CN1438188A - Method for removing organic matter from super-pure water by 185 nano ultraviolet light and film de-airing combination - Google Patents

Abstract

The method for removing organics from ultrapure water by utilizing combination of 185 nano UV light and membrane deaeration includes water-cleaning treatment process, which is characterized by that in the described water-cleaning treatment process, after 185 nano UV equipment treatment procedure the membrane deaeration treatment procedure is made, so that it can remove small-molecular non-charged organics and most of carbon dioxide from the ultrapure water, and can obviously reduce total organic carbon content in the ultrapure water and can expand the application range of the ultrapure water.

Description

The organism method in the ultrapure water of removing that 185 nano-ultraviolet lights combine with the film degassing

The present invention relates to a kind of 185 nanometer ultraviolet organism splitters and film de-gassing vessel are combined and make the processing method of the low ultrapure water of organic content.

Ultrapure water is mainly used in production and a lot of other telecommunications equipment production of large-scale integrated circuit.Total organic content in the ultrapure water is weighed with total organic carbon (TOC) content usually, guarantees that the TOC index is normally challenging for the ultrapure water manufacturing process in the ultrapure water.

Because 185 nano-ultraviolet lights can interrupt most of chemical bonds in the organism, so can decompose residual organic matter in the pure water with 185 nano-ultraviolet lights.Residual organic matter may exist with three kinds of forms after decomposing under the 185 nano-ultraviolet light effects in the pure water, promptly charged small organic molecule, not charged small organic molecule and be oxidized to carbonic acid gas.

Continuous electric desalination device or hybrid ionic switch are installed to remove the organism that is decomposed in the known technology after 185 nanometer ultraviolets.But continuous electric desalination device or hybrid ionic switch are only effective to removing charged organism and carbonic acid gas, but can not remove not charged small organic molecule.Therefore, can not make organic content be reduced to high levels.

The purpose of this invention is to provide the low ultrapure water technology of a kind of organic content, this technology is easy, and is effective.

For achieving the above object, the present invention is by the following technical solutions: the organism method in the ultrapure water of removing that this 185 nano-ultraviolet lights combine with the film degassing, it comprises: the water purification process technique, in the described water purification process technique, after 185 nanometer ultraviolet device treatment process, be film degassing treatment process.

The inventor has utilized scientific knowledge, promptly not charged small organic molecule has volatility, and the degassing film film can carry out technical schemes such as gas-water separation, and these technical schemes are applied in the ultrapure water manufacturing process, so film de-gassing vessel and continuous electric desalination device or hybrid ionic switch are installed behind 185 nanometer ultraviolet devices, utilize the film de-gassing vessel to deviate from not charged organism of small molecules and most carbonic acid gas, remove charged organism and residual carbon dioxide with continuous electric desalination device or hybrid ionic switch again.

In addition, used de-gassing vessel is good with de-gassing vessel among the present invention, and pure water should not contact with air in degasification process.185 nanometer ultraviolet devices only are applicable to through purifying treatment, the purified water that organic content is lower, and total content of organic carbon is less than 500ppb in the purified water.In this enforcement, the film de-gassing vessel is existing procucts, (seeing US5938922), and in the processing condition, vacuum tightness is＜50mmHg that all the other are routine operation.

Embodiment one: city tap-water is through filtration, active carbon adsorber, twin-stage reverse osmosis, continuous electric desalination, 185 nanometer ultraviolet devices, the accurate bed that mixes, and product water total content of organic carbon stationary value is 12-26ppb.Homology underground water is through filtration, twin-stage reverse osmosis, continuous electric desalination, 185 nanometer ultraviolet devices, film de-gassing vessel, the accurate bed that mixes.Product water total content of organic carbon stationary value is 0.1-0.2ppb.

Embodiment two: the underground water tap water is through filtration, single-stage reverse osmosis, continuous electric desalination, 185 nanometer ultraviolet devices, the accurate bed that mixes, and product water total content of organic carbon stationary value is 30-35ppb.Homology underground water is through filtration, single-stage reverse osmosis, 185 nanometer ultraviolet devices, film de-gassing vessel, continuous electric desalination, the accurate bed that mixes.Product water total content of organic carbon stationary value is 0.5 ± 0.1ppb.

Advantage: after 185 nanometer ultraviolet ray operations, for the degassed treatment process of film, therefrom can among the present invention To remove the not charged organic matter of little molecule and most of carbon dioxide, always have thereby obviously reduced in the ultra-pure water The machine carbon content has enlarged the purposes of ultra-pure water, satisfies different demands, and simple process.

Claims (1)

1, the organism method in the ultrapure water of removing that the degassing of a kind of 185 nano-ultraviolet lights and film combines, it comprises: the water purification process technique, it is characterized in that: in the described water purification process technique, after 185 nanometer ultraviolet device treatment process, be film degassing treatment process.