷株式会社 フレキシブル有機ｅｌディスプレイの製造方法
JP5448030B2 (ja) * 2008-11-19 2014-03-19 新日鐵住金株式会社 超音波探傷方法及び装置
DE102010014613A1 (de) * 2010-04-09 2011-10-13 Ledon Oled Lighting Gmbh & Co.Kg Flächige Leuchtkörper, Anordnung von flächigen Leuchtkörpern und Verfahren zum Herstellen flächiger Leuchtkörper
JP5852810B2 (ja) 2010-08-26 2016-02-03 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP6077280B2 (ja) * 2011-11-29 2017-02-08 株式会社半導体エネルギー研究所 表示装置及び電子機器
JP6124577B2 (ja) 2012-12-12 2017-05-10 株式会社半導体エネルギー研究所 発光装置およびその作製方法
DE102018131023B4 (de) 2018-12-05 2025-12-04 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronische leuchtvorrichtung mit einem pwm-transistor und verfahren zum herstellen oder steuern einer optoelektronischen leuchtvorrichtung
CN110993814B (zh) 2019-11-15 2021-09-03 深圳市华星光电半导体显示技术有限公司 显示装置及其制备方法

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4067020A (en) 1976-09-20 1978-01-03 A. B. Dick Company Noninterrupt ink transfer system for ink jet printer
US4281332A (en) 1978-12-28 1981-07-28 Ricoh Company, Ltd. Deflection compensated ink ejection printing apparatus
JPS6290260A (ja) 1985-10-16 1987-04-24 Tdk Corp サ−マルヘツド用耐摩耗性保護膜
US4737803A (en) 1986-07-09 1988-04-12 Fuji Xerox Co., Ltd. Thermal electrostatic ink-jet recording apparatus
GB8909011D0 (en) 1989-04-20 1989-06-07 Friend Richard H Electroluminescent devices
US5334539A (en) * 1993-01-29 1994-08-02 Iowa State University Research Foundation, Inc. Fabrication of poly(p-phenyleneacetylene) light-emitting diodes
US5923962A (en) 1993-10-29 1999-07-13 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device
TW264575B (de) 1993-10-29 1995-12-01 Handotai Energy Kenkyusho Kk
JP3431033B2 (ja) 1993-10-29 2003-07-28 株式会社半導体エネルギー研究所 半導体作製方法
US5821003A (en) * 1994-03-16 1998-10-13 Sumitomo Electric Industries, Ltd. Organic electroluminescent device
JP3034438B2 (ja) 1994-03-31 2000-04-17 キヤノン株式会社 カラーフィルタの製造装置
JP2839134B2 (ja) 1994-05-20 1998-12-16 キヤノン株式会社 カラーフィルタの製造方法及び液晶表示装置の製造方法及び液晶表示装置を備えた装置の製造方法及びカラーフィルタの隣接する着色部間の混色の低減方法
DE69524429T2 (de) 1994-09-08 2002-05-23 Idemitsu Kosan Co. Ltd., Tokio/Tokyo Verfahren zur abdichtung eines organischen elektrolumineszenten elements und organisches elektrolumineszentes element
JP3254335B2 (ja) 1994-09-08 2002-02-04 出光興産株式会社 有機ｅｌ素子の封止方法および有機ｅｌ素子
US5985356A (en) 1994-10-18 1999-11-16 The Regents Of The University Of California Combinatorial synthesis of novel materials
US5684365A (en) 1994-12-14 1997-11-04 Eastman Kodak Company TFT-el display panel using organic electroluminescent media
JPH08203672A (ja) * 1995-01-27 1996-08-09 Fuji Electric Co Ltd 薄膜電場発光素子の製造方法および製造装置
JP3539821B2 (ja) 1995-03-27 2004-07-07 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3124722B2 (ja) 1995-07-31 2001-01-15 キヤノン株式会社 カラーフィルタの製造方法及び製造装置及びカラーフィルタの区画された領域間の混色の低減方法及びカラーフィルタの区画された領域へのインク付与位置の精度向上方法及びカラーフィルタの区画された領域の着色ムラ低減方法
JPH09148066A (ja) 1995-11-24 1997-06-06 Pioneer Electron Corp 有機ｅｌ素子
JP3736881B2 (ja) * 1996-01-25 2006-01-18 三星エスディアイ株式会社 有機薄膜ｅｌ素子
JP3036436B2 (ja) 1996-06-19 2000-04-24 セイコーエプソン株式会社 アクティブマトリックス型有機ｅｌ表示体の製造方法
US5817366A (en) 1996-07-29 1998-10-06 Tdk Corporation Method for manufacturing organic electroluminescent element and apparatus therefor
CN1882206A (zh) 1996-09-19 2006-12-20 精工爱普生株式会社 矩阵式显示元件及其制造方法
JP3899566B2 (ja) * 1996-11-25 2007-03-28 セイコーエプソン株式会社 有機ｅｌ表示装置の製造方法
CN1123040C (zh) 1996-12-17 2003-10-01 东丽株式会社 等离子显示器的制造方法和制造装置
JP3408090B2 (ja) 1996-12-18 2003-05-19 ステラケミファ株式会社 エッチング剤
US6013982A (en) 1996-12-23 2000-01-11 The Trustees Of Princeton University Multicolor display devices
KR100226548B1 (ko) 1996-12-24 1999-10-15 김영환 웨이퍼 습식 처리 장치
JP3463971B2 (ja) 1996-12-26 2003-11-05 出光興産株式会社 有機アクティブｅｌ発光装置
US6049167A (en) 1997-02-17 2000-04-11 Tdk Corporation Organic electroluminescent display device, and method and system for making the same
JP3544280B2 (ja) 1997-03-27 2004-07-21 株式会社半導体エネルギー研究所 半導体装置の作製方法
JPH1125852A (ja) 1997-05-09 1999-01-29 Canon Inc 電子源の製造方法、電子源、画像形成装置の製造方法、画像形成装置及び電子源基板の製造装置
US6220912B1 (en) 1997-05-09 2001-04-24 Canon Kabushiki Kaisha Method and apparatus for producing electron source using dispenser to produce electron emitting portions
US6175345B1 (en) 1997-06-02 2001-01-16 Canon Kabushiki Kaisha Electroluminescence device, electroluminescence apparatus, and production methods thereof
US5972419A (en) * 1997-06-13 1999-10-26 Hewlett-Packard Company Electroluminescent display and method for making the same
US6843937B1 (en) 1997-07-16 2005-01-18 Seiko Epson Corporation Composition for an organic EL element and method of manufacturing the organic EL element
JP3941169B2 (ja) * 1997-07-16 2007-07-04 セイコーエプソン株式会社 有機ｅｌ素子の製造方法
JP3911775B2 (ja) 1997-07-30 2007-05-09 セイコーエプソン株式会社 有機ｅｌ素子の製造方法
JPH1154272A (ja) * 1997-07-31 1999-02-26 Seiko Epson Corp 発光ディスプレイの製造方法
JP3580092B2 (ja) 1997-08-21 2004-10-20 セイコーエプソン株式会社 アクティブマトリクス型表示装置
WO1999021233A1 (en) 1997-10-17 1999-04-29 The Regents Of The University Of California Process for fabricating organic semiconductor devices using ink-jet printing technology and device and system employing same
US6134020A (en) 1997-11-17 2000-10-17 Canon Kabushiki Kaisha Serial printer with addressable print buffer
JP3543170B2 (ja) 1998-02-24 2004-07-14 カシオ計算機株式会社 電界発光素子及びその製造方法
GB9808806D0 (en) 1998-04-24 1998-06-24 Cambridge Display Tech Ltd Selective deposition of polymer films
US6394578B1 (en) 1998-09-02 2002-05-28 Canon Kabushiki Kaisha Production process of color filter, liquid crystal display device using the color filter produced by the production process, and ink-jet head
US6274887B1 (en) 1998-11-02 2001-08-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method therefor
JP4578609B2 (ja) 1999-03-19 2010-11-10 株式会社半導体エネルギー研究所 電気光学装置
TW512543B (en) * 1999-06-28 2002-12-01 Semiconductor Energy Lab Method of manufacturing an electro-optical device
TW468283B (en) 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
TW480722B (en) 1999-10-12 2002-03-21 Semiconductor Energy Lab Manufacturing method of electro-optical device
TW471011B (en) 1999-10-13 2002-01-01 Semiconductor Energy Lab Thin film forming apparatus
TW495808B (en) 2000-02-04 2002-07-21 Semiconductor Energy Lab Thin film formation apparatus and method of manufacturing self-light-emitting device using thin film formation apparatus

Also Published As

Publication number Publication date
EP1065724A3 (de) 2004-04-14
CN1197165C (zh) 2005-04-13
US20020197394A1 (en) 2002-12-26
KR100713028B1 (ko) 2007-05-02
KR100713019B1 (ko) 2007-05-02
KR20010029843A (ko) 2001-04-16
DE60034401T2 (de) 2007-08-16
US6440877B1 (en) 2002-08-27
KR20050069956A (ko) 2005-07-05
CN1279514A (zh) 2001-01-10
CN100539239C (zh) 2009-09-09
EP1065724B1 (de) 2007-04-18
US6872672B2 (en) 2005-03-29
EP1065724A2 (de) 2001-01-03
CN1652648A (zh) 2005-08-10
TW512543B (en) 2002-12-01

Similar Documents

Publication Publication Date Title
DE60036157D1 (de) Herstellungsverfahren einer elektrooptischen Vorrichtung
DE60034401D1 (de) Herstellungsverfahren einer elektrooptischen Vorrichtung
DE69836216D1 (de) Herstellungsverfahren einer elektrooptischen Vorrichtung
DE60027367D1 (de) Elektrooptische Vorrichtung
DE69924100D1 (de) Vorrichtung zum reversiblen einbringen einer endoprothese
ATE332514T1 (de) Verfahren zur hilfsweisen befestigung einer brille und gerät
DE69838410D1 (de) Herstellungsverfahren einer optischen Halbleitervorrichtung
DE50009173D1 (de) Vorrichtung mit mindestens einer mehrere einzel-lichtquellen umfassenden lichtquelle
DE50014725D1 (de) Optoelektronische Vorrichtung
DE60233840D1 (de) Elektrooptische Vorrichtung und zugehöriges Herstellungsverfahren
DE60020656D1 (de) Autofokusgerät und -verfahren
DE60118668D1 (de) Kommunikationsverfahren einer elektronischen Vorrichtung
DE69937217D1 (de) Vorrichtung mit einer Induktivität
DE60028319D1 (de) System und Verfahren zur Kommunikation mit einer integrierten Schaltung
DE60133865D1 (de) Verfahren zur Ansteuerung einer elektrooptischen Vorrichtung, elektrooptische Vorrichtung und elektronisches Gerät
DE69917978T2 (de) Vorrichtung und Verfahren zur Komplettierung einer unterirdischen Bohrung
DE60038360D1 (de) Gerd vorrichtung
DE60028912D1 (de) Verfahren zur Herstellung von Hableitervorrichtungen
DE60045463D1 (de) Verfahren zur Herstellung einer elektrolumineszenten Anzeigevorrichtung
DE60234088D1 (de) Verfahren zur recherche in einer elektronischer programmführung
DE69935437D1 (de) Visuelle vorrichtung
FI981731A0 (fi) Optoelektroninen komponentti ja valmistusmenetelmä
DE60044969D1 (de) Herstellungsverfahren einer integrierten schaltung
DE60035447D1 (de) Herstellungsverfahren einer Elektronenemittierenden Vorrichtung
DE69932219D1 (de) Abgeschlossene Vorrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition