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TW200618034A - Excimer light apparatus - Google Patents

Excimer light apparatus

Info

Publication number
TW200618034A
TW200618034A TW094128438A TW94128438A TW200618034A TW 200618034 A TW200618034 A TW 200618034A TW 094128438 A TW094128438 A TW 094128438A TW 94128438 A TW94128438 A TW 94128438A TW 200618034 A TW200618034 A TW 200618034A
Authority
TW
Taiwan
Prior art keywords
light
lamp
excimer
power supply
light mask
Prior art date
Application number
TW094128438A
Other languages
Chinese (zh)
Other versions
TWI365478B (en
Inventor
Kenichi Hirose
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200618034A publication Critical patent/TW200618034A/en
Application granted granted Critical
Publication of TWI365478B publication Critical patent/TWI365478B/zh

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/015—Disinfection, sterilisation or deodorisation of air using gaseous or vaporous substances, e.g. ozone
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/28—Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/10—Apparatus features
    • A61L2209/12—Lighting means
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/20—Method-related aspects
    • A61L2209/21—Use of chemical compounds for treating air or the like
    • A61L2209/212—Use of ozone, e.g. generated by UV radiation or electrical discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Water Treatments (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

The goal of the invention is to provide an excimer light apparatus. Wherein, the light extraction window for dividing the light mask and the irradiated region is excluded. It simplifies the apparatus construction, and achieves the effect of low production cost, and avoids the power supply components built near the lamp terminal portion to expose to active oxygen. Therefore, it prevents from oxidizing, and decreases component deterioration or occurrence of damage. The solving method of the excimer light apparatus comprises the following procedures: Firstly, the excimer lamp conducts irradiation of UV light through the discharging of medium. Further, the light mask accommodates the excimer lamp. Furthermore, it forms the opening for extracting the irradiated light from the lamp at the light mask. Moreover, it conducts the internal space of the light mask with the opening through the internal space of the processing room where the object to be treated is processed. The characteristic is that: At least one terminal portion of the excimer lamp connects with the power supply component to form the power supply combination portion. In addition, inside the light mask, it builds the isolation component for isolating the lamp terminal region formed with the power supply portion.
TW094128438A 2004-11-22 2005-08-19 Excimer light apparatus TW200618034A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004337552A JP4453527B2 (en) 2004-11-22 2004-11-22 Excimer lamp device

Publications (2)

Publication Number Publication Date
TW200618034A true TW200618034A (en) 2006-06-01
TWI365478B TWI365478B (en) 2012-06-01

Family

ID=36627246

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094128438A TW200618034A (en) 2004-11-22 2005-08-19 Excimer light apparatus

Country Status (4)

Country Link
JP (1) JP4453527B2 (en)
KR (1) KR100891243B1 (en)
CN (1) CN100561662C (en)
TW (1) TW200618034A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI402884B (en) * 2008-04-10 2013-07-21 Ushio Electric Inc An excimer lamp and a lamp unit with its lamp unit
TWI740052B (en) * 2017-07-19 2021-09-21 日商牛尾電機股份有限公司 Light irradiation device

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5233551B2 (en) * 2008-09-27 2013-07-10 ウシオ電機株式会社 Excimer lamp device
JP6301796B2 (en) * 2014-09-24 2018-03-28 日本電子株式会社 Organic compound removal equipment
JP7003431B2 (en) * 2017-04-06 2022-01-20 ウシオ電機株式会社 Light irradiation device
JP6896919B1 (en) * 2020-08-03 2021-06-30 株式会社クォークテクノロジー Sterilization lamp
JP7721886B2 (en) * 2020-11-11 2025-08-13 ウシオ電機株式会社 Ultraviolet treatment device and ultraviolet treatment method
CN113367268A (en) * 2021-03-18 2021-09-10 郑州圣华药物食品技术开发有限公司 Pulsed ozone disinfection and washing food cabinet excited by xenon excimer light source
IT202200014443A1 (en) * 2022-07-08 2024-01-08 Amen Enamuna LAMP WITH INTEGRATED SANITIZATION SYSTEM.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001185089A (en) * 1999-12-28 2001-07-06 Quark Systems Co Ltd Excimer irradiation device
JP2003144913A (en) * 2001-11-13 2003-05-20 Ushio Inc Processing apparatus and processing method using dielectric barrier discharge lamp
TW200501194A (en) * 2003-05-19 2005-01-01 Ushio Electric Inc Excimer lamp lighting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI402884B (en) * 2008-04-10 2013-07-21 Ushio Electric Inc An excimer lamp and a lamp unit with its lamp unit
TWI740052B (en) * 2017-07-19 2021-09-21 日商牛尾電機股份有限公司 Light irradiation device

Also Published As

Publication number Publication date
CN1783421A (en) 2006-06-07
JP4453527B2 (en) 2010-04-21
KR20060056846A (en) 2006-05-25
TWI365478B (en) 2012-06-01
JP2006147928A (en) 2006-06-08
CN100561662C (en) 2009-11-18
KR100891243B1 (en) 2009-04-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees