CN208127167U - Spring buckle type box opening equipment - Google Patents

Abstract

The utility model relates to a bullet knot formula box body equipment of opening, be used for opening a box body, above-mentioned box body includes and establishes with the relative pivot of side, and a first cap and a second cap that can close relatively, it is again first, two caps are different in that the pin joint side utilizes at least bullet knot portion selectivity to detain, each this bullet knot portion is including being formed with respectively in first, the bullet cramp and the relative knot reason of two caps, it is including a lower part fixed establishment, an upper portion lifts lid device and pulls the knot device, in order to utilize lower part fixed establishment to fix the first cap of box body, and it snatchs the second cap of box body to lift the lid device in upper portion, and utilize this to pull the bullet cramp and the knot reason that the device released box body bullet knot portion, make upper portion lift the lid device and can lift the second cap, let knot formula box body also can carry out automation and open the box, therefore can improve the practicality by a wide margin.

Description

Spring button box body opening equipment

technical field

The utility model relates to a box-opening technology of a box body, in particular to a spring-type box-opening device, which can effectively perform the actions of opening the box and lifting the cover for the snap-type box body, so that the equipment can perform automatic operations , to improve production efficiency.

Background technique

In recent years, the wire diameter of integrated circuits in the semiconductor manufacturing process has become smaller and smaller, and has developed to below 10 nanometers. Therefore, any pollutants in the manufacturing process may directly affect the relative manufacturing process or product yield. However, in the entire semiconductor manufacturing process, no matter in the process of manufacturing, transfer, storage or transportation, there are many harmful substances such as particles, water vapor, gas, and chemical solvent molecules. film or the surface of various manufacturing process equipment and devices, which will reduce the yield rate of chips, and increase the time for cleaning and improvement, resulting in reduced production, and relatively higher operating costs. Therefore, in order to solve this problem, in the semiconductor manufacturing process, the automated material handling system "Automated Material Handling System, AMHS" and the standard mechanical interface "Standard Mechanical Interface, SMIF" equipment for isolating incoming and outgoing materials are used to carry out chip/mask The maintenance and transportation during the non-use period can not only replace the traditional manual handling, reduce the construction and maintenance costs of clean room equipment, but also improve the cleanliness of the mask and achieve ultra-high production yield. Therefore, in recent years, AMHS And SMIF has been listed as a standard equipment specification for international semiconductor factories.

In the semiconductor manufacturing process, the mask (Mask) used to form the integrated circuit on the surface of the chip (Wafer) is one of the indispensable components in the lithography manufacturing process. The mask includes a substrate, a frame and A protective film "Pellicle". When there are pollutants on the surface of the substrate or protective film, the image of the pollutant may be imaged on the chip, and it may also cause distortion of the pattern during lithography exposure, which will affect the production efficiency of the manufacturing process and increase cost.

According to the above technical concept, except when the mask is used for exposure, the chip or mask must be placed in a high-cleanliness carrier during the transportation process or storage of the mask, such as a mask transfer box for automation" Reticle SMIFPod, RSP", mask transfer box or mask placement box for shipping or storage. Among them, the mask placement box mainly used for general storage and transportation is a snap-on box body. As shown in the first figure, the box body (100) is mainly composed of a first shell cover (110) and a second shell The cover (120) is composed of the first and second shell covers (120) which are pivoted relative to any side, so that the first and second shell covers (120) can be selectively closed or opened along the pivot axis, At least one elastic buckle (150) is formed on the side of the first and second case covers (120) different from the pivotal side, and each of the snap parts (150) includes a spring formed on the first case cover (110). The buckle (151) and the buckle edge (152) formed at the opposite position of the second case cover (120) allow the first and second case covers (110, 120) to use the snap buckle (151) of the snap part (150) ) to reset the buckle buckle edge (152) to cover (as shown in part A of Figure 1), or let the first and second shell covers (110, 120) use the snap button (151) of the snap button (150) Open the release buckle edge (152) to open relatively;

Since the structure of the snap-on box (100) of the above-mentioned mask placement box is relatively simple, there are no effective fixing and clamping positions on the first and second shell covers (110, 120), and the snap-on parts (150) of the snap-on parts (150) The release of the buckle (151) needs to be moved by fingers, so it is usually performed manually, which is difficult to be used in automatic equipment, such as mask inspection equipment, mask cleaning equipment or mask storage equipment, etc.;

In other words, the existing snap-on box (100) is difficult to be automatically opened, which affects the degree of automation of the equipment using the snap-on box (100), which in turn causes the pass rate and efficiency of the semiconductor manufacturing process to be unable to be controlled. Effective improvement, so it is an important subject in the industry to develop a device that can automatically open the box of the snap-on box.

Therefore, the utility model is based on the in-depth discussion of the above-mentioned automation needs, and according to the people of the utility model who have been engaged in related development for many years, actively seeks a solution. After continuous efforts in research and development, a snap button has finally been successfully created. The box-type box opening device and the spring-type box-body opening method can effectively solve the inconvenience and trouble caused by the inability to automatically open the box of the existing snap-type box body.

Utility model content

Aiming at the defects in the prior art, the purpose of this utility model is to provide a box that can be opened in an automated manner, so as to improve the automation of the equipment, reduce the mistakes of manual operations, and improve the efficiency of the production process. A snap-on box opening device and a snap-on box opening method using the device.

In order to achieve the above object, the utility model adopts the following technical means:

A snap-type box opening device for opening a box, the box includes a first shell cover and a second shell cover that are relatively pivoted on the sides and can be closed relatively, and the first 1. The sides of the second case cover that are different from the pivot joint are selectively buckled by at least one snap part, and each snap part includes a snap piece and an opposite buckle edge respectively formed on the first and second case covers. Type box opening equipment includes:

A lower fixing mechanism, which has a positioning mechanism, for fixing the first case cover below which the above-mentioned box body is located;

An upper flipping device, which is located above the lower fixing mechanism, the upper flipping device includes a frame and a grasping mechanism arranged on the frame, for grabbing and rotating to open the box located above the second shell cover;

A puller device is located in the lower fixing mechanism on the side of the second housing that is different from that of the upper flipping device. The puller device has at least one puller that can move relative to the spring part of the box body, so that The pulling mechanism can drive the snap piece of the snap part to selectively separate from the buckle edge of the corresponding buckle.

The spring-type box opening device, wherein: the positioning mechanism of the lower fixing mechanism is composed of a plurality of suction cup elements for sucking the lower surface of the first cover of the box by vacuum suction, and the The grasping mechanism of the upper flip-cover device is composed of a plurality of suction cup elements for sucking the upper surface of the second cover of the box body by vacuum suction.

The snap button type box opening device, wherein: the lower fixing mechanism also includes a side clamping mechanism, and the side clamping mechanism includes at least one driving element and clamping parts opposite to the two opposite sides of the box body. The driving element can drive the clamping member to synchronously press the lower first cover of the box relative to the side of the box body.

The snap-on type box opening device, wherein: the positioning mechanism of the lower fixing mechanism includes a plurality of first positioning members opposite to the edge or corner of the first cover, and the positioning mechanism also includes a plurality of relative to the other The second positioning piece on the edge or corner of the first shell cover of the standard box body, so that the box body with different specifications can quickly and accurately enter the fixed position when placed.

The spring-type box opening device, wherein: the frame of the upper flipping device is erected on a machine base through an installation, and a driving mechanism is used to drive the frame to perform the flipping action, and the lower fixing mechanism and The trigger device can be arranged on a substrate, and the substrate can be arranged on a feeding conveying device of a semiconductor device, so that the substrate can move between a first position and a second position of the base, and the above-mentioned The upper flipping device can be fixed at any one of the first and second positions of the machine base.

The snap-type box body opening device, wherein: the pull device also has a first driving element and a second driving element, and each of the pulling mechanisms is arranged on the second driving element, and the second driving element 1. The second drive element can be used to drive the displacement of the buckle piece corresponding to the relative buckle part of the box body of the pulling mechanism, and the pulling mechanism is a stretch piece, and the stretch piece has a downwardly bent pull portion, and the pull mechanism The part can be pressed down to drive the buckle piece to separate from the buckle edge.

The beneficial effects of the utility model are: through the specific realization of the aforementioned technical means, the snap-type box opening device of the utility model uses the lower fixing mechanism to fix the first shell cover of the box body, and the upper cover lifting device grasps Take the second shell cover of the box body, and use the pull button device to release the snap piece and the buckle edge of the box body snap part, so that the upper flip cover device can lift the second shell cover, so that the snap button type box body can also be opened. Carry out automatic opening of the box, and further, it can also be closed automatically, so as to improve the automation of the equipment and reduce the mistakes of manual operations. Improve its practicability, increase its added value, and improve its economic benefits.

Description of drawings

FIG. 1 is a schematic diagram of the appearance of a snap-on box applied to place a mask, where (A) is in a hooked state.

FIG. 2 is a schematic perspective view of the three-dimensional appearance of the spring box box opening device used to illustrate the relative relationship between the components of the present invention.

Fig. 3 is a partially enlarged appearance schematic diagram of the middle and lower fixing device and the puller device of the spring button type box opening device of the present invention.

Fig. 4 is a flow chart of the method for opening the box of the snap button type box of the present invention.

Fig. 5 is a schematic diagram of the fixing action of the lower part of the snap button box opening device of the present invention for opening the box.

FIG. 6 is a schematic diagram of the release action of the spring button part of the box opening device of the utility model for opening the box.

Fig. 7 is a schematic side view sectional view of the snap button type box opening device of the present invention, in which (A) is the state of driving the snap snap piece to release the buckle edge.

Fig. 8 is a schematic cross-sectional view of the snap button box opening device of the present invention for opening the box.

Fig. 9 is a schematic diagram of the action of flipping the upper part of the box opening device of the utility model to open the box.

Fig. 10 is a schematic diagram of the appearance of the snap button box opening device of the present invention used for box opening of another specification.

Explanation of reference numerals: 100-box body; 110-first shell cover; 120-second shell cover; 150-spring buckle; 151-spring buckle piece; 30-lower fixing device; 31-positioning mechanism; 32-suction cup element; 33-first positioning piece; 34-first detection element; 35-second positioning piece; 36-second detection element; 37-side clip Mechanism; 38-drive element; 39-clamping piece; 40-upper cover device; 41-frame; 42-installation frame; 43-drive mechanism; 45-grab mechanism; 46-suction cup element; Device; 51-first driving element; 52-second driving element; 55-pulling mechanism; 551-stretching piece;

Detailed ways

The utility model relates to a box-opening device for snap button type box body, which is used for selectively opening the box body (100) shown in Figure 1. A first shell cover (110) and a second shell cover (120) are closed, and the first and second shell covers (120) are selectively buckled by at least one elastic buckle part (150) from the hinged side , each of the snap parts (150) includes a snap piece (151) and a corresponding buckle edge (152) respectively formed on the first and second shell covers (110, 120). Figure 2 shows the snap box Body box opening equipment, which has a base (10), a base (20), a lower fixing device (30), an upper lifting device (40) and a puller device (50). In some embodiments, the spring box box opening device further includes a feeding conveying device (60) for moving the substrate (20), and the feeding conveying device (60) can be set in a semiconductor device, such as In the optical inspection equipment (Automatic Optical Inspection System, AOI), mask storage equipment or lithography equipment used to detect the contamination on the surface of the mask, the substrate (1) is directly taken out from the box body (100), and the substrate (1 ) such as contamination detection or storage conversion of masks;

Wherein the base body (20) is arranged on the base (10) for the above-mentioned lower fixing device (30) and the puller device (50) to be arranged. In some embodiments, the above-mentioned upper flipping device (40) can be arranged on the base body (20) at a position where the lower fixing device (30) is pivotally opened. In some embodiments, the substrate (20) can be arranged on the above-mentioned feeding conveying device (60), and the feeding conveying device (60) is arranged on the base (10). In some embodiments, the feeding conveying device (60) includes a driving mechanism (61) and a guide rail mechanism (62), and the above-mentioned base (20) is arranged at one end of the guide rail mechanism (62) for use of the driving mechanism ( 61) Drive, so that the base body (20) can be displaced along the moving direction X on the guide rail mechanism (62), so that the base body (20) can move between a first position and a second position of the machine base (10). And in some embodiments, the above-mentioned upper flipping device (40) can be fixed at any one of the first and second positions of the machine base (10), and the feeding conveying device (60) can drive the base (20) relatively The upper lifting mechanism (40) moves back and forth between the first and second positions;

Further cooperation is shown in Fig. 2 and Fig. 3, the lower fixing mechanism (30) is located on the base body (20), and the lower fixing device (30) has a positioning mechanism (31) and a side clamping mechanism (37) for Fix the first cover (110) of the box body (100) below. In some embodiments, the positioning mechanism (31) is composed of a plurality of suction cup elements (32) for use of vacuum suction. The lower surface of the first case cover (110) of the above-mentioned box body (100). And in some embodiments, the positioning mechanism (31) may include a plurality of first positioning members (33) (as shown in FIG. 5 ) opposite to the edges or corners of the first shell cover (110) for the box body ( 100) When placed, it can quickly and accurately enter the suction position of the suction cup element (32), and the positioning mechanism (31) further includes a first detection element (34) for detecting the corresponding first positioning member ( 33) Whether the standard box body (100) is in place correctly. Also in some embodiments, the positioning mechanism (31) can be used to place two or more types of boxes (100A) (as shown in Figure 10), and the positioning mechanism (31) further includes a plurality of The second positioning piece (35) relative to the edge or corner of the first shell cover (110A) of another standard box body (100A) can quickly and accurately enter the suction cup element (32) when the box body (100A) is placed The position of the suction catch, and the positioning mechanism (31) further includes a second detection element (36), which is used to detect whether the box body (100A) corresponding to the specification of the second positioning member (35) is in place ( As shown in Figure 10); the side clip mechanism (37) of this lower fixing device (30) corresponds to the opposite sides of the box body (100), and the side clip mechanism (37) includes at least one driving element (38) and With respect to the clamping pieces (39) on the two opposite sides of the box body (100), these driving elements (38) can drive the clamping pieces (39) to move relative to the side edges of the box body (100) along the Y displacement, so as to utilize the opposite clamping elements. The holder (39) simultaneously presses the opposite sides of the first shell cover (110) below the box body (100) (as shown in Figure 5);

Also in some embodiments, the upper flipping device (40) includes a frame body (41) and a gripping mechanism (45) for grabbing and flipping the second upper lid in the above-mentioned box body (100). The shell cover (120), the frame body (41) can be arranged on the above-mentioned machine base (10) by using the mounting brackets (42) on both sides, so that the upper lifting device (40) can be fixed relative to the lower part on the base body (20) The mechanism (30) pivots selectively. In some embodiments, the mounting brackets (42) can be set on the above-mentioned base (20) through the mounting brackets (42); and the upper cover device (40) is provided with a driving mechanism on the mounting brackets (42) (43), for utilizing the driving mechanism (43) to drive the frame body (41) to rotate along the moving direction θ, and the grasping mechanism (45) is arranged on the frame body (41), for grabbing the first box body (100) Two shell covers (120), and in some embodiments, the grasping mechanism (45) is made of a plurality of suction cup elements (46), for utilizing vacuum suction to suck the second shell of the above-mentioned box body (100) The upper surface of the cover (120), when the suction cup element (46) of the grasping mechanism (45) sucks the upper surface of the second shell cover (120) of the base body (20), the frame body (41) can be driven by the drive mechanism (43). ), and produce the action that allows the second shell cover (120) on the top to be lifted relative to the first shell cover (110) below;

The above-mentioned puller device (50) is located on the side of the base body (20) that is different from the tilting of the upper flip device (40), and the puller device (50) has a first driving element (51), a second A driving element (52) and at least one pulling mechanism (55), wherein each pulling mechanism (55) is arranged on the second driving element (52), and the first and second driving elements (52) can drive the The pulling mechanism (55) is displaced along the moving direction X, Z, so that each pulling mechanism (55) can correspond to the snap piece (151) of the relative snap part (150) of the above-mentioned box body (100) (as shown in Figure 7 shown), so that the above-mentioned snap piece (151) can be selectively separated from the buckle edge (152) corresponding to the buckle, so as to achieve the purpose of releasing the snap part (150) of the box body (100). In some embodiments, the pulling mechanism (55) can be a stretch piece (551), and the stretch piece (551) has a downwardly bent pull portion (552), when the pull mechanism (55) When the puller (552) of the extension piece (551) presses down on the above-mentioned spring buckle (150) buckle piece (151), the buckle piece (151) can be slightly pulled away from the buckle edge (152) to reach the release box body ( 100) the purpose of the snap part (150) between the first and second shell covers (110, 120) (as shown in part A of Figure 7);

According to this, a pop-up type box opening device capable of automatic box opening and flipping is formed.

FIG. 4 is a flow chart of a method for opening a snap-on box according to some embodiments. 5 , 6 , 7 , 8 , and 9 are schematic diagrams of the actions of the spring box opening device in the snap box opening method according to some embodiments. The spring button type box body opening device of the present utility model can be set in different semiconductor devices, such as mask inspection equipment, mask cleaning equipment or mask storage equipment, when there is a first, When the second case cover (110) takes out the mask stored inside for inspection, cleaning or storage. The process steps of the method for unpacking the snap-on box body include:

In step S101, place a closed box on a snap-type box opening device: place the above-mentioned box (100) on the lower fixing mechanism (30) of a snap-type box opening device , as shown in the fifth and sixth figures, according to some embodiments, the first positioning member (33) in the positioning mechanism (31) can be used to guide the box body (100) to align accurately, and through the first detection The element (34) detects whether the box body (100) is in place. In addition, as shown in the third and tenth figures, according to some embodiments, the second positioning member (35) in the positioning mechanism (31) can be used to guide the box bodies (100A) of different specifications to align accurately, and through The relative second detection element (36) detects whether the box body (100A) of this specification is in place;

In step S102, generate a positioning force to fix a first housing of the above-mentioned box body: the positioning mechanism (31) of the above-mentioned lower fixing mechanism (30) can generate a positioning force to make the first shell cover below the box body (100) (110) is fixed. And as shown in the seventh figure, according to some embodiments, the positioning mechanism (31) of the lower fixing mechanism (30) uses a plurality of suction cup elements (32) to suck the lower surface of the first shell cover (110). And according to some embodiments shown in Figure 8, the lower fixing mechanism (30) has a side clamping mechanism (37), which is used to clamp the box body ( 100) two opposite sides of the first shell cover (110) to provide its fixation;

In step S103, move an upper flipping device to a second casing of the above-mentioned box body, and generate a grasping force to fix the second casing: according to some embodiments, the above-mentioned snap-type box body opening device An upper flipping device (40) reaches above a second shell cover (120) of the box body (100) along the θ direction, and the grasping mechanism (45) of the above-mentioned upper flipping device (40) can generate a force to make the second Two shell covers (120) are fixed. And as shown in the seventh figure, according to some embodiments, the grasping mechanism (45) of the upper cover flip device (40) uses a plurality of suction cup elements (46) to hold the upper surface of the second shell cover (110); According to some embodiments, the lower fixing mechanism (30) of the above-mentioned snap-type box opening device is set on a feeding conveying device (60) through a base body (20), which first passes through the feeding conveying device (60) After displacing the lower fixing mechanism (30) to the bottom of the upper lifting device (40) along the moving direction X, the upper lifting device (40) is then allowed to grab the second cover ( 120);

In step S104, move a pull device to open the buckle part of the above-mentioned box body, so that the driving snap piece is separated from the buckle edge: the first and second shell covers (110, 120) of the above-mentioned box body (100) are respectively After the lower fixing mechanism (30) and the upper lifting device (40) are grasped and positioned, as shown in Fig. 5 and Fig. 6, a pull device (50) is moved to the snap part (150) of the above-mentioned box body (100). ) position, so that the extension piece (551) of the pulling mechanism (55) pulls the puller (552) to press the spring snap piece (151) of the above-mentioned spring snap part (150), so that the spring of the first case cover (110) The buckle (151) releases the buckle edge (152) of the second case cover (120) (as shown in part A of the seventh figure);

In step S105, drive the upper flipping device to tilt the second shell of the above-mentioned box body, for taking out the storage in the box body: when the snap button between the first and second shell covers (110, 120) of the box body (100) After the buckle sheet (151) of (150) releases the buckle edge (152), as shown in Figure 9, make the opening direction of the second shell cover (120) of the upper flipping device (40) relative to the box body (100) Rotate, because the first shell cover (110) of this box body (100) is firmly fixed by this lower fixing mechanism (30), and the upper flip cover device (40) grabs this second shell cover (120) firmly, Therefore, when the upper flip cover device (40) rotates, the second case cover (120) can be opened synchronously relative to the first case cover (110), which is convenient for the semiconductor device to be opened by the snap-on box body. Take out the stored object, such as a mask, from a storage space of the first case cover (110) of the box body (100).

In step S106, move the above-mentioned puller device to break away from the spring button part of the above-mentioned box body: the forehead pull mechanism (55) of the above-mentioned puller device (50) pulls open the first and second shell covers (110, 110, 120) behind the buckle part (150), the pulling mechanism (55) of the pull device (50) can be left from the above-mentioned buckle part (150) position, so as to avoid affecting the storage of the semiconductor device from the box body (100) The action of taking out the storage in the space.

After completing the unpacking of the first and second shell covers (110, 120) of the box body (100), and taking out the mask to complete the operation, the following process steps can be added as required; such as:

In step S107, a stored object is re-placed in the first casing of the above-mentioned box body: after the stored object such as a mask is completed, a mechanical arm of the semiconductor device is used to re-place the stored object in the box body (100) Inside the storage space above the first shell cover (110);

In step S108, drive the upper flipping device to cover the second casing of the above-mentioned box body on the first casing: make the upper flipping device (40) relatively cover the second casing cover (120) of the box body (100) Rotate in the combined direction, because the lower fixing mechanism (30) firmly fixes the first shell cover (110) of the box body (100), and the upper flipping device (40) firmly grabs the second shell cover (120) ), so when the upper flipping device (40) rotates in reverse, the second shell cover (120) can be closed relative to the first shell cover (110);

In step S109, the above-mentioned puller device is moved to press the second casing of the above-mentioned box body, so that the above-mentioned snap button is snapped: the second cover (120) of the above-mentioned box body (100) is closed on the first cover (110 ) after being installed, the snap piece (151) of the snap part (150) can be made to correspond to the buckle edge (152). Above the second case cover (120) of the box body (100), and after the extension sheet (551) of the pulling mechanism (55) presses the second case cover (120) downward, the first case cover (110) The buckle piece (151) hooks the buckle edge (152) of the second case cover (120) to protect the storage between the first and second case covers (110, 120) of the box body (100);

In step S110, take out the above-mentioned closed box body: when the first and second shell covers (110, 120) of the box body (100) are snapped by the snap button (150), the above-mentioned upper flipping device (40) The grabbing mechanism (45) can release the second shell cover (120) of the box body (100), and the upper flipping device (40) rotates upwards to separate from the second shell cover (120), while the lower fixing mechanism (30) The positioning mechanism (31) releases the first shell cover (110) of the box body (100) sequentially, so that the mechanical arm of the semiconductor equipment can take out the box body (100).

Through the above description, the utility model spring box box opening equipment uses the lower fixing mechanism (30) to fix the first shell cover (110) of the box body (100), and the upper cover lifting device (40) grabs The second shell cover (120) of the box body (100), and use the pull device (50) to release the spring button (150) of the box body (100), so that the upper cover device (40) can open the second shell The cover (120) allows the snap-on box body to be opened automatically, and further can be closed automatically, so as to improve the automation of the equipment, reduce manual work errors, and reduce manual work due to automatic operation pollution and ensure the cleanliness of the manufacturing process space, so it can greatly improve its practicability.

As shown in the figure, the utility model is a snap-type box opening device. In the drawings and specific embodiments of the utility model and its components, all about front and rear, left and right, top and bottom, and upper The references to the lower part, and horizontal and vertical are only used for convenience of description, and do not limit the present invention, nor limit its components to any position or spatial orientation. The dimensions specified in the accompanying drawings and the description can be changed according to the design and requirements of the specific embodiments of the utility model without departing from the patent scope of the utility model.

Claims (6)

1. A spring-type box body opening device, used to open a box body, the above-mentioned box body includes a first shell cover and a second shell cover that are relatively pivoted on the sides and can be closed relatively, and The sides of the first and second shells that are different from the pivot joint are selectively buckled by at least one snap button, and each of the snap buttons includes a snap piece and an opposite buckle edge respectively formed on the first and second shells. Snap-type box opening equipment includes: A lower fixing mechanism, which has a positioning mechanism, for fixing the first case cover below which the above-mentioned box body is located; An upper flipping device, which is located above the lower fixing mechanism, the upper flipping device includes a frame and a grasping mechanism arranged on the frame, for grabbing and rotating to open the box located above the second shell cover; A puller device, which is arranged in the lower fixing mechanism on a side different from that of the upper flipping device to lift the second casing, and the puller device has at least one pulling mechanism that can move relative to the spring part of the box body, so as to The pulling mechanism can drive the snap piece of the snap part to selectively separate from the buckle edge of the corresponding buckle. 2. The pop-up box opening device according to claim 1, characterized in that: The positioning mechanism of the lower fixing mechanism is composed of a plurality of suction cup elements, so as to use vacuum suction to suck the lower surface of the first shell cover of the box body, and the grasping mechanism of the upper flip cover device is composed of a plurality of suction cup elements It is formed to use the vacuum suction to suck the upper surface of the second cover of the box body. 3. The pop-up box opening device according to claim 1, characterized in that: The lower fixing mechanism also includes a side clamping mechanism, which includes at least one driving element and clamping parts opposite to the two opposite sides of the box body. Press the first shell cover below the box body. 4. The spring box opening device according to claim 1, characterized in that: The positioning mechanism of the lower fixing mechanism includes a plurality of first positioning members opposite to the edges or corners of the first cover, and the positioning mechanism also includes a plurality of second positioning members relative to the edges or corners of the first cover of another specification box body. Positioning parts, so that boxes of different specifications can quickly and accurately enter the fixed position when placed. 5. The spring box opening device according to claim 1, characterized in that: The frame body of the upper flipping device is installed on a machine base through an installation, and a driving mechanism is used to drive the frame body to perform the flipping action, while the lower fixing mechanism and the pull device can be arranged on a base body, and the base body It can be installed on the feeding conveying device of a semiconductor device, so that the base can move between a first position and a second position of the base, and the above-mentioned upper cover device can be fixed on the first and second positions of the base. any of the locations. 6. The spring box opening device according to claim 1, characterized in that: The trigger device also has a first driving element and a second driving element, and each of the pulling mechanisms is arranged on the second driving element, and the first and second driving elements can be used to drive the corresponding box of the pulling mechanism. The snap piece of the body relative to the snap part is displaced, and the pulling mechanism is an extension piece, and the extension piece has a downwardly bent pull portion, and the pull portion can be pressed down to drive the snap piece to separate from the buckle edge.