CN201194222Y - Container with fool-proof device - Google Patents

Abstract

The utility model discloses a container with a foolproof device, which is composed of a first cover body and a second cover body; the container also includes a bottom plate, which is arranged on the second cover body and forms a space for accommodating objects with the second cover body; the second cover body includes at least one first foolproof device; the bottom plate includes at least one second foolproof device; when the second foolproof device and the first foolproof device are engaged with each other, the relative position of the bottom plate and the second cover body is fixed. The design of the foolproof device of the utility model is combined with the original structure of the container, which can ensure the correct placement of various parts in the container and avoid damage to the objects in the container during use.

Description

Containers with fool-proof devices

technical field

The utility model relates to a container, in particular to a fool-proof device contained therein for preventing wrong placement.

Background technique

The rapid development of modern semiconductor technology, in which optical lithography (Optical Lithography) plays an important role, as long as it is about the definition of graphics (pattern), it needs to rely on optical lithography. In the application of optical lithography technology to semiconductors, the designed circuit is made into a light-transmitting photo mask with a specific shape. Using the exposure principle, the light source is projected onto the silicon wafer (silicon wafer) through the mask to expose and display a specific pattern. Since any dust particles (such as particles, dust or organic matter) attached to the mask will cause the quality of projection imaging to deteriorate, the mask used to generate graphics must be kept absolutely clean. Clean room environment to avoid airborne particle contamination. However, the current clean room cannot achieve an absolutely dust-free state. Modern semiconductor manufacturing processes use anti-pollution reticle pods for storage and transportation of reticles to keep the reticles clean.

Existing photomask boxes are mostly made of polymer materials, which have the advantages of easy molding, low cost and the ability to form transparent bodies. This kind of polymer material with high insulation resistance is easy to generate static electricity due to friction or separation, especially the working environment in a clean room needs to maintain low humidity, so the photomask pod made of polymer material is very easy to generate and accumulate charges. The static electricity on the surface of the photomask is easy to attract the pollution particles in the air, what's more, it will cause electrostatic discharge (ESD) effect on the metal lines on the photomask. The instantaneous current generated by electrostatic discharge will cause spark or arc. When the spark and arc occur, the strong current is accompanied by high temperature, which leads to the oxidation and dissolution of the metal wire, thus changing the photomask. pattern.

At present, there are many solutions to electrostatic discharge. The first is to improve the working environment, maintain proper humidity in the air, wear clothes with a grounding effect, or use ion fans to eliminate static electricity in the environment. However, there are many unpredictable variables that change the working environment, and there is no way to completely solve the damage of static electricity to the photomask.

Another method is to change the material of the components of the pod. U.S. Patent No. US6,513,654 proposes to set up a photomask support with a grounding function. The charge on the cover is exported. In addition, US Pat. No. 6,247,599 proposes to add a conductive plate to the chassis, cover or handle of the pod to reduce the accumulation of charges. The method of adding conductive plates has been widely used. However, the positioning of the cover and the chassis mostly depends on screw locking. The friction during locking will generate particles and form a pollution source.

In view of the above deficiencies, the photomask pod provided by the present invention is an improvement on the prior art.

Utility model content

The main purpose of this utility model is to provide a container with a fool-proof device, wherein the design of the fool-proof device is combined with the original structure of the container, which can ensure the correct placement of various parts in the container and avoid damage to the container during use. object causing damage.

Another object of the present invention is to provide a container with a fool-proof device, wherein the design of the fool-proof device does not need to be locked by screws, which can avoid the generation of particles and reduce pollution sources.

Another object of the present invention is to provide a container with a fool-proof device, which can reduce the accumulation of charges and prevent damage to the photomask caused by static electricity.

Another object of the present utility model is to provide a container with a fool-proof device, which can add a charge shielding device without changing the structure design of the original container.

Based on the above purpose, the utility model firstly provides a container, which is composed of a first cover and a second cover. The container also includes a chassis, which is arranged on the second cover, and forms a space for accommodating objects with the second cover; the second cover includes at least one first fool-proof device; the chassis includes at least one second fool-proof device; When the second fool-proof device and the first fool-proof device engage with each other, the relative position of the chassis and the second cover fixed.

The utility model further provides a container with a fool-proof device , which is composed of a first cover and a second cover. The container also includes a cover and a chassis. The chassis includes at least one third fool-proof device, and the cover includes a fourth fool-proof device. When the third fool-proof device and the fourth fool-proof device are engaged with each other, the relative position of the chassis and the cover It is fixed and does not move, and the chassis and cover are combined to form a space that can accommodate objects.

The utility model further provides a container with a fool-proof device, which is composed of a first cover and a second cover to form an inner area, and the container also includes a cover, which is arranged on the second cover. The second cover cover includes at least one fifth fool-proof device, and the cover includes at least one sixth fool-proof device. When the sixth fool-proof device and the fifth fool-proof device correspond to each other, the cover is combined with the two covers into a space that can accommodate objects.

The beneficial effect of the utility model is that, besides being able to place each part of the container in the correct position, it is not necessary to use screws to fix it, thereby avoiding the generation of particles and reducing pollution sources. When the cover is made of conductive material, it can prevent static electricity from damaging the contents. This design can also be added to the current photomask box without any design changes.

Description of drawings

Fig. 1A is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 1B is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 1C is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 2 is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 3 is a perspective view of a container of a preferred embodiment of the utility model;

Fig. 4 is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 5A is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 5B is a perspective view of a container of a preferred embodiment of the utility model.

[Description of main component symbols]

100 mask boxes

102 First cover

104 second cover

1041 frame

1042 door body

106 inner area

110 Chassis

112a First Foolproof Device

112b First Foolproof Device

112c First Foolproof Device

115 cover

202a Second fool-proof device

202b Second Foolproof Device

202c Second fool-proof device

300 containers

302 The first cover

304 Second cover

306 Internal area

310 chassis

312a The third fool-proof device

312b The third fool-proof device

312c Third Foolproof Device

315 cover

317a The fourth fool-proof device

317b The fourth fool-proof device

400 photomask boxes

402 The first cover

404 Second cover

4041 frame

4042 door body

406 internal area

412 The fifth fool-proof device

415 cover

417 The sixth fool-proof device

Detailed ways

The embodiment of the present invention is described by taking the container used in the semiconductor manufacturing process as an example, but any application that must be kept clean or sealed, such as medical treatment supplies, biochemical supplies or optical instruments, all belong to the application scope of the present invention. Some of the basic components and the mutual structural principles used in the utility model can be easily understood by those with common knowledge in this field, and will not be repeated here. The diagrams compared below are schematic representations of the structures related to the features of the present invention, and are not and need not be completely drawn according to the actual size.

的容器可用以保存或传送对象，如图1A与图1B所示，此容器100是一光罩盒，包含了一第一盖体102与一第二盖体104，第一盖体102具有一内部区域106，第二盖体104是用以隔绝内部区域106与外在环境。第二盖体104可以是一体成型，亦可以是由框体1041和门体1042所组成。第二盖体104面对内部区域106的表面可设置一底盘110。According to a preferred embodiment of the utility model, a foolproof device is provided

1A and 1B, the container 100 is a photomask box, including a first cover 102 and a second cover 104, the first cover 102 has a The inner area 106 and the second cover 104 are used to isolate the inner area 106 from the external environment. The second cover body 104 can be integrally formed, or can be composed of a frame body 1041 and a door body 1042 . A bottom plate 110 can be disposed on the surface of the second cover 104 facing the inner area 106 .

As shown in FIG. 2 , the second cover 104 includes three first fool-proof devices 112a, 112b, 112c. The chassis 110 includes three second foolproofs 202a, 202b, 202c relative to the first foolproofs 112a, 112b, 112c. When the second fool-proof devices 202a, 202b, 202c engage with the first fool-proof devices 112a, 112b, 112c, the relative positions of the chassis 110 and the second cover 104 are substantially fixed and will not move relative to each other. If the second fool-proof device 202a, 202b, 202c and the first fool-proof device 112a, 112b, 112c cannot engage with each other, the chassis 110 is not correctly set on the surface of the second cover 104, and the chassis 110 and the second cover 104 will slide relatively, causing the chassis to drop or shift.

In this embodiment, the first fool-proof means 112a, 112b, 112c are protrusions, and the second fool-proof means 202a, 202b, 202c are grooves opposite to the protrusions. It is also possible to change the first fool-proof device into a groove, and the second fool-proof device is a protrusion opposite to the groove. Since the three 112a, 112b, 112c and the three second fool-proof devices 202a, 202b, 202c must be engaged with each other to make the chassis 110 and the second cover 104 fit tightly, the chassis 110 must be arranged on the second cover 104 according to a specific direction. On the second cover body 104

As shown in FIG. 1C, a cover 115 can be added in the inner area of the container 100. When at least one of the cover 115 or the chassis 110 is made of a conductive material, it can produce a shielding effect on the object 10 and avoid unnecessary charge accumulation. Generated, can achieve the effect of electrostatic protection.

According to another preferred embodiment of the present utility model, a container is provided for storing or transferring objects. As shown in FIG. 3 and shown in FIG. The body 304, the first cover 302 has an inner area 306, and the second cover 304 is used to isolate the inner area 306 from the external environment. The second cover 304 can be integrally formed, or can be composed of a frame and a door. A bottom plate 310 (not shown) can be disposed on the surface of the second cover 304 facing the inner area 306 .

As shown in FIG. 3 and FIG. 4 , the chassis 310 includes third foolproof devices 312a, 312b. The edge of the cover 315 is the fourth fool-proof device 317a, 317b. When the cover 315 is placed on the chassis 310 in a specific direction, the third fool-proof device 312a, 312b and the fourth fool-proof device 317a, 317b are engaged with each other. , so that the relative positions of the chassis 310 and the cover 315 are substantially fixed and do not move, and the chassis 310 and the cover 315 are combined to form a space that can accommodate objects. When the third fool-proof device 312a, 312b is not engaged with the fourth fool-proof device 317a, 317b, the relative position of the chassis 310 and the cover 315 is not fixed.

In this embodiment, the third foolproof devices 312a, 312b are side walls of the chassis 310 protruding from the surface of the chassis 310 facing the inner area 306 . The fourth fool-proof device 317a, 317b is the edge of the cover 315, and the side wall 310 of the chassis corresponds to the edge of the cover 315, so that the fourth fool-proof device can lean against the third fool-proof device to form an object that can be placed Space. If the cover 315 is not arranged on the chassis 310 in a specific direction, the third fool-proofing devices 312a, 312b do not correspond to the fourth fool-proofing devices 317a, 317b, so that the cover 315 and the chassis 310 cannot be in close contact with each other. To achieve the purpose of safe delivery of objects.

According to yet another preferred embodiment of the present utility model, a container is provided for storing or transferring objects. As shown in FIG. 5A, the container 400 is a photomask box, which includes a first cover 402 and a second cover. 404 , the first cover 402 has an inner area 406 , and the second cover 404 is used to isolate the inner area 406 from the external environment. The second cover 404 is composed of a frame 4041 and a door 4042 , and the part of the frame 404 facing the inner area 406 includes at least one fifth foolproof device 412 . The container 400 further includes a cover 415, the cover 415 is arranged on the second cover 404, the cover 415 includes at least one sixth fool-proof device 417, when the sixth fool-proof device 417 and the fifth fool-proof device 412 mutually Correspondingly, the cover 415 and the second cover 404 are combined to form a space that can accommodate objects.

In this embodiment, as shown in FIG. 5B , a fifth fool-proof device 412 is provided on the frame body 4042 , which is a protruding object from the inner area. The sixth fool-proof device 417 is a bent portion of the cover 415 , and the gap formed by the sixth fool-proof device 417 can be provided by the fifth fool-proof device 412 . When the fifth fool-proof device 412 and the sixth fool-proof device 417 do not correspond to each other, the second cover 404 and the cover 415 cannot be combined into a space for receiving objects, and the objects cannot be safely stored or transferred.

Therefore, for the container with fool-proof device provided by the utility model, the design of the fool-proof device is combined with the original structure of the container, which can ensure the correct placement of various parts in the container and avoid damage to the objects in the container during use. damage; and no screw locking is required, which can avoid the generation of particles; it can also reduce the accumulation of charges and prevent static electricity from harming internal objects.

The above description is only a preferred embodiment of the present utility model, and is not intended to limit the application for patent rights of the present utility model; simultaneously, the above description should be clear and implementable for those who are familiar with the technical field, so others do not depart from it. Equivalent changes or modifications completed under the spirit disclosed by the utility model shall be included in the scope of the following patent applications.

Claims (20)

1. the container of a tool anti-misoperation device in order to preserve or transmission object, is characterized in that this container comprises:

One first lid has an interior zone;

One second lid, in order to isolated this interior zone and external environment, this second lid comprises at least one first anti-misoperation device; And

One chassis is arranged at the surface of this second lid in the face of this interior zone, and this chassis comprises at least one second anti-misoperation device;

When wherein this second anti-misoperation device engages mutually with specific direction with this first anti-misoperation device, the relative position almost fixed of this chassis and this second lid.

2. container as claimed in claim 1 is characterized in that, when this second anti-misoperation device did not engage with first anti-misoperation device, the relative position of this chassis and this cover cap was unfixing.

3. container as claimed in claim 1 is characterized in that, this first anti-misoperation device is at least one groove, and this second anti-misoperation device is at least one thrust of relative this groove.

4. container as claimed in claim 1 is characterized in that, this first anti-misoperation device is at least one thrust, and this second anti-misoperation device is at least one groove of relative this thrust.

5. container as claimed in claim 1 is characterized in that, this second lid comprises a framework and a body.

6. container as claimed in claim 1 is characterized in that, this container is that box for photomask or light shield transmit box.

7. container as claimed in claim 1 is characterized in that, also comprises a cover cap.

8. container as claimed in claim 1 is characterized in that, this chassis is a conductive material.

9. container as claimed in claim 8 is characterized in that, also comprises a cover cap, and this cover cap is conductive material and electrically communicates with this chassis.

10. a tool is prevented the container that slow-witted Installed puts, and in order to preserve or transmission object, it is characterized in that this container comprises:

One first lid has an interior zone;

One second lid is in order to isolated this interior zone and external environment;

One chassis is arranged at the surface of this second lid in the face of this interior zone, and this chassis comprises at least one the 3rd anti-misoperation device in the face of the surface of this interior zone; And

One cover cap is positioned on this chassis, and this cover cap comprises one the 4th anti-misoperation device,

When wherein the 3rd anti-misoperation device engaged mutually with the 4th anti-misoperation device with specific direction, the relative position of this chassis and this cover cap is fixing not to be moved, and this chassis and this cover cap are combined into a space that can bear object.

11. container as claimed in claim 10 is characterized in that, when the 3rd anti-misoperation device did not engage with the 4th anti-misoperation device, the relative position of this chassis and this cover cap was unfixing.

12. container as claimed in claim 10 is characterized in that, the 3rd anti-misoperation device is at least one abutment wall.

13. container as claimed in claim 12 is characterized in that, this abutment wall is to protrude in the surface of this chassis in the face of this interior zone.

14. container as claimed in claim 12 is characterized in that, this abutment wall is to be depressed in the surface of this chassis in the face of this interior zone.

15. container as claimed in claim 12 is characterized in that, the 4th anti-misoperation device is against this abutment wall.

16. the container of a tool anti-misoperation device in order to preserve or transmission object, is characterized in that this container comprises:

One first lid has an interior zone;

One second lid, in order to isolated this interior zone and external environment, this second lid comprises at least one the 5th anti-misoperation device in the face of the part of this interior zone; And,

One cover cap is arranged on this second lid, and this cover cap comprises at least one the 6th anti-misoperation device;

Wherein the 6th anti-misoperation device and the 5th anti-misoperation device be with specific direction in correspondence with each other the time, and this cover cap and this second lid are combined into a space that can bear object.

17. container as claimed in claim 16 is characterized in that, in correspondence with each other the time, this second lid and this cover cap can not be combined into the space that this can bear object for the 5th anti-misoperation device and the 6th anti-misoperation device.

18. container as claimed in claim 16 is characterized in that, in this second lid a locked instrument is set, in order to this first lid and this second lid of locking.

19. container as claimed in claim 18 is characterized in that, the 5th anti-misoperation device is the part of this locked instrument.

20. container as claimed in claim 16 is characterized in that, the 6th anti-misoperation device is the bend of this cover cap.

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