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DD53506A1 - Insight device for vacuum systems - Google Patents

Insight device for vacuum systems

Info

Publication number
DD53506A1
DD53506A1 DD11432565A DD11432565A DD53506A1 DD 53506 A1 DD53506 A1 DD 53506A1 DD 11432565 A DD11432565 A DD 11432565A DD 11432565 A DD11432565 A DD 11432565A DD 53506 A1 DD53506 A1 DD 53506A1
Authority
DD
German Democratic Republic
Prior art keywords
vacuum systems
insight device
insight
vacuum
systems
Prior art date
Application number
DD11432565A
Other languages
German (de)
Inventor
Willy Roggenbuck
Horst Liebergeld
Rudolf Pochert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD11432565A priority Critical patent/DD53506A1/en
Publication of DD53506A1 publication Critical patent/DD53506A1/en

Links

DD11432565A 1965-11-24 1965-11-24 Insight device for vacuum systems DD53506A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD11432565A DD53506A1 (en) 1965-11-24 1965-11-24 Insight device for vacuum systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD11432565A DD53506A1 (en) 1965-11-24 1965-11-24 Insight device for vacuum systems

Publications (1)

Publication Number Publication Date
DD53506A1 true DD53506A1 (en) 1967-01-20

Family

ID=42072912

Family Applications (1)

Application Number Title Priority Date Filing Date
DD11432565A DD53506A1 (en) 1965-11-24 1965-11-24 Insight device for vacuum systems

Country Status (1)

Country Link
DD (1) DD53506A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008048586A1 (en) 2008-09-23 2010-04-01 Von Ardenne Anlagentechnik Gmbh Insight device for vacuum plant, comprises a disk movably arranged in a process chamber on interior side directly before a sight glass in an adjustable defined distance, where bristles of resilient materials are directed on the disk
DE102013211127A1 (en) * 2013-06-14 2014-12-18 Singulus Technologies Ag Detection of carriers for substrates in coating chambers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008048586A1 (en) 2008-09-23 2010-04-01 Von Ardenne Anlagentechnik Gmbh Insight device for vacuum plant, comprises a disk movably arranged in a process chamber on interior side directly before a sight glass in an adjustable defined distance, where bristles of resilient materials are directed on the disk
DE102013211127A1 (en) * 2013-06-14 2014-12-18 Singulus Technologies Ag Detection of carriers for substrates in coating chambers

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