CN111856877A - Photosensitive resin composition, spacer, protective film, and liquid crystal display element - Google Patents
Photosensitive resin composition, spacer, protective film, and liquid crystal display element Download PDFInfo
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- CN111856877A CN111856877A CN202010250123.6A CN202010250123A CN111856877A CN 111856877 A CN111856877 A CN 111856877A CN 202010250123 A CN202010250123 A CN 202010250123A CN 111856877 A CN111856877 A CN 111856877A
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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Abstract
Description
技术领域technical field
本发明涉及一种感光性树脂组合物、间隙体、保护膜及液晶显示元件,尤其涉及一种适用于间隙体与保护膜的感光性树脂组合物以及使用间隙体与保护膜的液晶显示元件。The present invention relates to a photosensitive resin composition, a spacer, a protective film and a liquid crystal display element, in particular to a photosensitive resin composition suitable for a spacer and a protective film and a liquid crystal display element using the spacer and the protective film.
背景技术Background technique
一般而言,彩色滤光层表面的彩色印刷的像素与黑色矩阵有凹凸不平的情形,因此通常于彩色滤光层的表面形成保护膜,藉此隐藏凹凸不平处,以达到平坦化的要求。Generally speaking, the color printing pixels and black matrix on the surface of the color filter layer are uneven, so a protective film is usually formed on the surface of the color filter layer to hide the unevenness and achieve flattening requirements.
然而,在制造液晶显示元件或固态成像装置等光学元件中,时常需要在严苛条件下进行处理,例如在基板表面以酸性溶剂或碱性溶液浸泡的处理或以溅镀(Sputtering)形成配线电极层时,会造成局部腐蚀或高温的产生。因此,需于这些元件的表面上铺设保护膜,以防止制造时元件受损。为使保护膜具有耐受上述处理的特性,保护膜需要与基板间具有优异的附着力,也需具有高透明度、高表面硬度以及平滑的表面。除此之外,保护膜还需要具有高耐热性与耐光性的保护膜,以避免于长期使用下时,发生变色、黄化或白化等变质情况。另外,保护膜还需要具有良好的耐水性、耐化性、耐溶剂性、耐酸性以及耐碱性等特性。However, in the manufacture of optical elements such as liquid crystal display elements and solid-state imaging devices, it is often necessary to process under severe conditions, such as immersing the substrate surface in an acidic solvent or an alkaline solution, or forming wiring by sputtering. When the electrode layer is used, it will cause local corrosion or high temperature. Therefore, it is necessary to lay a protective film on the surface of these components to prevent the components from being damaged during manufacture. In order for the protective film to have the characteristics to withstand the above-mentioned treatments, the protective film needs to have excellent adhesion with the substrate, and also needs to have high transparency, high surface hardness, and a smooth surface. In addition, the protective film also needs a protective film with high heat resistance and light resistance to avoid deterioration such as discoloration, yellowing or whitening during long-term use. In addition, the protective film also needs to have good water resistance, chemical resistance, solvent resistance, acid resistance and alkali resistance.
另一方面,在现有技术中,彩色液晶显示元件中,为了维持两个基板间固定的层间距,是于整个基板上随机喷洒如聚苯乙烯珠或硅珠等喷珠,其中喷珠的直径为两基板间的间距。然而,此现有方式因喷珠的位置及密度分布并不均匀,造成背光源的光线受喷珠影响而散射,进一步使得显示元件的对比度降低。因此,以光微影制程(photolithography)方式所开发出的间隙体用感光性组合物,遂成为业界的主流。间隙体的形成方式,是将间隙体用的感光性组合物先涂布至基板,再于基板与曝光源间放入指定形状光罩,可于曝光步骤后再经显影形成间隙体。依据此方法,可于红色、绿色、蓝色等的像素外的指定位置上形成间隙体,以解决现有技术的问题;层间距也可利用感光性成分形成的涂膜厚度来控制,使层间距的距离变得容易控制,具有精度高的优点。On the other hand, in the prior art, in the color liquid crystal display element, in order to maintain a fixed layer distance between two substrates, spray beads such as polystyrene beads or silicon beads are randomly sprayed on the entire substrate. The diameter is the distance between the two substrates. However, due to the uneven position and density distribution of the sprayed beads, the light of the backlight source is scattered due to the influence of the sprayed beads, which further reduces the contrast ratio of the display element. Therefore, photosensitive compositions for spacers developed by photolithography have become the mainstream in the industry. The spacer is formed by first applying the photosensitive composition for the spacer to the substrate, then placing a photomask of a specified shape between the substrate and the exposure source, and then developing the spacer after the exposure step to form the spacer. According to this method, spacers can be formed at designated positions outside the red, green, blue, etc. pixels to solve the problems of the prior art; the interlayer spacing can also be controlled by the thickness of the coating film formed by the photosensitive component, so that the layer The distance of the pitch becomes easy to control, which has the advantage of high precision.
由于保护膜或间隙体是形成于彩色滤光片或是基板上,因此对透明度的要求极高。若保护膜或间隙体的透明度不佳,当应用于液晶显示元件时,将造成液晶显示元件的亮度不足,而影响液晶显示元件的显示质量。Since the protective film or spacer is formed on the color filter or the substrate, the requirement for transparency is extremely high. If the transparency of the protective film or the spacer is not good, when applied to a liquid crystal display element, the brightness of the liquid crystal display element will be insufficient, and the display quality of the liquid crystal display element will be affected.
为提高保护膜或间隙体的透明度,日本特开2010-054561号专利揭示保护膜用的感光性组合物,其包括(A)粘着剂树脂(其为碱可溶性树脂)、(B)具有乙烯性不饱和基的化合物、(C)光起始剂以及(D)溶剂,其中(B)具有乙烯性不饱和基的化合物中的不饱和键的当量为介于90至450g/eq之间。(B)乙烯性不饱和基的化合物中,单一化合物的不饱和双键的数量介于2至4个之间。(A)粘着剂树脂的重量平均分子量介于10,000至20,000之间。另一方面,日本特开2004-240241号专利揭示感光组合物,其包括(A)由乙烯性不饱合羧酸(酐)、具环氧基的乙烯性不饱合基的化合物及其他乙烯性不饱合基的化合物所形成的共聚合物、(B)具有乙烯性不饱合基的聚合性化合物以及(C)2-丁二酮-(4-(甲硫基)苯基)-2-(O-肟醋酸盐)、1,2-丁二酮-1-(4-吗啉基苯基)-2-(O-苯甲酰肟)、1,2-辛二酮-1-(4-(苯基硫基)苯基)-2-[O-(4-甲基苯甲酰基)肟]等的光聚合起始剂。然而,上述这些感光性树脂组合物却仍具有感度不佳的缺点,并且其所形成的间隙体亦仍具有段差不佳的缺点。In order to improve the transparency of the protective film or the spacer, Japanese Patent Laid-Open No. 2010-054561 discloses a photosensitive composition for the protective film, which comprises (A) an adhesive resin (which is an alkali-soluble resin), (B) an ethylenic resin An unsaturated group compound, (C) a photoinitiator, and (D) a solvent, wherein (B) the ethylenically unsaturated group-containing compound has an equivalent weight of unsaturated bonds between 90 and 450 g/eq. (B) In the compound of ethylenically unsaturated group, the number of unsaturated double bonds in a single compound is between 2 and 4. (A) The weight average molecular weight of the adhesive resin is between 10,000 and 20,000. On the other hand, Japanese Patent Laid-Open No. 2004-240241 discloses a photosensitive composition comprising (A) a compound composed of an ethylenically unsaturated carboxylic acid (anhydride), an ethylenically unsaturated group having an epoxy group, and other vinyl groups Copolymers of compounds with ethylenically unsaturated groups, (B) polymerizable compounds having ethylenically unsaturated groups, and (C) 2-butanedione-(4-(methylthio)phenyl)- 2-(O-oxime acetate), 1,2-butanedione-1-(4-morpholinophenyl)-2-(O-benzoyl oxime), 1,2-octanedione- Photopolymerization initiators such as 1-(4-(phenylthio)phenyl)-2-[O-(4-methylbenzoyl)oxime]. However, the above-mentioned photosensitive resin compositions still have the disadvantage of poor sensitivity, and the spacers formed by them still have the disadvantage of poor level difference.
因此,如何提高感光性树脂组合物的感度,并改善间隙体的段差,实为目前此领域技术人员亟欲解决的问题。Therefore, how to improve the sensitivity of the photosensitive resin composition and how to improve the level difference of the spacers is a problem that those skilled in the art are eager to solve at present.
发明内容SUMMARY OF THE INVENTION
有鉴于此,本发明提供一种具有优异的感度,且可形成段差优异的间隙体的感光性树脂组合物,其可适用于间隙体与保护膜。In view of this, the present invention provides a photosensitive resin composition which has excellent sensitivity and can form a spacer having an excellent level difference, which can be applied to a spacer and a protective film.
本发明提供一种感光性树脂组合物,其包括碱可溶性树脂(A)、含乙烯性不饱和基的化合物(B)、光起始剂(C)以及溶剂(D)。具体来说,碱可溶性树脂(A)包括碱可溶性树脂(A-1),其中碱可溶性树脂(A-1)是由混合物经共聚合而得。另外,混合物包括含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)及下述式(I)所示的含氧基亚烷基的乙烯性不饱和单体(a-1-2)。The present invention provides a photosensitive resin composition comprising an alkali-soluble resin (A), an ethylenically unsaturated group-containing compound (B), a photoinitiator (C), and a solvent (D). Specifically, the alkali-soluble resin (A) includes the alkali-soluble resin (A-1), wherein the alkali-soluble resin (A-1) is obtained by copolymerizing the mixture. In addition, the mixture includes a carboxylic acid group- or carboxylic acid anhydride group-containing ethylenically unsaturated monomer (a-1-1) and an oxyalkylene group-containing ethylenically unsaturated monomer (a-1-1) represented by the following formula (I). a-1-2).
式(I)中,In formula (I),
R1、R2及R3各自独立表示氢或甲基;R 1 , R 2 and R 3 each independently represent hydrogen or methyl;
R4表示经取代或未经取代的C1-C20的直链或支链的烷基、经取代或未经取代的C2-C20的直链或支链的烯基、或者经取代或未经取代的C6-C20的芳香族烃基;R 4 represents substituted or unsubstituted C 1 -C 20 linear or branched alkyl, substituted or unsubstituted C 2 -C 20 linear or branched alkenyl, or substituted Or unsubstituted C 6 -C 20 aromatic hydrocarbon groups;
AO表示C2-C20的氧基亚烷基;AO represents C 2 -C 20 oxyalkylene;
x表示0至2的整数;x represents an integer from 0 to 2;
y表示0或1;y represents 0 or 1;
n表示2以上。n represents 2 or more.
另外,光起始剂(C)包括光起始剂(C-1),其中光起始剂(C-1)为下述式(II)所示的化合物。In addition, the photoinitiator (C) includes a photoinitiator (C-1), wherein the photoinitiator (C-1) is a compound represented by the following formula (II).
式(II)中,In formula (II),
A表示氢、卤素、硝基、C1-C20的直链或支链的烷基、C3-C10的烷基环烷基、C4-C10的烷基环烷基、C4-C10的环烷基烷基、其中C1-C20的直链或支链的烷基、C3-C10的烷基环烷基、C4-C10的烷基环烷基、C4-C10的环烷基烷基、中所含有的任一个-CH2-可被O、N、S或羰基所取代;A represents hydrogen, halogen, nitro, C 1 -C 20 straight or branched chain alkyl, C 3 -C 10 alkyl cycloalkyl, C 4 -C 10 alkyl cycloalkyl, C 4 -C 10 cycloalkylalkyl, Wherein C 1 -C 20 linear or branched alkyl, C 3 -C 10 alkyl cycloalkyl, C 4 -C 10 alkyl cycloalkyl, C 4 -C 10 cycloalkyl alkane base, Any -CH 2 - contained in can be substituted by O, N, S or carbonyl;
R5表示氢、卤素、C1-C20的直链或支链的烷基、C4-C20的环烷基烷基或C2-C20的烯基,其中C1-C20的直链或支链的烷基、C4-C20的环烷基烷基以及C2-C20的烯基中所含有的-CH2-可被O、N、S或羰基所取代,两个R5之间可形成环状结构;R 5 represents hydrogen, halogen, C 1 -C 20 straight or branched chain alkyl, C 4 -C 20 cycloalkylalkyl or C 2 -C 20 alkenyl, wherein C 1 -C 20 The -CH 2 - contained in the straight or branched chain alkyl, C 4 -C 20 cycloalkyl alkyl and C 2 -C 20 alkenyl may be substituted by O, N, S or carbonyl, two A ring structure can be formed between each R 5 ;
R6表示C1-C20的直链或支链的烷基、C2-C20的烯基、C3-C20的环烷基、C4-C20的环烷基烷基、C4-C20的烷基环烷基、C6-C20的芳基或C6-C20的烷基芳基,其中这些基团中的一个或多个氢可各自独立被烷基、卤素、羟基或硝基所取代,并且R6中的-CH2-可被O、N、S或羰基所取代;R 6 represents C 1 -C 20 straight or branched chain alkyl, C 2 -C 20 alkenyl, C 3 -C 20 cycloalkyl, C 4 -C 20 cycloalkyl alkyl, C 4 - C20 alkylcycloalkyl group, C6 - C20 aryl group or C6 - C20 alkylaryl group, wherein one or more hydrogens in these groups can each independently be replaced by alkyl, halogen , hydroxy or nitro, and -CH 2 - in R 6 can be substituted by O, N, S or carbonyl;
R7表示C1-C20的直链或支链的烷基、C3-C20的环烷基、C4-C20的环烷基烷基、C4-C20的烷基环烷基、C6-C20的芳基、C6-C20的烷基芳基、下述式(II-A)所示的基团、下述式(II-B)所示的基团或下述式(II-C)所示的基团,当R7表示C1-C20的直链或支链的烷基、C3-C20的环烷基、C4-C20的环烷基烷基、C4-C20的烷基环烷基、C6-C20的芳基或C6-C20的烷基芳基时,这些基团中的一个或多个氢可各自独立被烷基、卤素、羟基或硝基所取代,并且R7中的-CH2-可被O、N、S或羰基所取代;R 7 represents a C 1 -C 20 straight or branched chain alkyl group, a C 3 -C 20 cycloalkyl group, a C 4 -C 20 cycloalkyl alkyl group, a C 4 -C 20 alkylcycloalkane group, a C 6 -C 20 aryl group, a C 6 -C 20 alkylaryl group, a group represented by the following formula (II-A), a group represented by the following formula (II-B), or In the group represented by the following formula (II-C), when R 7 represents a C 1 -C 20 straight or branched chain alkyl group, a C 3 -C 20 cycloalkyl group, a C 4 -C 20 cyclic alkyl group In the case of alkylalkyl, C4 - C20 alkylcycloalkyl, C6 - C20 aryl, or C6 - C20 alkylaryl, one or more hydrogens in these groups may each independently substituted by alkyl, halogen, hydroxy or nitro, and -CH 2 - in R 7 may be substituted by O, N, S or carbonyl;
R6与R7之间可形成环状结构;A ring structure can be formed between R 6 and R 7 ;
式(II-A)中,m表示0或1的整数,R11表示氢、C1-C8的烷基、或苯基,R12、R13及R14各自独立表示氢或C1-C4的烷基;In formula (II-A), m represents an integer of 0 or 1, R 11 represents hydrogen, a C 1 -C 8 alkyl group, or a phenyl group, and R 12 , R 13 and R 14 each independently represent hydrogen or C 1 - C 4 alkyl;
式(II-B)中,p是0至3的整数;In formula (II-B), p is an integer from 0 to 3;
式(II-C)中,R15表示氢、C1-C8的烷基、或苯基,Ar是经取代或未经取代的苯基、萘基、呋喃基、噻吩基或吡啶基;In formula (II-C), R 15 represents hydrogen, C 1 -C 8 alkyl, or phenyl, and Ar is substituted or unsubstituted phenyl, naphthyl, furyl, thienyl or pyridyl;
R8表示N-吗啉基、N-呱啶基、N-吡咯基或N-二烷基,其中这些基团中的一个或多个氢可被卤素或羟基所取代;R 8 represents N-morpholinyl, N-pyridyl, N-pyrrolyl or N-dialkyl, wherein one or more hydrogens in these groups may be replaced by halogen or hydroxyl;
R9、R9’各自独立表示C1-C20的直链或支链的烷基、C4-C20的环烷基、C2-C20的烯基、C6-C20的芳基或C6-C20的烷基芳基,其中这些基团中的一个或多个氢可各自独立被烷基、卤素、羟基或硝基所取代,并且这些基团中的-CH2-可被-O-取代;或者R9及R9’可以彼此相连或经由-O-、-S-或-NH-形成五元环或六元环;R 9 and R 9 ' each independently represent a C 1 -C 20 straight or branched chain alkyl group, a C 4 -C 20 cycloalkyl group, a C 2 -C 20 alkenyl group, and a C 6 -C 20 aryl group or C 6 -C 20 alkylaryl groups, wherein one or more hydrogens in these groups may be independently substituted by alkyl, halogen, hydroxyl or nitro, and -CH 2 - may be substituted by -O-; or R 9 and R 9 ' may be connected to each other or via -O-, -S- or -NH- to form a five-membered or six-membered ring;
R10表示C1-C20的直链或支链的烷基、C4-C20的环烷基、C4-C20的烷基环烷基、C2-C20的烯基、C6-C20的芳基或C6-C20的烷基芳基,其中这些基团中的-CH2-可被-O-或-S-取代,并且这些基团的一个或多个氢可以独立地被选自烷基、卤素、硝基、氰基、SR16或OR17所取代;R 10 represents C 1 -C 20 straight or branched chain alkyl, C 4 -C 20 cycloalkyl, C 4 -C 20 alkyl cycloalkyl, C 2 -C 20 alkenyl, C 6 - C20 aryl or C6 - C20 alkylaryl, wherein -CH2- in these groups may be substituted by -O- or -S-, and one or more hydrogens of these groups may be independently substituted by alkyl, halogen, nitro, cyano, SR 16 or OR 17 ;
R16和R17各自独立表示氢、或者C1-C20的直链或支链的烷基。R 16 and R 17 each independently represent hydrogen, or a C 1 -C 20 straight-chain or branched-chain alkyl group.
在本发明的一实施例中,上述的混合物还包括含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)。In an embodiment of the present invention, the above-mentioned mixture further comprises an ethylenically unsaturated monomer (a-1-3) containing a maleimide group or two alkenyl groups.
在本发明的一实施例中,上述的含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)至少包括一种选自下述式(1)至式(5)所示的单体。In an embodiment of the present invention, the above-mentioned ethylenically unsaturated monomer (a-1-3) containing a maleimide group or two alkenyl groups at least includes one selected from the following formulas (1) to A monomer represented by formula (5).
式(4)及式(5)中,R18、R19及R20各自独立表示氢、或者C1-C30的直链或支链的烷基。In formula (4) and formula (5), R 18 , R 19 and R 20 each independently represent hydrogen or a C 1 -C 30 linear or branched alkyl group.
在本发明的一实施例中,上述的碱可溶性树脂(A-1)含有乙烯性不饱和基。In an embodiment of the present invention, the above-mentioned alkali-soluble resin (A-1) contains an ethylenically unsaturated group.
在本发明的一实施例中,上述的光起始剂(C)还包括光起始剂(C-2),其中光起始剂(C-2)为下述式(III)所示的化合物。In an embodiment of the present invention, the above-mentioned photoinitiator (C) further includes a photoinitiator (C-2), wherein the photoinitiator (C-2) is represented by the following formula (III) compound.
式(III)中,In formula (III),
Ar1表示邻亚芳基或邻亚杂芳基,邻亚芳基或邻亚杂芳基是以相邻的两个原子与Y1及羰基形成环状结构,其余原子上的取代基各自选自由氢;卤素;C1-C12的烷基;C5-C7的环烷基;经C5-C7的环烷基取代的C1-C4的烷基;苯基;经一个或多个C1-C4的烷基、羧基、C1-C12的烷基酰基、C1-C12的芳基酰基、杂芳基酰基、JT4、苯基、卤素或CN取代的苯基;C1-C4的烷基苯甲氧基;经取代的C1-C4的烷氧基、C1-C3的亚烷基二氧基;;C1-C12的烷基硫基;C1-C4的烷基苯硫基;经取代的C1-C4的烷基硫基;CN;羧基;C1-C12的烷氧基甲酰基;芳基酰基;杂芳基酰基及JT5所组成的群组;或者Ar 1 represents an o-arylene group or an o-hetero-arylene group, and the o-arylene group or the o-hetero arylene group forms a ring structure with Y 1 and a carbonyl group by two adjacent atoms, and the substituents on the remaining atoms are selected from each other. Free hydrogen; halogen; C 1 -C 12 alkyl; C 5 -C 7 cycloalkyl; C 1 -C 4 alkyl substituted with C 5 -C 7 cycloalkyl; phenyl; or more C 1 -C 4 alkyl, carboxyl, C 1 -C 12 alkyl acyl, C 1 -C 12 aryl acyl, heteroaryl acyl, JT 4 , phenyl, halogen or CN substituted Phenyl; C 1 -C 4 alkylbenzyloxy; via Substituted C 1 -C 4 alkoxy, C 1 -C 3 alkylenedioxy; ; C 1 -C 12 alkylthio; C 1 -C 4 alkylphenylthio; Substituted C 1 -C 4 alkylthio; CN; carboxyl; C 1 -C 12 alkoxyformyl; aryl acyl; heteroaryl acyl and the group consisting of JT 5 ; or
Ar1的上述取代基中相邻的两个取代基之间或取代基与Ar1之间经由单键、碳原子、羰基形成环状结构;In the above-mentioned substituents of Ar 1 , a cyclic structure is formed between two adjacent substituents or between the substituents and Ar 1 via a single bond, a carbon atom, and a carbonyl group;
其中,JT4及JT5中,J选自由O、S及NT6所组成的群组;Among them, in JT 4 and JT 5 , J is selected from the group consisting of O, S and NT 6 ;
Y1选自由O、S、NT7、BT7、CT2T3、SiT2T3、S=O及C=O所组成的群组;Y 1 is selected from the group consisting of O, S, NT 7 , BT 7 , CT 2 T 3 , SiT 2 T 3 , S=O and C=O;
T1表示氢、C1-C18的烷基或C1-C18的烷氧基;或者T 1 represents hydrogen, C 1 -C 18 alkyl or C 1 -C 18 alkoxy; or
T1表示经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基或芳酰氧基取代和/或被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烷基;C2-C18的烯基;经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基或芳酰氧基取代和/或被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烯基,或上述两者情况同时存在;或者T 1 represents via one or more halogen, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 alkane C 2 -C 18 alkyl substituted with acyloxy or aroyloxy and/or inserted by C 5 -C 7 cycloalkylene, phenylene, O, S or NT 4 ; C 2 -C 18 alkenyl; via one or more halogens, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 Alkanoyloxy or aroyloxy substituted and/or C2 - C18 alkenyl inserted by C5 - C7 cycloalkylene, phenylene, O, S or NT4, or both conditions exist simultaneously; or
T1表示C5-C7的环烷基,或经一个或多个C1-C4的烷基、苯基、卤素或CN取代的C5-C7的环烷基;或者T 1 represents a C 5 -C 7 cycloalkyl, or a C 5 -C 7 cycloalkyl substituted with one or more C 1 -C 4 alkyl, phenyl, halogen or CN; or
T1表示苯基,或经一个或多个C1-C4的烷基、C1-C4的烷氧基、苯基、卤素或CN取代的苯基;或者T 1 represents phenyl, or phenyl substituted with one or more C 1 -C 4 alkyl, C 1 -C 4 alkoxy, phenyl, halogen or CN; or
T1表示萘基、苯甲酰基或苯氧基羰基,其中苯甲酰基及苯氧基羰基的苯基任意被一个或两个以上卤素、T4、C5-C6的环烷基、CN、OH或JT4所取代;T 1 represents naphthyl, benzoyl or phenoxycarbonyl, wherein the phenyl group of benzoyl and phenoxycarbonyl is optionally replaced by one or more halogens, T 4 , C 5 -C 6 cycloalkyl, CN , OH or JT 4 ;
T2及T3各自独立表示氢、C1-C18的烷基、经羧基取代的C1-C5的烷基、经C1-C4的烷氧基酰基取代的C1-C5的烷基或经取代的C1-C4的烷基;或者T 2 and T 3 each independently represent hydrogen, C 1 -C 18 alkyl, C 1 -C 5 alkyl substituted with carboxyl, C 1 -C 5 substituted with C 1 -C 4 alkoxyacyl alkyl or substituted C 1 -C 4 alkyl; or
T2及T3各自独立表示经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基、芳酰氧基取代的C2-C18的烷基,或是被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烷基,或是上述两种情况同时存在;或者T 2 and T 3 each independently represent via one or more halogen, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 alkanoyloxy, aroyloxy substituted C 2 -C 18 alkyl, or inserted by C 5 -C 7 cycloalkylene, phenylene, O, S or NT 4 C 2 -C 18 alkyl, or both; or
T2及T3各自独立表示C5-C7的环烷基,或经一个或多个C1-C4的烷基、苯基、卤素或CN取代的C5-C7的环烷基;或者T 2 and T 3 each independently represent a C 5 -C 7 cycloalkyl, or a C 5 -C 7 cycloalkyl substituted with one or more C 1 -C 4 alkyl, phenyl, halogen or CN ;or
T2及T3各自独立表示苯基,或经一个或多个C1-C4的烷基、C1-C4的烷氧基、羧基、C1-C12的烷基酰基、C5-C6的环烷基甲酰基或C5-C6的环烷基取代的C2-C4的烷基酰基、芳基酰基、JT4、苯基、卤素或CN取代的苯基;或者T 2 and T 3 each independently represent a phenyl group, or via one or more C 1 -C 4 alkyl groups, C 1 -C 4 alkoxy groups, carboxyl groups, C 1 -C 12 alkyl acyl groups, C 5 -C 6 cycloalkylformyl or C 5 -C 6 cycloalkyl substituted C 2 -C 4 alkyl acyl, aryl acyl, JT 4 , phenyl, halogen or CN substituted phenyl; or
T2及T3各自与其共同所连结的碳原子或硅原子一起构成环状结构且成环的原子数为4至7;或者Each of T 2 and T 3 together with the carbon atom or silicon atom to which they are commonly attached forms a ring structure and the number of atoms forming the ring is 4 to 7; or
T2及T3各自与相邻的取代基一起构成环状结构且成环的原子数为4至7;Each of T 2 and T 3 together with the adjacent substituents forms a cyclic structure and the number of atoms forming the ring is 4 to 7;
T4表示C1-C4的烷基;T 4 represents a C 1 -C 4 alkyl group;
T5表示氢、C1-C18的烷基、经C1-C4的烷氧基酰基取代的C1-C5的烷基或经取代的C1-C4的烷基;或者T 5 represents hydrogen, C 1 -C 18 alkyl, C 1 -C 5 alkyl substituted with C 1 -C 4 alkoxyacyl, or C 1 -C 5 alkyl substituted C 1 -C 4 alkyl; or
T5表示经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基或芳酰氧基取代的C2-C18的烷基,或是被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烷基,或是上述两种情况同时存在;或者T 5 represents via one or more halogen, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 alkane C 2 -C 18 alkyl substituted with acyloxy or aroyloxy, or C 2 -C 18 inserted by C 5 -C 7 cycloalkylene, phenylene, O, S or NT 4 , or both of the above; or
T5表示C5-C7的环烷基,或经一个或多个C1-C4的烷基、苯基、卤素或CN取代的C5-C7的环烷基;或者T 5 represents a C 5 -C 7 cycloalkyl, or a C 5 -C 7 cycloalkyl substituted with one or more C 1 -C 4 alkyl, phenyl, halogen or CN; or
T5表示苯基,或经一个或多个C1-C12的烷基、羧基、C1-C12的烷基酰基、被亚苯基、O、S或NT4插入的C2-C12的烷基酰基、C5-C6的环烷基甲酰基、C5-C6的环烷基取代的C2-C4的烷基酰基、芳基酰基、杂芳基酰基、JT4、苯基、卤素、CN或NO2取代的苯基;或者T 5 represents phenyl, or C 2 -C through one or more C 1 -C 12 alkyl, carboxyl, C 1 -C 12 alkylacyl, C 2 -C inserted by phenylene, O, S or NT 4 12 alkyl acyl, C 5 -C 6 cycloalkyl formyl, C 5 -C 6 cycloalkyl substituted C 2 -C 4 alkyl acyl, aryl acyl, heteroaryl acyl, JT 4 , phenyl, halogen, CN or NO substituted phenyl ; or
T5表示C1-C4的烷基酰基、C1-C4的共轭烯酰基、苯甲酰基或苯氧基羰基,其中苯甲酰基及苯氧基羰基中的苯基可任意被一个或两个以上卤素、T4、环戊基、环己基、CN、OH或JT4取代;或者T 5 represents a C 1 -C 4 alkyl acyl group, a C 1 -C 4 conjugated alkenoyl group, a benzoyl group or a phenoxycarbonyl group, wherein the phenyl group in the benzoyl group and the phenoxycarbonyl group can be arbitrarily replaced by one or two or more halogen, T 4 , cyclopentyl, cyclohexyl, CN, OH or JT 4 substitutions; or
T5经由单键、碳原子或羰基与Ar1中的芳环形成环状结构;T 5 forms a cyclic structure with the aromatic ring in Ar 1 via a single bond, a carbon atom or a carbonyl group;
T6及T7各自独立表示氢、C1-C18的烷基、经C1-C4的烷氧基酰基取代的C1-C5的烷基或经取代的C1-C4的烷基;或者T 6 and T 7 each independently represent hydrogen, a C 1 -C 18 alkyl group, a C 1 -C 5 alkyl group substituted with a C 1 -C 4 alkoxyacyl group, or a C 1 -C 5 alkyl group substituted with a C 1 -C 4 alkoxyacyl group. substituted C 1 -C 4 alkyl; or
T6及T7各自独立表示经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基或芳酰氧基取代的C2-C18的烷基,被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烷基,或是上述两种情况同时存在;或者T 6 and T 7 each independently represent through one or more halogen, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 alkanoyloxy or aroyloxy substituted C 2 -C 18 alkyl, C 2 inserted by C 5 -C 7 cycloalkylene, phenylene, O, S or NT 4 -C 18 alkyl, or both; or
T6及T7各自独立表示C5-C7的环烷基,或经一个或多个C1-C4的烷基、苯基、卤素或CN取代的C5-C7的环烷基;或者 T6 and T7 each independently represent a C5 - C7 cycloalkyl, or a C5 -C7 cycloalkyl substituted with one or more C1 - C4 alkyl, phenyl, halogen or CN ;or
T6及T7各自独立表示苯基,或经一个或多个C1-C4的烷基、羧基、C1-C12的烷基酰基、C5-C6的环烷基甲酰基或C5-C6的环烷基取代的C2-C4的烷基酰基、芳基酰基、JT4、苯基、卤素或CN取代的苯基;或者T 6 and T 7 each independently represent a phenyl group, or via one or more C 1 -C 4 alkyl groups, carboxyl groups, C 1 -C 12 alkyl acyl groups, C 5 -C 6 cycloalkylformyl groups or C5 - C6 cycloalkyl substituted C2 - C4 alkylacyl, arylacyl, JT4 , phenyl, halogen or CN substituted phenyl; or
T6各自经由单键、碳原子、羰基与Ar1中的芳环形成环状结构;Each of T 6 forms a cyclic structure via a single bond, a carbon atom, a carbonyl group and an aromatic ring in Ar 1 ;
其中当Ar1为经取代的咔唑基团时,Y1不是C、O、S或NT7。Wherein when Ar 1 is a substituted carbazole group, Y 1 is not C, O, S or NT 7 .
在本发明的一实施例中,基于碱可溶性树脂(A)为100重量份,碱可溶性树脂(A-1)的使用量为50重量份至100重量份,含乙烯性不饱和基的化合物(B)的使用量为50重量份至600重量份,光起始剂(C)的使用量为10重量份至140重量份,光起始剂(C-1)的使用量为10重量份至90重量份,并且溶剂(D)的使用量为500重量份至5000重量份。In an embodiment of the present invention, based on 100 parts by weight of the alkali-soluble resin (A), the amount of the alkali-soluble resin (A-1) used is 50 to 100 parts by weight, and the ethylenically unsaturated group-containing compound ( The usage amount of B) is 50 to 600 parts by weight, the usage amount of the photoinitiator (C) is 10 to 140 parts by weight, and the usage amount of the photoinitiator (C-1) is 10 to 100 parts by weight 90 parts by weight, and the solvent (D) is used in an amount of 500 parts by weight to 5000 parts by weight.
在本发明的一实施例中,基于混合物的总使用量为100重量份,含氧基亚烷基的乙烯性不饱和单体(a-1-2)的使用量为1重量份至55重量份。In an embodiment of the present invention, based on the total usage amount of the mixture being 100 parts by weight, the usage amount of the oxyalkylene-containing ethylenically unsaturated monomer (a-1-2) is 1 part by weight to 55 parts by weight share.
在本发明的一实施例中,基于混合物的总使用量为100重量份,含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)的使用量为5重量份至50重量份。In an embodiment of the present invention, based on the total usage amount of the mixture is 100 parts by weight, the usage amount of the ethylenically unsaturated monomer (a-1-3) containing maleimide group or two alkenyl groups is 5 to 50 parts by weight.
在本发明的一实施例中,基于碱可溶性树脂(A)为100重量份,光起始剂(C-2)的使用量为5重量份至50重量份。In an embodiment of the present invention, based on 100 parts by weight of the alkali-soluble resin (A), the amount of the photoinitiator (C-2) used is 5 parts by weight to 50 parts by weight.
本发明亦提供一种间隙体,其是由上述感光性树脂组合物所形成。The present invention also provides a spacer formed from the above-mentioned photosensitive resin composition.
本发明亦提供一种保护膜,由上述感光性树脂组合物所形成。The present invention also provides a protective film formed from the above-mentioned photosensitive resin composition.
本发明还提供一种液晶显示元件,其包括上述的间隙体。The present invention also provides a liquid crystal display element comprising the above-mentioned spacer.
本发明还提供一种液晶显示元件,其包括上述的保护膜。The present invention also provides a liquid crystal display element comprising the above protective film.
基于上述,本发明通过于感光性树脂组合物组合特定的碱可溶性树脂(A-1)以及特定的光起始剂(C-1)改善感光性树脂组合物的感度,以及形成段差较优异的间隙体,因此适用于间隙体、保护膜以及液晶显示元件。Based on the above, the present invention improves the sensitivity of the photosensitive resin composition by combining the specific alkali-soluble resin (A-1) and the specific photoinitiator (C-1) with the photosensitive resin composition, and forms an excellent step difference. It is suitable for spacers, protective films and liquid crystal display elements.
为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并作详细说明如下。In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, the following examples are given and described in detail as follows.
具体实施方式Detailed ways
在下文中,是以(甲基)丙烯酸表示丙烯酸和/或甲基丙烯酸,并以(甲基)丙烯酸酯表示丙烯酸酯和/或甲基丙烯酸酯;同样地,以(甲基)丙烯酰基表示丙烯酰基和/或甲基丙烯酰基;以(甲基)丙烯酰胺表示丙烯酰胺和/或甲基丙烯酰胺。In the following text, acrylic acid and/or methacrylic acid is represented by (meth)acrylic acid, and acrylate and/or methacrylic acid is represented by (meth)acrylate; similarly, propylene is represented by (meth)acryloyl Acyl and/or methacryloyl; by (meth)acrylamide acrylamide and/or methacrylamide.
<感光性树脂组合物><Photosensitive resin composition>
本发明提供一种感光性树脂组合物,其包括碱可溶性树脂(A)、含乙烯性不饱和基的化合物(B)、光起始剂(C)以及溶剂(D)。此外,若需要,感光性树脂组合物可选择性地包括添加剂(E)。以下将详细说明用于本发明的感光性树脂组合物的各个成分:The present invention provides a photosensitive resin composition comprising an alkali-soluble resin (A), an ethylenically unsaturated group-containing compound (B), a photoinitiator (C), and a solvent (D). Furthermore, the photosensitive resin composition may optionally include an additive (E) if necessary. Each component of the photosensitive resin composition used in the present invention will be described in detail below:
碱可溶性树脂(A)Alkali Soluble Resin (A)
本发明的碱可溶性树脂(A)包括碱可溶性树脂(A-1),并可还包括其他碱可溶性树脂(A-2)。The alkali-soluble resin (A) of the present invention includes the alkali-soluble resin (A-1), and may further include other alkali-soluble resins (A-2).
碱可溶性树脂(A-1)Alkali Soluble Resin (A-1)
碱可溶性树脂(A-1)是由混合物经共聚合而得,其中混合物(在后述碱可溶性树脂(A-1)的合成例中,亦称为“单体混合物”)包括含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)及含氧基亚烷基的乙烯性不饱和单体(a-1-2)。The alkali-soluble resin (A-1) is obtained by copolymerizing a mixture, wherein the mixture (also referred to as a "monomer mixture" in the synthesis example of the alkali-soluble resin (A-1) described later) includes a carboxylic acid group-containing Or the ethylenically unsaturated monomer (a-1-1) of a carboxylic acid anhydride group, and the ethylenically unsaturated monomer (a-1-2) containing an oxyalkylene group.
另外,上述混合物可还包括含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3),并可选择性地还包括其他乙烯性不饱和单体(a-1-4)。In addition, the above mixture may further include ethylenically unsaturated monomers (a-1-3) containing maleimide groups or two alkenyl groups, and optionally other ethylenically unsaturated monomers (a-1-3) -1-4).
碱可溶性树脂(A-1)可进一步含有乙烯性不饱和基。具体来说,含有乙烯性不饱和基的碱可溶性树脂(A-1)可使上述混合物所得的聚合物进一步与乙烯性不饱和单体(a-1-5)进行缩合反应而得。The alkali-soluble resin (A-1) may further contain an ethylenically unsaturated group. Specifically, the ethylenically unsaturated group-containing alkali-soluble resin (A-1) can be obtained by further condensation-reacting the polymer obtained from the mixture with the ethylenically unsaturated monomer (a-1-5).
以下详细说明形成碱可溶性树脂(A-1)的各种单体:Various monomers forming the alkali-soluble resin (A-1) are described in detail below:
含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)Ethylenically unsaturated monomer containing carboxylic acid group or carboxylic acid anhydride group (a-1-1)
含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)由于具有羧酸基或羧酸酐基(以下简称为“酸基”),因此可使所合成的聚合物在侧链上具有酸基,而具有碱可溶性。含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)的具体例包括丙烯酸、甲基丙烯酸、2-丙烯酰乙氧基丁二酸酯、2-甲基丙烯酰基乙氧基丁二酸酯(HOMS)、衣康酸、ω-羧基-聚己内酯单丙烯酸酯(ω-carboxy-polycaprolactone monoacrylate)等的含羧酸基的乙烯性不饱和单体;马来酸酐、衣康酸酐等的含羧酸酐基的乙烯性不饱和单体、或上述单体的组合。含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)的具体例较佳为包括丙烯酸、甲基丙烯酸、2-甲基丙烯酰基乙氧基丁二酸酯、或其组合。Since the ethylenically unsaturated monomer (a-1-1) containing a carboxylic acid group or a carboxylic acid anhydride group has a carboxylic acid group or a carboxylic acid anhydride group (hereinafter referred to as "acid group"), the synthesized polymer can be It has an acid group on the side chain and has alkali solubility. Specific examples of the carboxylic acid group or carboxylic acid anhydride group-containing ethylenically unsaturated monomer (a-1-1) include acrylic acid, methacrylic acid, 2-acryloylethoxysuccinate, 2-methacryloyl Ethoxylated succinate (HOMS), itaconic acid, ω-carboxy-polycaprolactone monoacrylate (ω-carboxy-polycaprolactone monoacrylate) and other carboxylic acid group-containing ethylenically unsaturated monomers; male A carboxylic acid anhydride group-containing ethylenically unsaturated monomer such as acid anhydride and itaconic acid anhydride, or a combination of the above monomers. Specific examples of the carboxylic acid group- or carboxylic acid anhydride group-containing ethylenically unsaturated monomer (a-1-1) preferably include acrylic acid, methacrylic acid, 2-methacryloylethoxysuccinate, or its combination.
基于混合物的总使用量为100重量份,含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)的使用量可为10重量份至90重量份,较佳为15重量份至85重量份,更佳为20重量份至80重量份。Based on the total usage amount of the mixture being 100 parts by weight, the usage amount of the carboxylic acid group or carboxylic acid anhydride group-containing ethylenically unsaturated monomer (a-1-1) may be 10 parts by weight to 90 parts by weight, preferably 15 parts by weight Parts by weight to 85 parts by weight, more preferably 20 parts by weight to 80 parts by weight.
含氧基亚烷基的乙烯性不饱和单体(a-1-2)Oxyalkylene-containing ethylenically unsaturated monomer (a-1-2)
含氧基亚烷基的乙烯性不饱和单体(a-1-2)为具有2个以上的氧基亚烷基的单体。具体来说,含氧基亚烷基的乙烯性不饱和单体(a-1-2)具有式(I)所示的结构。The oxyalkylene group-containing ethylenically unsaturated monomer (a-1-2) is a monomer having two or more oxyalkylene groups. Specifically, the oxyalkylene group-containing ethylenically unsaturated monomer (a-1-2) has a structure represented by formula (I).
式(I)中,In formula (I),
R1、R2及R3各自独立表示氢或甲基,较佳为各自独立表示氢;R 1 , R 2 and R 3 each independently represent hydrogen or methyl, preferably each independently represents hydrogen;
R4表示经取代或未经取代的C1-C20的直链或支链的烷基、经取代或未经取代的C2-C20的直链或支链的烯基、或者经取代或未经取代的C6-C20的芳香族烃基,较佳为C1-C20的直链状的烷基、未经取代的C6-C20的芳香族烃基、经芳香族烃基取代的C6-C20的芳香族烃基、或经C1-C10的烷基取代的C6-C20的芳香族烃基,更佳为甲基、苯基、4-壬基苯基(4-Nonylphenyl)或者联苯基。R 4 represents substituted or unsubstituted C 1 -C 20 linear or branched alkyl, substituted or unsubstituted C 2 -C 20 linear or branched alkenyl, or substituted Or an unsubstituted C 6 -C 20 aromatic hydrocarbon group, preferably a C 1 -C 20 straight-chain alkyl group, an unsubstituted C 6 -C 20 aromatic hydrocarbon group, substituted with an aromatic hydrocarbon group C 6 -C 20 aromatic hydrocarbon group, or C 6 -C 20 aromatic hydrocarbon group substituted by C 1 -C 10 alkyl group, more preferably methyl, phenyl, 4-nonylphenyl (4-nonylphenyl) -Nonylphenyl) or biphenyl.
AO表示C2-C20的氧基亚烷基,较佳为C2-C10的氧基亚烷基,更佳为C2-C5的氧基亚烷基,再更佳为氧基亚乙基;AO represents a C 2 -C 20 oxyalkylene group, preferably a C 2 -C 10 oxyalkylene group, more preferably a C 2 -C 5 oxyalkylene group, still more preferably an oxy group Ethylene;
x表示0至2的整数;x represents an integer from 0 to 2;
y表示0或1;y represents 0 or 1;
n表示2以上,较佳为2至200,更佳为2至50,再更佳为2至15。n represents 2 or more, preferably 2 to 200, more preferably 2 to 50, still more preferably 2 to 15.
值得注意的是,含氧基亚烷基的乙烯性不饱和单体(a-1-2)可含有1种或者2种以上的氧基亚烷基。Notably, the oxyalkylene group-containing ethylenically unsaturated monomer (a-1-2) may contain one or two or more types of oxyalkylene groups.
含氧基亚烷基的乙烯性不饱和单体(a-1-2)的具体例包括邻-苯基苯氧基乙二醇丙烯酸酯(EO1摩尔)/邻-苯基苯氧基二乙二醇丙烯酸酯(EO2摩尔)的混合物(邻-苯基苯氧基乙二醇丙烯酸酯与邻-苯基苯氧基二乙二醇丙烯酸酯之间的摩尔比1:1)、邻-苯基苯氧基二乙二醇(甲基)丙烯酸酯(EO2摩尔)、苯氧基二乙二醇(甲基)丙烯酸酯(EO2摩尔)、苯氧基聚乙二醇(甲基)丙烯酸酯(EO4摩尔)、甲氧基聚乙二醇(甲基)丙烯酸酯(EO9摩尔)、甲氧基聚乙二醇(甲基)丙烯酸酯(EO12至13摩尔)、甲氧基三乙二醇(甲基)丙烯酸(EO3摩尔)、乙氧基二乙二醇(甲基)丙烯酸酯(EO2摩尔)、丁氧基二乙二醇(甲基)丙烯酸酯(EO2摩尔)、2-乙基己氧基二乙二醇(甲基)丙烯酸酯(EO2摩尔)、甲氧基二丙二醇(甲基)丙烯酸酯(PO2摩尔)、甲氧基聚丙二醇(甲基)丙烯酸酯(PO4摩尔)、壬基苯氧基聚乙二醇(甲基)丙烯酸酯(EO4至17摩尔)、壬基苯氧基聚丙二醇(甲基)丙烯酸酯(PO5摩尔)、经环氧乙烷(EO)改质的甲酚(甲基)丙烯酸(EO2摩尔)、或上述单体的组合。Specific examples of the oxyalkylene-containing ethylenically unsaturated monomer (a-1-2) include o-phenylphenoxyethylene glycol acrylate (EO 1 mole)/o-phenylphenoxydiethyl A mixture of glycol acrylates (EO2 moles) (1:1 molar ratio between o-phenylphenoxyethylene glycol acrylate and o-phenylphenoxydiethylene glycol acrylate), o-benzene phenoxydiethylene glycol (meth)acrylate (EO2 mole), phenoxydiethylene glycol (meth)acrylate (EO2 mole), phenoxy polyethylene glycol (meth)acrylate (EO4 moles), methoxypolyethylene glycol (meth)acrylate (EO9 moles), methoxypolyethylene glycol (meth)acrylates (EO12 to 13 moles), methoxytriethylene glycol (Meth)acrylic acid (EO3 moles), ethoxydiethylene glycol (meth)acrylate (EO2 moles), butoxydiethylene glycol (meth)acrylate (EO2 moles), 2-ethyl Hexyloxydiethylene glycol (meth)acrylate (EO2 mole), methoxydipropylene glycol (meth)acrylate (PO2 mole), methoxypolypropylene glycol (meth)acrylate (PO4 mole), Nonylphenoxy polyethylene glycol (meth)acrylate (EO4 to 17 moles), nonylphenoxy polypropylene glycol (meth)acrylate (PO5 moles), modified with ethylene oxide (EO) of cresol (meth)acrylic acid (EO2 moles), or a combination of the above monomers.
含氧基亚烷基的乙烯性不饱和单体(a-1-2)的具体例较佳为包括邻-苯基苯氧基乙二醇丙烯酸酯/邻-苯基苯氧基二乙二醇丙烯酸酯(苯基苯氧基乙二醇丙烯酸酯与苯基苯氧基二乙二醇丙烯酸酯之间的摩尔比1:1)、苯氧基二乙二醇丙烯酸酯、甲氧基聚乙二醇丙烯酸酯(EO9摩尔)、甲氧基聚乙二醇丙烯酸酯(EO12至13摩尔)、壬基苯氧聚乙二醇丙烯酸酯(EO4至17摩尔)、壬基苯氧聚丙二醇丙烯酸酯(PO5摩尔)、或上述单体的组合。Specific examples of the oxyalkylene-containing ethylenically unsaturated monomer (a-1-2) preferably include o-phenylphenoxyethylene glycol acrylate/o-phenylphenoxydiethylene Alcohol acrylate (molar ratio between phenylphenoxyethylene glycol acrylate and phenylphenoxydiethylene glycol acrylate 1:1), phenoxydiethylene glycol acrylate, methoxypolyethylene glycol Ethylene glycol acrylate (EO 9 moles), methoxy polyethylene glycol acrylate (EO12 to 13 moles), nonylphenoxy polyethylene glycol acrylate (EO4 to 17 moles), nonylphenoxy polypropylene glycol acrylate Esters (PO5 moles), or a combination of the above monomers.
在前文中,“EO”及“PO”分别表示氧基亚乙烷基及氧基亚丙烷基。“EO”及“PO”后面所记载的摩尔数为每单位摩尔的化合物中,所含有的氧基亚乙烷基或氧基亚丙烷基的平均摩尔数。举例来说,“甲氧基聚乙二醇丙烯酸酯(EO9摩尔)”表示在每单位摩尔化合物中平均具有9摩尔的氧基亚乙烷基。In the foregoing, "EO" and "PO" represent oxyethylene and oxypropylene, respectively. The number of moles described after "EO" and "PO" is the average number of moles of an oxyethylene group or an oxypropylene group contained in a unit mole of the compound. For example, "methoxy polyethylene glycol acrylate (EO 9 moles)" means having an average of 9 moles of oxyethylene groups per unit mole of compound.
若无使用含氧基亚烷基的乙烯性不饱和单体(a-1-2),则感光性树脂组合物的感度不佳。If the oxyalkylene group-containing ethylenically unsaturated monomer (a-1-2) is not used, the sensitivity of the photosensitive resin composition is not good.
基于混合物的总使用量为100重量份,含氧基亚烷基的乙烯性不饱和单体(a-1-2)的使用量可为1重量份至55重量份,较佳为1重量份至50重量份,更佳为1重量份至45重量份。The oxyalkylene-containing ethylenically unsaturated monomer (a-1-2) may be used in an amount of 1 part by weight to 55 parts by weight, preferably 1 part by weight, based on 100 parts by weight of the total used amount of the mixture to 50 parts by weight, more preferably 1 to 45 parts by weight.
含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)Ethylenically unsaturated monomer containing maleimide group or two alkenyl groups (a-1-3)
含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)包括含马来酰亚胺基的乙烯性不饱和单体(亦可称为“具有环状结构的单体”)、含两个烯基的乙烯性不饱和单体(亦可称为聚合后可形成环状结构的单体)、或其组合。值得注意的是,上述这些单体在形成聚合物时,可形成具有环状结构的结构单元。The ethylenically unsaturated monomers (a-1-3) containing maleimide groups or two alkenyl groups include ethylenically unsaturated monomers containing maleimide groups (also called "cyclic unsaturated monomers" structural monomer"), an ethylenically unsaturated monomer containing two alkenyl groups (also referred to as a monomer that can form a cyclic structure upon polymerization), or a combination thereof. It is worth noting that the above-mentioned monomers can form structural units with a cyclic structure when forming polymers.
含马来酰亚胺基的乙烯性不饱和单体的具体例包括马来酰亚胺、苯甲基马来酰亚胺、苯基马来酰亚胺、萘基马来酰亚胺、N-邻-羟基苯基马来酰亚胺、N-间-羟基苯基马来酰亚胺、N-对-羟基苯基马来酰亚胺、N-邻-氯苯基马来酰亚胺、N-间-氯苯基马来酰亚胺、N-对-氯苯基马来酰亚胺、N-邻-甲基苯基马来酰亚胺、N-间-甲基苯基马来酰亚胺、N-对-甲基苯基马来酰亚胺、N-邻-甲氧基苯基马来酰亚胺、N-间-甲氧基苯基马来酰亚胺、N-对-甲氧基苯基马来酰亚胺等经芳香族取代的马来酰亚胺类;环己基马来酰亚胺、甲基马来酰亚胺、乙基马来酰亚胺、丙基马来酰亚胺、异丙基马来酰亚胺等经烷基所取代的马来酰亚胺类、或上述单体的组合。Specific examples of the maleimide group-containing ethylenically unsaturated monomer include maleimide, benzylmaleimide, phenylmaleimide, naphthylmaleimide, N - o-Hydroxyphenylmaleimide, N-m-hydroxyphenylmaleimide, N-p-hydroxyphenylmaleimide, N-o-chlorophenylmaleimide , N-m-chlorophenylmaleimide, N-p-chlorophenylmaleimide, N-o-methylphenylmaleimide, N-m-methylphenylmaleimide Laminide, N-p-methylphenylmaleimide, N-o-methoxyphenylmaleimide, N-m-methoxyphenylmaleimide, N- -Aromatically substituted maleimides such as p-methoxyphenylmaleimide; cyclohexylmaleimide, methylmaleimide, ethylmaleimide, Maleimides substituted with alkyl groups such as propylmaleimide and isopropylmaleimide, or a combination of the above monomers.
在一实施例中,含马来酰亚胺基的乙烯性不饱和单体包括式(1)所示的化合物、式(2)所示的化合物、式(3)所示的化合物、或其组合。In one embodiment, the maleimide group-containing ethylenically unsaturated monomer includes a compound represented by formula (1), a compound represented by formula (2), a compound represented by formula (3), or its combination.
含两个烯基的乙烯性不饱和单体例如可为1,6-二烯烃类。1,6-二烯烃包括式(4)所示的1,6-二烯烃、式(5)所示的1,6-二烯烃、或其组合。The ethylenically unsaturated monomer containing two alkenyl groups can be, for example, 1,6-diolefins. The 1,6-diene includes the 1,6-diene represented by the formula (4), the 1,6-diene represented by the formula (5), or a combination thereof.
式(4)及式(5)中,R18、R19及R20各自独立表示氢、或者C1-C30的直链或支链的烷基,较佳为氢或者C1-C10的直链或支链的烷基,更佳为氢或者C1-C5的直链或支链的烷基,再更佳为甲基。In formula (4) and formula (5), R 18 , R 19 and R 20 each independently represent hydrogen or a C 1 -C 30 linear or branched alkyl group, preferably hydrogen or C 1 -C 10 The straight-chain or branched-chain alkyl group is more preferably hydrogen or a C 1 -C 5 straight-chain or branched-chain alkyl group, more preferably methyl group.
1,6-二烯烃类的具体例包括二甲基-2,2'-[氧双(亚甲基)]双-2-丙烯酸酯、α-(烯丙氧基甲基)丙烯酸甲酯、或其组合。Specific examples of 1,6-diolefins include dimethyl-2,2'-[oxybis(methylene)]bis-2-acrylate, methyl α-(allyloxymeth)acrylate, or a combination thereof.
含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)的具体例较佳为包括苯甲基马来酰亚胺、苯基马来酰亚胺、环己基马来酰亚胺、二甲基-2,2'-[氧双(亚甲基)]双-2-丙烯酸酯、α-(烯丙氧基甲基)丙烯酸甲酯、或其组合。Specific examples of the ethylenically unsaturated monomer (a-1-3) containing a maleimide group or two alkenyl groups preferably include benzylmaleimide, phenylmaleimide, Cyclohexylmaleimide, dimethyl-2,2'-[oxybis(methylene)]bis-2-acrylate, methyl alpha-(allyloxymeth)acrylate, or a combination thereof .
当使用含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)时,则可进一步形成段差较优异的间隙体。When an ethylenically unsaturated monomer (a-1-3) containing a maleimide group or two alkenyl groups is used, a spacer with an excellent level difference can be further formed.
基于混合物的总使用量为100重量份,含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)的使用量可为5重量份至50重量份,较佳为8重量份至45重量份,更佳为10重量份至40重量份。Based on the total usage amount of the mixture being 100 parts by weight, the usage amount of the ethylenically unsaturated monomer (a-1-3) containing a maleimide group or two alkenyl groups may be 5 parts by weight to 50 parts by weight, It is preferably 8 to 45 parts by weight, more preferably 10 to 40 parts by weight.
其他乙烯性不饱和单体(a-1-4)Other ethylenically unsaturated monomers (a-1-4)
构成碱可溶性树脂(A-1)的混合物可还包括其他乙烯性不饱和单体(a-1-4)。其他乙烯性不饱和单体(a-1-4)为含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)、含氧基亚烷基的乙烯性不饱和单体(a-1-2)、含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)以及下述乙烯性不饱和单体(a-1-5)以外的乙烯性不饱和单体。The mixture constituting the alkali-soluble resin (A-1) may further include other ethylenically unsaturated monomers (a-1-4). Other ethylenically unsaturated monomers (a-1-4) are ethylenically unsaturated monomers (a-1-1) containing carboxylic acid groups or carboxylic acid anhydride groups, ethylenically unsaturated monounsaturated monomers containing oxyalkylene groups Monomer (a-1-2), ethylenically unsaturated monomer containing maleimide group or two alkenyl groups (a-1-3) and the following ethylenically unsaturated monomer (a-1-5 ) other than ethylenically unsaturated monomers.
其他乙烯性不饱和单体(a-1-4)的具体例包括丙烯酸甲酯、甲基丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丙酯、(甲基)丙烯酸异丙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸异丁酯、(甲基)丙烯酸第三丁酯、(甲基)丙烯酸-2-乙基己基酯、(甲基)丙烯酸环己酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸硬脂酸酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸联苯酯(biphenyl(meth)acrylate)、(甲基)丙烯酸甲氧基乙酯、(甲基)丙烯酸乙氧基乙酯、丁氧基乙二醇(甲基)丙烯酸酯、2-乙基己基乙二醇二(甲基)丙烯酸酯、甲氧基丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸苯氧基乙酯(phenoxyethyl(meth)acrylate)、(甲基)丙烯酸联苯氧乙酯(biphenoxyethyl(meth)acrylate)、(甲基)丙烯酸二环戊酯、(甲基)丙烯酸三环癸酯、(甲基)丙烯酸二环戊烯氧基乙酯(Dicyclopentenyloxyethyl(meth)acrylate)、三环癸基氧乙基(甲基)丙烯酸酯(tricyclodecyl oxyethyl(meth)acrylate)、壬基苯氧基乙二醇基(甲基)丙烯酸酯、壬基苯氧基丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸苯甲酯、(甲基)丙烯酸2-羟基乙酯等的(甲基)丙烯酸酯类;(甲基)丙烯酰吗啉(吗啉基(甲基)丙烯酸酯)、(甲基)丙烯酰胺、N-甲基(甲基)丙烯酰胺、N-异丙基(甲基)丙烯酰胺、N-丁基(甲基)丙烯酰胺、N-异丁基(甲基)丙烯酰胺、N-第三丁基(甲基)丙烯酰胺、N-第三辛基(甲基)丙烯酰胺、二丙酮(甲基)丙烯酰胺(diacetone(meth)acrylamide)、N-羟甲基(甲基)丙烯酰胺、N-羟基乙基(甲基)丙烯酰胺、N-环己基(甲基)丙烯酰胺、N-苯基(甲基)丙烯酰胺、N-苯甲基(甲基)丙烯酰胺、N-三苯基甲基(甲基)丙烯酰胺、N,N-二甲基(甲基)丙烯酰胺等的(甲基)丙烯酸酰胺类;苯乙烯、乙烯基甲苯、α-甲基苯乙烯等芳香族乙烯基化合物;丁二烯、异戊二烯等的丁二烯或经取代的丁二烯化合物;乙烯、丙烯、氯乙烯、丙烯腈等乙烯或经取代的乙烯化合物;及乙酸乙烯酯(醋酸乙烯酯)等的乙烯基酯类等。上述这些单体可单独使用或组合多种来使用。Specific examples of other ethylenically unsaturated monomers (a-1-4) include methyl acrylate, methyl methacrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, (meth)acrylic acid Isopropyl, n-butyl (meth)acrylate, isobutyl (meth)acrylate, tert-butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, (meth)acrylic acid Cyclohexyl ester, lauryl (meth)acrylate, stearate (meth)acrylate, phenyl (meth)acrylate, biphenyl (meth)acrylate, (meth)acrylate Methoxyethyl acrylate, ethoxyethyl (meth)acrylate, butoxyethylene glycol (meth)acrylate, 2-ethylhexylethylene glycol di(meth)acrylate, methoxy Propylene glycol (meth)acrylate, (phenoxyethyl(meth)acrylate), (meth)acrylate (biphenoxyethyl(meth)acrylate), (meth)acrylate diphenoxyethyl (meth)acrylate Cyclopentyl, tricyclodecyl (meth)acrylate, dicyclopentenyloxyethyl (meth)acrylate, tricyclodecyl (meth)acrylate oxyethyl(meth)acrylate), nonylphenoxyethylene glycol (meth)acrylate, nonylphenoxypropylene glycol (meth)acrylate, benzyl (meth)acrylate, (meth)acrylic acid (Meth)acrylates such as 2-hydroxyethyl ester; (meth)acryloyl morpholine (morpholino (meth)acrylate), (meth)acrylamide, N-methyl (methyl) Acrylamide, N-isopropyl (meth)acrylamide, N-butyl (meth)acrylamide, N-isobutyl (meth)acrylamide, N-tert-butyl (meth)acrylamide , N-third octyl (meth) acrylamide, diacetone (meth) acrylamide (diacetone (meth) acrylamide), N-methylol (meth) acrylamide, N-hydroxyethyl (methyl) ) acrylamide, N-cyclohexyl(meth)acrylamide, N-phenyl(meth)acrylamide, N-benzyl(meth)acrylamide, N-triphenylmethyl(meth)propylene (meth)acrylic acid amides such as amides, N,N-dimethyl(meth)acrylamide, etc.; aromatic vinyl compounds such as styrene, vinyltoluene, α-methylstyrene, etc.; butadiene, isotope Butadiene or substituted butadiene compounds such as pentadiene; ethylene or substituted ethylene compounds such as ethylene, propylene, vinyl chloride, acrylonitrile; and vinyl esters such as vinyl acetate (vinyl acetate) Wait. These monomers mentioned above may be used alone or in combination of two or more.
其他乙烯性不饱和单体(a-1-4)的具体例较佳为包括甲基丙烯酸2-羟基乙酯、甲基丙烯酸甲酯、甲基丙烯酸二环戊酯、甲基丙烯酸苯甲酯、苯乙烯、或其组合。Specific examples of other ethylenically unsaturated monomers (a-1-4) preferably include 2-hydroxyethyl methacrylate, methyl methacrylate, dicyclopentyl methacrylate, benzyl methacrylate , styrene, or a combination thereof.
基于混合物的总使用量为100重量份,其他乙烯性不饱和单体(a-1-4)的使用量可为0重量份至55重量份,较佳为5重量份至50重量份,更佳为10重量份至45重量份。Based on the total usage amount of the mixture being 100 parts by weight, the usage amount of the other ethylenically unsaturated monomers (a-1-4) may be 0 parts by weight to 55 parts by weight, preferably 5 parts by weight to 50 parts by weight, more It is preferably 10 to 45 parts by weight.
乙烯性不饱和单体(a-1-5)Ethylenically unsaturated monomer (a-1-5)
碱可溶性树脂(A-1)可进一步含有乙烯性不饱和基。这样的碱可溶性树脂(A-1)为由含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)及含氧基亚烷基的乙烯性不饱和单体(a-1-2)、含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)、其他乙烯性不饱和单体(a-1-4)等单体所形成的聚合物,进一步与乙烯性不饱和单体(a-1-5)进行缩合反应而得。The alkali-soluble resin (A-1) may further contain an ethylenically unsaturated group. Such an alkali-soluble resin (A-1) is composed of a carboxylic acid group- or carboxylic acid anhydride group-containing ethylenically unsaturated monomer (a-1-1) and an oxyalkylene group-containing ethylenically unsaturated monomer (a) -1-2), ethylenically unsaturated monomers containing maleimide group or two alkenyl groups (a-1-3), other ethylenically unsaturated monomers (a-1-4) and other monomers The formed polymer is further obtained by a condensation reaction with the ethylenically unsaturated monomer (a-1-5).
乙烯性不饱和单体(a-1-5)包括含环氧基的乙烯性不饱和单体、含异氰酸基的乙烯性不饱和单体、含羟基的乙烯性不饱和单体、或其组合等。The ethylenically unsaturated monomers (a-1-5) include epoxy group-containing ethylenically unsaturated monomers, isocyanate group-containing ethylenically unsaturated monomers, hydroxyl group-containing ethylenically unsaturated monomers, or its combination, etc.
当含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)为含羧酸基的乙烯性不饱和单体时,可以使用含环氧基的乙烯性不饱和单体及含异氰酸基的乙烯性不饱和单体作为乙烯性不饱和单体(a-1-5)。含环氧基的乙烯性不饱和单体的具体例包括(甲基)丙烯酸环氧丙脂(甲基丙烯酸缩水甘油酯)、(甲基)丙烯酸3,4-环氧环己基甲酯、邻-乙烯基苯甲基环氧丙醚(邻-乙烯基苯甲基缩水甘油醚)、间-乙烯基苯甲基缩水甘油醚、对乙烯基苯甲基缩水甘油基醚、4-羟基丁基丙烯酸酯缩水甘油基醚、或其组合。含异氰酸基(isocyanato,-N=C=O)的乙烯性不饱和单体的具体例包括(甲基)丙烯酸2-异氰酸基乙酯(2-isocyanatoethyl(meth)acrylate)。When the carboxylic acid group- or carboxylic acid anhydride group-containing ethylenically unsaturated monomer (a-1-1) is a carboxylic acid group-containing ethylenically unsaturated monomer, an epoxy group-containing ethylenically unsaturated monomer can be used and isocyanate group-containing ethylenically unsaturated monomers as ethylenically unsaturated monomers (a-1-5). Specific examples of the epoxy group-containing ethylenically unsaturated monomer include glycidyl (meth)acrylate (glycidyl methacrylate), 3,4-epoxycyclohexylmethyl (meth)acrylate, o- - Vinylbenzyl glycidyl ether (o-vinylbenzyl glycidyl ether), m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, 4-hydroxybutyl Acrylate glycidyl ether, or a combination thereof. Specific examples of the isocyanato group (isocyanato, -N=C=O)-containing ethylenically unsaturated monomer include 2-isocyanatoethyl (meth)acrylate (meth)acrylate.
当含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)为含羧酸酐基的乙烯性不饱和单体时,可以使用含羟基的乙烯性不饱和单体作为乙烯性不饱和单体(a-1-5)。含羟基的乙烯性不饱和单体的具体例包括(甲基)丙烯酸2-羟基乙酯等。When the carboxylic acid group- or carboxylic acid anhydride group-containing ethylenically unsaturated monomer (a-1-1) is a carboxylic acid anhydride group-containing ethylenically unsaturated monomer, a hydroxyl group-containing ethylenically unsaturated monomer can be used as the vinyl group Sexually unsaturated monomer (a-1-5). Specific examples of the hydroxyl group-containing ethylenically unsaturated monomer include 2-hydroxyethyl (meth)acrylate and the like.
乙烯性不饱和单体(a-1-5)的具体例较佳为包括甲基丙烯酸环氧丙脂(甲基丙烯酸缩水甘油酯)、甲基丙烯酸3,4-环氧环己基甲酯、邻-乙烯基苯甲基环氧丙醚(邻-乙烯基苯甲基缩水甘油醚)、或其组合。Specific examples of the ethylenically unsaturated monomer (a-1-5) preferably include glycidyl methacrylate (glycidyl methacrylate), 3,4-epoxycyclohexylmethyl methacrylate, o-vinylbenzyl glycidyl ether (o-vinylbenzyl glycidyl ether), or a combination thereof.
当碱可溶性树脂(A-1)含有乙烯性不饱和基时,感光性树脂组合物具有较优异的感度。When the alkali-soluble resin (A-1) contains an ethylenically unsaturated group, the photosensitive resin composition has relatively excellent sensitivity.
基于混合物的总使用量为100重量份,乙烯性不饱和单体(a-1-5)的使用量可为10重量份至180重量份,较佳为15重量份至160重量份,更佳为20重量份至140重量份。Based on the total usage amount of the mixture being 100 parts by weight, the usage amount of the ethylenically unsaturated monomer (a-1-5) may be 10 parts by weight to 180 parts by weight, preferably 15 parts by weight to 160 parts by weight, more preferably 20 to 140 parts by weight.
以下详细说明碱可溶性树脂(A-1)的制备方法:The preparation method of alkali-soluble resin (A-1) is described in detail below:
碱可溶性树脂(A-1)可由包括上述含羧酸基或羧酸酐基的乙烯性不饱和单体(a-1-1)、含氧基亚烷基的乙烯性不饱和单体(a-1-2)、含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)、其他乙烯性不饱和单体(a-1-4)的聚合方法没有特别的限制,可依照需求选择适当的聚合方法。聚合方法例如是溶液聚合法。The alkali-soluble resin (A-1) can be composed of the above-mentioned carboxylic acid group- or carboxylic acid anhydride group-containing ethylenically unsaturated monomer (a-1-1), oxyalkylene-containing ethylenically unsaturated monomer (a- 1-2), the polymerization method of ethylenically unsaturated monomer (a-1-3) containing maleimide group or two alkenyl groups, other ethylenically unsaturated monomer (a-1-4) No With special restrictions, an appropriate polymerization method can be selected according to the needs. The polymerization method is, for example, a solution polymerization method.
构成碱可溶性树脂(A-1)的混合物可包括溶剂。溶剂的种类没有特别的限制。详言之,溶剂的具体例包括四氢呋喃、二恶烷、乙二醇二甲醚、二乙二醇二甲醚、丙二醇单甲醚等的醚类;丙酮、甲乙酮等的酮类;乙酸乙酯(醋酸乙酯)、乙酸丁酯(醋酸丁酯)、丙二醇单甲醚醋酸酯、3-甲氧基乙酸丁酯等的酯类;甲醇、乙醇等的醇类;甲苯、二甲苯、乙苯等的芳香族碳氢化合物类;氯仿;二甲基亚砜等。上述这些溶剂可单独使用或组合多种来使用。溶剂较佳为丙二醇单甲醚、丙二醇单甲醚醋酸酯、或其组合。The mixture constituting the alkali-soluble resin (A-1) may include a solvent. The kind of solvent is not particularly limited. Specifically, specific examples of the solvent include ethers such as tetrahydrofuran, dioxane, ethylene glycol dimethyl ether, diethylene glycol dimethyl ether, and propylene glycol monomethyl ether; ketones such as acetone and methyl ethyl ketone; ethyl acetate Esters of (ethyl acetate), butyl acetate (butyl acetate), propylene glycol monomethyl ether acetate, 3-methoxybutyl acetate, etc.; alcohols such as methanol and ethanol; toluene, xylene, ethylbenzene Aromatic hydrocarbons such as chloroform; dimethyl sulfoxide, etc. These solvents mentioned above may be used alone or in combination of two or more. The solvent is preferably propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, or a combination thereof.
上述混合物于聚合时的聚合浓度为5重量%至90重量%,较佳为5重量%至50重量%,更佳为10重量%至50重量%。The polymerization concentration of the above mixture during polymerization is 5 to 90% by weight, preferably 5 to 50% by weight, more preferably 10 to 50% by weight.
构成碱可溶性树脂(A-1)的混合物可包括聚合起始剂。聚合起始剂的种类没有特别的限制。详言之,聚合起始剂的具体例包括过氧化氢异丙苯(cumene hydroperoxide,CHP)、过氧化氢二异丙苯(diisopropylbenzene hydroperoxide)、二第三丁基过氧化物(di-t-butyl peroxide)、过氧化月桂酰(lauroyl peroxide)、过氧化苯甲酰(benzoylperoxide)、过氧化异丙基碳酸第三丁酯(t-butylperoxyisopropyl carbonate)、过氧化2-乙基己酸第三戊酯(t-amylperoxy-2-ethylhexanoate)、过氧化2-乙基己酸第三丁酯(t-butylperoxy-2-ethylhexanoate)等的有机过氧化物;2,2'-偶氮双(异丁腈)(2,2'-azobis(isobutyronitrile))、1,1'-偶氮双(环己烷甲腈)(1,1'-azobis(cyclohexanecarbonitrile))、2,2'-偶氮双(2,4-二甲基戊腈)(2,2'-azobis(2,4-dimethylvaleronitrile))、二甲基2,2'-偶氮双(2-甲基丙酸酯)(dimethyl 2,2'-azobis(2-methyl propionate))等的偶氮化合物等。聚合起始剂较佳为过氧化2-乙基己酸第三丁酯(t-butylperoxy-2-ethylhexanoate)。聚合起始剂的使用量相对于混合物中全部单体的100重量份,可为0.1重量份至15重量份,较佳为0.5重量份至10重量份。The mixture constituting the alkali-soluble resin (A-1) may include a polymerization initiator. The kind of the polymerization initiator is not particularly limited. Specifically, specific examples of the polymerization initiator include cumene hydroperoxide (CHP), diisopropylbenzene hydroperoxide (diisopropylbenzene hydroperoxide), di-t-butyl peroxide (di-t- butyl peroxide), lauroyl peroxide (lauroyl peroxide), benzoyl peroxide (benzoylperoxide), t-butylperoxyisopropyl carbonate (t-butylperoxyisopropyl carbonate), 2-ethylhexanoic acid tripentyl peroxide Organic peroxides such as ester (t-amylperoxy-2-ethylhexanoate), t-butylperoxy-2-ethylhexanoate, etc.; 2,2'-azobis(isobutyl) Nitrile)(2,2'-azobis(isobutyronitrile)), 1,1'-azobis(cyclohexanecarbonitrile)(1,1'-azobis(cyclohexanecarbonitrile)), 2,2'-azobis( 2,4-Dimethylvaleronitrile)(2,2'-azobis(2,4-dimethylvaleronitrile)), dimethyl 2,2'-azobis(2-methylpropionate)(dimethyl 2, 2'-azobis (2-methyl propionate) and other azo compounds, etc. The polymerization initiator is preferably t-butylperoxy-2-ethylhexanoate. The used amount of the polymerization initiator may be 0.1 to 15 parts by weight, preferably 0.5 to 10 parts by weight, relative to 100 parts by weight of all the monomers in the mixture.
碱可溶性树脂(A-1)在通过溶液聚合法来聚合时的聚合温度可为40℃至150℃,较佳为60℃至130℃。The polymerization temperature of the alkali-soluble resin (A-1) when polymerized by the solution polymerization method may be 40°C to 150°C, preferably 60°C to 130°C.
上述混合物所形成的聚合物可进一步与乙烯性不饱和单体(a-1-5)进行加成反应,藉此获得含有乙烯性不饱和基(碳双键)。使聚合物与乙烯性不饱和单体(a-1-5)进行反应的方法没有特别的限制,例如于存在后述聚合抑制剂及触媒的情况下,通过使乙烯性不饱和单体(a-1-5)与上述混合物所形成的聚合物部分或全部酸基(较佳为部分酸基)而进行加成反应(addition reaction)。The polymer formed from the above mixture can be further subjected to an addition reaction with the ethylenically unsaturated monomer (a-1-5) to obtain an ethylenically unsaturated group (carbon double bond). The method for reacting the polymer with the ethylenically unsaturated monomer (a-1-5) is not particularly limited, and for example, in the presence of a polymerization inhibitor and a catalyst described later, the ethylenically unsaturated monomer (a-1-5) can be reacted -1-5) Perform an addition reaction with part or all of the acid groups (preferably part of the acid groups) of the polymer formed by the above mixture.
另外,溶液聚合法的过程中可添加链转移剂,以控制聚合物的分子量。链转移剂只要能够于自由基聚合反应中作为链转移剂而发挥功能的化合物,则并没有特别的限制。链转移剂例如是正十二烷基硫醇(1-dodecanethiol,nDM)等烷基硫醇类。链转移剂的使用量的相对于混合物中全部单体的100重量份,可为0.1重量份至15重量份,较佳为1.2重量份至5.0重量份。In addition, chain transfer agents can be added during the solution polymerization process to control the molecular weight of the polymer. The chain transfer agent is not particularly limited as long as it can function as a chain transfer agent in a radical polymerization reaction. The chain transfer agent is, for example, alkylthiols such as n-dodecanethiol (1-dodecanethiol, nDM). The chain transfer agent can be used in an amount of 0.1 to 15 parts by weight, preferably 1.2 to 5.0 parts by weight, relative to 100 parts by weight of all the monomers in the mixture.
最后,溶液聚合法可使用聚合抑制剂,以中止自由基聚合反应。聚合抑制剂的种类没有特别的限制,例如是6-第三丁基-2,4-二甲基苯酚等的烷基酚化合物。另外,溶液聚合法还可使用触媒。触媒的种类没有特别的限制,例如是如二甲基苯甲胺(dimethylbenzylamine)、三乙胺等的三级胺。Finally, solution polymerization methods can use polymerization inhibitors to stop the free radical polymerization reaction. The kind of the polymerization inhibitor is not particularly limited, and for example, it is an alkylphenol compound such as 6-tert-butyl-2,4-dimethylphenol. In addition, the solution polymerization method can also use a catalyst. The type of the catalyst is not particularly limited, for example, tertiary amines such as dimethylbenzylamine and triethylamine.
碱可溶性树脂(A-1)可为无规共聚物,亦可为嵌段共聚合物。The alkali-soluble resin (A-1) may be a random copolymer or a block copolymer.
碱可溶性树脂(A-1)的重量平均分子量可通过四氢呋喃(THF)溶剂的胶体渗透层析法(Gel permeation chromatography,GPC)所测定的值。碱可溶性树脂(A-1)的重量平均分子量可为3,000至200,000,较佳为4,000至100,000,更佳为5,000至50,000。The weight average molecular weight of the alkali-soluble resin (A-1) can be a value measured by colloidal permeation chromatography (Gel permeation chromatography, GPC) of a tetrahydrofuran (THF) solvent. The weight average molecular weight of the alkali-soluble resin (A-1) may be 3,000 to 200,000, preferably 4,000 to 100,000, more preferably 5,000 to 50,000.
碱可溶性树脂(A-1)的酸价可为20mg KOH/g至300mg KOH/g,较佳为25mg KOH/g至200mg KOH/g是,更佳为30mg KOH/g至150mg KOH/g。The acid value of the alkali-soluble resin (A-1) may be 20 mg KOH/g to 300 mg KOH/g, preferably 25 mg KOH/g to 200 mg KOH/g, more preferably 30 mg KOH/g to 150 mg KOH/g.
当使用碱可溶性树脂(A-1)时,感光性树脂组合物具有优异的感度。反之,若没有使用碱可溶性树脂(A-1),则感光性树脂组合物的感度不佳。When the alkali-soluble resin (A-1) is used, the photosensitive resin composition has excellent sensitivity. On the contrary, if the alkali-soluble resin (A-1) is not used, the sensitivity of the photosensitive resin composition is not good.
基于碱可溶性树脂(A)为100重量份,碱可溶性树脂(A-1)的使用量可为50重量份至100重量份,较佳为60重量份至100重量份,更佳为70重量份至100重量份。Based on 100 parts by weight of the alkali-soluble resin (A), the amount of the alkali-soluble resin (A-1) used may be 50 parts by weight to 100 parts by weight, preferably 60 parts by weight to 100 parts by weight, more preferably 70 parts by weight to 100 parts by weight.
其他碱可溶性树脂(A-2)Other alkali-soluble resins (A-2)
碱可溶性树脂(A)亦可包括碱可溶性树脂(A-1)以外的其他碱可溶性树脂(A-2)。The alkali-soluble resin (A) may include other alkali-soluble resins (A-2) other than the alkali-soluble resin (A-1).
其他碱可溶性树脂(A-2)没有特别的限制,只要其他碱可溶性树脂(A-2)与碱可溶性树脂(A-1)不同即可。另外,其他碱可溶性树脂(A-2)的制造方法没有特别的限制,例如可与碱可溶性树脂(A-1)类似,故不另行赘述。The other alkali-soluble resin (A-2) is not particularly limited as long as the other alkali-soluble resin (A-2) is different from the alkali-soluble resin (A-1). In addition, the manufacturing method of other alkali-soluble resin (A-2) is not particularly limited, for example, it can be similar to alkali-soluble resin (A-1), so it will not be described in detail.
基于碱可溶性树脂(A)为100重量份,其他碱可溶性树脂(A-2)的使用量可为0重量份至50重量份,较佳为0重量份至40重量份,更佳为0重量份至30重量份。Based on 100 parts by weight of the alkali-soluble resin (A), other alkali-soluble resins (A-2) can be used in an amount of 0 to 50 parts by weight, preferably 0 to 40 parts by weight, more preferably 0 parts by weight parts to 30 parts by weight.
含乙烯性不饱和基的化合物(B)Ethylenically unsaturated group-containing compound (B)
含乙烯性不饱和基的化合物(B)包括具有一个乙烯性不饱和基的化合物、具有二个以上(含二个)乙烯性不饱和基的化合物、或其组合。The ethylenically unsaturated group-containing compound (B) includes a compound having one ethylenically unsaturated group, a compound having two or more (including two) ethylenically unsaturated groups, or a combination thereof.
具有一个乙烯性不饱和基的化合物的具体例可包括但不限于(甲基)丙烯酰胺、(甲基)丙烯酰吗啉、(甲基)丙烯酸-7-胺基-3,7-二甲基辛酯、异丁氧基甲基(甲基)丙烯酰胺、(甲基)丙烯酸异冰片基氧乙酯、(甲基)丙烯酸异冰片酯、(甲基)丙烯酸-2-乙基己酯、乙二醇二(甲基)丙烯酸酯、乙氧基二乙二醇(甲基)丙烯酸酯、第三辛基(甲基)丙烯酰胺、二丙酮(甲基)丙烯酰胺、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸十二烷基酯、(甲基)丙烯酸二环戊烯氧基乙酯、(甲基)丙烯酸二环戊烯酯、N,N-二甲基(甲基)丙烯酰胺、(甲基)丙烯酸四氯苯酯、(甲基)丙烯酸-2-四氯苯氧基乙酯、(甲基)丙烯酸四氢糠酯、(甲基)丙烯酸四溴苯酯、(甲基)丙烯酸-2-四溴苯氧基乙酯、(甲基)丙烯酸-2-三氯苯氧基乙酯、(甲基)丙烯酸三溴苯酯、(甲基)丙烯酸-2-三溴苯氧基乙酯、(甲基)丙烯酸2-羟基乙酯、(甲基)丙烯酸-2-羟基丙酯、乙烯基己内酰胺、N-乙烯基吡咯啶酮、(甲基)丙烯酸苯氧基乙酯、(甲基)丙烯酸五氯苯酯、(甲基)丙烯酸五溴苯酯、聚单(甲基)丙烯酸乙二酯、聚单(甲基)丙烯酸丙二酯或(甲基)丙烯酸冰片酯等的化合物。上述这些具有一个乙烯性不饱和基的化合物可单独使用或组合多种来使用。Specific examples of compounds having one ethylenically unsaturated group may include, but are not limited to, (meth)acrylamide, (meth)acryloylmorpholine, (meth)acrylic acid-7-amino-3,7-dimethyl Octyl octyl ester, isobutoxymethyl (meth)acrylamide, isobornyloxyethyl (meth)acrylate, isobornyl (meth)acrylate, 2-ethylhexyl (meth)acrylate , ethylene glycol di(meth)acrylate, ethoxydiethylene glycol (meth)acrylate, tertiary octyl(meth)acrylamide, diacetone(meth)acrylamide, (meth) Dimethylaminoethyl acrylate, dodecyl (meth)acrylate, dicyclopentenyloxyethyl (meth)acrylate, dicyclopentenyl (meth)acrylate, N,N-dicyclopentenyl Methyl (meth)acrylamide, tetrachlorophenyl (meth)acrylate, 2-tetrachlorophenoxyethyl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, (meth)acrylic acid Tetrabromophenyl, (meth)acrylate-2-tetrabromophenoxyethyl, (meth)acrylate-2-trichlorophenoxyethyl, (meth)acrylate, tribromophenyl, (meth)acrylate ) 2-Tribromophenoxyethyl acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, vinylcaprolactam, N-vinylpyrrolidone, (meth)acrylate base) phenoxyethyl acrylate, pentachlorophenyl (meth)acrylate, pentabromophenyl (meth)acrylate, polyethylene mono(meth)acrylate, polytrimethylene mono(meth)acrylate Or compounds such as (meth)bornyl acrylate. The above-mentioned compounds having one ethylenically unsaturated group can be used alone or in combination of two or more.
具有二个以上(含二个)乙烯性不饱和基的化合物的具体例可包括但不限于乙二醇二丙烯酸酯、乙二醇二甲基丙烯酸酯、二(甲基)丙烯酸二环戊烯酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、三(2-羟基乙基)异氰酸二(甲基)丙烯酸酯、三(2-羟基乙基)异氰酸三(甲基)丙烯酸酯、经己内酯改质的三(2-羟基乙基)异氰酸三(甲基)丙烯酸酯、三丙烯酸三羟甲基丙酯、三甲基丙烯酸三羟甲基丙酯、经环氧乙烷(简称为“EO”)改质的三(甲基)丙烯酸三羟甲基丙酯、经环氧丙烷改质(简称为“PO”)的三(甲基)丙烯酸三羟甲基丙酯、三丙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、聚酯二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、二季戊四醇六丙烯酸酯、二季戊四醇六甲基丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、经己内酯改质的二季戊四醇六(甲基)丙烯酸酯、经己内酯改质的二季戊四醇五(甲基)丙烯酸酯、四(甲基)丙烯酸二三羟甲基丙酯、经环氧乙烷改质的双酚A二(甲基)丙烯酸酯、经环氧丙烷改质的双酚A二(甲基)丙烯酸酯、经环氧乙烷改质的氢化双酚A二(甲基)丙烯酸酯、经环氧丙烷改质的氢化双酚A二(甲基)丙烯酸酯、经环氧乙烷改质的双酚F二(甲基)丙烯酸酯季戊四醇三丙烯酸酯、经环氧丙烷改质的甘油三丙烯酸酯或酚醛清漆聚缩水甘油醚(甲基)丙烯酸酯等的化合物。具有二个以上(含二个)乙烯性不饱和基的化合物可单独使用或组合多种来使用。Specific examples of compounds having two or more (containing two) ethylenically unsaturated groups may include, but are not limited to, ethylene glycol diacrylate, ethylene glycol dimethacrylate, dicyclopentene di(meth)acrylate ester, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, tris(2-hydroxyethyl)isocyanate di(meth)acrylate, tris(2-hydroxyl) ethyl) isocyanate tri(meth)acrylate, caprolactone-modified tris(2-hydroxyethyl) isocyanate tri(meth)acrylate, trimethylolpropyl triacrylate, trimethylolpropyl triacrylate Trimethylolpropyl methacrylate, trimethylolpropyl tri(meth)acrylate modified by ethylene oxide (abbreviated as "EO"), modified by propylene oxide (abbreviated as "PO" ) of trimethylolpropyl tri(meth)acrylate, tripropylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,4-butanediol di(meth)acrylic acid Esters, 1,6-hexanediol di(meth)acrylate, polyester di(meth)acrylate, polyethylene glycol di(meth)acrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethyl Acrylates, dipentaerythritol penta(meth)acrylate, dipentaerythritol tetra(meth)acrylate, caprolactone-modified dipentaerythritol hexa(meth)acrylate, caprolactone-modified dipentaerythritol penta (Meth)acrylate, ditrimethylolpropyl tetra(meth)acrylate, bisphenol A di(meth)acrylate modified with ethylene oxide, bisphenol A modified with propylene oxide Di(meth)acrylate, ethylene oxide modified hydrogenated bisphenol A di(meth)acrylate, propylene oxide modified hydrogenated bisphenol A di(meth)acrylate, epoxy modified Compounds such as ethane-modified bisphenol F di(meth)acrylate pentaerythritol triacrylate, propylene oxide-modified glycerol triacrylate, or novolak polyglycidyl ether (meth)acrylate. The compound having two or more (including two) ethylenically unsaturated groups can be used alone or in combination of two or more.
含乙烯性不饱和基的化合物(B)的具体例较佳为可包括但不限于乙二醇二甲基丙烯酸酯、三丙烯酸三羟甲基丙酯、经环氧乙烷改质的三丙烯酸三羟甲基丙酯、经环氧丙烷改质的三丙烯酸三羟甲基丙酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇六丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇四丙烯酸酯、经己内酯改质的二季戊四醇六丙烯酸酯、四丙烯酸二三羟甲基丙酯、经环氧丙烷改质的甘油三丙烯酸酯、或上述化合物的组合。Specific examples of the ethylenically unsaturated group-containing compound (B) preferably include, but are not limited to, ethylene glycol dimethacrylate, trimethylolpropyl triacrylate, and ethylene oxide-modified triacrylic acid. Trimethylolpropyl, propylene oxide modified trimethylolpropyl triacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol hexaacrylate, dipentaerythritol pentaacrylate, dipentaerythritol tetraacrylate , caprolactone-modified dipentaerythritol hexaacrylate, ditrimethylolpropyl tetraacrylate, propylene oxide-modified glycerol triacrylate, or a combination of the foregoing.
含乙烯性不饱和基的化合物(B)更佳为乙二醇二甲基丙烯酸酯、三丙烯酸三羟甲基丙酯、二季戊四醇六丙烯酸酯、或上述化合物的组合。The ethylenically unsaturated group-containing compound (B) is more preferably ethylene glycol dimethacrylate, trimethylolpropyl triacrylate, dipentaerythritol hexaacrylate, or a combination thereof.
基于碱可溶性树脂(A)为100重量份,含乙烯性不饱和基的化合物(B)的使用量可为50重量份至600重量份,较佳为70重量份至580重量份,更佳为90重量份至550重量份。Based on 100 parts by weight of the alkali-soluble resin (A), the ethylenically unsaturated group-containing compound (B) may be used in an amount of 50 to 600 parts by weight, preferably 70 to 580 parts by weight, more preferably 90 to 550 parts by weight.
光起始剂(C)Photoinitiator (C)
光起始剂(C)可包括光起始剂(C-1),并且更可包括光起始剂(C-2)。另外,光起始剂(C)可选择性地包括其他光起始剂(C-3)。The photoinitiator (C) may include the photoinitiator (C-1), and more may include the photoinitiator (C-2). In addition, the photoinitiator (C) may optionally include other photoinitiators (C-3).
光起始剂(C-1)Photoinitiator (C-1)
光起始剂(C-1)为下述式(II)所示的化合物。The photoinitiator (C-1) is a compound represented by the following formula (II).
式(II)中,In formula (II),
A表示氢、卤素、硝基、C1-C20的直链或支链的烷基、C3-C10的烷基环烷基、C4-C10的烷基环烷基、C4-C10的环烷基烷基、其中C1-C20的直链或支链的烷基、C3-C10的烷基环烷基、C4-C10的烷基环烷基、C4-C10的环烷基烷基、中所含有的任一个-CH2-可被O、N、S或羰基所取代;A represents hydrogen, halogen, nitro, C 1 -C 20 straight or branched chain alkyl, C 3 -C 10 alkyl cycloalkyl, C 4 -C 10 alkyl cycloalkyl, C 4 -C 10 cycloalkylalkyl, Wherein C 1 -C 20 linear or branched alkyl, C 3 -C 10 alkyl cycloalkyl, C 4 -C 10 alkyl cycloalkyl, C 4 -C 10 cycloalkyl alkane base, Any -CH 2 - contained in can be substituted by O, N, S or carbonyl;
R5表示氢、卤素、C1-C20的直链或支链的烷基、C4-C20的环烷基烷基或C2-C20的烯基,其中C1-C20的直链或支链的烷基、C4-C20的环烷基烷基以及C2-C20的烯基中所含有的-CH2-可被O、N、S或羰基所取代,两个R5之间可形成环状结构;R 5 represents hydrogen, halogen, C 1 -C 20 straight or branched chain alkyl, C 4 -C 20 cycloalkylalkyl or C 2 -C 20 alkenyl, wherein C 1 -C 20 The -CH 2 - contained in the straight or branched chain alkyl, C 4 -C 20 cycloalkyl alkyl and C 2 -C 20 alkenyl may be substituted by O, N, S or carbonyl, two A ring structure can be formed between each R 5 ;
R6表示C1-C20的直链或支链的烷基、C2-C20的烯基、C3-C20的环烷基、C4-C20的环烷基烷基、C4-C20的烷基环烷基、C6-C20的芳基或C6-C20的烷基芳基,其中这些基团中的一个或多个氢可各自独立被烷基、卤素、羟基或硝基所取代,并且R6中的-CH2-可被O、N、S或羰基所取代;R 6 represents C 1 -C 20 straight or branched chain alkyl, C 2 -C 20 alkenyl, C 3 -C 20 cycloalkyl, C 4 -C 20 cycloalkyl alkyl, C 4 - C20 alkylcycloalkyl group, C6 - C20 aryl group or C6 - C20 alkylaryl group, wherein one or more hydrogens in these groups can each independently be replaced by alkyl, halogen , hydroxy or nitro, and -CH 2 - in R 6 can be substituted by O, N, S or carbonyl;
R7表示C1-C20的直链或支链的烷基、C3-C20的环烷基、C4-C20的环烷基烷基、C4-C20的烷基环烷基、C6-C20的芳基、C6-C20的烷基芳基、下述式(II-A)所示的基团、下述式(II-B)所示的基团或下述式(II-C)所示的基团,当R7表示C1-C20的直链或支链的烷基、C3-C20的环烷基、C4-C20的环烷基烷基、C4-C20的烷基环烷基、C6-C20的芳基或C6-C20的烷基芳基时,这些基团中的一个或多个氢可各自独立被烷基、卤素、羟基或硝基所取代,并且R7中的-CH2-可被O、N、S或羰基所取代;R 7 represents a C 1 -C 20 straight or branched chain alkyl group, a C 3 -C 20 cycloalkyl group, a C 4 -C 20 cycloalkyl alkyl group, a C 4 -C 20 alkylcycloalkane group, a C 6 -C 20 aryl group, a C 6 -C 20 alkylaryl group, a group represented by the following formula (II-A), a group represented by the following formula (II-B), or In the group represented by the following formula (II-C), when R 7 represents a C 1 -C 20 straight or branched chain alkyl group, a C 3 -C 20 cycloalkyl group, a C 4 -C 20 cyclic alkyl group In the case of alkylalkyl, C4 - C20 alkylcycloalkyl, C6 - C20 aryl, or C6 - C20 alkylaryl, one or more hydrogens in these groups may each independently substituted by alkyl, halogen, hydroxy or nitro, and -CH 2 - in R 7 may be substituted by O, N, S or carbonyl;
R6与R7之间可形成环状结构;A ring structure can be formed between R 6 and R 7 ;
式(II-A)中,m表示0或1的整数,R11表示氢、C1-C8的烷基、或苯基,R12、R13及R14各自独立表示氢或C1-C4的烷基;In formula (II-A), m represents an integer of 0 or 1, R 11 represents hydrogen, a C 1 -C 8 alkyl group, or a phenyl group, and R 12 , R 13 and R 14 each independently represent hydrogen or C 1 - C 4 alkyl;
式(II-B)中,p是0至3的整数;In formula (II-B), p is an integer from 0 to 3;
式(II-C)中,R15表示氢、C1-C8的烷基、或苯基,Ar是经取代或未经取代的苯基、萘基、呋喃基、噻吩基或吡啶基;In formula (II-C), R 15 represents hydrogen, C 1 -C 8 alkyl, or phenyl, and Ar is substituted or unsubstituted phenyl, naphthyl, furyl, thienyl or pyridyl;
R8表示N-吗啉基N-呱啶基N-吡咯基或N-二烷基(N(R21)2,其中R21表示烷基),其中这些基团中的一个或多个氢可被卤素或羟基所取代;R 8 represents N-morpholinyl N-Guidinyl N-pyrrolyl or N-dialkyl (N(R 21 ) 2 , where R 21 represents an alkyl group), wherein one or more hydrogens in these groups may be substituted by halogen or hydroxy;
R9、R9’各自独立表示C1-C20的直链或支链的烷基、C4-C20的环烷基、C2-C20的烯基、C6-C20的芳基或C6-C20的烷基芳基,其中这些基团中的一个或多个氢可各自独立被烷基、卤素、羟基或硝基所取代,并且这些基团中的-CH2-可被-O-取代;或者R9及R9’可以彼此相连或经由-O-、-S-或-NH-形成五元环或六元环;R 9 and R 9 ' each independently represent a C 1 -C 20 straight or branched chain alkyl group, a C 4 -C 20 cycloalkyl group, a C 2 -C 20 alkenyl group, and a C 6 -C 20 aryl group or C 6 -C 20 alkylaryl groups, wherein one or more hydrogens in these groups may be independently substituted by alkyl, halogen, hydroxyl or nitro, and -CH 2 - may be substituted by -O-; or R 9 and R 9 ' may be connected to each other or via -O-, -S- or -NH- to form a five-membered or six-membered ring;
R10表示C1-C20的直链或支链的烷基、C4-C20的环烷基、C4-C20的烷基环烷基、C2-C20的烯基、C6-C20的芳基或C6-C20的烷基芳基,其中这些基团中的-CH2-可被-O-或-S-取代,并且这些基团的一个或多个氢可以独立地被选自烷基、卤素、硝基、氰基、SR16或OR17所取代;R 10 represents C 1 -C 20 straight or branched chain alkyl, C 4 -C 20 cycloalkyl, C 4 -C 20 alkyl cycloalkyl, C 2 -C 20 alkenyl, C 6 - C20 aryl or C6 - C20 alkylaryl, wherein -CH2- in these groups may be substituted by -O- or -S-, and one or more hydrogens of these groups may be independently substituted by alkyl, halogen, nitro, cyano, SR 16 or OR 17 ;
R16和R17各自独立表示氢、或者C1-C20的直链或支链的烷基。R 16 and R 17 each independently represent hydrogen, or a C 1 -C 20 straight-chain or branched-chain alkyl group.
另外,式(II)中,A较佳为表示氢、甲基、甲氧基、氯、硝基、或N-吗啉基,其中R10较佳为表示苯基、经一个或多个甲基取代的苯基、经硝基取代的苯基、更佳为表示氢、甲基、硝基、经一个或多个甲基取代的苯基、或N-吗啉基,其中*表示键结位置。In addition, in formula (II), A preferably represents hydrogen, methyl, methoxy, chlorine, nitro, or N-morpholinyl, wherein R 10 preferably represents phenyl, phenyl substituted with one or more methyl groups, phenyl substituted with nitro, More preferably represents hydrogen, methyl, nitro, phenyl substituted with one or more methyl groups, or N-morpholinyl, wherein * represents the bonding position.
式(II)中,R5较佳为表示氢、甲基、丙基、丁基或烯丙基(allyl group,-CH2CH=CH2),更佳为表示氢、甲基、丁基或烯丙基。In formula (II), R 5 preferably represents hydrogen, methyl, propyl, butyl or allyl group (allyl group, -CH 2 CH=CH 2 ), more preferably represents hydrogen, methyl, butyl or allyl.
式(II)中,R6较佳为表示甲基或乙基。In formula (II), R 6 preferably represents a methyl group or an ethyl group.
式(II)中,R7较佳为表示甲基、乙基或苯甲基,更佳为表示甲基或苯甲基。In formula (II), R 7 preferably represents a methyl group, an ethyl group or a benzyl group, more preferably a methyl group or a benzyl group.
式(II)中,R8较佳为表示N-吗啉基、N-呱啶基、-N(CH3)2、-N(CH2CH2CH3)2或N-吡咯基,更佳为表示N-吗啉基、-N(CH3)2、N-吡咯基或N-呱啶基,其中*表示键结位置。In formula (II), R 8 preferably represents N-morpholinyl, N-pyridyl, -N(CH 3 ) 2 , -N(CH 2 CH 2 CH 3 ) 2 or N-pyrrolyl, more Preferably, it represents N-morpholinyl, -N(CH 3 ) 2 , N-pyrrolyl or N-pyridyl, wherein * represents a bonding position.
光起始剂(C-1)的具体例包括下述式(II-1)至式(II-35)所示的化合物、或这些化合物的组合。Specific examples of the photoinitiator (C-1) include compounds represented by the following formulae (II-1) to (II-35), or combinations of these compounds.
光起始剂(C-1)的具体例较佳为包括式(II-1)所示的化合物、式(II-5)所示的化合物、式(II-11)所示的化合物、式(II-14)所示的化合物、式(II-17)所示的化合物、式(II-19)所示的化合物、式(II-28)所示的化合物、式(II-35)所示的化合物、或这些化合物的组合。Specific examples of the photoinitiator (C-1) preferably include the compound represented by the formula (II-1), the compound represented by the formula (II-5), the compound represented by the formula (II-11), the compound represented by the formula The compound represented by (II-14), the compound represented by the formula (II-17), the compound represented by the formula (II-19), the compound represented by the formula (II-28), the compound represented by the formula (II-35) compounds shown, or a combination of these compounds.
通过使用光起始剂(C-1),可形成段差优异的间隙体。反之,若未使用光起始剂(C-1),则所形成的间隙体的段差不佳。By using the photoinitiator (C-1), a spacer having an excellent level difference can be formed. On the contrary, if the photoinitiator (C-1) is not used, the level difference of the formed spacer is not good.
基于碱可溶性树脂(A)为100重量份,光起始剂(C-1)的使用量可为10重量份至90重量份,较佳为12重量份至85重量份,更佳为15重量份至80重量份。Based on 100 parts by weight of the alkali-soluble resin (A), the use amount of the photoinitiator (C-1) can be 10 parts by weight to 90 parts by weight, preferably 12 parts by weight to 85 parts by weight, more preferably 15 parts by weight parts to 80 parts by weight.
光起始剂(C-2)Photoinitiator (C-2)
光起始剂(C-2)为下述式(III)所示的化合物。The photoinitiator (C-2) is a compound represented by the following formula (III).
式(III)中,In formula (III),
Ar1表示邻亚芳基或邻亚杂芳基,邻亚芳基或邻亚杂芳基是以相邻的两个原子与Y1及羰基形成环状结构,其余原子上的取代基各自选自由氢;卤素;C1-C12的烷基;C5-C7的环烷基;经C5-C7的环烷基取代的C1-C4的烷基;苯基;经一个或多个C1-C4的烷基、羧基、C1-C12的烷基酰基、C1-C12的芳基酰基、杂芳基酰基、JT4、苯基、卤素或CN取代的苯基;C1-C4的烷基苯甲氧基;经取代的C1-C4的烷氧基、C1-C3的亚烷基二氧基;C1-C12的烷基硫基;C1-C4的烷基苯硫基;经取代的C1-C4的烷基硫基;CN;羧基;C1-C12的烷氧基甲酰基;芳基酰基;杂芳基酰基及JT5所组成的群组;或者Ar 1 represents an o-arylene group or an o-hetero-arylene group, and the o-arylene group or the o-hetero arylene group forms a ring structure with Y 1 and a carbonyl group by two adjacent atoms, and the substituents on the remaining atoms are selected from each other. Free hydrogen; halogen; C 1 -C 12 alkyl; C 5 -C 7 cycloalkyl; C 1 -C 4 alkyl substituted with C 5 -C 7 cycloalkyl; phenyl; or more C 1 -C 4 alkyl, carboxyl, C 1 -C 12 alkyl acyl, C 1 -C 12 aryl acyl, heteroaryl acyl, JT 4 , phenyl, halogen or CN substituted Phenyl; C 1 -C 4 alkylbenzyloxy; via Substituted C 1 -C 4 alkoxy, C 1 -C 3 alkylenedioxy; C 1 -C 12 alkylthio group; C 1 -C 4 alkylphenylthio group; Substituted C 1 -C 4 alkylthio; CN; carboxyl; C 1 -C 12 alkoxyformyl; aryl acyl; heteroaryl acyl and the group consisting of JT 5 ; or
Ar1的上述取代基中相邻的两个取代基之间或取代基与Ar1之间经由单键、碳原子、羰基形成环状结构;In the above-mentioned substituents of Ar 1 , a cyclic structure is formed between two adjacent substituents or between the substituents and Ar 1 via a single bond, a carbon atom, and a carbonyl group;
其中,JT4及JT5中,J选自由O、S及NT6所组成的群组;Among them, in JT 4 and JT 5 , J is selected from the group consisting of O, S and NT 6 ;
Y1选自由O、S、NT7、BT7、CT2T3、SiT2T3、S=O及C=O所组成的群组;Y 1 is selected from the group consisting of O, S, NT 7 , BT 7 , CT 2 T 3 , SiT 2 T 3 , S=O and C=O;
T1表示氢、C1-C18的烷基或C1-C18的烷氧基;或者T 1 represents hydrogen, C 1 -C 18 alkyl or C 1 -C 18 alkoxy; or
T1表示经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基或芳酰氧基取代和/或被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烷基;C2-C18的烯基;经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基或芳酰氧基取代和/或被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烯基,或上述两者情况同时存在;或者T 1 represents via one or more halogen, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 alkane C 2 -C 18 alkyl substituted with acyloxy or aroyloxy and/or inserted by C 5 -C 7 cycloalkylene, phenylene, O, S or NT 4 ; C 2 -C 18 alkenyl; via one or more halogens, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 Alkanoyloxy or aroyloxy substituted and/or C2 - C18 alkenyl inserted by C5 - C7 cycloalkylene, phenylene, O, S or NT4, or both conditions exist simultaneously; or
T1表示C5-C7的环烷基,或经一个或多个C1-C4的烷基、苯基、卤素或CN取代的C5-C7的环烷基;或者T 1 represents a C 5 -C 7 cycloalkyl, or a C 5 -C 7 cycloalkyl substituted with one or more C 1 -C 4 alkyl, phenyl, halogen or CN; or
T1表示苯基,或经一个或多个C1-C4的烷基、C1-C4的烷氧基、苯基、卤素或CN取代的苯基;或者T 1 represents phenyl, or phenyl substituted with one or more C 1 -C 4 alkyl, C 1 -C 4 alkoxy, phenyl, halogen or CN; or
T1表示萘基、苯甲酰基或苯氧基羰基,其中苯甲酰基及苯氧基羰基的苯基任意被一个或两个以上卤素、T4、C5-C6的环烷基、CN、OH或JT4所取代;T 1 represents naphthyl, benzoyl or phenoxycarbonyl, wherein the phenyl group of benzoyl and phenoxycarbonyl is optionally replaced by one or more halogens, T 4 , C 5 -C 6 cycloalkyl, CN , OH or JT 4 ;
T2及T3各自独立表示氢、C1-C18的烷基、经羧基取代的C1-C5的烷基、经C1-C4的烷氧基酰基取代的C1-C5的烷基或经取代的C1-C4的烷基;或者T 2 and T 3 each independently represent hydrogen, C 1 -C 18 alkyl, C 1 -C 5 alkyl substituted with carboxyl, C 1 -C 5 substituted with C 1 -C 4 alkoxyacyl alkyl or substituted C 1 -C 4 alkyl; or
T2及T3各自独立表示经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基、芳酰氧基取代的C2-C18的烷基,或是被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烷基,或是上述两种情况同时存在;或者T 2 and T 3 each independently represent via one or more halogen, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 alkanoyloxy, aroyloxy substituted C 2 -C 18 alkyl, or inserted by C 5 -C 7 cycloalkylene, phenylene, O, S or NT 4 C 2 -C 18 alkyl, or both; or
T2及T3各自独立表示C5-C7的环烷基,或经一个或多个C1-C4的烷基、苯基、卤素或CN取代的C5-C7的环烷基;或者T 2 and T 3 each independently represent a C 5 -C 7 cycloalkyl, or a C 5 -C 7 cycloalkyl substituted with one or more C 1 -C 4 alkyl, phenyl, halogen or CN ;or
T2及T3各自独立表示苯基,或经一个或多个C1-C4的烷基、C1-C4的烷氧基、羧基、C1-C12的烷基酰基、C5-C6的环烷基甲酰基或C5-C6的环烷基取代的C2-C4的烷基酰基、芳基酰基、JT4、苯基、卤素或CN取代的苯基;或者T 2 and T 3 each independently represent a phenyl group, or via one or more C 1 -C 4 alkyl groups, C 1 -C 4 alkoxy groups, carboxyl groups, C 1 -C 12 alkyl acyl groups, C 5 -C 6 cycloalkylformyl or C 5 -C 6 cycloalkyl substituted C 2 -C 4 alkyl acyl, aryl acyl, JT 4 , phenyl, halogen or CN substituted phenyl; or
T2及T3各自与其共同所连结的碳原子或硅原子一起构成环状结构且成环的原子数为4至7;或者Each of T 2 and T 3 together with the carbon atom or silicon atom to which they are commonly attached forms a ring structure and the number of atoms forming the ring is 4 to 7; or
T2及T3各自与相邻的取代基一起构成环状结构且成环的原子数为4至7;Each of T 2 and T 3 together with the adjacent substituents forms a cyclic structure and the number of atoms forming the ring is 4 to 7;
T4表示C1-C4的烷基;T 4 represents a C 1 -C 4 alkyl group;
T5表示氢、C1-C18的烷基、经C1-C4的烷氧基酰基取代的C1-C5的烷基或经取代的C1-C4的烷基;或者T 5 represents hydrogen, C 1 -C 18 alkyl, C 1 -C 5 alkyl substituted with C 1 -C 4 alkoxyacyl, or C 1 -C 5 alkyl substituted C 1 -C 4 alkyl; or
T5表示经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基或芳酰氧基取代的C2-C18的烷基,或是被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烷基,或是上述两种情况同时存在;或者T 5 represents via one or more halogen, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 alkane C 2 -C 18 alkyl substituted with acyloxy or aroyloxy, or C 2 -C 18 inserted by C 5 -C 7 cycloalkylene, phenylene, O, S or NT 4 , or both of the above; or
T5表示C5-C7的环烷基,或经一个或多个C1-C4的烷基、苯基、卤素或CN取代的C5-C7的环烷基;或者T 5 represents a C 5 -C 7 cycloalkyl, or a C 5 -C 7 cycloalkyl substituted with one or more C 1 -C 4 alkyl, phenyl, halogen or CN; or
T5表示苯基,或经一个或多个C1-C12的烷基、羧基、C1-C12的烷基酰基、被亚苯基、O、S或NT4插入的C2-C12的烷基酰基、C5-C6的环烷基甲酰基、C5-C6的环烷基取代的C2-C4的烷基酰基、芳基酰基、杂芳基酰基、JT4、苯基、卤素、CN或NO2等上述取代基取代的苯基,其中芳基酰基为苯甲酰基、或经一个或多个卤素、C1-C4的烷基或C1-C4的烷氧基取代的苯甲酰基;或者T 5 represents phenyl, or C 2 -C through one or more C 1 -C 12 alkyl, carboxyl, C 1 -C 12 alkylacyl, C 2 -C inserted by phenylene, O, S or NT 4 12 alkyl acyl, C 5 -C 6 cycloalkyl formyl, C 5 -C 6 cycloalkyl substituted C 2 -C 4 alkyl acyl, aryl acyl, heteroaryl acyl, JT 4 , phenyl, halogen, CN or NO 2 and other above-mentioned substituent substituted phenyl, wherein aryl acyl is benzoyl, or through one or more halogen, C 1 -C 4 alkyl or C 1 -C 4 alkoxy-substituted benzoyl; or
T5表示C1-C4的烷基酰基、C1-C4的共轭烯酰基、苯甲酰基或苯氧基羰基,其中苯甲酰基及苯氧基羰基中的苯基可任意被一个或两个以上卤素、T4、环戊基、环己基、CN、OH或JT4取代;或者T 5 represents a C 1 -C 4 alkyl acyl group, a C 1 -C 4 conjugated alkenoyl group, a benzoyl group or a phenoxycarbonyl group, wherein the phenyl group in the benzoyl group and the phenoxycarbonyl group can be arbitrarily replaced by one or two or more halogen, T 4 , cyclopentyl, cyclohexyl, CN, OH or JT 4 substitutions; or
T5经由单键、碳原子或羰基与Ar1中的芳环形成环状结构;T 5 forms a cyclic structure with the aromatic ring in Ar 1 via a single bond, a carbon atom or a carbonyl group;
T6及T7各自独立表示氢、C1-C18的烷基、经C1-C4的烷氧基酰基取代的C1-C5的烷基或经取代的C1-C4的烷基;或者T 6 and T 7 each independently represent hydrogen, a C 1 -C 18 alkyl group, a C 1 -C 5 alkyl group substituted with a C 1 -C 4 alkoxyacyl group, or a C 1 -C 5 alkyl group substituted with a C 1 -C 4 alkoxyacyl group. substituted C 1 -C 4 alkyl; or
T6及T7各自独立表示经一个或多个卤素、C1-C4的烷基、C5-C7的环烷基、杂环烷基、苯基、杂芳基、CN、C1-C4的烷酰氧基或芳酰氧基取代的C2-C18的烷基,被C5-C7的亚环烷基、亚苯基、O、S或NT4插入的C2-C18的烷基,或是上述两种情况同时存在;或者T 6 and T 7 each independently represent through one or more halogen, C 1 -C 4 alkyl, C 5 -C 7 cycloalkyl, heterocycloalkyl, phenyl, heteroaryl, CN, C 1 -C 4 alkanoyloxy or aroyloxy substituted C 2 -C 18 alkyl, C 2 inserted by C 5 -C 7 cycloalkylene, phenylene, O, S or NT 4 -C 18 alkyl, or both; or
T6及T7各自独立表示C5-C7的环烷基,或经一个或多个C1-C4的烷基、苯基、卤素或CN取代的C5-C7的环烷基;或者 T6 and T7 each independently represent a C5 - C7 cycloalkyl, or a C5 -C7 cycloalkyl substituted with one or more C1 - C4 alkyl, phenyl, halogen or CN ;or
T6及T7各自独立表示苯基,或经一个或多个C1-C4的烷基、羧基、C1-C12的烷基酰基、C5-C6的环烷基甲酰基或C5-C6的环烷基取代的C2-C4的烷基酰基、芳基酰基、JT4、苯基、卤素或CN取代的苯基;或者T 6 and T 7 each independently represent a phenyl group, or via one or more C 1 -C 4 alkyl groups, carboxyl groups, C 1 -C 12 alkyl acyl groups, C 5 -C 6 cycloalkylformyl groups or C5 - C6 cycloalkyl substituted C2 - C4 alkylacyl, arylacyl, JT4 , phenyl, halogen or CN substituted phenyl; or
T6各自经由单键、碳原子、羰基与Ar1中的芳环形成环状结构;Each of T 6 forms a cyclic structure via a single bond, a carbon atom, a carbonyl group and an aromatic ring in Ar 1 ;
其中当Ar1为经取代的咔唑基团时,Y1不是C、O、S或NT7。Wherein when Ar 1 is a substituted carbazole group, Y 1 is not C, O, S or NT 7 .
另外,式(III)中,Ar1较佳为表示下述式(III-A)所示的基团。In addition, in the formula (III), Ar 1 preferably represents a group represented by the following formula (III-A).
T8、T9、T10及T11各自独立表示氢;或者T 8 , T 9 , T 10 and T 11 each independently represent hydrogen; or
T8、T9、T10及T11各自独立表示经一个或多个C1-C12的烷氧基、C1-C4的烷基苯甲氧基取代的C1-C4的烷氧基、经取代的C1-C4的烷氧基;或者T 8 , T 9 , T 10 and T 11 each independently represent a C 1 -C 4 alkane substituted with one or more of C 1 -C 12 alkoxy, C 1 -C 4 alkylbenzyloxy Oxygen, via substituted C 1 -C 4 alkoxy; or
T8、T9、T10及T11各自独立表示经一个或多个C1-C4的烷基取代的苯氧基;经一个C1-C8的烷基酰基、C5-C6的环烷基酰基、芳基酰基、杂芳基酰基取代的苯氧基;经C5-C6的环烷基取代的C1-C4的烷基酰基苯氧基;C1-C3的亚烷基二氧基;C1-C12的烷基硫基;经取代的C1-C4的烷基硫基;经C1-C4的烷基苯硫基;经取代的C1-C4的烷基苯硫基;或者T 8 , T 9 , T 10 and T 11 each independently represent a phenoxy group substituted with one or more C 1 -C 4 alkyl groups ; cycloalkyl acyl, aryl acyl, heteroaryl acyl substituted phenoxy; C 5 -C 6 cycloalkyl substituted C 1 -C 4 alkyl acyl phenoxy; C 1 -C 3 The alkylene dioxy group; C 1 -C 12 alkylthio; via Substituted C 1 -C 4 alkylthio; through C 1 -C 4 alkylphenylthio; through Substituted C 1 -C 4 alkylphenylthio; or
T8、T9、T10及T11各自独立表示经一个C1-C8的烷基酰基、C5-C6的环烷基酰基、芳基酰基、杂芳基酰基取代的苯硫基,或经C5-C6的环烷基取代的C1-C4的烷基酰基苯硫基;T 8 , T 9 , T 10 and T 11 each independently represent a phenylthio group substituted with a C 1 -C 8 alkylacyl group, a C 5 -C 6 cycloalkyl acyl group, an aryl acyl group, and a heteroaryl acyl group , or a C 1 -C 4 alkyl acyl phenylthio group substituted with a C 5 -C 6 cycloalkyl group;
Y1较佳为表示CH2、CHCH3或C(CH3)2;Y 1 preferably represents CH 2 , CHCH 3 or C(CH 3 ) 2 ;
T1较佳为表示甲基、乙基、苯基、2-甲基苯基、3-甲基苯基、2,4,6-三甲基苯基或2,6-二甲氧基苯基;T 1 preferably represents methyl, ethyl, phenyl, 2-methylphenyl, 3-methylphenyl, 2,4,6-trimethylphenyl or 2,6-dimethoxybenzene base;
*表示键结位置。* indicates bond position.
值得注意的是,Ar1的取代基中,较佳为至少一个取代基处于与Ar1相连羰基的对位。It is worth noting that, among the substituents of Ar 1 , preferably at least one substituent is in the para position to the carbonyl group connected to Ar 1 .
光起始剂(C-1)的具体例包括下述式(III-1)至式(III-28)所示的化合物、或这些化合物的组合。Specific examples of the photoinitiator (C-1) include compounds represented by the following formulae (III-1) to (III-28), or a combination of these compounds.
光起始剂(C-2)的具体例较佳为包括式(III-2)所示的化合物、式(III-6)所示的化合物、式(III-11)所示的化合物、式(III-17)所示的化合物、式(III-24)所示的化合物、式(III-28)所示的化合物、或这些化合物的组合。Specific examples of the photoinitiator (C-2) preferably include the compound represented by the formula (III-2), the compound represented by the formula (III-6), the compound represented by the formula (III-11), the compound represented by the formula A compound represented by (III-17), a compound represented by formula (III-24), a compound represented by formula (III-28), or a combination of these compounds.
感光性树脂组合物含有光起始剂(C-2),感光性树脂组合物具有较优异的感度。The photosensitive resin composition contains a photoinitiator (C-2), and the photosensitive resin composition has relatively excellent sensitivity.
基于碱可溶性树脂(A)为100重量份,光起始剂(C-2)的使用量可为5重量份至50重量份,较佳为6重量份至45重量份,更佳为7重量份至40重量份。Based on 100 parts by weight of the alkali-soluble resin (A), the amount of the photoinitiator (C-2) used may be 5 parts by weight to 50 parts by weight, preferably 6 parts by weight to 45 parts by weight, more preferably 7 parts by weight parts to 40 parts by weight.
其他光起始剂(C-3)Other photoinitiators (C-3)
本发明可视情况选择添加其他光起始剂(C-3)。其他光起始剂(C-3)的具体例包括但不限于O-酰基肟类化合物、三氮杂苯系化合物、苯乙烷酮类化合物、二咪唑类化合物、二苯甲酮类化合物、α-二酮类化合物、酮醇类化合物、酮醇醚类化合物、酰膦氧化物类化合物、醌类化合物、含卤素类化合物、过氧化物、或其组合。In the present invention, other photoinitiators (C-3) can be optionally added as appropriate. Specific examples of other photoinitiators (C-3) include, but are not limited to, O-acyl oxime compounds, triazine compounds, acetophenone compounds, diimidazole compounds, benzophenone compounds, Alpha-diketones, ketone alcohols, ketol ethers, acylphosphine oxides, quinones, halogen-containing compounds, peroxides, or combinations thereof.
上述的O-酰基肟类化合物的具体例包括1-[4-(苯基硫代)苯基]-丙烷-3-环戊烷-1,2-二酮2-(O-苯酰基肟)、1-[4-(苯基硫代)苯基]-庚烷-1,2-二酮2-(O-苯酰基肟)、1-[4-(苯基硫代)苯基]-辛烷-1,2-二酮2-(O-苯酰基肟)、乙烷酮,1-[9-乙基-6-(2-甲基苯甲酰基)-9氢-咔唑-3-取代基]-,1-(氧-乙酰肟)、1,2-丁二酮-1-[4-(甲硫基)苯基]2-(O-乙酰基肟)、或其组合。Specific examples of the above-mentioned O-acyl oxime compounds include 1-[4-(phenylthio)phenyl]-propane-3-cyclopentane-1,2-dione 2-(O-benzoyl oxime) , 1-[4-(phenylthio)phenyl]-heptane-1,2-dione 2-(O-benzoyl oxime), 1-[4-(phenylthio)phenyl]- Octane-1,2-dione 2-(O-benzoyl oxime), ethanone, 1-[9-ethyl-6-(2-methylbenzoyl)-9hydro-carbazole-3 -Substituent]-,1-(Oxy-acetyloxime), 1,2-butanedione-1-[4-(methylthio)phenyl]2-(O-acetyloxime), or a combination thereof.
O-酰基肟类化合物的具体例包括较佳为包括1-[4-(苯基硫代)苯基]-庚烷-1,2-二酮2-(O-苯酰基肟)、1-[4-(苯基硫代)苯基]-辛烷-1,2-二酮2-(O-苯酰基肟)、或其组合。上述的O-酰基肟类化合物可单独使用或组合多种来使用,端视实际需要而定。Specific examples of O-acyl oxime compounds include preferably 1-[4-(phenylthio)phenyl]-heptane-1,2-dione 2-(O-benzoyl oxime), 1- [4-(Phenylthio)phenyl]-octane-1,2-dione 2-(O-benzoyl oxime), or a combination thereof. The above-mentioned O-acyl oxime compounds can be used alone or in combination, depending on actual needs.
三氮杂苯系化合物的具体例可包括但不限于乙烯基-卤代甲基-s-三氮杂苯化合物、2-(萘并-1-取代基)-4,6-双-卤代甲基-s-三氮杂苯化合物、4-(对-胺基苯基)-2,6-二-卤代甲基-s-三氮杂苯化合物、或其组合。Specific examples of triazabenzene-based compounds may include, but are not limited to, vinyl-halomethyl-s-triazabenzene compounds, 2-(naphtho-1-substituent)-4,6-bis-halo Methyl-s-triazabenzene compound, 4-(p-aminophenyl)-2,6-di-halomethyl-s-triazabenzene compound, or a combination thereof.
上述的乙烯基-卤代甲基-s-三氮杂苯化合物的具体例包括2,4-双(三氯甲基)-6-对-甲氧基苯乙烯基-s-三氮杂苯、2,4-双(三氯甲基)-3-(1-对-二甲基胺基苯基-1,3-丁两个烯基)-s-三氮杂苯、2-三氯甲基-3-胺基-6-对-甲氧基苯乙烯基-s-三氮杂苯、或其组合。Specific examples of the above vinyl-halomethyl-s-triazabenzene compounds include 2,4-bis(trichloromethyl)-6-p-methoxystyryl-s-triazabenzene , 2,4-bis(trichloromethyl)-3-(1-p-dimethylaminophenyl-1,3-buttwoenyl)-s-triazabenzene, 2-trichloro Methyl-3-amino-6-p-methoxystyryl-s-triazabenzene, or a combination thereof.
上述的2-(萘并-1-取代基)-4,6-双-卤代甲基-s-三氮杂苯化合物的具体例包括2-(萘并-1-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(4-甲氧基-萘并-1-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(4-乙氧基-萘并-1-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(4-丁氧基-萘并-1-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-[4-(2-甲氧基乙基)-萘并-1-取代基]-4,6-双-三氯甲基-s-三氮杂苯、2-[4-(2-乙氧基乙基)-萘并-1-取代基]-4,6-双-三氯甲基-s-三氮杂苯、2-[4-(2-丁氧基乙基)-萘并-1-取代基]-4,6-双-三氯甲基-s-三氮杂苯、2-(2-甲氧基-萘并-1-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(6-甲氧基-5-甲基-萘并-2-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(6-甲氧基-萘并-2-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(5-甲氧基-萘并-1-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(4,7-二甲氧基-萘并-1-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(6-乙氧基-萘并-2-取代基)-4,6-双-三氯甲基-s-三氮杂苯、2-(4,5-二甲氧基-萘并-1-取代基)-4,6-双-三氯甲基-s-三氮杂苯、或其组合。Specific examples of the above-mentioned 2-(naphtho-1-substituent)-4,6-bis-halomethyl-s-triazabenzene compound include 2-(naphtho-1-substituent)-4, 6-Bis-trichloromethyl-s-triazabenzene, 2-(4-methoxy-naphtho-1-substituent)-4,6-bis-trichloromethyl-s-triaza Benzene, 2-(4-ethoxy-naphtho-1-substituent)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(4-butoxy-naphtho- 1-Substituent)-4,6-bis-trichloromethyl-s-triazabenzene, 2-[4-(2-methoxyethyl)-naphtho-1-substituent]-4, 6-Bis-trichloromethyl-s-triazabenzene, 2-[4-(2-ethoxyethyl)-naphtho-1-substituent]-4,6-bis-trichloromethyl -s-triazabenzene, 2-[4-(2-butoxyethyl)-naphtho-1-substituent]-4,6-bis-trichloromethyl-s-triazabenzene, 2-(2-Methoxy-naphtho-1-substituent)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(6-methoxy-5-methyl- naphtho-2-substituent)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(6-methoxy-naphtho-2-substituent)-4,6-bis -Trichloromethyl-s-triazabenzene, 2-(5-methoxy-naphtho-1-substituent)-4,6-bis-trichloromethyl-s-triazabenzene, 2 -(4,7-Dimethoxy-naphtho-1-substituent)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(6-ethoxy-naphtho- 2-Substituent)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(4,5-dimethoxy-naphtho-1-substituent)-4,6-bis -Trichloromethyl-s-triazabenzene, or a combination thereof.
前述的4-(对-胺基苯基)-2,6-二-卤代甲基-s-三氮杂苯化合物的具体例包括4-[对-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[邻-甲基-对-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[对-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[邻-甲基-对-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-(对-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(对-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-[对-N,N-二(苯基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-(对-N-氯乙基羰基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-[对-N-(对-甲氧基苯基)羰基胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[间-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[间-溴-对-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[间-氯-对-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[间-氟-对-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[邻-溴-对-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[邻-氯-对-N,N-二(乙氧基羰基甲基)胺基苯基-2,6-二(三氯甲基)-s-三氮杂苯、4-[邻-氟-对-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[邻-溴-对-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[邻-氯-对-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[邻-氟-对-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[间-溴-对-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[间-氯-对-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-[间-氟-对-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、4-(间-溴-对-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(间-氯-对-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(间-氟-对-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(邻-溴-对-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(邻-氯-对-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(邻-氟-对-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(间-溴-对-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(间-氯-对-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(间-氟-对-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(邻-溴-对-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(邻-氯-对-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、4-(邻-氟-对-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮杂苯、2,4-双(三氯甲基)-6-[3-溴-4-[N,N-双(乙氧基羰基甲基)胺基]苯基]-1,3,5-三氮杂苯、或其组合。Specific examples of the aforementioned 4-(p-aminophenyl)-2,6-di-halomethyl-s-triazabenzene compound include 4-[p-N,N-bis(ethoxycarbonyl) Methyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-methyl-p-N,N-bis(ethoxycarbonylmethyl) ) aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[p-N,N-bis(chloroethyl)aminophenyl]-2,6 -Bis(trichloromethyl)-s-triazabenzene, 4-[o-methyl-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichlorophenyl) Methyl)-s-triazabenzene, 4-(p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(p-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene -N-Ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[p-N,N-bis(phenyl)amino Phenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(p-N-chloroethylcarbonylaminophenyl)-2,6-bis(trichloromethyl) )-s-triazabenzene, 4-[p-N-(p-methoxyphenyl)carbonylaminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene , 4-[m-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-bromo -p-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-chloro-p- N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-fluoro-p-N,N -Bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-bromo-p-N,N-bis( Ethoxycarbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-chloro-p-N,N-bis(ethoxy) Carbonylmethyl)aminophenyl-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-fluoro-p-N,N-bis(ethoxycarbonylmethyl) Aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-bromo-p-N,N-bis(chloroethyl)aminophenyl]- 2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-chloro-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis( Trichloromethyl)-s-triazabenzene, 4-[o-fluoro-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)- s-triazabenzene, 4-[m-bromo-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene , 4-[m-chloro-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m- Fluoro-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)-s -Triazabenzene, 4-(m-bromo-p-N-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4- (m-chloro-p-N-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m-fluoro-p-N -Ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(o-bromo-p-N-ethoxycarbonylmethylamine phenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(o-chloro-p-N-ethoxycarbonylmethylaminophenyl)-2,6 -Bis(trichloromethyl)-s-triazabenzene, 4-(o-fluoro-p-N-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl) -s-triazabenzene, 4-(m-bromo-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-( m-Chloro-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m-fluoro-p-N-chloroethyl Aminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(o-bromo-p-N-chloroethylaminophenyl)-2,6-di (Trichloromethyl)-s-triazabenzene, 4-(o-chloro-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triaza Heterobenzene, 4-(o-fluoro-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 2,4-bis(trichlorophenyl) methyl)-6-[3-bromo-4-[N,N-bis(ethoxycarbonylmethyl)amino]phenyl]-1,3,5-triazabenzene, or a combination thereof.
前述的三氮杂苯系化合物的具体例较佳为包括4-[间-溴-对-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮杂苯、2,4-双(三氯甲基)-6-对-甲氧基苯乙烯基-s-三氮杂苯、或其组合。上述的三氮杂苯系化合物可单独使用或组合多种来使用。Specific examples of the aforementioned triazabenzene-based compounds preferably include 4-[m-bromo-p-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-bis(tris chloromethyl)-s-triazabenzene, 2,4-bis(trichloromethyl)-6-p-methoxystyryl-s-triazabenzene, or a combination thereof. The above-mentioned triazabenzene-based compounds may be used alone or in combination of two or more.
上述的苯乙烷酮类化合物的具体例包括对二甲胺苯乙烷酮、α,α’-二甲氧基氧化偶氮苯乙烷酮、2,2’-二甲基-2-苯基苯乙烷酮、对-甲氧基苯乙烷酮、2-甲基-1-(4-甲基硫代苯基)-2-吗啉代-1-丙酮、2-苄基-2-N,N-二甲胺-1-(4-吗啉代苯基)-1-丁酮、或其组合。前述的苯乙烷酮类化合物较佳为2-甲基-1-(4-甲基硫代苯基)-2-吗啉代-1-丙酮、2-苄基-2-N,N-二甲胺-1-(4-吗啉代苯基)-1-丁酮、或其组合。上述的苯乙烷酮类化合物可单独使用或组合多种来使用。Specific examples of the above-mentioned acetophenone compounds include p-dimethylamine acetophenone, α,α'-dimethoxy azo acetophenone, 2,2'-dimethyl-2-benzene Ethyl acetophenone, p-methoxyacetophenone, 2-methyl-1-(4-methylthiophenyl)-2-morpholino-1-propanone, 2-benzyl-2 -N,N-Dimethylamine-1-(4-morpholinophenyl)-1-butanone, or a combination thereof. The aforementioned acetophenone compounds are preferably 2-methyl-1-(4-methylthiophenyl)-2-morpholino-1-acetone, 2-benzyl-2-N,N- Dimethylamine-1-(4-morpholinophenyl)-1-butanone, or a combination thereof. The above-mentioned acetophenone compounds can be used alone or in combination.
上述的二咪唑类化合物的具体例包括2,2’-双(邻-氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-双(邻-氟苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-双(邻-甲基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-双(邻-甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-双(邻-乙基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-双(对-甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-双(2,2’,4,4’-四甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-双(2-氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-双(2,4-二氯苯基)-4,4’,5,5’-四苯基二咪唑。前述的二咪唑类化合物较佳为2,2’-双(2,4-二氯苯基)-4,4’,5,5’-四苯基二咪唑、或其组合。上述的二咪唑类化合物可单独使用或组合多种来使用,端视实际需要而定。Specific examples of the above-mentioned diimidazole compounds include 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-fluorophenyl) Phenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-methylphenyl)-4,4',5,5'-tetraphenyldiimidazole , 2,2'-bis(o-methoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-ethylphenyl)-4, 4',5,5'-tetraphenyldiimidazole, 2,2'-bis(p-methoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2' -Bis(2,2',4,4'-tetramethoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(2-chlorophenyl) -4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyldiimidazole. The aforementioned diimidazole compound is preferably 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyldiimidazole, or a combination thereof. The above-mentioned diimidazole compounds can be used alone or in combination, depending on actual needs.
上述的二苯甲酮类化合物的具体例包括噻吨酮、2,4-二乙基噻吨酮、噻吨酮-4-砜、二苯甲酮、4,4’-双(二甲胺)二苯甲酮、4,4’-双(二乙胺)二苯甲酮、或其组合。前述的二苯甲酮类化合物较佳为4,4’-双(二乙胺)二苯甲酮。上述的二苯甲酮类化合物可单独使用或组合多种来使用,端视实际需要而定。Specific examples of the above-mentioned benzophenone compounds include thioxanthone, 2,4-diethylthioxanthone, thioxanthone-4-sulfone, benzophenone, 4,4'-bis(dimethylamine) ) benzophenone, 4,4'-bis(diethylamine)benzophenone, or a combination thereof. The aforementioned benzophenone compound is preferably 4,4'-bis(diethylamine)benzophenone. The above-mentioned benzophenone compounds can be used alone or in combination, depending on actual needs.
上述的α-二酮类化合物的具体例包括苯偶酰、乙酰基、或其组合。Specific examples of the above-mentioned α-diketone compounds include benzil, acetyl, or a combination thereof.
上述的酮醇类化合物的具体例包括二苯乙醇酮。上述的酮醇醚类化合物的具体例包括二苯乙醇酮甲醚、二苯乙醇酮乙醚、二苯乙醇酮异丙醚、或其组合。Specific examples of the above-mentioned ketone alcohol compound include benzophenone. Specific examples of the above-mentioned ketol ether compounds include benzophenone methyl ether, benzophenone ethyl ether, benzophenone isopropyl ether, or a combination thereof.
上述的酰膦氧化物类化合物的具体例包括2,4,6-三甲基苯酰二苯基膦氧化物、双-(2,6-二甲氧基苯酰)-2,4,4-三甲基苯基膦氧化物、或其组合。Specific examples of the above-mentioned acylphosphine oxide compounds include 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis-(2,6-dimethoxybenzoyl)-2,4,4 - Trimethylphenylphosphine oxide, or a combination thereof.
上述的醌类化合物的具体例包括蒽醌、1,4-萘醌、或其组合。Specific examples of the aforementioned quinone compounds include anthraquinone, 1,4-naphthoquinone, or a combination thereof.
上述的含卤素类化合物的具体例包括苯酰甲基氯、三溴甲基苯砜、三(三氯甲基)-s-三氮杂苯、或其组合。Specific examples of the above-mentioned halogen-containing compounds include benzoyl methyl chloride, tribromomethyl phenyl sulfone, tris(trichloromethyl)-s-triazabenzene, or combinations thereof.
上述的过氧化物的具体例包括二-第三丁基过氧化物、或其组合。Specific examples of the above-mentioned peroxides include di-tert-butyl peroxide, or combinations thereof.
上述的α-二酮类化合物、酮醇类化合物、酮醇醚类化合物、酰膦氧化物类化合物、醌类化合物、含卤素类化合物、过氧化物等可单独使用或组合多种来使用,端视实际需要而定。The above-mentioned α-diketone compounds, ketone alcohol compounds, ketone alcohol ether compounds, acylphosphine oxide compounds, quinone compounds, halogen-containing compounds, peroxides, etc. can be used alone or in combination. It depends on the actual needs.
其他光起始剂(C-3)的具体例较佳为包括1-[4-(苯基硫代)苯基]-辛烷-1,2-二酮2-(O-苯酰基肟)(例如商品名OXE-01,汽巴精化有限公司制造,结构由式(IV)所示)、2-甲基-1-(4-甲基硫代苯基)-2-吗啉代-1-丙酮(商品名Irgacure 907,汽巴精化有限公司制造)、或其组合。Specific examples of other photoinitiators (C-3) preferably include 1-[4-(phenylthio)phenyl]-octane-1,2-dione 2-(O-benzoyl oxime) (For example, trade name OXE-01, manufactured by Ciba Refinery Co., Ltd., and the structure is represented by formula (IV)), 2-methyl-1-(4-methylthiophenyl)-2-morpholino- 1-acetone (trade name Irgacure 907, manufactured by Ciba Refinery Co., Ltd.), or a combination thereof.
基于碱可溶性树脂(A)为100重量份,光起始剂(C)的使用量为10重量份至140重量份,较佳为15重量份至130重量份,更佳为20重量份至120重量份。Based on 100 parts by weight of the alkali-soluble resin (A), the photoinitiator (C) is used in an amount of 10 parts by weight to 140 parts by weight, preferably 15 parts by weight to 130 parts by weight, more preferably 20 parts by weight to 120 parts by weight parts by weight.
溶剂(D)Solvent (D)
溶剂(D)是指可以将碱可溶性树脂(A)、含乙烯性不饱和基的化合物(B)以及光起始剂(C)溶解,但又不与上述成分反应的溶剂,并且可为具有适当挥发性者。The solvent (D) refers to a solvent that can dissolve the alkali-soluble resin (A), the ethylenically unsaturated group-containing compound (B), and the photoinitiator (C), but does not react with the above-mentioned components, and may have Appropriately volatile.
溶剂(D)的具体例包括烷基二醇单烷醚类化合物、烷基二醇单烷醚醋酸酯类化合物、二乙二醇烷基醚类化合物、其他醚类化合物、酮类化合物、乳酸烷酯类化合物、其他酯类化合物、芳香族烃类化合物、羧酸胺类化合物、或上述化合物的组合。Specific examples of the solvent (D) include alkyl glycol monoalkyl ether compounds, alkyl glycol monoalkyl ether acetate compounds, diethylene glycol alkyl ether compounds, other ether compounds, ketone compounds, lactic acid Alkyl esters, other esters, aromatic hydrocarbons, carboxylic acid amines, or a combination of the foregoing.
烷基二醇单烷醚类化合物的具体例包括乙二醇单甲醚、乙二醇单乙醚、二乙二醇单乙醚、二乙二醇单正丙醚、二乙二醇单正丁醚、三乙二醇单甲醚、三乙二醇单乙醚、丙二醇单甲醚、丙二醇单乙醚、二丙二醇单甲醚、二丙二醇单乙醚、二丙二醇单正丙醚、二丙二醇单正丁醚、三丙二醇单甲醚、三丙二醇单乙醚或其类似物,或上述化合物的组合。Specific examples of the alkyl glycol monoalkyl ether compounds include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, and diethylene glycol mono-n-butyl ether , triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, Tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, or the like, or a combination of the foregoing.
烷基二醇单烷醚醋酸酯类化合物的具体例包括乙二醇甲醚醋酸酯、乙二醇乙醚醋酸酯、丙二醇单甲醚醋酸酯、丙二醇乙醚醋酸酯或其类似物,或上述化合物的组合。Specific examples of alkyl glycol monoalkyl ether acetate compounds include ethylene glycol methyl ether acetate, ethylene glycol ethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol ethyl ether acetate or the like, or the above compounds. combination.
二乙二醇烷基醚的具体例包括二乙二醇二甲醚、二乙二醇甲乙醚、二乙二醇二乙醚或其类似物,或上述化合物的组合。Specific examples of the diethylene glycol alkyl ether include diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol diethyl ether or the like, or a combination of the above compounds.
其他醚类化合物的具体例包括四氢呋喃或其类似物。Specific examples of other ether compounds include tetrahydrofuran or the like.
酮类化合物的具体例包括甲乙酮、环己酮、2-庚酮、3-庚酮、二丙酮醇或其类似物,或上述化合物的组合。Specific examples of the ketone compound include methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone, diacetone alcohol or the like, or a combination of the above compounds.
乳酸烷酯类化合物的具体例包括乳酸甲酯、乳酸乙酯或其类似物,或上述化合物的组合。Specific examples of the alkyl lactate compound include methyl lactate, ethyl lactate or the like, or a combination of the above compounds.
其他酯类化合物的具体例包括2-羟基-2-甲基丙酸甲酯、2-羟基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基醋酸乙酯、羟基醋酸乙酯、2-羟基-3-甲基丁酸甲酯、3-甲基-3-甲氧基丁基醋酸酯、3-甲基-3-甲氧基丁基丙酸酯、醋酸乙酯、醋酸正丙酯、醋酸异丙酯、醋酸正丁酯、醋酸异丁酯、醋酸正戊酯、醋酸异戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸异丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙酰醋酸甲酯、乙酰醋酸乙酯、2-氧基丁酸乙酯或其类似物,或上述化合物的组合。Specific examples of other ester compounds include methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, 3-methoxypropionate ethyl acetate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxy acetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutyrate, 3 -Methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl propionate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, acetic acid Isobutyl, n-amyl acetate, isoamyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, methyl pyruvate, pyruvic acid ethyl ester, n-propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, ethyl 2-oxybutyrate, or the like, or a combination of the foregoing.
芳香族烃类化合物的具体例包括甲苯、二甲苯或其类似物,或上述化合物的组合。Specific examples of the aromatic hydrocarbon compound include toluene, xylene or the like, or a combination of the above compounds.
羧酸胺类化合物N-甲基吡咯啶酮、N,N-二甲基甲酰胺、N,N-二甲基乙酰胺或其类似物,或上述化合物的组合。上述溶剂(D)可单独使用或组合多种来使用。Carboxylic acid amine compound N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide or analogs thereof, or a combination of the above compounds. The above-mentioned solvent (D) may be used alone or in combination of two or more.
溶剂(D)的具体例较佳为包括丙二醇单甲醚醋酸酯、二乙二醇二甲醚、3-乙氧基丙酸乙酯、或其组合。Specific examples of the solvent (D) preferably include propylene glycol monomethyl ether acetate, diethylene glycol dimethyl ether, ethyl 3-ethoxypropionate, or a combination thereof.
基于碱可溶性树脂(A)为100重量份,溶剂(D)的使用量可为500重量份至5000重量份,较佳为600重量份至4500重量份,更佳为700重量份至4000重量份。Based on 100 parts by weight of the alkali-soluble resin (A), the solvent (D) can be used in an amount of 500 parts by weight to 5000 parts by weight, preferably 600 parts by weight to 4500 parts by weight, more preferably 700 parts by weight to 4000 parts by weight .
添加剂(E)Additive (E)
在不影响本发明功效的前提下,本发明的感光性树脂组合物可选择性地包括添加剂(E)。添加剂(E)可包括填充剂、前述碱可溶性树脂(A)以外的聚合物、密着促进剂、抗氧化剂、紫外线吸收剂、界面活性剂、防凝集剂或其组合。Under the premise of not affecting the efficacy of the present invention, the photosensitive resin composition of the present invention may optionally include an additive (E). The additive (E) may include a filler, a polymer other than the aforementioned alkali-soluble resin (A), an adhesion promoter, an antioxidant, an ultraviolet absorber, a surfactant, an anti-aggregation agent, or a combination thereof.
填充剂的具体例可包括但不限于玻璃或铝等。Specific examples of fillers may include, but are not limited to, glass, aluminum, and the like.
聚合物的具体例可包括但不限于聚乙烯醇、聚乙二醇单烷基醚、聚氟丙烯酸烷酯、或上述聚合物的任意组合。Specific examples of polymers may include, but are not limited to, polyvinyl alcohol, polyethylene glycol monoalkyl ethers, polyfluoroalkyl acrylates, or any combination of the foregoing polymers.
密着促进剂的具体例可包括但不限于乙烯基三甲氧基硅烷、乙烯基三乙氧基硅烷、乙烯基三(2-甲氧乙氧基)硅烷、氮-(2-胺基乙基)-3-胺基丙基甲基二甲氧基硅烷、氮-(2-胺基乙基)-3-胺基丙基三甲氧基硅烷、3-胺基丙基三乙氧基硅烷、3-环氧丙氧基丙基三甲氧基硅烷、3-环氧丙醇丙基甲基二甲氧基硅烷、2-(3,4-环氧环己基)乙基三甲氧基硅烷、3-氯丙基甲基二甲氧基硅烷、3-氯丙基三甲氧基硅烷、3-甲基丙烯氧基丙基三甲氧基硅烷、3-硫醇基丙基三甲氧基硅烷、3-甲基丙烯酰氧基丙基三乙氧基硅烷、或上述化合物的任意组合。Specific examples of adhesion promoters may include, but are not limited to, vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris(2-methoxyethoxy)silane, nitrogen-(2-aminoethyl) -3-aminopropylmethyldimethoxysilane, nitrogen-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3 - Glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3- Chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-thiolpropyltrimethoxysilane, 3-methyl Acryloyloxypropyltriethoxysilane, or any combination of the above.
抗氧化剂的具体例可包括但不限于2,2-硫代双(4-甲基-6-第三丁基苯酚)、2,6-二-第三丁基苯酚、或上述化合物的任意组合。Specific examples of antioxidants may include, but are not limited to, 2,2-thiobis(4-methyl-6-tert-butylphenol), 2,6-di-tert-butylphenol, or any combination of the foregoing compounds .
紫外线吸收剂的具体例可包括但不限于2-(3-第三丁基-5-甲基-2-羟基苯基)-5-氯苯基迭氮、烷氧基苯酮(alkoxy phenone)、或上述化合物的任意组合。Specific examples of the ultraviolet absorber may include, but are not limited to, 2-(3-tert-butyl-5-methyl-2-hydroxyphenyl)-5-chlorophenylazide, alkoxy phenone , or any combination of the above compounds.
界面活性剂的市售商品的具体例包括KP(由信越化学工业制造)、SF-8427(由道康宁东丽聚硅氧股份有限公司(Dow Corning Toray Silicone Co.,Ltd.)制造)、Polyflow(由共荣社油脂化学工业制造)、F-Top(由得克姆股份有限公司制造(Tochem ProductsCo.,Ltd.)制造)、Megafac(由大日本印墨化学工业(DIC)制造)、Fluorade(由住友3M股份有限公司(Sumitomo 3M Ltd.)制造)、Asahi Guard或Surflon(由旭硝子制造)、SINOPOLE8008(由中日合成化学制造)、F-475(由大日本印墨化学工业制造)或其组合。Specific examples of commercially available surfactants include KP (manufactured by Shin-Etsu Chemical Industry), SF-8427 (manufactured by Dow Corning Toray Silicone Co., Ltd.), Polyflow (manufactured by Dow Corning Toray Silicone Co., Ltd.), Manufactured by Kyōeisha Oil & Chemical Industries), F-Top (manufactured by Tochem Products Co., Ltd.), Megafac (manufactured by Dainippon Ink Chemical Industries (DIC)), Fluorade (manufactured by Tochem Products Co., Ltd.) Manufactured by Sumitomo 3M Ltd.), Asahi Guard or Surflon (manufactured by Asahi Glass), SINOPOLE8008 (manufactured by Sino-Nippon Synthetic Chemical), F-475 (manufactured by Dainippon Ink Chemical Industry) or its combination.
防凝集剂的具体例可包括但不限于聚丙烯酸钠(sodium polyacrylate)等。Specific examples of the anti-aggregation agent may include, but are not limited to, sodium polyacrylate and the like.
添加剂(E)的具体例较佳为包括SF-8427(由道康宁东丽聚硅氧股份有限公司(DowCorning Toray Co.,Ltd.)制造,界面活性剂)、3-环氧丙氧基丙基三甲氧基硅烷(KBM-403,信越化学制造)、或其组合。Specific examples of the additive (E) preferably include SF-8427 (manufactured by Dow Corning Toray Co., Ltd., surfactant), 3-glycidoxypropyl Trimethoxysilane (KBM-403, manufactured by Shin-Etsu Chemical), or a combination thereof.
基于碱可溶性树脂(A)为100重量份,添加剂(E)的使用量可为0至10重量份,较佳为1至9重量份,更佳为3至8重量份。The additive (E) may be used in an amount of 0 to 10 parts by weight, preferably 1 to 9 parts by weight, more preferably 3 to 8 parts by weight, based on 100 parts by weight of the alkali-soluble resin (A).
感光性树脂组合物的制备方法Preparation method of photosensitive resin composition
可用来制备感光性树脂组合物的方法例如:将碱可溶性树脂(A)、含乙烯性不饱和基的化合物(B)、光起始剂(C)以及溶剂(D)放置于搅拌器中搅拌,使其均匀混合成溶液状态。另外,必要时亦可添加添加剂(E),予以均匀混合后,便可获得溶液状态的感光性树脂组合物。The method that can be used to prepare the photosensitive resin composition is, for example: the alkali-soluble resin (A), the ethylenically unsaturated group-containing compound (B), the photoinitiator (C) and the solvent (D) are placed in a stirrer and stirred , so that it is uniformly mixed into a solution state. Moreover, you may add an additive (E) as needed, and after mixing uniformly, the photosensitive resin composition of a solution state can be obtained.
又,感光性树脂组合物的制备方法没有特别的限制。感光性树脂组合物的制备方法例如是先将一部分的碱可溶性树脂(A)及含乙烯性不饱和基的化合物(B)分散于一部分的溶剂(D)中,以形成分散溶液;并且混合其余的碱可溶性树脂(A)、含乙烯性不饱和基的化合物(B)、光起始剂(C)、溶剂(D)。另外,必要时亦可添加添加剂(E)。Moreover, the preparation method of the photosensitive resin composition is not specifically limited. The preparation method of the photosensitive resin composition is, for example, first dispersing a part of the alkali-soluble resin (A) and the ethylenically unsaturated group-containing compound (B) in a part of the solvent (D) to form a dispersion solution; and mixing the rest. Alkali-soluble resin (A), ethylenically unsaturated group-containing compound (B), photoinitiator (C), solvent (D). In addition, if necessary, an additive (E) may be added.
<保护膜与间隙体><Protective film and spacer>
本发明提供一种保护膜与一种间隙体,其由上述的感光性树脂组合物所形成。以下详细说明保护膜及间隙体的制备方法。The present invention provides a protective film and a spacer formed from the above-mentioned photosensitive resin composition. The manufacturing method of the protective film and the spacer will be described in detail below.
在一实施例中,形成保护膜的步骤包括:先将由红色、绿色及蓝色等的着色层组成的像素层形成于透明基板上,再将感光性树脂组合物涂布于像素层上,接着,对感光性树脂组合物进行预烤、曝光、显影以及后烤等步骤。In one embodiment, the step of forming the protective film includes: firstly forming a pixel layer consisting of red, green and blue coloring layers on a transparent substrate, then coating the photosensitive resin composition on the pixel layer, and then , the photosensitive resin composition is subjected to the steps of pre-baking, exposing, developing and post-baking.
在一实施例中,形成间隙体的步骤包括:在已形成有保护膜及像素层的透明基板上,形成透明导电膜,再将感光性树脂组合物涂布于透明导电膜上,接着,进行预烤、曝光、显影以及后烤等步骤。In one embodiment, the step of forming the spacer includes: forming a transparent conductive film on the transparent substrate on which the protective film and the pixel layer have been formed, and then coating the photosensitive resin composition on the transparent conductive film, and then performing Pre-bake, exposure, development, and post-bake steps.
换言之,若欲形成保护膜,则是将感光性树脂组合物涂布于基板上的像素层上;而若欲形成间隙体,则是将感光性树脂组合物涂布于基板上的透明导电膜上。In other words, if the protective film is to be formed, the photosensitive resin composition is coated on the pixel layer on the substrate; and if the spacer is to be formed, the photosensitive resin composition is coated on the transparent conductive film on the substrate. superior.
当然,本发明的保护膜及间隙体并不限定于形成于像素层或透明导电膜上,而可以形成于基板上或基板上的各种元件上。以下,亦将涂布上感光性树脂组合物的元件称为“被涂布物”。Of course, the protective film and spacer of the present invention are not limited to being formed on the pixel layer or the transparent conductive film, but may be formed on the substrate or various elements on the substrate. Hereinafter, the element to which the photosensitive resin composition is applied is also referred to as "object to be applied".
具体而言,上述间隙体或保护膜的形成方法依序包括以下步骤:(a)成膜步骤;(b)曝光步骤;(c)显影步骤;以及(d)后烤步骤,以形成保护膜或间隙体。Specifically, the above-mentioned method for forming a spacer or a protective film sequentially includes the following steps: (a) a film forming step; (b) an exposure step; (c) a developing step; and (d) a post-baking step to form the protective film or spacers.
a.成膜步骤:a. Film forming steps:
通过涂布法将感光性树脂组合物涂布于形成有像素层或透明导电膜的基板(被涂布物)上,以形成膜。The photosensitive resin composition is coated on the substrate (object to be coated) on which the pixel layer or the transparent conductive film is formed by a coating method to form a film.
基板可为透明基板或透明导电基板。基板的材质没有特别的限制,例如是钠钙玻璃及无碱玻璃等的玻璃基板;或者聚对苯二甲酸乙二酯、聚丁烯对苯二甲酸酯、聚醚砜、聚碳酸酯或聚酰亚胺等的树脂基板。基板的材质较佳为玻璃基板。The substrate may be a transparent substrate or a transparent conductive substrate. The material of the substrate is not particularly limited, for example, glass substrates such as soda lime glass and alkali-free glass; or polyethylene terephthalate, polybutylene terephthalate, polyethersulfone, polycarbonate or Resin substrates such as polyimide. The material of the substrate is preferably a glass substrate.
透明导电基板可为于透明基板的全部表面上具有氧化锡(SnO2)所形成的奈塞(NESA)膜(美国必丕志(PPG)公司注册商标)或具有氧化铟-氧化锡(In2O3-SnO2)所形成的铟锡氧化物(Indium tin oxide,ITO)膜等。The transparent conductive substrate can be a NESA film (registered trademark of PPG) formed by tin oxide (SnO 2 ) on the entire surface of the transparent substrate, or an indium oxide-tin oxide (In 2 ) film. Indium tin oxide (Indium tin oxide, ITO) film formed by O 3 -SnO 2 ).
以涂布法形成膜的方法是将感光性树脂组合物的溶液涂布于被涂布物上。应用于涂布法的感光性树脂组合物溶液的固形物浓度为5重量%至50重量%,较佳为10重量%至40重量%,且更佳为15重量%至35重量%。涂布法包括但不限于喷涂法、辊涂法、旋涂法(旋转涂布法)、缝模涂布法、棒涂布法或喷墨涂布法。此外,在涂布法之前,基板的涂布面较佳为先经过加热步骤。A method of forming a film by a coating method is to apply a solution of the photosensitive resin composition on an object to be coated. The solid content concentration of the photosensitive resin composition solution applied to the coating method is 5% by weight to 50% by weight, preferably 10% by weight to 40% by weight, and more preferably 15% by weight to 35% by weight. Coating methods include, but are not limited to, spray coating, roll coating, spin coating (spin coating), slot die coating, bar coating, or ink jet coating. In addition, before the coating method, the coated surface of the substrate is preferably subjected to a heating step.
另外,较佳为对膜进一步进行预烤处理。预烤处理的条件可依成分及混合比例而有所不同,较佳为于70℃至90℃下加热1分钟至15分钟。于预烤处理后,膜的厚度为0.15μm至8.5μm,较佳为0.15μm至6.5μm,更佳为0.15μm至4.5μm。另外,上述厚度为去除溶剂后的厚度。In addition, it is preferable to further prebake the film. The conditions of the pre-baking treatment may vary depending on the ingredients and the mixing ratio, but preferably heating at 70° C. to 90° C. for 1 minute to 15 minutes. After the pre-baking process, the thickness of the film is 0.15 μm to 8.5 μm, preferably 0.15 μm to 6.5 μm, more preferably 0.15 μm to 4.5 μm. In addition, the said thickness is the thickness after removing a solvent.
b.曝光步骤:b. Exposure steps:
以具有特定图案的光罩对上述膜进行曝光。曝光步骤所使用的光线可例如可见光、紫外线、远紫外线、电子束(electron beam)或X射线等,较佳为波长为190nm至450nm的紫外线。曝光步骤的曝光量以100J/m2至20,000J/m2为宜,较佳为150J/m2至10,000J/m2。The above film is exposed with a photomask having a specific pattern. The light used in the exposure step can be, for example, visible light, ultraviolet light, extreme ultraviolet light, electron beam, or X-ray, etc., preferably ultraviolet light with a wavelength of 190 nm to 450 nm. The exposure amount of the exposure step is preferably 100 J/m 2 to 20,000 J/m 2 , preferably 150 J/m 2 to 10,000 J/m 2 .
c.显影步骤:c. Development steps:
在上述曝光步骤后进行显影处理,以碱显影移除不需要的部分并形成特定图案。After the above-mentioned exposure step, a development treatment is performed to remove unnecessary portions and form a specific pattern by alkali development.
显影液的具体例包括氢氧化钠、氢氧化钾、碳酸钠、硅酸钠、偏硅酸酸钠或氨等的无机碱;乙胺或正丙胺等的第一级脂肪胺;二乙胺或正丙胺等的第二级脂肪胺;三甲胺、二乙胺甲基、二甲基乙基胺或三乙胺等的第三级脂肪胺;吡咯、哌啶、N-甲基哌啶、N-甲基1,8-二氮杂双环[5.4.0]-7-十一碳烯或1,5-二氮杂双环[4.3.0]-5-壬烯等的第三级脂肪环酸;吡啶、甲基嘧啶、二甲基吡啶或喹啉等的第三级芳香胺;四甲基氢氧化铵或四乙基氢氧化铵之水溶液等的第四级铵盐碱性化合物;或上述化合物的组合。水溶性有机溶剂或表面活性剂,例如甲醇或乙醇,亦可视需要添加于显影液中。Specific examples of the developer include inorganic bases such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, or ammonia; primary aliphatic amines such as ethylamine or n-propylamine; diethylamine or Secondary aliphatic amines such as n-propylamine; tertiary aliphatic amines such as trimethylamine, diethylamine methyl, dimethylethylamine or triethylamine; pyrrole, piperidine, N-methylpiperidine, N - Tertiary alicyclic acid such as methyl 1,8-diazabicyclo[5.4.0]-7-undecene or 1,5-diazabicyclo[4.3.0]-5-nonene ; tertiary aromatic amines such as pyridine, methyl pyrimidine, lutidine or quinoline; quaternary ammonium salt basic compounds such as tetramethylammonium hydroxide or an aqueous solution of tetraethylammonium hydroxide; or the above combination of compounds. Water-soluble organic solvents or surfactants, such as methanol or ethanol, can also be added to the developer as needed.
显影的方法例如是浸渍法(dipping method)、含浸法(impregnation method)或喷淋法(shower method)。显影较佳为于室温至180℃下进行约10秒。The development method is, for example, a dipping method, an impregnation method, or a shower method. Development is preferably performed at room temperature to 180°C for about 10 seconds.
将形成了预定的图案的基板于显影后进行蒸气清洗30秒至90秒,并经由压缩空气或氮气风干。The substrate on which the predetermined pattern is formed is subjected to steam cleaning for 30 seconds to 90 seconds after development, and air-dried by compressed air or nitrogen.
d.后烤步骤:d. Post-baking steps:
以加热板或烘箱等加热装置对形成了预定的图案的基板进行后烤(post-bake)处理,以形成间隙体或保护膜。加热温度设定在150℃至250℃之间,其中使用加热板的加热时间为5分钟至30分钟,使用烘箱的加热时间为30分钟至90分钟。The substrate on which the predetermined pattern is formed is subjected to post-bake treatment with a heating device such as a hot plate or an oven to form a spacer or a protective film. The heating temperature is set between 150°C and 250°C, wherein the heating time using a hot plate is 5 minutes to 30 minutes, and the heating time using an oven is 30 minutes to 90 minutes.
经过上述的处理步骤后,即可形成保护膜与间隙体。After the above-mentioned processing steps, the protective film and the spacer can be formed.
本发明的保护膜及间隙体并不限定于形成于像素层或透明导电膜上,而可以形成于基板上或基板上的各种元件上。The protective film and spacer of the present invention are not limited to being formed on the pixel layer or the transparent conductive film, but may be formed on a substrate or various elements on the substrate.
<彩色滤光片基板的制造方法><Manufacturing method of color filter substrate>
彩色滤光片基板的制造方法例如是:在温度介于220℃至250℃之间的真空环境下,于形成有红色、绿色、蓝色等像素着色层及保护膜的透明基板中的保护膜的表面进行溅镀,以形成铟锡氧化物(Indium tin oxide,ITO)保护膜。另外,必要时,可对ITO保护膜进行蚀刻,并进行布线,然后在ITO保护膜表面上涂布液晶配向膜。如此,便可制造出包含将本发明的感光性树脂组合物硬化而成的硬化物的彩色滤光片。The manufacturing method of the color filter substrate is, for example, in a vacuum environment with a temperature between 220° C. and 250° C., a protective film in a transparent substrate on which pixel coloring layers such as red, green, and blue and a protective film are formed. The surface is sputtered to form an indium tin oxide (ITO) protective film. In addition, if necessary, the ITO protective film can be etched and wired, and then a liquid crystal alignment film can be coated on the surface of the ITO protective film. Thus, the color filter containing the hardened|cured material which hardened the photosensitive resin composition of this invention can be manufactured.
<液晶显示元件及其制造方法><Liquid crystal display element and its manufacturing method>
本发明更提供一种液晶显示元件,其包括由本发明的感光性树脂组合物所形成的间隙体及保护膜中的至少一者。具体而言,本发明的液晶显示元件包括彩色滤光片基板、主动元件基板、以及位于彩色滤光片基板与主动元件基板之间的液晶层。主动元件基板为设置有薄膜电晶体的基板。彩色滤光片基板与主动元件基板中的至少一者可包括由本发明的感光性树脂组合物所形成的保护膜。另外,间隙体可以夹持于彩色滤光片基板与主动元件基板之间的方式分散于液晶层中,以使彩色滤光片基板与主动元件基板之间存在间隙。The present invention further provides a liquid crystal display element including at least one of a spacer and a protective film formed from the photosensitive resin composition of the present invention. Specifically, the liquid crystal display element of the present invention includes a color filter substrate, an active element substrate, and a liquid crystal layer located between the color filter substrate and the active element substrate. The active element substrate is a substrate provided with thin film transistors. At least one of the color filter substrate and the active element substrate may include a protective film formed from the photosensitive resin composition of the present invention. In addition, the spacers may be dispersed in the liquid crystal layer in a manner of being sandwiched between the color filter substrate and the active element substrate, so that a gap exists between the color filter substrate and the active element substrate.
本发明的液晶显示元件的制造方法没有特别的限制,例如是以下述方法制造。The manufacturing method of the liquid crystal display element of this invention is not specifically limited, For example, it manufactures by the following method.
首先,将彩色滤光片基板与主动元件基板以隔着间隙体的方式对向配置。接着,使用密封剂将彩色滤光片基板及主动元件基板的周边粘合,并且留下注入孔。然后,经由注入孔于彩色滤光片基板与主动元件基板之间以及密封剂所划分的空间内注入液晶。最后,封闭注入孔后,以于彩色滤光片基板与主动元件基板之间形成液晶层。液晶层中所含有的液晶化合物或液晶组合物没有特别的限制,端视实际需要而定。First, the color filter substrate and the active element substrate are arranged to face each other with a spacer therebetween. Next, the peripheries of the color filter substrate and the active element substrate are bonded using a sealant, and injection holes are left. Then, liquid crystal is injected into the space between the color filter substrate and the active element substrate and the space divided by the sealant through the injection hole. Finally, after closing the injection hole, a liquid crystal layer is formed between the color filter substrate and the active element substrate. The liquid crystal compound or liquid crystal composition contained in the liquid crystal layer is not particularly limited and depends on actual needs.
另外,可在施加电压及照光的情况下,经由液晶配向膜来使液晶化合物及液晶组合物进行配向。液晶配向膜的种类没有特别的限制,端视实际需要而定。In addition, the liquid crystal compound and the liquid crystal composition can be aligned via a liquid crystal alignment film under application of a voltage and light. The type of the liquid crystal alignment film is not particularly limited, and it depends on the actual needs.
本发明将就以下实施例来作进一步说明,但应了解的是,该等实施例仅为例示说明之用,而不应被解释为本发明实施的限制。The present invention will be further described with respect to the following examples, but it should be understood that these examples are only used for illustration and should not be construed as a limitation of the implementation of the present invention.
碱可溶性树脂(A-1)的合成例Synthesis example of alkali-soluble resin (A-1)
本发明的碱可溶性树脂(A-1)的合成例A-1-1至A-1-11以及合成例A-2-1至A-2-2合成所使用的各个反应试剂的用量列于下表1,各个反应试剂的名称列于下表2。The amounts of the respective reaction reagents used in the synthesis of the synthesis examples A-1-1 to A-1-11 and the synthesis examples A-2-1 to A-2-2 of the alkali-soluble resin (A-1) of the present invention are listed in Table 1 below, the names of the respective reagents are listed in Table 2 below.
合成例A-1-1Synthesis Example A-1-1
首先,准备两个滴注器(instillator),其中一者为单体滴注器,另一者为链转移剂滴注器。First, two instillators are prepared, one of which is a monomer instillator and the other is a chain transfer agent instillator.
于单体滴注器中加入丙烯酸(作为单体,以下称作AA)45g、苯基苯氧基乙二醇丙烯酸酯及苯基苯氧基二乙二醇丙烯酸酯的混合物(摩尔比1:1,此混合物作为单体,以下称作PGAPDGA)40g、苯甲基马来酰亚胺(作为单体,以下称作BzMI)15g、过氧化2-乙基己酸第三丁酯(作为聚合起始剂,(商品名帕布吉(PERBUTYL)O,日本油脂公司制造,以下称作PBO))2g、丙二醇单甲醚醋酸酯(作为溶剂,以下称作PGMEA)42g以及丙二醇单甲醚(作为溶剂,以下称作PGME)18g,并搅拌混合,以制作单体混合物。接着,于链转移剂滴注器中加入正十二烷基硫醇(nDM)2g、PGMEA 18g以及PGME 8g并搅拌混合。Add 45 g of acrylic acid (as a monomer, hereinafter referred to as AA), a mixture of phenylphenoxyethylene glycol acrylate and phenylphenoxydiethylene glycol acrylate (molar ratio 1: 1. This mixture is used as a monomer, hereinafter referred to as PGAPDGA) 40g, benzylmaleimide (as a monomer, hereinafter referred to as BzMI) 15g, 3-butyl peroxide 2-ethylhexanoate (as a polymer Starter, (trade name PERBUTYL O, manufactured by NOF Corporation, hereinafter referred to as PBO)) 2 g, propylene glycol monomethyl ether acetate (as a solvent, hereinafter referred to as PGMEA) 42 g and propylene glycol monomethyl ether (as a solvent). The solvent, hereinafter referred to as PGME) 18 g, was stirred and mixed to prepare a monomer mixture. Next, 2 g of n-dodecyl mercaptan (nDM), 18 g of PGMEA, and 8 g of PGME were added to the chain transfer agent dripper, followed by stirring and mixing.
准备设置有冷凝管的分离式烧瓶作为反应槽。在反应槽中的加入PGMEA 98g和PGME 42g。接着,在氮气环境下,一边搅拌一边以油浴加热,使反应槽的温度升温至90℃。当反应槽的温度稳定在90℃后,分别以单体滴注器及链转移剂滴注器于反应槽中滴加单体混合物及链转移剂。使单体滴注器及链转移剂滴注器维持为90℃,并且在180分钟的期间内滴完单体混合物及链转移剂。滴加结束后,待反应30分钟再加入PBO 0.5g。接着,再反应30分钟后,加热反应槽至115℃。当反应槽的温度稳定在115℃1.5小时后,将分离式烧瓶中的气体置换为氧/氮=5/95(v/v)的混合气体。接着,在反应槽中,加入甲基丙烯酸环氧丙脂(作为单体,GMA)70g、6-第三丁基-2,4-二甲基苯酚(作为聚合抑制剂,商品名“Topanol”,东京化成工业公司制造)0.3g、二甲基苯甲胺(作为触媒,DMBA)0.5g、PGMEA 16g以及PGME 6g。然后,于110℃的温度下反应1小时,再接着于115℃的温度下反应8小时。接着,将反应溶液冷却至室温,而得到碱可溶性树脂A-1-1。碱可溶性树脂A-1-1的重量平均分子量(Mw)为17200。A separation flask provided with a condenser was prepared as a reaction tank. In the reaction tank, 98 g of PGMEA and 42 g of PGME were added. Next, the temperature of the reaction tank was raised to 90° C. by heating with an oil bath while stirring in a nitrogen atmosphere. When the temperature of the reaction tank was stabilized at 90° C., the monomer mixture and the chain transfer agent were added dropwise to the reaction tank with a monomer dripper and a chain transfer agent dripper, respectively. The monomer dripper and the chain transfer agent dripper were maintained at 90°C, and the monomer mixture and the chain transfer agent were dropped over a period of 180 minutes. After the dropwise addition, 0.5 g of PBO was added after the reaction for 30 minutes. Next, after further 30 minutes of reaction, the reaction tank was heated to 115 degreeC. When the temperature of the reaction tank was stabilized at 115°C for 1.5 hours, the gas in the separation flask was replaced with a mixed gas of oxygen/nitrogen=5/95 (v/v). Next, in the reaction tank, 70 g of glycidyl methacrylate (as a monomer, GMA), 6-tert-butyl-2,4-dimethylphenol (as a polymerization inhibitor, trade name "Topanol") were added , manufactured by Tokyo Chemical Industry Co., Ltd.) 0.3 g, dimethylbenzylamine (as a catalyst, DMBA) 0.5 g, PGMEA 16 g, and PGME 6 g. Then, the reaction was carried out at a temperature of 110°C for 1 hour, followed by a reaction at a temperature of 115°C for 8 hours. Next, the reaction solution was cooled to room temperature to obtain alkali-soluble resin A-1-1. The weight average molecular weight (Mw) of the alkali-soluble resin A-1-1 was 17,200.
合成例A-1-2至A-1-9及合成例A-2-1至A-2-2Synthesis Examples A-1-2 to A-1-9 and Synthesis Examples A-2-1 to A-2-2
合成例A-1-2至A-1-9及合成例A-2-1至A-2-2的碱可溶性树脂(A-1)是以与合成例A-1-1相同的步骤来制备,并且其不同处在于:改变合成碱可溶性树脂(A-1)所使用的单体及其使用量、以及链转移剂的用量(如表1所示)。The alkali-soluble resins (A-1) of Synthesis Examples A-1-2 to A-1-9 and Synthesis Examples A-2-1 to A-2-2 were obtained by the same procedure as that of Synthesis Example A-1-1 were prepared, and the difference was that the monomers used for synthesizing the alkali-soluble resin (A-1) and their usage amount, and the amount of chain transfer agent (as shown in Table 1) were changed.
表2Table 2
实施例1至11与比较例1至4Examples 1 to 11 and Comparative Examples 1 to 4
以下说明感光性树脂组合物的实施例1至实施例11以及比较例1至比较例4:Examples 1 to 11 and Comparative Examples 1 to 4 of the photosensitive resin compositions will be described below:
实施例1Example 1
将100重量份的合成例A-1-1的碱可溶性树脂(以下简称为A-1-1)、50重量份的乙二醇二甲基丙烯酸酯(以下简称为B-1)、10重量份的由式(II-1)所示的化合物(以下简称为C-1-1)加入500重量份的丙二醇单甲醚醋酸酯(以下简称为D-1)中,并且以摇动式搅拌器(shaking type stirrer)搅拌均匀后,即可制造得实施例1的感光性树脂组合物。将所制得的感光性树脂组合物以后述评价方式进行评价,其结果如表3所示。100 parts by weight of the alkali-soluble resin of Synthesis Example A-1-1 (hereinafter abbreviated as A-1-1), 50 parts by weight of ethylene glycol dimethacrylate (hereinafter abbreviated as B-1), 10 parts by weight Part of the compound represented by the formula (II-1) (hereinafter referred to as C-1-1) was added to 500 parts by weight of propylene glycol monomethyl ether acetate (hereinafter referred to as D-1), and the After stirring uniformly (shaking type stirrer), the photosensitive resin composition of Example 1 can be produced. The obtained photosensitive resin composition was evaluated by the following evaluation method, and Table 3 shows the result.
实施例2至实施例11、比较例1至比较例4Example 2 to Example 11, Comparative Example 1 to Comparative Example 4
实施例2至实施例11、比较例1至比较例4的感光性树脂组合物是以与实施例1相同的步骤来制备,并且其不同处在于:改变感光性树脂组合物的成分种类及其使用量(如表3所示),其中表3中标号所对应的成分如表4所示。将所制得的感光性树脂组合物以后述评价方式进行评价,其结果如表3所示。The photosensitive resin compositions of Examples 2 to 11 and Comparative Examples 1 to 4 were prepared in the same steps as those of Example 1, and the difference was that the types of the components of the photosensitive resin compositions and their composition were changed. The usage amount (as shown in Table 3), wherein the components corresponding to the labels in Table 3 are shown in Table 4. The obtained photosensitive resin composition was evaluated by the following evaluation method, and Table 3 shows the result.
表4Table 4
<评价方式><Evaluation method>
感度Sensitivity
将前述实施例及比较例所制得的感光性树脂组合物,以旋转涂布的方式分别涂布在100mm×100mm×0.7mm的素玻璃基板上,并在90℃下预烤150秒,即可制得厚度约4μm的预烤涂膜。The photosensitive resin compositions prepared in the foregoing examples and comparative examples were respectively coated on a plain glass substrate of 100 mm × 100 mm × 0.7 mm by spin coating, and pre-baked at 90°C for 150 seconds, that is, Pre-baked coating films with a thickness of about 4 μm can be prepared.
接着,对所制得的预烤涂膜曝光步骤。具体来说,将具有特定图案的光罩置于预烤涂膜与曝光机(型号AG500-4N;科毅科技(股)有限公司(M&R Nano Technology)制造)之间,并且以不同曝光量的紫外线照射预烤涂膜。然后,于涂膜上任取一测定点测得膜厚(δ)后,将涂膜浸渍于0.0438重量%的氢氧化钾(KOH)水溶液中显影70秒,并且在相同的测定点测得另一膜厚(δd)。最后,经下式(V)计算可得到残膜率。Next, the prepared pre-baked coating film is exposed to an exposure step. Specifically, a photomask with a specific pattern was placed between the pre-baked coating film and an exposure machine (model AG500-4N; manufactured by M&R Nano Technology), and the photomasks were exposed at different exposure levels. UV irradiation pre-bake coating film. Then, after measuring the film thickness (δ) at any measurement point on the coating film, the coating film was immersed in a 0.0438 wt% potassium hydroxide (KOH) aqueous solution for 70 seconds and developed, and another measurement point was measured at the same measurement point. Film thickness (δd). Finally, the residual film rate can be obtained by the following formula (V).
残膜率(%)=[(δd)/(δ)]×100(V)Residual film rate (%)=[(δd)/(δ)]×100(V)
将上述残膜率达90%以上时的曝光量称为感度,并根据以下基准进行评价:The exposure amount when the above-mentioned residual film ratio is 90% or more is called sensitivity, and is evaluated according to the following criteria:
◎:曝光量≦70mJ/cm2;◎: Exposure ≦70mJ/cm 2 ;
○:70mJ/cm2<曝光量≦90mJ/cm2;○: 70mJ/cm 2 <exposure amount≦90mJ/cm 2 ;
△:90mJ/cm2<曝光量≦110mJ/cm2;△: 90mJ/cm 2 <exposure amount≦110mJ/cm 2 ;
╳:曝光量>110mJ/cm2。╳: Exposure > 110mJ/cm 2 .
段差level difference
将前述实施例及比较例所制得的感光性树脂组合物,以旋转涂布的方式分别涂布在100mm×100mm×0.7mm的素玻璃基板上,并在90℃下预烤150秒,即可制到约4μm的预烤涂膜。The photosensitive resin compositions prepared in the foregoing examples and comparative examples were respectively coated on a plain glass substrate of 100 mm × 100 mm × 0.7 mm by spin coating, and pre-baked at 90°C for 150 seconds, that is, Pre-baked coatings of about 4 μm can be prepared.
然后,将此预烤涂膜置于所指定的光罩图案下(部分为半色调,透过率30%),并利用能量为60mJ/cm2的紫外线(曝光机型号为AG500-4N,且其为科毅科技(股)有限公司(M&RNano Technology制造))照射,以进行曝光步骤。Then, this pre-baked coating film is placed under the specified mask pattern (partially halftone, transmittance 30%), and the ultraviolet light with energy of 60mJ/ cm2 (exposure machine model is AG500-4N, And it was irradiated by Keyi Technology Co., Ltd. (manufactured by M&RNano Technology) to perform the exposure step.
接着,将曝光后的涂膜浸于浓度为0.0438重量%的氢氧化钾(KOH)水溶液中显影70秒,以除去未曝光的部分。接者,以纯水洗净,并以235℃后烤30分钟,即可获得间隙体。Next, the exposed coating film was immersed in a potassium hydroxide (KOH) aqueous solution having a concentration of 0.0438 wt % and developed for 70 seconds to remove unexposed portions. The receiver was washed with pure water and post-baked at 235°C for 30 minutes to obtain a gap body.
其中,主间隙体的高度为Hm,次间隙体(半色调部分)的高度为Hs,Hm-Hs即为段差。Among them, the height of the main spacer is Hm, the height of the secondary spacer (halftone part) is Hs, and Hm-Hs is the step difference.
◎:0.1μm≦段差≦0.3μm;◎: 0.1μm≦level difference≦0.3μm;
○:0.3μm<段差≦0.4μm;○: 0.3μm<level difference≦0.4μm;
△:0.4μm<段差≦0.5μm;△: 0.4μm<level difference≦0.5μm;
╳:段差>0.5μm或段差<0.1μm。╳: Level difference >0.5μm or level difference <0.1μm.
<评价结果><Evaluation result>
由表3得知,相较于不含有碱可溶性树脂(A-1)的感光性树脂组合物(比较例1及比较例2)、不含有光起始剂(C-1)的感光性树脂组合物(比较例3)以及同时不含有碱可溶性树脂(A-1)及光起始剂(C-1)的感光性树脂组合物(比较例4),同时含有碱可溶性树脂(A-1)及光起始剂(C-1)的感光性树脂组合物(实施例1至实施例11)具有优异的感度,且可形成段差优异的间隙体。更进一步来说,不含有碱可溶性树脂(A-1)的感光性树脂组合物(比较例1及比较例2)的感度不佳;不含有光起始剂(C-1)的感光性树脂组合物(比较例3)所形成的间隙体的段差不佳;而同时不含有碱可溶性树脂(A-1)及光起始剂(C-1)的感光性树脂组合物(比较例4)的感度不佳,且所形成的间隙体的段差亦不佳。From Table 3, compared with the photosensitive resin composition (Comparative Example 1 and Comparative Example 2) that does not contain the alkali-soluble resin (A-1), the photosensitive resin that does not contain the photoinitiator (C-1) The composition (Comparative Example 3) and the photosensitive resin composition (Comparative Example 4) not containing both the alkali-soluble resin (A-1) and the photoinitiator (C-1) simultaneously containing the alkali-soluble resin (A-1) ) and the photoinitiator (C-1) of the photosensitive resin composition (Examples 1 to 11) have excellent sensitivity and can form a spacer excellent in level difference. Furthermore, the sensitivity of the photosensitive resin composition (Comparative Example 1 and Comparative Example 2) not containing the alkali-soluble resin (A-1) was poor; the photosensitive resin not containing the photoinitiator (C-1) The level difference of the spacers formed by the composition (Comparative Example 3) is not good; and the photosensitive resin composition (Comparative Example 4) that does not contain both the alkali-soluble resin (A-1) and the photoinitiator (C-1) The sensitivity is not good, and the level difference of the formed gap body is also not good.
当合成碱可溶性树脂(A-1)的单体混合物中含有含马来酰亚胺基或两个烯基的乙烯性不饱和单体(a-1-3)(实施例1至7、11)时,感光性树脂组合物可形成段差较优异的间隙体。When the monomer mixture for synthesizing the alkali-soluble resin (A-1) contains an ethylenically unsaturated monomer (a-1-3) containing a maleimide group or two alkenyl groups (Examples 1 to 7, 11 ), the photosensitive resin composition can form a spacer with excellent level difference.
当合成碱可溶性树脂(A-1)含有乙烯性不饱和基(实施例1至6、8、11)时,感光性树脂组合物具有较优异的感度。When the synthetic alkali-soluble resin (A-1) contains an ethylenically unsaturated group (Examples 1 to 6, 8, and 11), the photosensitive resin composition has relatively excellent sensitivity.
当感光性树脂组合物含有光起始剂(C-2)(实施例2至6、10)时,感光性树脂组合物具有较优异的感度。When the photosensitive resin composition contains the photoinitiator (C-2) (Examples 2 to 6, 10), the photosensitive resin composition has relatively excellent sensitivity.
综上所述,本发明的感光性树脂组合物包括具有特定结构的碱可溶性树脂(A-1)与具有特定结构的光起始剂(C-1),可以有效改善感度及间隙体的段差不佳的问题。藉此,本发明提供一种具有优异的感度,且可形成段差优异的间隙体的感光性树脂组合物,其可适用于间隙体与保护膜。To sum up, the photosensitive resin composition of the present invention includes an alkali-soluble resin (A-1) having a specific structure and a photoinitiator (C-1) having a specific structure, which can effectively improve the sensitivity and the level difference of the spacer Bad question. Accordingly, the present invention provides a photosensitive resin composition which has excellent sensitivity and can form a spacer having an excellent level difference, which can be suitably used for a spacer and a protective film.
虽然本发明已以实施例揭示如上,然其并非用以限定本发明,任何所属技术领域中技术人员,在不脱离本发明的精神和范围内,当可作些许的更改与润饰,故本发明的保护范围当视权利要求所界定的为准。Although the present invention has been disclosed above with examples, it is not intended to limit the present invention. Any person skilled in the art can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall be subject to what is defined in the claims.
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