DE60022458D1 - Halbleitergehäuse, halbleitervorrichtung, elektronikelement und herstellung eines halbleitergehäuses - Google Patents
Halbleitergehäuse, halbleitervorrichtung, elektronikelement und herstellung eines halbleitergehäusesInfo
- Publication number
- DE60022458D1 DE60022458D1 DE60022458T DE60022458T DE60022458D1 DE 60022458 D1 DE60022458 D1 DE 60022458D1 DE 60022458 T DE60022458 T DE 60022458T DE 60022458 T DE60022458 T DE 60022458T DE 60022458 D1 DE60022458 D1 DE 60022458D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor
- housing
- manufacture
- electronic element
- semiconductor housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H10W72/20—
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- H10W20/49—
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- H10W72/019—
-
- H10W74/01—
-
- H10W74/111—
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- H10W74/129—
-
- H10W70/05—
-
- H10W70/65—
-
- H10W70/656—
-
- H10W70/68—
-
- H10W72/242—
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- H10W72/244—
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- H10W72/251—
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- H10W72/29—
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- H10W72/922—
-
- H10W72/923—
-
- H10W72/9415—
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- H10W72/952—
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- H10W72/983—
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16900899 | 1999-06-15 | ||
| JP16900899 | 1999-06-15 | ||
| PCT/JP2000/003836 WO2000077844A1 (fr) | 1999-06-15 | 2000-06-13 | Boitier a semi-conducteur, dispositif semi-conducteur, dispositif electronique et procede de fabrication de boitier a semi-conducteur |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60022458D1 true DE60022458D1 (de) | 2005-10-13 |
| DE60022458T2 DE60022458T2 (de) | 2006-06-22 |
Family
ID=15878638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60022458T Expired - Lifetime DE60022458T2 (de) | 1999-06-15 | 2000-06-13 | Halbleitergehäuse, halbleitervorrichtung, elektronikelement und herstellung eines halbleitergehäuses |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US6835595B1 (de) |
| EP (1) | EP1107307B1 (de) |
| JP (1) | JP3651597B2 (de) |
| AU (1) | AU5109900A (de) |
| CA (1) | CA2340677C (de) |
| DE (1) | DE60022458T2 (de) |
| WO (1) | WO2000077844A1 (de) |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6936531B2 (en) | 1998-12-21 | 2005-08-30 | Megic Corporation | Process of fabricating a chip structure |
| US8021976B2 (en) * | 2002-10-15 | 2011-09-20 | Megica Corporation | Method of wire bonding over active area of a semiconductor circuit |
| CA2340677C (en) * | 1999-06-15 | 2005-07-05 | Fujikura Ltd. | Semiconductor package, semiconductor device, electronic device, and method for producing semiconductor package |
| US6518675B2 (en) * | 2000-12-29 | 2003-02-11 | Samsung Electronics Co., Ltd. | Wafer level package and method for manufacturing the same |
| US7759803B2 (en) * | 2001-07-25 | 2010-07-20 | Rohm Co., Ltd. | Semiconductor device and method of manufacturing the same |
| JP2003045907A (ja) * | 2001-07-27 | 2003-02-14 | Tdk Corp | 電子部品の製造方法と製造装置 |
| JP2003045877A (ja) * | 2001-08-01 | 2003-02-14 | Sharp Corp | 半導体装置およびその製造方法 |
| US7932603B2 (en) | 2001-12-13 | 2011-04-26 | Megica Corporation | Chip structure and process for forming the same |
| JP2003248309A (ja) * | 2001-12-19 | 2003-09-05 | Hitachi Chemical Dupont Microsystems Ltd | 感光性樹脂組成物、これを用いたパターン製造法及び電子部品 |
| US7265045B2 (en) | 2002-10-24 | 2007-09-04 | Megica Corporation | Method for fabricating thermal compliant semiconductor chip wiring structure for chip scale packaging |
| CN1739014B (zh) | 2003-01-30 | 2010-05-05 | 株式会社藤仓 | 半导体压力传感器及其制造方法 |
| JP2004241696A (ja) * | 2003-02-07 | 2004-08-26 | Seiko Epson Corp | 半導体装置及びその製造方法、回路基板並びに電子機器 |
| TW200507218A (en) * | 2003-03-31 | 2005-02-16 | North Corp | Layout circuit substrate, manufacturing method of layout circuit substrate, and circuit module |
| JP4360873B2 (ja) * | 2003-09-18 | 2009-11-11 | ミナミ株式会社 | ウエハレベルcspの製造方法 |
| US7294929B2 (en) * | 2003-12-30 | 2007-11-13 | Texas Instruments Incorporated | Solder ball pad structure |
| JP3851320B2 (ja) | 2004-03-25 | 2006-11-29 | Tdk株式会社 | 回路装置及びその製造方法 |
| US7259468B2 (en) * | 2004-04-30 | 2007-08-21 | Advanced Chip Engineering Technology Inc. | Structure of package |
| SG119329A1 (en) | 2004-07-29 | 2006-02-28 | Fujikura Ltd | Semiconductor device and method for manufacturing the same |
| US7714448B2 (en) | 2004-11-16 | 2010-05-11 | Rohm Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
| JP4777644B2 (ja) * | 2004-12-24 | 2011-09-21 | Okiセミコンダクタ株式会社 | 半導体装置およびその製造方法 |
| JP2006196728A (ja) * | 2005-01-14 | 2006-07-27 | Seiko Epson Corp | 電子部品、電気光学装置、及び電子機器 |
| JP4843229B2 (ja) * | 2005-02-23 | 2011-12-21 | 株式会社東芝 | 半導体装置の製造方法 |
| JP2006287094A (ja) * | 2005-04-04 | 2006-10-19 | Seiko Epson Corp | 半導体装置及びその製造方法 |
| US7294923B2 (en) * | 2005-05-04 | 2007-11-13 | Texas Instruments Incorporated | Metallization scheme including a low modulus structure |
| JP4061506B2 (ja) * | 2005-06-21 | 2008-03-19 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| JP4145902B2 (ja) * | 2005-07-19 | 2008-09-03 | セイコーエプソン株式会社 | 半導体装置及びその製造方法 |
| JP4235835B2 (ja) * | 2005-08-08 | 2009-03-11 | セイコーエプソン株式会社 | 半導体装置 |
| TWI311367B (en) * | 2006-07-17 | 2009-06-21 | Chipmos Technologies Inc | Chip structure |
| CN100559575C (zh) * | 2006-07-27 | 2009-11-11 | 南茂科技股份有限公司 | 晶片结构 |
| JP4726744B2 (ja) * | 2006-08-29 | 2011-07-20 | Okiセミコンダクタ株式会社 | 半導体装置およびその製造方法 |
| US7582966B2 (en) | 2006-09-06 | 2009-09-01 | Megica Corporation | Semiconductor chip and method for fabricating the same |
| US7813730B2 (en) * | 2006-10-17 | 2010-10-12 | Mavenir Systems, Inc. | Providing mobile core services independent of a mobile device |
| US7928582B2 (en) * | 2007-03-09 | 2011-04-19 | Micron Technology, Inc. | Microelectronic workpieces and methods for manufacturing microelectronic devices using such workpieces |
| JP4486103B2 (ja) | 2007-03-19 | 2010-06-23 | Okiセミコンダクタ株式会社 | 加速度センサ、及び加速度センサの製造方法 |
| JP4121543B1 (ja) | 2007-06-18 | 2008-07-23 | 新光電気工業株式会社 | 電子装置 |
| JP4536757B2 (ja) * | 2007-08-02 | 2010-09-01 | 株式会社フジクラ | 半導体パッケージおよび半導体パッケージの製造方法 |
| US8058726B1 (en) | 2008-05-07 | 2011-11-15 | Amkor Technology, Inc. | Semiconductor device having redistribution layer |
| GB2464549B (en) * | 2008-10-22 | 2013-03-27 | Cambridge Silicon Radio Ltd | Improved wafer level chip scale packaging |
| US8362612B1 (en) | 2010-03-19 | 2013-01-29 | Amkor Technology, Inc. | Semiconductor device and manufacturing method thereof |
| JP5503590B2 (ja) * | 2011-04-28 | 2014-05-28 | ラピスセミコンダクタ株式会社 | 半導体装置 |
| US8373282B2 (en) * | 2011-06-16 | 2013-02-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer level chip scale package with reduced stress on solder balls |
| KR20130044050A (ko) * | 2011-10-21 | 2013-05-02 | 에스케이하이닉스 주식회사 | 반도체 패키지 및 적층 반도체 패키지 |
| US9099396B2 (en) * | 2011-11-08 | 2015-08-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Post-passivation interconnect structure and method of forming the same |
| US8552557B1 (en) | 2011-12-15 | 2013-10-08 | Amkor Technology, Inc. | Electronic component package fabrication method and structure |
| US8664090B1 (en) | 2012-04-16 | 2014-03-04 | Amkor Technology, Inc. | Electronic component package fabrication method |
| CN104246990A (zh) * | 2012-04-26 | 2014-12-24 | 东丽株式会社 | 具有凹凸结构的晶体衬底的制造方法 |
| KR101965256B1 (ko) * | 2012-10-17 | 2019-04-04 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
| NL2010077C2 (en) * | 2013-01-02 | 2014-07-03 | Univ Delft Tech | Through-polymer via (tpv) and method to manufacture such a via. |
| US9245862B1 (en) | 2013-02-12 | 2016-01-26 | Amkor Technology, Inc. | Electronic component package fabrication method and structure |
| US9257511B2 (en) * | 2013-03-26 | 2016-02-09 | Infineon Technologies Ag | Silicon carbide device and a method for forming a silicon carbide device |
| KR20150144174A (ko) * | 2014-06-16 | 2015-12-24 | 삼성전자주식회사 | 반도체 패키지 |
| TWI662657B (zh) * | 2015-04-07 | 2019-06-11 | 聯華電子股份有限公司 | 半導體元件的堆疊結構 |
| KR20170040842A (ko) * | 2015-10-05 | 2017-04-14 | 삼성전자주식회사 | 반도체 칩, 이의 제조방법, 및 이를 포함하는 반도체 패키지 |
| US10103114B2 (en) * | 2016-09-21 | 2018-10-16 | Nanya Technology Corporation | Semiconductor structure and manufacturing method thereof |
| US20180138115A1 (en) * | 2016-11-11 | 2018-05-17 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure and method for manufacturing the same |
| KR101897653B1 (ko) * | 2017-03-06 | 2018-09-12 | 엘비세미콘 주식회사 | 컴플라이언트 범프의 제조방법 |
| KR102127828B1 (ko) | 2018-08-10 | 2020-06-29 | 삼성전자주식회사 | 반도체 패키지 |
| KR102551909B1 (ko) * | 2018-10-16 | 2023-07-04 | 삼성전자주식회사 | 반도체 패키지 및 그 제조 방법 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01209746A (ja) * | 1988-02-17 | 1989-08-23 | Nec Corp | 半導体装置 |
| JPH05206301A (ja) * | 1991-11-19 | 1993-08-13 | Nec Corp | 金属の埋め込み構造およびその製造方法 |
| JP3353508B2 (ja) | 1994-12-20 | 2002-12-03 | ソニー株式会社 | プリント配線板とこれを用いた電子装置 |
| EP1335422B1 (de) * | 1995-03-24 | 2013-01-16 | Shinko Electric Industries Co., Ltd. | Herstellungsverfahren für Halbleitervorrichtung mit Chipabmessungen |
| JPH09107048A (ja) * | 1995-03-30 | 1997-04-22 | Mitsubishi Electric Corp | 半導体パッケージ |
| US5874782A (en) * | 1995-08-24 | 1999-02-23 | International Business Machines Corporation | Wafer with elevated contact structures |
| US6211572B1 (en) | 1995-10-31 | 2001-04-03 | Tessera, Inc. | Semiconductor chip package with fan-in leads |
| US6284563B1 (en) | 1995-10-31 | 2001-09-04 | Tessera, Inc. | Method of making compliant microelectronic assemblies |
| US5851911A (en) * | 1996-03-07 | 1998-12-22 | Micron Technology, Inc. | Mask repattern process |
| JPH10135270A (ja) * | 1996-10-31 | 1998-05-22 | Casio Comput Co Ltd | 半導体装置及びその製造方法 |
| JP3346263B2 (ja) * | 1997-04-11 | 2002-11-18 | イビデン株式会社 | プリント配線板及びその製造方法 |
| JPH118250A (ja) * | 1997-06-17 | 1999-01-12 | Seiko Epson Corp | 半導体集積回路装置およびその製造方法 |
| JP3618212B2 (ja) * | 1998-01-08 | 2005-02-09 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
| JP3520764B2 (ja) * | 1998-04-22 | 2004-04-19 | 松下電器産業株式会社 | 半導体装置およびその製造方法 |
| JP3477375B2 (ja) * | 1998-08-05 | 2003-12-10 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
| JP3116926B2 (ja) * | 1998-11-16 | 2000-12-11 | 日本電気株式会社 | パッケージ構造並びに半導体装置、パッケージ製造方法及び半導体装置製造方法 |
| JP2000174078A (ja) * | 1998-12-08 | 2000-06-23 | Advantest Corp | プローブカード及びその製造方法 |
| US6426176B1 (en) * | 1999-01-06 | 2002-07-30 | Intel Corporation | Method of forming a protective conductive structure on an integrated circuit package interconnection |
| US6440836B1 (en) * | 1999-03-16 | 2002-08-27 | Industrial Technology Research Institute | Method for forming solder bumps on flip chips and devices formed |
| US6387734B1 (en) * | 1999-06-11 | 2002-05-14 | Fujikura Ltd. | Semiconductor package, semiconductor device, electronic device and production method for semiconductor package |
| CA2340677C (en) * | 1999-06-15 | 2005-07-05 | Fujikura Ltd. | Semiconductor package, semiconductor device, electronic device, and method for producing semiconductor package |
| KR20010105769A (ko) * | 2000-05-18 | 2001-11-29 | 윤종용 | 웨이퍼 레벨 칩 스케일 패키지와 그 제조 방법 |
| US6622907B2 (en) * | 2002-02-19 | 2003-09-23 | International Business Machines Corporation | Sacrificial seed layer process for forming C4 solder bumps |
-
2000
- 2000-06-13 CA CA002340677A patent/CA2340677C/en not_active Expired - Fee Related
- 2000-06-13 AU AU51099/00A patent/AU5109900A/en not_active Abandoned
- 2000-06-13 EP EP00935668A patent/EP1107307B1/de not_active Expired - Lifetime
- 2000-06-13 US US09/744,976 patent/US6835595B1/en not_active Expired - Fee Related
- 2000-06-13 WO PCT/JP2000/003836 patent/WO2000077844A1/ja not_active Ceased
- 2000-06-13 DE DE60022458T patent/DE60022458T2/de not_active Expired - Lifetime
- 2000-06-13 JP JP2001503223A patent/JP3651597B2/ja not_active Expired - Fee Related
-
2003
- 2003-05-21 US US10/442,298 patent/US7023088B2/en not_active Expired - Fee Related
-
2004
- 2004-09-27 US US10/949,386 patent/US7157363B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1107307A8 (de) | 2001-11-21 |
| US7157363B2 (en) | 2007-01-02 |
| US6835595B1 (en) | 2004-12-28 |
| US20050037539A1 (en) | 2005-02-17 |
| EP1107307B1 (de) | 2005-09-07 |
| EP1107307A1 (de) | 2001-06-13 |
| JP3651597B2 (ja) | 2005-05-25 |
| US20030207494A1 (en) | 2003-11-06 |
| WO2000077844A1 (fr) | 2000-12-21 |
| CA2340677C (en) | 2005-07-05 |
| US7023088B2 (en) | 2006-04-04 |
| DE60022458T2 (de) | 2006-06-22 |
| CA2340677A1 (en) | 2000-12-21 |
| AU5109900A (en) | 2001-01-02 |
| EP1107307A4 (de) | 2001-12-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |