CN201090993Y - Container and cover thereof - Google Patents

Abstract

The utility model relates to a container, which is formed by combining an upper cover body and a lower cover body; the container also comprises a cover cap which is arranged on the lower cover body and forms a space capable of accommodating objects with the lower cover body; and a plurality of positioning pieces are arranged around the cover cap, and when the lower cover body is closed with the upper cover body, the positioning pieces are clamped between the lower cover body and the upper cover body, so that the cover cap is positioned.

Description

Container and its cover

technical field

The utility model relates to a container, in particular to a cover contained therein and its positioning method.

Background technique

The rapid development of modern semiconductor technology, in which optical lithography plays an important role, as long as it is about the definition of patterns, it needs to rely on lithography.

In the application of photolithography technology to semiconductors, the designed circuit is made into a light-transmitting photo mask with a specific shape. Using the principle of exposure, the light source is projected onto the silicon wafer (silicon wafer) through a mask to expose and display a specific pattern. Since any dust particles (such as particles, dust or organic matter) attached to the mask will cause the quality of projection imaging to deteriorate, the mask used to generate graphics must be kept absolutely clean. Clean room environment to avoid airborne particle contamination. However, the current clean room cannot achieve an absolutely dust-free state. Modern semiconductor manufacturing processes use anti-pollution reticle pods for photomask storage and transportation to keep the photomask clean.

Existing photomask boxes are mostly made of polymer materials, which have the advantages of easy molding, low cost and the ability to form transparent bodies. This kind of polymer material with high insulation resistance is easy to generate static electricity due to friction or separation, especially the working environment in a clean room needs to maintain low humidity, so the photomask pod made of polymer material is very easy to generate and accumulate charges. The static electricity on the surface of the photomask is easy to attract the pollution particles in the air, what's more, it will cause electrostatic discharge (ESD) effect on the metal lines on the photomask. The instantaneous current generated by electrostatic discharge will cause spark or arc. When the spark and arc occur, the strong current is accompanied by high temperature, which leads to the oxidation and dissolution of the metal wire, thus changing the photomask. pattern.

At present, there are many solutions to electrostatic discharge. The first is to improve the working environment, maintain proper humidity in the air, wear clothes with a grounding effect, or use ion fans to eliminate static electricity in the environment. However, there are many unpredictable variables that change the working environment, and there is no way to completely solve the damage of static electricity to the photomask.

Another method is to change the material of the components of the photomask box. US Patent No. US6,513,654 proposes to set up a photomask support with a grounding function. The charge on the cover is exported. In addition, US Pat. No. 6,247,599 proposes to add a conductive plate to the chassis, cover or handle of the pod to reduce the accumulation of charges. The method of adding conductive plates has been widely used. However, the positioning of the cover and the chassis mostly depends on screw locking. The friction during locking will generate particles and form a pollution source.

In view of the above deficiencies, the photomask pod provided by the present invention is an improvement on the prior art.

Utility model content

The main purpose of the utility model is to provide a container and its cover, wherein the positioning of the cover does not need to be locked by screws, which can avoid the generation of particles and reduce pollution sources.

Another object of the present utility model is to provide a container and its cover, which can reduce the accumulation of charges and prevent damage to the photomask caused by static electricity.

Another object of the present invention is to provide a cover for a container, which can add a cover without changing the structural design of the original container.

Based on the above-mentioned purpose, the utility model firstly provides a container, which is composed of an upper cover and a lower cover; the container also includes a cover, which is arranged on the lower cover and forms a A space that can accommodate objects; and a plurality of positioning parts are arranged around the cover. When the lower cover and the upper cover are tightly sealed, the positioning parts will be sandwiched between the lower cover and the upper cover, so that the cover is positioned .

The utility model further provides a container, which is composed of an upper cover and a lower cover. The lower cover is provided with a side wall facing the surface of the upper cover; The cover and the lower cover form a space for accommodating objects; and a plurality of positioning pieces are arranged around the cover, and the positioning pieces are used to abut against the side wall to position the cover.

The utility model further provides a container, which is composed of an upper cover and a lower cover to form an inner area; the container also includes a chassis, the chassis is arranged on the surface of the lower cover facing the inner area, and the surface of the chassis At least one side wall is provided on the surface of the inner area; the container further includes a cover, which is arranged on the chassis, and forms a space for accommodating objects with the chassis; a plurality of positioning pieces are arranged around the cover, and the positioning pieces are used to resist Lean against the side wall to position the cover.

The utility model further provides a cover, which is arranged in a container. The container is composed of an upper cover and a lower cover. The surface of the lower cover facing the upper cover is provided with at least one wall; the cover It includes a plurality of positioning parts, which are arranged around the cover and are used to abut against the side wall of the lower cover to position the cover.

The utility model further provides a cover, which is arranged in the container. The container is composed of an upper cover and a lower cover. The lower cover faces the surface of the upper cover with a chassis, and the chassis faces the upper cover. A side wall is arranged on the surface of the chassis; the cover includes a plurality of positioning parts, which are arranged around the cover and are used to abut against the side wall on the chassis to position the cover.

The beneficial effect of the utility model is that, through the design provided by the utility model, the cover can be effectively positioned, and there is no need to use screws to fix it, avoiding the generation of particles and reducing pollution sources. When the cover is made of conductive material, it can prevent static electricity from damaging the contents. This design can also be added to the current photomask box without changing the design.

Description of drawings

Fig. 1A is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 1B is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 2 is a three-dimensional view of the positioning member structure of a preferred embodiment of the utility model;

Fig. 3A is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 3B is a sectional view of a container of a preferred embodiment of the utility model;

Fig. 4A is a three-dimensional view of the positioning member structure of a preferred embodiment of the utility model;

Fig. 4B is a three-dimensional view of the positioning member structure of a preferred embodiment of the utility model.

[Description of main component symbols]

10 mask

100 mask boxes

102 upper cover

104 lower cover

106 inner area

110 cover

112 Chassis

114 side wall

120 positioning parts

122 positioning parts

300 mask box

302 upper cover

304 lower cover

306 Internal area

308 frame

310 cover

312 chassis

314 side wall

320 positioning parts

322 positioning parts

Detailed ways

The embodiment of the present invention is described by taking a semiconductor container as an example, but any application that must be kept clean or sealed, such as medical treatment supplies, biochemical supplies or optical instruments, all belong to the scope of application of the present invention. Some basic components and mutual structural principles used in the utility model are easily understood by those with common knowledge in this field, and will not be repeated here. The diagrams compared below are schematic representations of the structures related to the features of the present invention, and are not and need not be completely drawn according to the actual size.

According to a preferred embodiment of the present invention, a container is provided for storing or transferring objects, such as a semiconductor pod or a pod, as shown in FIG. 1A and FIG. 1B , the container is a pod 100 , including an upper cover 102 and a lower cover 104, the upper cover 102 and the lower cover 104 are combined into an inner area 106, the container 100 also includes a cover 110, the cover 110 is arranged on the lower cover 104, The cover 110 and the lower cover 104 form a space for accommodating the photomask 10 .

A plurality of positioning pieces 120 are arranged around the cover 110, and the connection methods between the positioning pieces 120 and the cover 110 can be riveted, welded or screwed; the positioning pieces 120 are L-shaped, and are usually arranged at the four corners of the cover 110; When the upper cover 102 and the lower cover 104 are tightly sealed, one end of the L-shaped positioning member 120 is sandwiched between the lower cover 104 and the upper cover 102, so that the cover 110 is positioned, and there is no need to move the container during transportation. It may happen that the cover is displaced.

A chassis 112 can be additionally added on the surface of the lower cover 104 facing the inner region 106; when at least one of the cover 110 and the chassis 112 is made of conductive material such as metal, it will produce a shielding effect and achieve the effect of electrostatic protection.

According to another preferred embodiment of the present invention, as shown in FIG. 2 , at least one wall 114 is disposed on the surface of the lower cover 104 facing the inner area 106 . The edge of the cover 110 is provided with a positioning piece 122 . The positioning piece 122 is L-shaped, but has a bent portion at a corner of the L-shape. The bent portion is used to abut against the side wall 114 to position the cover 110 . When the plurality of positioning members 122 correctly abut against the side wall 114 , the horizontal movement range of the cover 110 is limited, and the cover will not be toppled and shifted during the transportation of the container.

Alternatively, side walls may be provided on the surface of the chassis facing the interior area. The bent portion at the corner of the L-shaped positioning member is used to abut against the side wall to position the cover.

According to another preferred embodiment of the present utility model, a container is provided for storing or transferring objects. As shown in FIG. 3A and FIG. The body has a first opening; a frame 308 is disposed on the edge of the first opening; and a lower cover 304 is engaged with the frame 308 . The upper cover 302, the frame body 308 and the lower cover 304 are combined to form an inner area 306. The container 300 also includes a cover 310, the cover 310 is provided with the inner area 306, and the cover 310 and the lower cover 304 form a can A space for accommodating the photomask 10 .

A plurality of positioning parts 320 are arranged around the cover 310, and the connection mode between the positioning parts 320 and the cover 310 can be riveted, welded or screwed; the positioning parts 320 are L-shaped, and are usually arranged at the four corners of the cover 310; When the upper cover body 302 is engaged with the frame body 308, one end of the L-shaped positioning member 120 is clamped between the frame body 308 and the upper cover body 302, so that the cover 310 is positioned, and there will be no cover during the transportation of the container. Cover displacement occurs.

A chassis 312 can be added on the surface of the lower cover 304 facing the inner area 306; when at least one of the cover 310 and the chassis 312 is made of conductive material such as metal, it will produce a shielding effect and achieve the effect of electrostatic protection.

According to another preferred embodiment of the present invention, as shown in FIG. 4A and FIG. 4B , at least one side wall 314 is disposed on the surface of the frame body 308 facing the inner area 306 . A positioning piece 322 is disposed on the edge of the cover 310 . The positioning piece 322 is L-shaped, but has a bent portion at a corner of the L-shape. The bent portion is used to abut against the side wall 314 to position the cover 310 . When the plurality of positioning members 322 correctly abut against the side wall 314 , the horizontal movement range of the cover 310 is limited, and the cover will not be toppled and shifted during the transportation of the container.

In addition, the side wall can also be arranged on the surface of the lower cover facing the inner area. The bent portion at the corner of the L-shaped positioning member is used to abut against the side wall to position the cover.

The above description is only a preferred embodiment of the present utility model, and is not intended to limit the application for patent rights of the present utility model; simultaneously, the above description should be clear and implementable for those who are familiar with the technical field, so others do not depart from it. Equivalent changes or modifications completed under the spirit disclosed by the utility model shall be included in the scope of the following patent applications.

Claims (18)

1. A container for storing or transferring objects, characterized in that the container comprises: a cover body; The lower cover is combined with the upper cover to form an inner area; a cover, located in the inner area, is provided with the lower cover, and forms a space for accommodating the object with the lower cover; and A plurality of positioning parts are arranged around the cover, and when the lower cover and the upper cover are tightly sealed, the positioning parts are sandwiched between the lower cover and the upper cover, so that the cover position. 2 . The container according to claim 1 , further comprising a bottom plate disposed on a surface of the lower cover facing the inner area. 3 . 3. The container according to claim 2, wherein the chassis is made of conductive material. 4. The container according to claim 1, wherein the positioning member is L-shaped. 5. The container according to claim 4, wherein one side of the L-shaped positioning member is connected to the cover, and the other side is sandwiched between the upper cover and the lower cover. 6. The container according to claim 1, wherein the cover is made of conductive material. 7. The container of claim 1, wherein the container is a reticle pod or a reticle transfer pod. 8. A container for storing or transferring objects, characterized in that the container comprises: a cover body; The lower cover is combined with the upper cover to form an inner area, and at least one side wall is provided on the surface of the lower cover facing the inner area; a cover, disposed on the lower cover, and forming a space for accommodating the object with the lower cover; and A plurality of positioning pieces are arranged around the cover, and are used for abutting against the side wall to position the cover. 9 . The container according to claim 8 , wherein the positioning member is L-shaped, and a corner of the L-shaped positioning member has a bent portion, and the bent portion abuts against the side wall. 10. The container as claimed in claim 8, wherein the positioning member has a bent portion, and the bent portion abuts against the side wall. 11. A container for storing or transferring objects, characterized in that the container comprises: a cover body; The lower cover is combined with the upper cover to form an inner area; A chassis is arranged on the surface of the lower cover facing the inner area, and the surface of the chassis facing the inner area is provided with at least one side wall, a cover, disposed on the chassis, and forms a space with the chassis for accommodating the object; and A plurality of positioning pieces are arranged around the cover, and are used for abutting against the side wall to position the cover. 12. A cover, used to be arranged in a container, the container includes an upper cover, a lower cover, the combination of the upper cover and the lower cover forms an inner space; it is characterized in that the cover includes: A plurality of locating parts are arranged around the cover, and when the lower cover and the upper cover are in close contact, the locating parts are sandwiched between the lower cover and the upper cover, so that the cover position. 13. A cover, used to be arranged in a container, the container includes an upper cover, a lower cover, the surface of the lower cover facing the upper cover is provided with at least one side wall; it is characterized in that the cover Cover includes: A plurality of positioning pieces are arranged around the cover, and are used for abutting against the side wall to position the cover. 14. A cover, used to be arranged in a container, the container includes an upper cover; a lower cover; and a chassis, the chassis is arranged on the surface of the lower cover facing the upper cover, the chassis At least one side wall is provided on the surface facing the upper cover body; the feature is that the cover cover includes: a plurality of positioning parts, which are arranged around the cover cover, and are used to lean against the side wall to position the cover cover. 15. A container for storing or transferring objects, characterized in that the container comprises: an upper cover with a first opening; a frame body, arranged on the edge of the first opening; The lower cover is engaged with the frame, wherein the lower cover, the frame and the upper cover are combined to form an inner area; a cover, disposed in the inner area, and the lower cover to form a space for accommodating the object; and A plurality of positioning pieces are arranged around the cover, and when the upper cover is engaged with the cover frame, the positioning pieces are sandwiched between the upper cover and the frame, so that the cover position. 16. A container for storing or transferring objects, characterized in that the container comprises: an upper cover with a first opening; A frame body is arranged on the edge of the first opening, and the surface of the frame body facing the upper cover is provided with at least one side wall; The lower cover is engaged with the frame, wherein the lower cover, the frame and the upper cover are combined to form an inner area; a cover, disposed in the inner area, and the lower cover to form a space for accommodating the object; and A plurality of positioning pieces are arranged around the cover, and are used for abutting against the side wall to position the cover. 17. A cover for being arranged in a container, the container is composed of an upper cover, a frame, and a lower cover; it is characterized in that the cover includes: A plurality of locating pieces are arranged around the cover, and when the upper cover is engaged with the frame, the locating pieces are interposed between the upper cover and the frame to position the cover. 18. A cover, used to be arranged in a container, the container includes an upper cover; a frame; and a lower cover, the surface of the frame facing the upper cover is provided with at least one side wall; Characteristic in that the cover includes: A plurality of positioning pieces are arranged around the cover, and are used for abutting against the side wall to position the cover.

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