CN1783421A - Quasi molecular lamp device - Google Patents

Abstract

The invention provides an excimer lamp device, which simplifies the structure of the device by removing the light output window that divides the lampshade and the irradiated area, and can realize cost reduction, and prevents the power supply components arranged near the end of the lamp from being exposed to active oxygen to prevent Oxidation, and can reduce the occurrence of deterioration and breakage of the part. An excimer lamp device is provided with an excimer lamp that emits ultraviolet light through a discharge of a dielectric, and a lampshade that accommodates the excimer lamp; an opening for taking out radiated light from the lamp is formed on the lampshade, through which the lampshade The inner space communicates with the inner space of the treatment chamber for processing the object to be processed; it is characterized in that at least one end of the above-mentioned excimer lamp is connected with a power supply component to form a power supply junction; inside the lampshade, a partition is provided to form a power supply Part of the separation between the lamp end area of the junction and the interior space of the lampshade.

Description

excimer lamp device

technical field

The present invention relates to an excimer lamp device including an excimer lamp that emits ultraviolet light by discharge of a dielectric, and a lamp cover that accommodates the excimer lamp.

Background technique

For example, in an excimer lamp device equipped with an excimer lamp known from Patent Document 1, etc., ultraviolet light of 200 nm or less radiated from the excimer lamp is irradiated to the surface of the object to be treated, and the generated ozone and the transmitted ultraviolet light The synergistic effect of light decomposes organic matter splashed on the surface of the object to be treated for cleaning.

FIG. 8 shows a schematic configuration diagram of the excimer lamp device. An excimer lamp 91 is disposed inside a lampshade 90. An opening is provided on the lower surface of the lampshade 90, and a light output window M that is transparent to ultraviolet light is provided in a sealed manner. A treatment chamber 92 for processing the object W is formed at the lower part of the excimer lamp device, and the space between the inner space of the lampshade 90 and the inner space P of the treatment chamber is airtightly divided by the light output window M, and constitutes a radiation of the excimer lamp 91. Light is emitted through the light output window M. An unillustrated to-be-processed object conveyance mechanism is provided in the processing chamber 92, and the workpiece|work W, such as a glass substrate, is conveyed by this conveyance mechanism.

The ultraviolet light emitted from the excimer lamp 91 emits light having a wavelength of 172 nm when xenon gas is used as the discharge gas. Such short-wavelength ultraviolet light is efficiently taken out to the outside. Therefore, the light output window M needs to have high transmittance to ultraviolet rays below 200 nm, and synthetic quartz glass is generally used. In addition, in the lamp housing 90, in order to prevent the loss of ultraviolet light, an inert gas such as nitrogen is filled, and a low oxygen concentration is maintained.

In the above-mentioned excimer lamp device, along with the increase in the size of the glass substrate of the liquid crystal display device to be processed, there is a strong demand for an increase in the irradiation area that enables processing of a large area. Therefore, the light output window made of quartz glass for dividing the lampshade and the irradiated area also requires a large component, and a large amount of inert gas for filling the lampshade is required, resulting in high cost of the device and a decrease in production efficiency.

From such a viewpoint, a device is proposed in which an excimer lamp is disposed adjacent to an irradiated area without providing a light output window for cost reduction (see Patent Document 2).

Patent Document 1: Japanese Patent Application Laid-Open No. 11-138490

Patent Document 2: Japanese Patent Application Laid-Open No. 2004-113984

9 is an example of a device that simplifies the structure and realizes cost reduction without setting the light output window W that divides the lampshade and the irradiated area in the excimer lamp device shown in FIG. Sectional view of the section.

In this figure, an excimer lamp 91 is coaxially arranged with an outer tube 912 and an inner tube 913 having different diameters, and has a substantially cylindrical discharge vessel 911 with both ends of the tube closed, and is arranged on the outer peripheral surface of the outer tube 912. There is a mesh-like outer electrode 914 made of metal wires, and an inner electrode 915 made of a metal plate is arranged on the inner peripheral surface of the inner tube 913 . The inner electrode 915 is formed by combining two semi-cylindrical metal plates, and the power supply terminal is connected so as to be in contact with the inner electrode 915 , and is pulled out through the lead wire 93 . A power supply unit (not shown) is provided on the upper part of the lampshade 90, and the plug 94 at the end of the lead wire 916 is connected to the socket 95 to form a connector.

In the excimer lamp device of Fig. 9, the inside of the lampshade 90 is in a state of communication with the inner space P of the processing chamber, so the high-concentration ozone generated in the inner space P of the processing chamber flows into the inside of the lampshade 90, and the ozone and the reactive Compared with high active oxygen, for example, the half-life in the air exists for more than or equal to 12 hours, so it flows freely inside the lampshade 90, and in addition, when it is restored to oxygen by natural decomposition, decomposition caused by light and heat, it is generated there. active oxygen.

Therefore, among the constituent parts of the lampshade, metal parts may be oxidized by high-concentration ozone or highly reactive active oxygen, so anti-oxidation treatment is performed on the surface of the metal parts.

However, on the connection surfaces of the power supply terminals 96 of the excimer lamp 91 and the internal electrodes 915 and the connection surfaces of the power supply components such as the connectors 94, 95, in order to maintain the electrical connection, the metal surface must be exposed, and the anti-corrosion cannot be performed. oxidation treatment. Therefore, when the power supply part is oxidized due to the action of the above-mentioned active oxygen, the resistance value increases to generate heat, the lead wire 93 is disconnected, or the power supply terminal 96 and the connectors 94, 95 are partially corroded and cannot be removed. Even when an oxidation-resistant metal material such as nickel or a nickel alloy is used, high active oxygen is generated by the reaction and oxidized, thereby causing the above-mentioned problems.

In addition, when oxide powder is splashed from an oxidized part, it may intrude into the inner space P of the processing chamber and contaminate the surface of the workpiece W.

Also, in the above-mentioned excimer lamp device, the inside of the lampshade 90 is not filled with an inert gas. Therefore, the ultraviolet light radiated from the excimer lamp 91 irradiates the lampshade 90, and reacts with oxygen inside the lampshade 90 to regenerate ozone and active oxygen. , or ozone is decomposed to generate active oxygen. Occurrence of such a phenomenon promotes oxidation of the power supply member, leading to deterioration and damage.

Contents of the invention

The present invention is made in view of the above matters, and its purpose is to provide an excimer lamp device, which can simplify the structure of the device by removing the light output window that divides the lampshade and the irradiated area, can realize cost reduction, and avoid the presence of active oxygen The power supply components disposed near the end of the lamp are exposed to prevent oxidation, and the occurrence of deterioration and breakage of the components can be reduced.

The present invention is to achieve the above object. An excimer lamp device is provided with: an excimer lamp emitting ultraviolet light through dielectric discharge, and a lampshade for accommodating the excimer lamp; The opening of the light, the inner space of the lampshade communicates with the inner space of the processing chamber for processing the object through the opening; it is characterized in that a power supply component is connected to at least one end of the above-mentioned excimer lamp to form a power supply joint; in the lampshade Inside, there is provided a partition member that partitions the lamp end area where the power supply coupling portion is formed from the interior space of the lampshade.

In addition, it is characterized in that the above-mentioned partition member has light-shielding properties against ultraviolet light.

Furthermore, it is characterized in that a light-shielding film for ultraviolet light is formed on an end portion of the discharge vessel of the excimer lamp.

Furthermore, it is characterized in that an ozone decomposing substance is provided in the interior of the lamp end region.

Furthermore, it is characterized in that a gas supply mechanism for flowing in or filling inert gas is provided in the lamp end region of the lamp cover.

In addition, it is characterized in that it includes a pressure detection mechanism for detecting the pressure in the lamp end region and the pressure in the inner space of the processing chamber or the atmospheric pressure, and a control mechanism; the control mechanism, based on the detection signal from the pressure detection mechanism, A control signal is sent to the gas supply mechanism so that the pressure in the lamp end region is always higher than the pressure in the inner space of the processing chamber or the atmospheric pressure.

In addition, it is characterized in that it includes a pressure detection mechanism for detecting the pressure in the lamp end region and the pressure in the inner space of the processing chamber or the atmospheric pressure, and a control mechanism; the control mechanism, based on the detection signal from the pressure detection mechanism, When the pressure in the lamp end region is always higher than the pressure in the inner space of the process chamber or the atmospheric pressure, a signal to light the excimer lamp is sent to the lamp light power supply.

In addition, the excimer lamp device for irradiating excimer light to the object to be processed conveyed by the conveying mechanism is characterized in that it includes a pressure sensor for detecting the pressure in the end region of the lamp and the pressure in the internal space of the processing chamber or the atmospheric pressure. Detection mechanism, and control mechanism; the above-mentioned control mechanism, according to the detection signal from the above-mentioned pressure detection mechanism, under the situation that the pressure in the lamp end area is always higher than the pressure in the inner space of the processing chamber or the atmospheric pressure, the object to be processed will be transported The signal is sent to the above-mentioned handling mechanism.

Invention effect

According to the present invention, the following effects can be produced.

(1) The light output window that divides the lampshade and the irradiated area is removed, and the structure of the device is simplified to achieve cost reduction. In addition, it is also possible to easily increase the irradiation area so that a larger area can be treated.

(2) In the inside of the lampshade, the end region of the excimer lamp formed with the power supply junction is partitioned by a partition member, so that the high-concentration ozone generated in the inner space of the processing chamber flows near the power supply junction at the end of the excimer lamp Restriction can prevent the power supply components from being oxidized by being exposed to active oxygen generated from ozone. Therefore, deterioration and breakage of the power supply member can be suppressed, and a highly reliable excimer lamp device can be formed.

(3) In addition, the partition member has light-shielding properties for ultraviolet light, so that ultraviolet light emitted from the excimer lamp can be suppressed from irradiating the vicinity of the end of the excimer lamp in which the power supply joint is formed, and it is possible to avoid re-formation in the end region of the lamp. Ozone or active oxygen.

(4) In addition, inflowing and filling inert gas into the lamp end area where the power supply joint is formed on the lampshade can surely prevent ozone from flowing into the lamp end area, and effectively avoid the formation of active oxygen generated by ozone. exposed power supply components.

Description of drawings

Fig. 1 is a diagram showing an embodiment of the present invention, a sectional view cut along the tube axis direction of the lamp;

Fig. 2 is a figure representing an embodiment of the present invention, a cross-sectional view cut off by A-A' in Fig. 1;

3 is a diagram illustrating the structure of an excimer lamp, (a) is a sectional view of the tube axis of the lamp, and (b) is a sectional view in a direction perpendicular to the tube axis;

4( a ) and FIG. 4( b ) are schematic diagrams showing the outline of an excimer lamp device;

Fig. 5 is a lamp tube axis sectional view showing an excimer lamp device according to another embodiment;

6 is a cross-sectional view of an excimer lamp device in an axial direction of a lamp tube showing another embodiment;

7 is a diagram showing the structure of the lamp; (a) is a cross-sectional view in the direction of the tube axis; (b) is a cross-sectional view in a direction perpendicular to the tube axis;

8 is an explanatory diagram showing the structure of a conventional excimer lamp device;

FIG. 9 is a view showing an example of an excimer lamp device, and is an enlarged view showing an end portion on a lamp power feeding part side.

Detailed ways

Fig. 1 shows the excimer lamp device of the present invention, showing enlarged cross-sectional view of the lamp end; Fig. 2 is A-A' cross-sectional view. The excimer lamp device 1 includes: a rectangular parallelepiped box-shaped lampshade 10 as a whole, and an excimer lamp 20 disposed adjacent to the inner space P of the processing chamber; The processing chamber 40 is equipped with a conveyance mechanism not shown, such as a conveyor, and carries in and out the workpiece|work W, such as a glass substrate. In addition, an exhaust duct 42 is provided at the lower portion of the processing chamber 40 for discharging oxides and the like generated during processing the workpiece W to the outside, and at the upper portion of the processing chamber 40 is provided a gas supply port 43 capable of supplying gas to the processing chamber. .

An opening is provided on the lower surface of the lampshade 10, and the inner space H of the lampshade 10 is connected to the inner space P of the processing chamber through the opening. As shown in FIG. 2 , a plurality of (for example, three) excimer lamps 20 are prepared, and are arranged in the lamp housing 10 so that the axes of the lamp tubes are parallel to each other. When the excimer lamp 20 radiates ultraviolet light, the ultraviolet light less than or equal to 200nm directly irradiates the surface of the workpiece W, reacts with the oxygen present in the inner space P of the processing chamber to generate ozone, and the synergistic effect of ultraviolet light , it becomes possible to perform predetermined processing on the surface of the workpiece W.

In Fig. 1, the lampshade 10 is equipped with: a frame body 11 constituting the side part of the housing; a top plate 12 covering its upper opening; The excimer lamps 20 are arranged around the ends 20a, 20b. As shown in Fig. 1 and Fig. 2, partition member 13 comprises: the side part 131 that excimer lamp 20 penetrates, and the bottom part 132a that the mode that blocks the bottom is provided at the both side edge parts of lampshade 10; In lampshade 10, A region T near the end of the lamp (hereinafter referred to as "lamp end region T") is partitioned from the inner space H of the lamp housing, and is configured so that the ozone generated in the internal space P of the processing chamber and the inner space H of the lamp housing does not directly into the region T of the lamp end. In addition, the "lamp end region" here is a region where a power supply joint is formed, and the power supply connection part includes power supply components provided outside the lamp such as the end of the excimer lamp 20 and the connectors 27 and 28 . In addition, in particular, the end portion of the excimer lamp 20 is at least a part of a portion (non-light-emitting portion) where no discharge is formed.

Here, the configuration of the excimer lamp 20 will be described with reference to FIG. 3 . FIG. 3 is an explanatory cross-sectional view showing the excimer lamp 20 shown in FIG. 1 . The discharge vessel 21 of the excimer lamp 20 is arranged coaxially with an outer tube 211 and an inner tube 212 having different diameters, and is formed in a substantially cylindrical shape that is closed at end portions 213a and 213b of the tube. The inner electrode 22 is formed by combining two semi-cylindrical metal plates, for example, and is arranged to be added to the inner peripheral surface of the inner tube 212 . A mesh-shaped outer electrode 23 made of metal wires is arranged around the entire periphery of the outer peripheral surface of the outer tube 211, whereby a pair of electrodes 22, 23 sandwich a dielectric composed of the discharge space S, the inner tube 212, and the outer tube 211. Layers are arranged opposite to each other.

As shown in FIG. 1, in the above-mentioned excimer lamp 20, for example, a power supply terminal 24 formed of a C-shaped cross-section and made of a leaf spring contacts and is connected to the inner electrode in a pushed state from the inside, and the lead wire 26 is connected with the inner electrode. The related power supply terminal 24 is connected to the provided lead bar 25 and is led out to the outside of the lamp. A power supply unit (not shown) is provided on the upper portion of the globe 10, and a plug 27 is connected to a socket 28 of the power supply unit to form a connector. On the other hand, a lead wire (not shown) is connected to the outer electrode 23 to be grounded. In addition, on the inner electrode 22, the outer electrode 23, and the power supply terminal 24, except for the surface of the contact part for power supply, it is covered with a film of SiO ₂ or Al ₂ O ₃ and treated with an anti-oxidation treatment. Among them, it is also an element with sufficient oxidation resistance.

Moreover, in this excimer lamp 20, the light-shielding film 29 which has light-shielding property with respect to the ultraviolet light of wavelength 200nm or less is provided so that the end surface part 213a, 213b of the discharge vessel 21 may be covered at least. The light-shielding films 29a and 29b prevent ultraviolet light from reaching the end region T of the lamp in the lampshade, and are made of, for example, TiO ₂ , CeO ₂ , ZnO, BN, or the like. The light-shielding films 29a, 29b may be provided at least at the end of the lamp on the side where the power supply joint is formed, and do not need to be formed on the light-shielding film (the light-shielding film 29b in the device shown in FIG. 1 ) on the non-power supply joint side.

The light-shielding film 29a formed in this way shields the ultraviolet light that passes through the discharge vessel 21 of the lamp and enters the end region T of the lamp to prevent ozone from being regenerated in the end region T of the lamp.

The partition member 13 is disposed so as to surround a lamp end region including an end 20 a serving as a non-light-emitting portion of the excimer lamp 20 , the above-described lead wire 26 , and connectors 27 and 28 . As shown in FIG. 2 , the side portion 131 of the partition member 13 is configured, for example, by abutting two thin plates that can be divided into two pieces, and is located around the non-light-emitting portion of the lamp, and divides the end region T in the internal space H of the lampshade 10 . . On the other hand, the bottom surface portion 132 a is provided so as to be able to close the gap between the side surface portion 131 and the housing 11 . The lamp end on the side of the non-power supply part does not form a power supply connecting part, so there is no need to provide a partition member. Here, a bottom surface 132b corresponding to the base 41 is provided to form a space continuous with the inner space H of the lampshade.

The partition member 13 may be made of, for example, metal such as aluminum, ceramics, glass, or the like, or may be made of a member that transmits ultraviolet light. By providing such a partition member 13 , it is possible to prevent the intrusion of ozone into the lamp end region T in which the power supply joint is formed.

Here, when the partition member 13 is formed of a member having a translucency to ultraviolet light, it is considered that the ultraviolet light radiated from the lamp 20 may irradiate the region near the end of the lamp and may react with oxygen in the region T of the end of the lamp. And generate ozone and active oxygen. In order to avoid this situation, for example, if the partition member is made of a member impermeable to ultraviolet light, ultraviolet light is blocked and ozone generation in the above-mentioned lamp end region can be appropriately avoided. The partition member in this case should just be a material which has a light-shielding property with respect to the ultraviolet light of wavelength 200nm or less. According to this structure, ultraviolet light can be prevented from passing through the luminous tube of the lamp and entering the end region of the lamp, thereby preventing ozone from being generated in the end region of the lamp, or the ozone is decomposed to generate active oxygen, or directly from oxygen When active oxygen is generated. As a result, it is possible to avoid the problem that the metal parts constituting the power supply portion of the lamp come into contact with active oxygen and corrode.

In addition, it is more preferable to provide the partition member 13, particularly, the processing chamber-side surface of the side surface portion 131 with a reflective function, because it can suppress a decrease in illuminance near the end of the lamp.

As can be seen from FIGS. 1 and 2 , in the opening 131 a of the side surface 131 , a small gap d is formed between the edge of the opening and the lamp 20 . When the discharge vessel 21 or the partition member 13 is heated and expands in the radial direction during lighting of the excimer lamp 20 , the gap d absorbs the expansion component. In addition, since the globe itself is also long, it deforms (bends) when it thermally expands toward the lamp axis. In order not to apply a bending force to the excimer lamp due to this deformation. When such a gap d is too large, the ozone generated in the inner space P of the processing chamber tends to flow into the lamp end region T, so it is better to be small in the range that can absorb the thermal expansion component, for example, the range of 0.5-5mm , the most ideal is the range of 1 ~ 3mm.

According to the excimer lamp device 1 configured as described above, the partition member 13 for preventing the passage of ozone is disposed so as to surround the end of the excimer lamp 20 including the connectors 27 and 28 , thereby dividing the end region T of the excimer lamp 20 . , so that the ozone generated in the inner space P of the processing chamber does not immediately flow into the end region T of the lamp. That is, ozone cannot freely pass from the processing chamber interior space P to the lamp end region T, therefore, it is possible to avoid exposing the metal parts constituting the power supply part of the lamp in the active oxygen decomposed/generated by ozone, and to avoid drawing out The disconnection of the internal metal wires, the corrosion of the terminals and connectors.

In addition, the present invention will be described with reference to FIG. 1 and FIG. 4( a ). Fig. 4(a) is a schematic diagram showing an outline of an excimer lamp device.

In FIG. 1 , the housing 11 is provided with a gas supply port 14 , and is configured such that an inert gas can flow from the gas supply unit. As shown in FIG. 4 , the gas supply unit includes a solenoid valve 61 and a gas supply source 62 . The pressure detection mechanism 50 detects the pressure in the end region T of the lamp. The pressure detection mechanism 51 detects the pressure of the internal space P of the processing chamber. This detected value is sent to the control unit 52 . In the control unit 52, the pressure in the lamp end region T is compared with the pressure in the processing chamber internal space P, and when the pressure in the processing chamber internal space P is high, a control signal to disable the lamp lighting is sent to the lighting power supply. 66 etc. In addition, a signal for stopping the processed object conveyance mechanism 67 is output. Then, a control signal is sent to the flow regulator 61 connected to the gas supply source 62, which is composed of a solenoid valve or a flow regulator, so that the pressure inside the lamp end region T becomes, for example, a pressurized state equal to or greater than atmospheric pressure. The flow rate regulator 61 switches or adjusts the flow rate based on the control signal, and supplies and fills the lamp end region T with an inert gas from the gas supply unit 60 . When the pressure in the lamp end region T becomes higher than the pressure in the processing chamber interior space P, the control unit 52 outputs a signal to enable the processed object conveying mechanism 67 and a signal to enable the lamp to be turned on. When the pressure of the inner space P of the processing chamber is close to the atmospheric pressure, the pressure detection mechanism 51 can also measure the atmospheric pressure outside the lampshade. This is because when detecting the pressure of the processing chamber internal space P, there is a possibility that the durability of the pressure detection mechanism may be damaged by ozone or the like inside the processing chamber.

Instead of the pressure detection mechanisms 50 and 51, the control circuit can be easily produced by providing a differential pressure switch which detects the difference between two pressures and outputs a signal when the differential pressure exceeds a set value.

As shown by arrows in FIG. 1 , the inert gas excessively supplied to the lamp end region T flows out into the lamp housing internal space H through the gap d between the side surface portion 131 and the lamp 20 . In this embodiment, the inert gas can pass through the inner tube of the excimer lamp 20, so it flows through the other end region T of the lamp, and the same effect can be obtained for the flow path of ozone in both end regions. The flow of such an inert gas reliably prevents ozone generated in the process chamber internal space P from passing through the gap d between the side surface portion 131 and the lamp 20 .

The inert gas leaking from between the lamp and the partition side part has the effect of reducing the oxygen concentration between the light source and the workpiece, thereby increasing the light reaching amount. Especially at the end of the lamp, since the light from oblique directions is reduced, it is easy to reduce the amount of light on the surface of the workpiece, and the oxygen concentration can be reduced so that uniform treatment can be performed.

In addition, in the above apparatus, the processing gas may be introduced into the processing chamber 40 through the gas supply port 43 . For example, FIG. 4( b ) is a schematic diagram showing an outline of an excimer lamp device provided with a gas supply mechanism for supplying a process gas; the process gas is supplied from the gas supply unit 63 . In addition, in FIG. 4( b ), the same structures as those in FIG. 4( a ) in the preceding figure are denoted by the same symbols, and description thereof will be omitted. When the processing gas is supplied into the processing chamber, the pressure of the internal space P of the processing chamber fluctuates. Therefore, a pressure detection mechanism 51 is provided to detect and control the pressure of the internal space P of the processing chamber so that the pressure on the side of the lamp end region T is always higher than that of the internal pressure of the processing chamber. The space P is high. Specifically, the detection signal of the pressure of the lamp end region T and the detection signal of the pressure of the processing chamber internal space P are sent to the control unit 52 for comparison and calculation, and the control signal for controlling the flow rate of the inert gas or the processing gas is sent to the control unit 52. Flow regulators 61 and 64 connected to the respective gas supply sources 62 and 65 . Such control is performed so that the pressure on the lamp end region T side is always high, and the inflow of ozone into the lamp end region T is reliably suppressed in the same manner as above. Of course, instead of the pressure detection means, the flow regulators 61 and 64 may be controlled, and a differential pressure switch may be used to always maintain a differential pressure equal to or greater than a certain value.

In addition, the processing gas mentioned above is SiH ₄ , TEOS and other organic silicon-based gases in photo CVD, and a mixed gas of N ₂ and O ₂ (for example, 2% oxygen concentration) in photo cleaning.

In addition, an inert gas may be used as the above-mentioned processing gas. Flowing inert gas into the processing chamber interior space P lowers the oxygen concentration in the atmosphere inside the processing chamber, thereby suppressing the absorption of ultraviolet light by oxygen, and efficiently irradiating the workpiece W with ultraviolet light to improve the processing capacity. Furthermore, the inert gas is, for example, nitrogen.

Such an appropriate processing gas may be introduced from the gas supply port 43, or a nozzle or the like may be provided between the lamps so that the gas may be directed toward the workpiece.

The embodiment will be described with reference to FIG. 1 again. As shown in the figure, the ozone decomposing substance layer 15 may be formed on a part of the housing 11 and the bottom surface portion 132 in the lamp end region T. As shown in FIG. If the oxygen decomposing substance layer 15 is provided on the inner surface of the lamp end region T, even if ozone flows into the lamp end region T, the ozone will not be decomposed on the surface of the ozone decomposing substance to generate active oxygen, so that the lamp can be avoided. The metal parts in the end region T are oxidized. For the ozone decomposing substance layer 15, for example, oxides such as MnO ₂ , CuO, and TiO ₂ , or metals such as Pt and Pb and alloys contained therein can be used.

In the case of forming the ozonolysis substance in layers as in the embodiment shown in FIG. 1 , the powder of the ozonolysis substance is not mixed with a suitable binder into a solvent, and coated to form a paste to form a film and set, or When a metal is selected as the ozonolysis substance, it can also be formed by electroplating, for example.

In addition, here, the ozone decomposing substance is formed in layers on the inner surface of the frame, but other than this form, the ozone decomposing substance may be arranged as a solid substance such as a pellet shape or a honeycomb structure.

Fig. 5 is a cross-sectional view of an excimer lamp device in the lamp tube direction according to another embodiment. In addition, in this figure, illustration of a processing chamber part is omitted, and the same structure as the structure demonstrated in the previous figure is denoted by the same code|symbol, and description is abbreviate|omitted. In this embodiment, it is an example in which a power supply joint is formed at both ends of the excimer lamp, partition members are provided at both ends of the lamp, and a lamp socket is installed on the lamp instead of the above-mentioned light-shielding film 29. Shade.

The socket 30 is made of ceramics, for example, and is attached so as to surround the end of the discharge vessel 21 via a sealing member 31 disposed on the outer peripheral surface of the discharge vessel. The structure of the inner electrode and the power supply terminal is the same as that described above in FIG. 1 . In this embodiment, power supply joints are formed at both ends of the excimer lamp. The lead wire 26 connected to the lead bar 25 passes through the thin tube provided at the rear end of the lamp socket 30 and is led out airtightly through the sealing member 31, so that the inner space of the lamp inner tube 212 is sealed. The partition member 13 is made of aluminum, and in this embodiment, the side part is composed of the first side part 131a and the second side part 131b; two pieces are arranged side by side in the longitudinal direction of the lamp. In addition, the bottom surface portion 132 is arranged to close the gap between the first side surface portion 131 a and the housing 11 . In addition, the front end of the socket 30 is arranged so as to be in contact with the second side surface portion 131 b, and the radiated light from the lamp is completely blocked by the partition member 13 and the socket 30 .

According to this embodiment, the lamp end region T is divided by the first side portion 131a and the second side portion 131b, thereby restricting the passage of ozone generated in the inner space of the processing chamber or the inner space H of the lampshade through the lamp end region T. In addition, in this embodiment, the two side surfaces are formed to be double-shielded, and the passage of ozone through the lamp end region T can be reliably prevented. In addition, the ultraviolet light radiated from the lamp is completely blocked because the second side wall portion is in contact with the lamp socket, so that regeneration of ozone in the lamp end region T can be avoided.

In addition, in this embodiment, the inert gas may flow into the lamp end region T from the gas supply port 14 provided in the housing 11 . In this case, the gas that has excessively flowed into the lamp end region T flows through the gap between the excimer lamp 20 and the first side portion 131 a or the second side portion 131 b, and is emitted into the interior space H of the globe.

FIG. 6 is an enlarged cross-sectional view showing a device in an embodiment different from the above; in this figure, only the end portion on the side where the power supply coupling portion is formed is shown. The structure of the lamp of this embodiment is different from that described above, in that an inner electrode is arranged in one glass tube, and an outer electrode is arranged outside the glass tube. In this figure, the basic structure of the lampshade is the same as previously explained in FIG. 5 . That is, the lampshade 10 includes a frame body 11 and a top plate 12 . In addition, the excimer lamp 70 housed in the globe 10 is formed by dividing the end region T by the partition member 13 for preventing the passage of ozone. 132 ; while the ozone generated in the inner space P of the processing chamber cannot immediately flow through the lamp end region T of the partition member 13 .

In addition, an opening is provided in the frame body 11 to form a gas supply port 14, and the inert gas can be supplied from there. When the inert gas is supplied to the lamp end region T, the pressure inside the lamp end region T is maintained so that the pressure is higher than that in the inner space P of the processing chamber, so that the inert gas flows from the tiny space between the first side surface 131a and the excimer lamp 70. The gap flows through the inner space P of the processing chamber, and the introduction of ozone into the lamp end region T can be effectively suppressed.

In this embodiment, between the first side part 131a and the first side part 131b, the light-shielding member 32 is embedded around the lamp, and the ultraviolet light entering through the gap between the above-mentioned side part 131 and the excimer lamp 70 is light-shielded. . In addition, a light shielding film 29 is provided on the outer surface of the discharge vessel 71 in the non-discharge space side region of the lamp.

Next, the structure of the lamp shown in FIG. 6 will be described in detail. 7 is a cross-sectional view illustrating the structure of an excimer lamp; (a) is a cross-sectional view in the direction of the tube axis; (b) is a cross-sectional view in the direction perpendicular to the tube axis.

The excimer lamp 70 is made of, for example, synthetic quartz glass, and is equipped with a straight tube-shaped discharge vessel 71 in which xenon gas is sealed inside; A coil-shaped internal electrode 72 is provided inside the coil, and a high-frequency voltage is applied between the internal electrode 73 and the external electrode 72 . 74 is a bobbin made of a dielectric material provided for stable discharge, for example, a glass tube. Inside the bobbin 74, the inner electrode 73 is inserted.

Metal foils 75 made of copper are respectively connected to both ends of the inner electrodes 73, and the metal foils 75 are embedded in pinch seals 76 formed at the ends of the discharge vessel 71, and the inner electrodes 73 are suspended in the discharge vessel 71. , and the discharge vessel 71 is sealed. At the outer end of the metal foil 75 , an outer lead bar 77 is welded; and this outer lead bar 77 is taken out of the discharge vessel 71 . Further, 78 is a strut formed to protrude toward the center from the inner wall of the discharge vessel 71 to restrict movement in the radial direction of the glass tube 74 .

When a voltage is applied between the internal electrode 73 and the external electrode 72, discharge occurs through the discharge vessel 71 and the glass tube 74, and xenon gas in the discharge space is excited to generate and emit excimer light with a wavelength of 172 nm.

As shown in FIG. 6, the end part of the lead wire 79 for electric power supply and the one end part of the lead bar 77 are welded and connected. The plug 80 is inserted into the socket 81 of the power supply unit.

In this excimer lamp 70, the dielectric layer made of the glass tube 74 is provided on the entire longitudinal region of the outer circumference of the inner electrode 73, so that the discharge generated between the inner electrode 73 and the outer electrode 72 is uniformly adjusted in the longitudinal direction of the lamp. Therefore, it is possible to avoid the situation where the discharge concentrates on one part of the inner electrode 73 and cause overheating and blown out, and a uniform light output can be stably obtained. Moreover, the structure of the discharge vessel 71 is relatively simple and can be reduced in weight, and it is also easy to increase the length.

In addition, when using such an excimer lamp 70, since the partition member 13 (particularly the side part 131) is arrange|positioned adjacent to a lamp|ramp, it is preferable to use an insulating member. When a conductive material such as metal is used as the material for the side portions 131a, 131b, discharge occurs between the inner lead portion 73a of the inner electrode 73 and the side portions 131a, 131b, and uniform discharge may not be obtained in the longitudinal direction of the lamp. Therefore, it is preferable to use inorganic insulating materials such as ceramics and glass, specifically heat-resistant strengthened glass such as alumina and Bay Rex (registered trademark) glass.

As above, the excimer lamp device with the structure of FIG. 6 is also the same as the excimer lamp device described above, and the lamp end area is separated from the bottom surface by a partition plate, so that the ozone generated in the inner space of the processing chamber can be prevented from flowing into the lamp end immediately. The internal area can avoid exposing the metal parts constituting the power supply part of the lamp to ozone or active oxygen. In addition, as a result, progress of oxygen and corrosion of metal parts for power supply can be effectively suppressed.

Furthermore, the regeneration of ozone or active oxygen from oxygen present in the end region of the lamp can also be avoided when the UV light emitted by the lamp is blocked.

In addition, forming a light-shielding film on the outer surface of the discharge vessel in the vicinity of the lamp end can also prevent ultraviolet light emitted inside the discharge space in the longitudinal direction from passing through the discharge vessel of the lamp and irradiating the lamp end region.

In addition, by supplying and filling the inert gas in the lamp end region, it is possible to reliably suppress the ozone in the inner space of the processing chamber from flowing into the lamp end region.

As mentioned above, although this invention was demonstrated, it goes without saying that this invention is not limited to the said structure, It can change suitably. For example, the structure of the excimer lamp is not limited to the structure of FIG. 3 and FIG. 7 as described above, but can be appropriately changed.

Claims (8)

1. an Excimer lamp apparatus possesses: come the Excimer lamp of emitting ultraviolet light by dielectric discharge, and accommodate the lampshade of this Excimer lamp;

Be formed with the opening that takes out from the radiating light of above-mentioned lamp on lampshade, the lampshade inner space is connected by this opening with the inner treatment chamber space of handling object being treated; It is characterized in that,

Be connected with power supply part at least one side's of above-mentioned Excimer lamp end and form the power supply joint portion;

Be provided with and be formed with the lamp end regions of power supply joint portion and the partition member that separate the lampshade inner space in lampshade inside.

2. Excimer lamp apparatus as claimed in claim 1 is characterized in that above-mentioned partition member possesses light-proofness to ultraviolet light.

3. Excimer lamp apparatus as claimed in claim 1 or 2 is characterized in that, is formed with the photomask of ultraviolet light in the end of the discharge vessel of above-mentioned Excimer lamp.

4. Excimer lamp apparatus as claimed in claim 1 or 2 is characterized in that, in the inside of lamp end regions, is provided with the ozone decomposed substance.

5. Excimer lamp apparatus as claimed in claim 1 or 2 is characterized in that, at the lamp end regions of above-mentioned lampshade, possesses the gas supply mechanism that flows into the filling inert gas.

6. Excimer lamp apparatus as claimed in claim 5 is characterized in that, possesses the pressure that is used to detect in the above-mentioned lamp end regions and the pressure in the inner treatment chamber space or atmospheric pressure detecting mechanism, reaches controlling organization;

Above-mentioned controlling organization transmits control signal to gas supply mechanism, so that the pressure in the lamp end regions is all the time than pressure in the inner treatment chamber space or the high state of atmospheric pressure according to the detection signal from above-mentioned pressure detecting mechanism.

7. Excimer lamp apparatus as claimed in claim 5 is characterized in that,

Possess the pressure that is used to detect in the above-mentioned lamp end regions and the pressure the inner treatment chamber space in or atmospheric pressure detecting mechanism, reach controlling organization;

Above-mentioned controlling organization is according to the detection signal from above-mentioned pressure detecting mechanism, and the pressure in the lamp end regions than under the high situation of the pressure in the inner treatment chamber space or atmospheric pressure, will be lighted the signal of above-mentioned Excimer lamp all the time, sends to lamp and lights power supply.

8. Excimer lamp apparatus as claimed in claim 5, the object being treated irradiation quasi-molecule light to coming by the carrying mechanism carrying is characterized in that,

Possess the pressure that is used to detect in the above-mentioned lamp end regions and the pressure the inner treatment chamber space in or atmospheric pressure detecting mechanism, reach controlling organization;

Above-mentioned controlling organization is according to the detection signal from above-mentioned pressure detecting mechanism, and the pressure in the lamp end regions than under the high situation of the pressure in the inner treatment chamber space or atmospheric pressure, can be carried the signal of object being treated all the time, send to above-mentioned carrying mechanism.

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