DE19716495C1 - Elektrolyt für die elektrolytische Abscheidung von Aluminium und dessen Verwendung - Google Patents
Elektrolyt für die elektrolytische Abscheidung von Aluminium und dessen VerwendungInfo
- Publication number
- DE19716495C1 DE19716495C1 DE19716495A DE19716495A DE19716495C1 DE 19716495 C1 DE19716495 C1 DE 19716495C1 DE 19716495 A DE19716495 A DE 19716495A DE 19716495 A DE19716495 A DE 19716495A DE 19716495 C1 DE19716495 C1 DE 19716495C1
- Authority
- DE
- Germany
- Prior art keywords
- aluminum
- electrolyte
- electrolyte according
- aromatic
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 42
- 239000003792 electrolyte Substances 0.000 title claims abstract description 41
- 230000008021 deposition Effects 0.000 title claims abstract description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000000203 mixture Substances 0.000 claims abstract description 14
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims abstract description 8
- 239000002904 solvent Substances 0.000 claims abstract description 8
- 229910052700 potassium Inorganic materials 0.000 claims abstract description 7
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 5
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims abstract description 3
- 229910052792 caesium Inorganic materials 0.000 claims abstract description 3
- 229910052701 rubidium Inorganic materials 0.000 claims abstract description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 30
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 claims description 6
- -1 aromatic carbon hydrogen Chemical class 0.000 claims description 6
- 239000003112 inhibitor Substances 0.000 claims description 4
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 claims description 3
- 125000002524 organometallic group Chemical group 0.000 claims description 3
- 125000003118 aryl group Chemical group 0.000 claims description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 2
- 125000001931 aliphatic group Chemical group 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 239000004411 aluminium Substances 0.000 abstract 2
- 101100058670 Aeromonas hydrophila subsp. hydrophila (strain ATCC 7966 / DSM 30187 / BCRC 13018 / CCUG 14551 / JCM 1027 / KCTC 2358 / NCIMB 9240 / NCTC 8049) bsr gene Proteins 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 11
- 239000010410 layer Substances 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 8
- 239000011698 potassium fluoride Substances 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- CNWZYDSEVLFSMS-UHFFFAOYSA-N tripropylalumane Chemical compound CCC[Al](CCC)CCC CNWZYDSEVLFSMS-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000005269 aluminizing Methods 0.000 description 4
- 239000008151 electrolyte solution Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011591 potassium Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- 241001085205 Prenanthella exigua Species 0.000 description 3
- 238000007792 addition Methods 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical class [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- 241001676573 Minium Species 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005246 galvanizing Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BZLVMXJERCGZMT-UHFFFAOYSA-N Methyl tert-butyl ether Chemical compound COC(C)(C)C BZLVMXJERCGZMT-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000009918 complex formation Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910001512 metal fluoride Inorganic materials 0.000 description 1
- CWEHKOAQFGHCFQ-UHFFFAOYSA-N methylalumane Chemical class [AlH2]C CWEHKOAQFGHCFQ-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 235000003270 potassium fluoride Nutrition 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- GGFBICGBDXVAGX-UHFFFAOYSA-N propylaluminum Chemical compound [Al].[CH2]CC GGFBICGBDXVAGX-UHFFFAOYSA-N 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 239000011877 solvent mixture Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical group C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/42—Electroplating: Baths therefor from solutions of light metals
- C25D3/44—Aluminium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electrolytic Production Of Metals (AREA)
Description
R = eine C3-Alkylgruppe oder ein Gemisch einer C3 und C1-C2-Alkylgruppe ist,
n = 0,1 bis 1 ist,
in einem aromatischen oder aliphatischen Kohlenwasserstoff als Lösungsmittel.
Claims (8)
MF.2 Al(C3H7)3.n AlR3 (I),
worin M = K, Rb, Cs,
R = eine C3-Alkylgruppe oder ein Gemisch einer C3 und C1-C2-Alkylgruppe ist,
n = 0,1 bis 1 ist,
in einem aromatischen oder aliphatischen Kohlenwasser stoff als Lösungsmittel.
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19716495A DE19716495C1 (de) | 1997-04-19 | 1997-04-19 | Elektrolyt für die elektrolytische Abscheidung von Aluminium und dessen Verwendung |
| CA002287511A CA2287511A1 (en) | 1997-04-19 | 1998-04-15 | Electrolytic high-speed deposition of aluminium on continuous products |
| AT98924119T ATE209264T1 (de) | 1997-04-19 | 1998-04-15 | Elektrolyt für die elektrolytische hochgeschwindigkeitsabscheidung von aluminium auf endlosprodukten |
| US09/403,394 US6207036B1 (en) | 1997-04-19 | 1998-04-15 | Electrolytic high-speed deposition of aluminum on continuous products |
| EP98924119A EP0975823B1 (de) | 1997-04-19 | 1998-04-15 | Elektrolyt für die elektrolytische hochgeschwindigkeitsabscheidung von aluminium auf endlosprodukten |
| DE59802731T DE59802731D1 (de) | 1997-04-19 | 1998-04-15 | Elektrolyt für die elektrolytische hochgeschwindigkeitsabscheidung von aluminium auf endlosprodukten |
| AU76435/98A AU7643598A (en) | 1997-04-19 | 1998-04-15 | Electrolytic high-speed deposition of aluminium on continuous products |
| JP54495898A JP3605772B2 (ja) | 1997-04-19 | 1998-04-15 | 連続製品への高速アルミニウム電着用電解液 |
| PCT/EP1998/002197 WO1998048082A1 (de) | 1997-04-19 | 1998-04-15 | Elektrolyt für die elektrolytische hochgeschwindigkeitsabscheidung von aluminium auf endlosprodukten |
| ZA983273A ZA983273B (en) | 1997-04-19 | 1998-04-20 | An electrolyte for the electrolytic high-speed deposition of aluminum on continuous products |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19716495A DE19716495C1 (de) | 1997-04-19 | 1997-04-19 | Elektrolyt für die elektrolytische Abscheidung von Aluminium und dessen Verwendung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE19716495C1 true DE19716495C1 (de) | 1998-05-20 |
Family
ID=7827073
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19716495A Expired - Lifetime DE19716495C1 (de) | 1997-04-19 | 1997-04-19 | Elektrolyt für die elektrolytische Abscheidung von Aluminium und dessen Verwendung |
| DE59802731T Expired - Lifetime DE59802731D1 (de) | 1997-04-19 | 1998-04-15 | Elektrolyt für die elektrolytische hochgeschwindigkeitsabscheidung von aluminium auf endlosprodukten |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE59802731T Expired - Lifetime DE59802731D1 (de) | 1997-04-19 | 1998-04-15 | Elektrolyt für die elektrolytische hochgeschwindigkeitsabscheidung von aluminium auf endlosprodukten |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6207036B1 (de) |
| EP (1) | EP0975823B1 (de) |
| JP (1) | JP3605772B2 (de) |
| AT (1) | ATE209264T1 (de) |
| AU (1) | AU7643598A (de) |
| CA (1) | CA2287511A1 (de) |
| DE (2) | DE19716495C1 (de) |
| WO (1) | WO1998048082A1 (de) |
| ZA (1) | ZA983273B (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7250102B2 (en) * | 2002-04-30 | 2007-07-31 | Alumiplate Incorporated | Aluminium electroplating formulations |
| WO2002088434A1 (en) * | 2001-04-30 | 2002-11-07 | Alumiplate Incorporated | Aluminium electroplating formulations |
| US8128750B2 (en) | 2007-03-29 | 2012-03-06 | Lam Research Corporation | Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components |
| US20080257744A1 (en) * | 2007-04-19 | 2008-10-23 | Infineon Technologies Ag | Method of making an integrated circuit including electrodeposition of aluminium |
| DE102008048020A1 (de) | 2008-09-19 | 2010-03-25 | Schaeffler Kg | Gleitlager |
| US8795504B2 (en) | 2009-08-27 | 2014-08-05 | University Of Southern California | Electrodeposition of platinum/iridium (Pt/Ir) on Pt microelectrodes with improved charge injection properties |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4417954A (en) * | 1982-01-25 | 1983-11-29 | Siemens Aktiengesellschaft | Electrolyte for the electrodeposition of aluminum |
| EP0402761A1 (de) * | 1989-06-10 | 1990-12-19 | Studiengesellschaft Kohle mbH | Organoaluminium-Elektrolyte und Verfahren zur elektrolytischen Absetzung von Aluminium |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5041194A (en) * | 1989-05-18 | 1991-08-20 | Mitsubishi Petrochemical Co., Ltd. | Aluminum electroplating method |
| DE3919068A1 (de) * | 1989-06-10 | 1990-12-13 | Studiengesellschaft Kohle Mbh | Aluminiumorganische elektrolyte zur elektrolytischen abscheidung von hochreinem aluminium |
-
1997
- 1997-04-19 DE DE19716495A patent/DE19716495C1/de not_active Expired - Lifetime
-
1998
- 1998-04-15 US US09/403,394 patent/US6207036B1/en not_active Expired - Fee Related
- 1998-04-15 AU AU76435/98A patent/AU7643598A/en not_active Abandoned
- 1998-04-15 WO PCT/EP1998/002197 patent/WO1998048082A1/de not_active Ceased
- 1998-04-15 EP EP98924119A patent/EP0975823B1/de not_active Expired - Lifetime
- 1998-04-15 CA CA002287511A patent/CA2287511A1/en not_active Abandoned
- 1998-04-15 DE DE59802731T patent/DE59802731D1/de not_active Expired - Lifetime
- 1998-04-15 JP JP54495898A patent/JP3605772B2/ja not_active Expired - Fee Related
- 1998-04-15 AT AT98924119T patent/ATE209264T1/de not_active IP Right Cessation
- 1998-04-20 ZA ZA983273A patent/ZA983273B/xx unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4417954A (en) * | 1982-01-25 | 1983-11-29 | Siemens Aktiengesellschaft | Electrolyte for the electrodeposition of aluminum |
| EP0084816B1 (de) * | 1982-01-25 | 1986-06-04 | Siemens Aktiengesellschaft | Elektrolyt zur galvanischen Abscheidung von Aluminium |
| EP0402761A1 (de) * | 1989-06-10 | 1990-12-19 | Studiengesellschaft Kohle mbH | Organoaluminium-Elektrolyte und Verfahren zur elektrolytischen Absetzung von Aluminium |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1998048082A1 (de) | 1998-10-29 |
| ATE209264T1 (de) | 2001-12-15 |
| EP0975823B1 (de) | 2001-11-21 |
| ZA983273B (en) | 1998-10-27 |
| DE59802731D1 (de) | 2002-02-21 |
| AU7643598A (en) | 1998-11-13 |
| JP2001521582A (ja) | 2001-11-06 |
| CA2287511A1 (en) | 1998-10-29 |
| JP3605772B2 (ja) | 2004-12-22 |
| US6207036B1 (en) | 2001-03-27 |
| EP0975823A1 (de) | 2000-02-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8100 | Publication of patent without earlier publication of application | ||
| D1 | Grant (no unexamined application published) patent law 81 | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: ALUMINAL OBERFLAECHENTECHNIK GMBH, 53842 TROISDORF |
|
| 8364 | No opposition during term of opposition | ||
| 8381 | Inventor (new situation) |
Free format text: DE VRIES, HANS, HEERDE, NL HELLER, JOERG DR., 51766 ENGELSKIRCHEN, DE |
|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: ALUMINAL OBERFLAECHENTECHNIK GMBH & CO. KG, 56249 H |
|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: ALOTEC HOLDING GMBH & CO. KG, 35708 HAIGER, DE |
|
| R082 | Change of representative |
Representative=s name: BOEHMERT & BOEHMERT, 40597 DUESSELDORF, DE Representative=s name: BOEHMERT & BOEHMERT, 28209 BREMEN, DE Representative=s name: BOEHMERT & BOEHMERT, DE Representative=s name: BOEHMERT & BOEHMERT ANWALTSPARTNERSCHAFT MBB -, DE |
|
| R082 | Change of representative |
Representative=s name: BOEHMERT & BOEHMERT, 28209 BREMEN, DE Representative=s name: BOEHMERT & BOEHMERT, DE Representative=s name: BOEHMERT & BOEHMERT ANWALTSPARTNERSCHAFT MBB -, DE |
|
| R071 | Expiry of right |