[go: up one dir, main page]

JP2001286860A - Water treating device and water treating method - Google Patents

Water treating device and water treating method

Info

Publication number
JP2001286860A
JP2001286860A JP2000105301A JP2000105301A JP2001286860A JP 2001286860 A JP2001286860 A JP 2001286860A JP 2000105301 A JP2000105301 A JP 2000105301A JP 2000105301 A JP2000105301 A JP 2000105301A JP 2001286860 A JP2001286860 A JP 2001286860A
Authority
JP
Japan
Prior art keywords
water
treated
activated carbon
oxidizing agent
toc concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000105301A
Other languages
Japanese (ja)
Inventor
Senri Kojima
泉里 小島
Masahiko Tokuyasu
政彦 徳安
Junichi Ouchida
淳一 大内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nomura Micro Science Co Ltd
Original Assignee
Nomura Micro Science Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nomura Micro Science Co Ltd filed Critical Nomura Micro Science Co Ltd
Priority to JP2000105301A priority Critical patent/JP2001286860A/en
Publication of JP2001286860A publication Critical patent/JP2001286860A/en
Pending legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Water Treatment By Sorption (AREA)

Abstract

PROBLEM TO BE SOLVED: To prolong the service life of activated carbon and to lower a TOC concentration of water to be treated. SOLUTION: An oxidizing agent is added to the water to be treated containing organic compounds, and the water to be treated to which the oxidizing agent is added is passed through the activated carbon 2, thus the organic compounds contained in the water to be treated are adsorbed on the activated carbon.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は水処理装置および水
処理方法に関し、特に、有機化合物を含む被処理水を活
性炭で処理する場合に適用して好適なものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water treatment apparatus and a water treatment method, and more particularly, to a water treatment apparatus and a water treatment method which are suitably applied to a case where treated water containing organic compounds is treated with activated carbon.

【0002】[0002]

【従来の技術】従来、有機化合物を含む被処理水から有
機化合物を除去する場合、有機化合物を含む被処理水を
活性炭に通水する方法があった。
2. Description of the Related Art Conventionally, there has been a method of removing an organic compound from treated water containing an organic compound by passing the treated water containing the organic compound through activated carbon.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、有機化
合物を含む被処理水を活性炭に通水する方法では、被処
理水を活性炭へ通水した際に有機化合物が活性炭へ吸着
され、活性炭が飽和吸着に達すると、有機化合物を除去
できなくなる。このため、この方法では、活性炭への通
水量が増加すると、活性炭を頻繁に交換しなければなら
ないという問題があった。
However, in the method of passing treated water containing an organic compound through activated carbon, the organic compound is adsorbed on the activated carbon when the treated water is passed through the activated carbon, and the activated carbon is saturated. , Organic compounds cannot be removed. For this reason, this method has a problem that the activated carbon must be frequently replaced when the amount of water passing through the activated carbon increases.

【0004】そこで、本発明の目的は、活性炭の寿命を
延ばし、被処理水のTOC濃度を低下させることが可能
な水処理装置および水処理方法を提供することである。
[0004] Therefore, an object of the present invention is to provide a water treatment apparatus and a water treatment method capable of extending the life of activated carbon and reducing the TOC concentration of the water to be treated.

【0005】[0005]

【課題を解決するための手段】上述した課題を解決する
ために、本発明によれば、有機化合物を含む被処理水に
酸化剤を添加する工程と、前記酸化剤が添加された被処
理水を活性炭に通水する工程とを備えることを特徴とす
る。
According to the present invention, there is provided, in accordance with the present invention, a step of adding an oxidizing agent to water to be treated containing an organic compound; And passing water through activated carbon.

【0006】これにより、有機化合物を含む被処理水を
活性炭に通水させた際の活性炭の飽和吸着を抑制するこ
とが可能となり、活性炭の寿命を延ばすことが可能とな
るとともに、活性炭で処理された被処理水のTOC濃度
を低下させることが可能となる。
[0006] This makes it possible to suppress the saturated adsorption of activated carbon when the water to be treated containing the organic compound is passed through the activated carbon, to prolong the life of the activated carbon, and to increase the life of the activated carbon. It becomes possible to reduce the TOC concentration of the water to be treated.

【0007】ここで、前記酸化剤は、過酸化水素である
ことが好ましい。
Here, it is preferable that the oxidizing agent is hydrogen peroxide.

【0008】これにより、酸化剤にかかる費用を安く抑
えることが可能となるとともに、酸化剤の取り扱いを容
易に行うことが可能となる。
Thus, the cost of the oxidizing agent can be reduced, and the oxidizing agent can be easily handled.

【0009】また、前記有機化合物のTOC濃度は0.
5〜50ppm、前記被処理水の通水速度LVは5〜1
0m/h、前記酸化剤の濃度は10〜100ppmであ
ることが好ましい。酸化剤濃度が低濃度の場合、本発明
の効果は、あまり期待できない。
Further, the TOC concentration of the organic compound is 0.1.
5 to 50 ppm, the flow rate LV of the water to be treated is 5 to 1
0 m / h, and the concentration of the oxidizing agent is preferably 10 to 100 ppm. When the oxidizing agent concentration is low, the effect of the present invention cannot be expected much.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施形態に係わる
水処理装置について図面を参照しながら説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a water treatment apparatus according to an embodiment of the present invention will be described with reference to the drawings.

【0011】図1は、本発明の一実施形態に係わる水処
理装置の構成例を示すブロック図である。図1におい
て、酸化剤添加装置1は、有機化合物を含む被処理水に
酸化剤を添加する。酸化剤が添加された被処理水は活性
炭2に通水され、被処理水に含まれる有機化合物が活性
炭2に吸着されることにより、有機化合物を含む被処理
水から有機化合物が除去される。
FIG. 1 is a block diagram showing a configuration example of a water treatment apparatus according to one embodiment of the present invention. In FIG. 1, an oxidizing agent adding device 1 adds an oxidizing agent to water to be treated containing an organic compound. The water to be treated to which the oxidizing agent has been added is passed through the activated carbon 2, and the organic compounds contained in the water to be treated are adsorbed by the activated carbon 2, whereby the organic compounds are removed from the water to be treated containing the organic compounds.

【0012】ここで、有機化合物を含む被処理水を活性
炭2に通水する前に、有機化合物を含む被処理水に酸化
剤を添加することにより、活性炭2に吸着された有機化
合物を酸化剤により酸化分解して、活性炭の飽和吸着を
抑制することが可能となる。この結果、活性炭の寿命を
延ばすことが可能となるとともに、活性炭で処理された
被処理水のTOC濃度を低下させることが可能となる。
Here, an oxidizing agent is added to the treated water containing the organic compound before the treated water containing the organic compound is passed through the activated carbon 2 so that the organic compound adsorbed on the activated carbon 2 can be oxidized. As a result, it becomes possible to suppress the saturated adsorption of activated carbon by oxidative decomposition. As a result, the life of the activated carbon can be extended, and the TOC concentration of the water to be treated treated with the activated carbon can be reduced.

【0013】また、酸化剤が活性炭により分解されて、
酸素が発生するため、活性炭に存在する好気性の微生物
を活性化することが可能となり、酸化分解された有機化
合物をさらに分解することが可能となる。
Also, the oxidizing agent is decomposed by the activated carbon,
Since oxygen is generated, it is possible to activate the aerobic microorganisms present in the activated carbon, and it is possible to further decompose the oxidatively decomposed organic compound.

【0014】ここで、被処理水含まれる有機化合物とし
て、界面活性剤やアルコールなどが挙げられる。また、
被処理水に含まれる有機化合物のTOC濃度は、0.5
〜50ppm程度であることが好ましい。
Here, examples of the organic compounds contained in the water to be treated include surfactants and alcohols. Also,
The TOC concentration of the organic compound contained in the water to be treated is 0.5
It is preferably about 50 ppm.

【0015】また、被処理水に添加する酸化剤は、過酸
化水素、オゾン、過硫酸ナトリウム、過硫酸アンモニウ
ム、塩素などを用いることができるが、コストおよび取
り扱い容易性などの点から過酸化水素であることが好ま
しい。また、被処理水に添加する酸化剤の濃度は、10
〜100ppmであることが好ましい。
As the oxidizing agent to be added to the water to be treated, hydrogen peroxide, ozone, sodium persulfate, ammonium persulfate, chlorine and the like can be used, but from the viewpoint of cost and ease of handling, hydrogen peroxide is used. Preferably, there is. The concentration of the oxidizing agent added to the water to be treated is 10%.
Preferably it is 100100 ppm.

【0016】また、活性炭は、石炭系またはヤシガラ系
などを用いることができるが、有機化合物の吸着力や寿
命などの点から石炭系であることが好ましい。
As the activated carbon, coal-based or coconut shell-based can be used, but coal-based is preferred from the viewpoint of the adsorption power of organic compounds and the life.

【0017】また、酸化剤が添加された被処理水を活性
炭2に通水する温度は室温でよく、被処理水の通水速度
LVは、5〜10m/hであることが好ましい。
The temperature at which the water to be treated to which the oxidizing agent has been added is passed through the activated carbon 2 may be room temperature, and the velocity LV of the water to be treated is preferably 5 to 10 m / h.

【0018】また、被処理水のpHは、特に調節する必
要はないが、pH3〜6が好ましい。
Although the pH of the water to be treated does not need to be particularly adjusted, it is preferably pH 3 to 6.

【0019】図2は、本発明の一実施形態に係わる水処
理装置を超純水製造装置に適用した構成例を示すブロッ
ク図である。図2において、一次純水装置11では、原
水が前処理装置12に導入され、原水中の懸濁物質等が
分離・除去される。次いで、前処理装置12で処理され
た被処理水は活性炭濾過塔13に送られ、被処理水に含
まれる有機化合物が除去される。ここで、活性炭濾過塔
13には、活性炭濾過塔13に送られる被処理水に酸化
剤を添加する酸化剤添加装置1が設けられ、この被処理
水に酸化剤を添加してから、活性炭2で処理することに
より、活性炭2の寿命を向上させることができる。
FIG. 2 is a block diagram showing a configuration example in which the water treatment apparatus according to one embodiment of the present invention is applied to an ultrapure water production apparatus. In FIG. 2, in the primary pure water apparatus 11, raw water is introduced into a pretreatment apparatus 12, and suspended substances and the like in the raw water are separated and removed. Next, the water to be treated, which has been treated by the pretreatment device 12, is sent to the activated carbon filtration tower 13, where the organic compounds contained in the water to be treated are removed. Here, the activated carbon filtration tower 13 is provided with an oxidizing agent addition device 1 for adding an oxidizing agent to the water to be treated sent to the activated carbon filtration tower 13. , The life of the activated carbon 2 can be improved.

【0020】次に、有機化合物が除去された被処理水は
2床3塔14に送られる。2床3塔14には、カチオン
交換樹脂塔、真空脱気塔及びアニオン交換樹脂塔が設け
られ、2床3塔14は、被処理水からイオン成分を除去
する。次に、イオン成分が除去された被処理水は逆浸透
装置15に導入され、微粒子およびコロイド状物質等の
除去が行われる。
Next, the water to be treated from which the organic compounds have been removed is sent to a two-bed, three-column tower 14. The two-bed three tower 14 is provided with a cation exchange resin tower, a vacuum degassing tower and an anion exchange resin tower, and the two-bed three tower 14 removes ionic components from the water to be treated. Next, the water to be treated from which the ionic components have been removed is introduced into the reverse osmosis device 15 to remove fine particles, colloidal substances and the like.

【0021】次に、微粒子およびコロイド状物質等の除
去が行われた被処理水は、低圧紫外線ランプ酸化装置1
6に導入され、被処理水の残留する溶存有機物が分解さ
れる。次に、溶存有機物が分解された被処理水は混床式
イオン交換装置17に送られ、被処理水中のイオン成分
が除去される。
Next, the water to be treated, from which fine particles and colloidal substances have been removed, is supplied to a low-pressure ultraviolet lamp oxidation apparatus 1.
The dissolved organic matter remaining in the water to be treated is decomposed. Next, the water to be treated, in which the dissolved organic matter has been decomposed, is sent to the mixed-bed ion exchange device 17, where the ionic components in the water to be treated are removed.

【0022】このような一次純水装置11から得られる
一次純水をさらに紫外線酸化装置19、ポリシャー20
および限外濾過膜21などからなる二次純水装置18を
通すことにより、一次純水にわずかに残留している極微
量の不純物の除去を行う。
The primary purified water obtained from the primary purified water apparatus 11 is further subjected to an ultraviolet oxidation apparatus 19 and a polisher 20.
By passing through a secondary pure water device 18 composed of an ultrafiltration membrane 21 and the like, a trace amount of impurities slightly remaining in the primary pure water is removed.

【0023】こうして製造された超純水は、半導体製造
工場やLCD製造工場などでのユースポイント(採水
点)22に供給され、ユースポイント22から排出され
た排水は、活性炭濾過塔23を介して排水中のBOD、
CODを低減して放流したり、活性炭濾過塔13の前段
に還流することにより、再利用したりすることができ
る。ここで、活性炭濾過塔23には、活性炭濾過塔23
に送られる被処理水に酸化剤を添加する酸化剤添加装置
1が設けられ、この被処理水に酸化剤を添加してから、
活性炭濾過塔23で処理することにより、活性炭の寿命
を向上させることができる。
The ultrapure water thus produced is supplied to a use point (water sampling point) 22 in a semiconductor manufacturing plant, an LCD manufacturing plant, etc., and the wastewater discharged from the use point 22 passes through an activated carbon filtration tower 23. BOD in drainage
The COD can be reused by reducing the COD and discharging it, or by refluxing it before the activated carbon filtration tower 13. Here, the activated carbon filtration tower 23 includes:
An oxidizing agent adding device 1 for adding an oxidizing agent to the water to be treated sent to the water is provided, and after adding the oxidizing agent to the water to be treated,
The treatment in the activated carbon filtration tower 23 can improve the life of the activated carbon.

【0024】次に、本発明の一実施例に係わる水処理装
置の実験例について説明する。
Next, an experimental example of the water treatment apparatus according to one embodiment of the present invention will be described.

【0025】図3は、本発明の一実施例に係わる水処理
装置の実験装置の構成例を示す図である。図3におい
て、25mmφ×1300mmのアクリル製カラム31
a、31bに活性炭32a、32bを300mlずつそ
れぞれ充填した。ここで、活性炭32a、32bは、東
洋カルゴン株式会社製F300(石炭系活性炭)を用い
た。
FIG. 3 is a diagram showing an example of the configuration of an experimental apparatus for a water treatment apparatus according to one embodiment of the present invention. In FIG. 3, an acrylic column 31 of 25 mmφ × 1300 mm is shown.
Activated carbons 32a and 32b were respectively filled into 300a and 31b. Here, F300 (coal-based activated carbon) manufactured by Toyo Calgon Co., Ltd. was used as the activated carbons 32a and 32b.

【0026】また、界面活性剤を含む被処理水30aに
過酸化水素30cを添加した被処理水および界面活性剤
のみを加えた被処理水30bをそれぞれ調製し、これら
の被処理水30a、30bをそれぞれカラム31a、3
1bに通水した。そして、これらの被処理水30a、3
0bのカラム31a、31bの出口でのTOC濃度を測
定した。ここで、被処理水30a、30bのpHは10
に調節した。また、界面活性剤は、和光純薬工業株式会
社製NCW601Aを用いた。また、TOC濃度の測定
には、島津製作所TOC5000を用いた。
Also, a water 30a containing a surfactant and a water 30b containing only a surfactant are prepared, and a water 30b containing only a surfactant is prepared. To columns 31a and 3a, respectively.
Water was passed through 1b. And these to-be-treated waters 30a, 3
The TOC concentration at the outlets of the columns 31a and 31b of Ob was measured. Here, the pH of the water to be treated 30a, 30b is 10
Was adjusted to As the surfactant, NCW601A manufactured by Wako Pure Chemical Industries, Ltd. was used. In addition, Shimadzu TOC5000 was used for the measurement of the TOC concentration.

【0027】さらに、実施例1として、被処理水30a
における界面活性剤のカラム31aの入口でのTOC濃
度が50ppm、過酸化水素濃度が50ppm、通水速
度LVが5m/h、比較例1として、被処理水30bに
おける界面活性剤のカラム31bの入口でのTOC濃度
が50ppm、通水速度LVが5m/hの条件に設定し
た。
Further, as a first embodiment, the water to be treated 30a
The TOC concentration at the inlet of the column 31a of the surfactant in Example 1 was 50 ppm, the hydrogen peroxide concentration was 50 ppm, the water flow rate LV was 5 m / h, and as Comparative Example 1, the inlet of the surfactant column 31b in the water 30b to be treated. The conditions were set such that the TOC concentration was 50 ppm and the water flow rate LV was 5 m / h.

【0028】また、実施例2として、被処理水30aに
おける界面活性剤のカラム31aの入口でのTOC濃度
が10ppm、過酸化水素濃度が10ppm、通水速度
LVが10m/h、比較例2として、被処理水30bに
おける界面活性剤のカラム31bの入口でのTOC濃度
が10ppm、通水速度LVが10m/hの条件に設定
した。
In Example 2, the concentration of TOC at the inlet of the column 31a of the surfactant in the water to be treated 30a was 10 ppm, the concentration of hydrogen peroxide was 10 ppm, and the water flow rate LV was 10 m / h. The TOC concentration at the inlet of the column 31b of the surfactant in the water to be treated 30b was set to 10 ppm, and the flow rate LV was set to 10 m / h.

【0029】図4は、本発明の実施例1の実験結果を比
較例1と対比して示す図である。図4において、比較例
1では、通水量が2000B.V.(Bed Volu
me:活性炭充填量の何倍の水を通水したかを示す単
位)近辺で、カラム31bの出口でのTOC濃度がカラ
ム31bの入口でのTOC濃度に達した。
FIG. 4 is a diagram showing experimental results of Example 1 of the present invention in comparison with Comparative Example 1. 4, in Comparative Example 1, the water flow rate was 2000B. V. (Bed Volu
(me: unit indicating how many times the amount of the activated carbon charged water was passed)), the TOC concentration at the outlet of the column 31b reached the TOC concentration at the inlet of the column 31b.

【0030】これに対し、実験例1では、通水量が80
0B.V.近辺で、カラム31aの出口でのTOC濃度
が上昇し始め、通水量が1200B.V.近辺で、カラ
ム31aの出口でのTOC濃度が38ppm程度となる
が、それ以上通水量を増加させても、カラム31aの出
口でのTOC濃度が38ppm程度を維持し、通水量が
2000B.V.を越えても、カラム31bの出口での
TOC濃度がカラム31bの入口でのTOC濃度に達す
ることはなかった。この結果、界面活性剤を加えた水溶
液に過酸化水素を添加することにより、活性炭の寿命を
延ばすことが可能となった。
On the other hand, in Experimental Example 1, the water flow was 80
0B. V. In the vicinity, the TOC concentration at the outlet of the column 31a starts to increase, and the flow rate becomes 1200 B. V. In the vicinity, the TOC concentration at the outlet of the column 31a is about 38 ppm, but even if the water flow rate is further increased, the TOC concentration at the outlet of the column 31a is maintained at about 38 ppm, and the water flow rate is 2,000 B.P. V. , The TOC concentration at the outlet of the column 31b did not reach the TOC concentration at the inlet of the column 31b. As a result, it has become possible to extend the life of activated carbon by adding hydrogen peroxide to an aqueous solution to which a surfactant has been added.

【0031】図5は、本発明の実施例2の実験結果を比
較例2と対比して示す図である。図5において、比較例
2では、通水量が1000B.V.近辺で、カラム31
bの出口でのTOC濃度が上昇し始め、通水量が100
00B.V.を越えると、カラム31bは、飽和傾向を
示し始めた。
FIG. 5 is a diagram showing experimental results of Example 2 of the present invention in comparison with Comparative Example 2. In FIG. 5, in Comparative Example 2, the flow rate is 1000 B. V. In the vicinity, column 31
b. The TOC concentration at the outlet of b starts to increase, and
00B. V. , Column 31b began to show a tendency to saturate.

【0032】これに対し、実験例2では、通水量が20
00B.V.近辺で、カラム31aの出口でのTOC濃
度が上昇し始め、通水量が10000B.V.近辺で、
カラム31aの出口でのTOC濃度が6.6ppm程度
となるが、それ以上通水量を増加させても、カラム31
aの出口でのTOC濃度が6.6ppm程度を維持し、
カラム31bの出口でのTOC濃度がカラム31bの入
口でのTOC濃度に達することはなかった。
On the other hand, in Experimental Example 2, the water flow rate was 20
00B. V. In the vicinity, the TOC concentration at the outlet of the column 31a starts to increase, and the water flow rate becomes 10000B. V. In the vicinity,
The TOC concentration at the outlet of the column 31a is about 6.6 ppm.
The TOC concentration at the outlet of a is maintained at about 6.6 ppm,
The TOC concentration at the outlet of the column 31b did not reach the TOC concentration at the inlet of the column 31b.

【0033】次に、通水量が12000B.V.に達し
た時に、実施例2の被処理水30aにおける過酸化水素
の添加を停止するとともに、比較例2の被処理水30b
に対し過酸化水素の添加を開始した。
Next, when the water flow rate is 12000B. V. , The addition of hydrogen peroxide to the water to be treated 30a of Example 2 was stopped, and the water to be treated 30b of Comparative Example 2 was stopped.
, The addition of hydrogen peroxide was started.

【0034】図6は、過酸化水素の添加を途中で停止し
た場合における実施例2の実験結果を比較例2と対比し
て示す図である。図6において、被処理水30aにおけ
る過酸化水素の添加を途中で停止すると、カラム31b
の出口でのTOC濃度が上昇し始め、通水量が1500
0B.V.近辺で、カラム31bの出口でのTOC濃度
がカラム31bの入口でのTOC濃度に達した。
FIG. 6 is a diagram showing the experimental results of Example 2 when the addition of hydrogen peroxide was stopped halfway, in comparison with Comparative Example 2. In FIG. 6, when the addition of hydrogen peroxide in the water to be treated 30a is stopped halfway, the column 31b
The TOC concentration at the outlet of the plant started to rise, and
0B. V. In the vicinity, the TOC concentration at the outlet of the column 31b reached the TOC concentration at the inlet of the column 31b.

【0035】一方、活性炭が界面活性剤により飽和した
後に、被処理水30bに過酸化水素の添加を開始して
も、カラム31bの出口でのTOC濃度が低下すること
はなく、過酸化水素の添加開始後のカラム31bの出口
でのTOC濃度は、過酸化水素の添加開始前のカラム3
1bの出口でのTOC濃度と同程度の値となることがわ
かった。
On the other hand, even if the addition of hydrogen peroxide to the water to be treated 30b is started after the activated carbon is saturated with the surfactant, the TOC concentration at the outlet of the column 31b does not decrease, and The TOC concentration at the outlet of the column 31b after the start of the addition is the same as that of the column 3 before the start of the hydrogen peroxide addition.
It was found that the value was about the same as the TOC concentration at the outlet of 1b.

【0036】[0036]

【発明の効果】以上説明したように、本発明によれば、
有機化合物を含む被処理水を活性炭に通水させる際に、
被処理水に酸化剤を連続的に添加することにより、活性
炭の寿命を延ばすことが可能となるとともに、活性炭で
処理された被処理水のTOC濃度を低下させることが可
能となる。
As described above, according to the present invention,
When passing treated water containing organic compounds through activated carbon,
By continuously adding the oxidizing agent to the water to be treated, the life of the activated carbon can be extended, and the TOC concentration of the water to be treated treated with the activated carbon can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態に係わる水処理装置の構成
例を示すブロック図である。
FIG. 1 is a block diagram illustrating a configuration example of a water treatment apparatus according to an embodiment of the present invention.

【図2】本発明の一実施形態に係わる水処理装置を超純
水製造装置に適用した構成例を示すブロック図である。
FIG. 2 is a block diagram illustrating a configuration example in which a water treatment apparatus according to an embodiment of the present invention is applied to an ultrapure water production apparatus.

【図3】本発明の一実施例に係わる水処理装置の実験装
置の構成例を示す図である。
FIG. 3 is a diagram showing a configuration example of an experimental device of a water treatment device according to one embodiment of the present invention.

【図4】本発明の実施例1に係わる水処理装置の実験結
果を示す図である。
FIG. 4 is a diagram showing experimental results of the water treatment device according to the first embodiment of the present invention.

【図5】本発明の実施例2に係わる水処理装置の実験結
果を示す図である。
FIG. 5 is a diagram showing an experimental result of the water treatment apparatus according to the second embodiment of the present invention.

【図6】本発明の実施例2に係わる水処理装置の実験結
果を示す図である。
FIG. 6 is a diagram showing experimental results of a water treatment apparatus according to Embodiment 2 of the present invention.

【符号の説明】[Explanation of symbols]

1 酸化剤添加装置 2 活性炭 11 一次純水装置 12 前処理装置 13、23 活性炭濾過塔 14 2床3塔 15 逆浸透装置 16、19 紫外線酸化装置 17 混床塔 18 二次純水装置 20 ポリシャー 21 限外濾過膜 22 ユースポイント DESCRIPTION OF SYMBOLS 1 Oxidizer addition apparatus 2 Activated carbon 11 Primary pure water apparatus 12 Pretreatment apparatus 13, 23 Activated carbon filtration tower 14 2 Beds 3 towers 15 Reverse osmosis apparatus 16, 19 Ultraviolet oxidizing apparatus 17 Mixed bed tower 18 Secondary pure water apparatus 20 Polisher 21 Ultrafiltration membrane 22 Use points

───────────────────────────────────────────────────── フロントページの続き (72)発明者 大内田 淳一 神奈川県厚木市岡田2丁目9番8号 野村 マイクロ・サイエンス株式会社内 Fターム(参考) 4D024 AA03 AB04 BA02 BB01 BC01 CA01 DA05 DA07 DB05 DB10 DB19 DB23 4D050 AA05 AB02 AB07 AB14 BB09 BC05 BC10 BD06 BD08 CA03 CA07 CA08 CA09 CA15  ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Junichi Ouchida 2-9-8 Okada, Atsugi-shi, Kanagawa F-term in Nomura Micro Science Co., Ltd. 4D024 AA03 AB04 BA02 BB01 BC01 CA01 DA05 DA07 DB05 DB10 DB19 DB23 4D050 AA05 AB02 AB07 AB14 BB09 BC05 BC10 BD06 BD08 CA03 CA07 CA08 CA09 CA15

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 有機化合物を含む被処理水に酸化剤を添
加する工程と、 前記酸化剤が添加された被処理水を活性炭に通水する工
程とを備えることを特徴とする水処理方法。
1. A water treatment method comprising: a step of adding an oxidizing agent to water to be treated containing an organic compound; and a step of passing the water to be treated to which the oxidizing agent has been added to activated carbon.
【請求項2】 前記酸化剤は、過酸化水素であることを
特徴とする請求項1記載の水処理方法。
2. The water treatment method according to claim 1, wherein the oxidizing agent is hydrogen peroxide.
【請求項3】 前記有機化合物のTOC濃度は0.5〜
50ppm、前記被処理水の通水速度LVは5〜10m
/h、前記酸化剤の濃度は10〜100ppmであるこ
とを特徴とする請求項1または2記載の水処理方法。
3. The organic compound having a TOC concentration of 0.5 to 0.5.
50 ppm, the flow rate LV of the water to be treated is 5 to 10 m.
The water treatment method according to claim 1 or 2, wherein the concentration of the oxidizing agent is 10 to 100 ppm.
【請求項4】 活性炭と、 有機化合物を含む被処理水に酸化剤を添加する酸化剤添
加手段と、 前記酸化剤が添加された前記被処理水を前記活性炭に通
水させる活性炭通水手段とを備えることを特徴とする水
処理装置。
4. An activated carbon, an oxidizing agent adding means for adding an oxidizing agent to water to be treated containing an organic compound, and an activated carbon water flowing means for flowing the treated water to which the oxidizing agent is added through the activated carbon. A water treatment apparatus comprising:
JP2000105301A 2000-04-06 2000-04-06 Water treating device and water treating method Pending JP2001286860A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000105301A JP2001286860A (en) 2000-04-06 2000-04-06 Water treating device and water treating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000105301A JP2001286860A (en) 2000-04-06 2000-04-06 Water treating device and water treating method

Publications (1)

Publication Number Publication Date
JP2001286860A true JP2001286860A (en) 2001-10-16

Family

ID=18618689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000105301A Pending JP2001286860A (en) 2000-04-06 2000-04-06 Water treating device and water treating method

Country Status (1)

Country Link
JP (1) JP2001286860A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010227888A (en) * 2009-03-27 2010-10-14 Nippon Rensui Co Ltd Wastewater recovery method and wastewater recovery device
JP2010247009A (en) * 2009-04-10 2010-11-04 Nippon Rensui Co Ltd Aldehyde removal method, aldehyde removal device, container sterilization waste water recovery device, soft drink manufacturing device and drinking water manufacturing device
JP2011255326A (en) * 2010-06-10 2011-12-22 Iwasaki Electric Co Ltd Ultrapure water production system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010227888A (en) * 2009-03-27 2010-10-14 Nippon Rensui Co Ltd Wastewater recovery method and wastewater recovery device
JP2010247009A (en) * 2009-04-10 2010-11-04 Nippon Rensui Co Ltd Aldehyde removal method, aldehyde removal device, container sterilization waste water recovery device, soft drink manufacturing device and drinking water manufacturing device
JP2011255326A (en) * 2010-06-10 2011-12-22 Iwasaki Electric Co Ltd Ultrapure water production system

Similar Documents

Publication Publication Date Title
JP5617231B2 (en) Method and apparatus for purifying ion exchange resin
US6893559B2 (en) System and method for removing organic compounds from waste water by oxidation
JP2007509740A (en) Apparatus and method for purifying aqueous effluents by oxidation and membrane filtration
JP2011194402A (en) Ultrapure water production plant
KR101476864B1 (en) Method and apparatus for removing organic matter
JP5259311B2 (en) Water treatment method and water treatment system used therefor
JP2005218983A (en) Wastewater treatment method and apparatus using electrolytic oxidation
JP4447212B2 (en) Ultrapure water production method and ultrapure water production apparatus
JP2003266097A (en) Ultrapure water production equipment
KR101036880B1 (en) Ultrapure water production method using wastewater recycling apparatus and recycled water produced by the wastewater recycling apparatus
JP2001286860A (en) Water treating device and water treating method
JP3560631B2 (en) Water treatment equipment
JP2001170630A (en) Pure water production device
EP4208412A1 (en) Wastewater ozone treatment
JP5061410B2 (en) Ultrapure water production apparatus and ultrapure water production method
JP2001179252A (en) Method and apparatus for making pure water reduced in content of oxidizing substance
JP2002336886A (en) Ultrapure water production equipment and ultrapure water production method
JP4049711B2 (en) Wastewater treatment method including ethylene carbonate
JP3537995B2 (en) Wastewater treatment method
JP3461514B2 (en) Advanced water treatment system and method of starting advanced water treatment system
JP3992996B2 (en) Wastewater treatment method and apparatus
JPH11347576A (en) Method and apparatus for treating water
JPH05305297A (en) Treatment equipment for acidic wastewater containing organic substances
JPH08267077A (en) Advanced treatment method for wastewater
JP2000061453A (en) Treatment of water and apparatus therefor

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070309

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090618

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090623

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20091104