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CN111086906A - Position correction method for placing core particles on sorting film and core particle sorting method - Google Patents

Position correction method for placing core particles on sorting film and core particle sorting method Download PDF

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Publication number
CN111086906A
CN111086906A CN201911173373.8A CN201911173373A CN111086906A CN 111086906 A CN111086906 A CN 111086906A CN 201911173373 A CN201911173373 A CN 201911173373A CN 111086906 A CN111086906 A CN 111086906A
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China
Prior art keywords
sorting
core particles
film
placing
core
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Pending
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CN201911173373.8A
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Chinese (zh)
Inventor
王胜利
杨波
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Silicon Electric Semiconductor Equipment Shenzhen Co Ltd
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Silicon Electric Semiconductor Equipment Shenzhen Co Ltd
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Priority to CN201911173373.8A priority Critical patent/CN111086906A/en
Publication of CN111086906A publication Critical patent/CN111086906A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H26/00Warning or safety devices, e.g. automatic fault detectors, stop-motions, for web-advancing mechanisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00Sensing or detecting means
    • B65H2553/40Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/45Scanning means

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Abstract

The invention discloses a position correction method for placing core particles on a sorting film and a core particle sorting method. A position correction method for placing core particles on a sorting film is characterized in that a position mark for placing the core particles is arranged on the sorting film capable of moving relative to a vision system, and the vision system with a fixed position determines that the sorting film moves to the position for placing the core particles through the position mark; the sorting film reaches the position for placing the core particles by the position correction method for placing the core particles on the sorting film, the sorting film is abutted against the core particles on the conveying part along the first motion path, and the core particles are adhered to the sorting film at the corresponding position marks; the position accuracy of the adhered core particles is improved by correcting the position marks by adopting a vision system.

Description

Position correction method for placing core particles on sorting film and core particle sorting method
Technical Field
The invention relates to a position correction method for placing core particles on a sorting film and a core particle sorting method.
Background
The existing sorting machine conveys core particles to a sorting membrane by adopting a step pitch accumulation mode, the sorting membrane moves according to set motion amount every time, and the core particles conveyed to the sorting membrane every time are arranged according to the set step pitch by default; however, since there is an error in the mechanical movement of the sorting film or an accumulated mechanical error, the actual movement position of the movement value set to one unit may be shifted from the ideal position, thereby causing a poor accuracy in the position of the core particles arranged on the sorting film after sorting.
Disclosure of Invention
In order to solve the technical problems, the invention provides a position correction method for placing core particles on a separation film and a core particle separation method.
The technical scheme of the invention is as follows: a position correction method for placing core particles on a sorting film is characterized in that a position mark for placing the core particles is arranged on the sorting film which can move relative to a vision system, and the vision system with a fixed position determines the position of the sorting film for placing the core particles through the position mark.
Further, the position mark is multiple, and each position of the adhered core particle corresponds to at least one position mark.
Further, the position mark is generated by attaching the mask plate to the sorting film.
Further, the position mark is a position mark carried by the sorting film.
Further, the position marks are grid lines printed on the sorting film.
Further, the position of the core particle placed on the sorting membrane corresponds to a position mark.
Further, the vision system scans the position marks on the sorting film in sequence.
A core particle sorting method, wherein a sorting film reaches a position for placing core particles by the position correction method for placing core particles by the sorting film, the sorting film abuts against the core particles on a conveying part along a first motion path, and the core particles are adhered to the sorting film at corresponding position marks.
Further, the conveying section can repeatedly reach the position, so that the position mark of the core particle can be adhered to the sorting film.
Further, the carrying section includes a first driving section, a rotating disk, and a plurality of mouthpiece sections;
the rotating disc is connected with the first driving part, so that the first driving part can drive the rotating disc to rotate; the plurality of nozzle portions are evenly distributed on the rotating disk along the rotating shaft of the rotating disk.
Furthermore, the plurality of suction nozzle parts are respectively connected with an adsorption air pipe, and the rotating disc rotates in a reciprocating mode along the rotating shaft.
Further, the suction opening is two, and the rotating disc performs 180-degree reciprocating rotation along the rotating shaft.
Further, after the sorting membrane abuts against the core particles, the suction nozzle part is switched to blow air to the core particles by adsorbing the core particles.
Further, the first movement path is a linear path along which the sorting film moves toward the conveying unit.
Further, the sorting film is returned along the first movement path away from the conveying section after the core particles are adhered thereto.
The invention has the beneficial effects that: the position accuracy of the adhered core particles is improved by correcting the position marks by adopting a vision system.
Drawings
FIG. 1 is a schematic view of the vision system, sorting membrane and handling section motion configuration of the present invention;
FIG. 2 is a schematic diagram of a location mark on a sorting film as a grid structure;
FIG. 3 is a schematic illustration of core particle adhesion to a sorting membrane;
FIG. 4 is a schematic diagram of a structure in which position marks on a sorting membrane are arranged at intervals.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention by those skilled in the art, the technical solutions of the present invention will be described in further detail with reference to specific examples.
As shown in fig. 1, 2, 3 and 4, a position correction method for placing core particles on a sorting film, a sorting film 30 movable with respect to a vision system 20 is provided with position marks P for placing core particles a; the sorting film 30 is connected with a motion control structure, such as a structure that the sorting film 30 is adhered to an iron ring, and the sorting film 30 is controlled by controlling the motion of the iron ring; the sorting film 30 is provided with a position mark P, and the placed core particles a are placed corresponding to the position mark P; the position markers P include, but are not limited to: the + font, the T font and the L font can meet the alignment requirement of the sorting membrane 30 as long as the mark P has a right angle corresponding to the cross cursor because the vision system 20 is provided with the cross cursor; of course, other position markers P that can be identified by the vision system 20 should also be of a meaning that the present position marker P can interpret; the fixed vision system 20 determines that the sorting film 30 moves to the position corresponding to the placement of the core particle a through the position mark P, and the fixed vision system 20 is used for ensuring that the vision system 20 can only identify the position mark P of the specific position on the sorting film 30, so that the sorting film 30 must move to the position where the vision system 20 can read the corresponding position mark P, and the sorting film 30 must reach the specific position identified by the vision system 20 before adhering the core particle a each time; identifying the position mark P by the vision system 20 to correct the position of the sorting film 30; thereby ensuring that the sorting film 30 recognizes the position mark P by the vision system 20 to improve the accuracy of the sorting film 30 reaching the position, wherein the sorting film 30 includes but is not limited to blue film and white film; the position marks P can be spaced apart from each other, that is, N core particles a (N is a positive integer) are located between adjacent position marks P, and the vision system 20 corrects the accumulated mechanical error after the sorting film 30 adheres the N core particles.
By adopting the technical scheme, the moving position of the sorting film 30 can be corrected by the vision system 20, and the conventional method for controlling the movement of the sorting film 30 by inputting the mechanical movement amount is replaced, so that the position accuracy of the sorting film 30 caused by the mechanical movement error is not high or the position deviation of the adhered core particles a is caused by the accumulated mechanical movement error.
As shown in fig. 1, 2, 3 and 4, the position mark P is plural, and the position of each adhered core particle a corresponds to at least one position mark P; at least one position mark P is correspondingly arranged on the position of each core particle a adhered to the sorting film 30, so that each core particle a adhered to the sorting film 30 is ensured to have a corresponding position mark P to correct the position of the core particle a, and the position precision of the core particle a adhered to the sorting film 30 is ensured to be high.
As shown in fig. 1, 2, 3 and 4, the position mark P is generated when the mask plate 50 is attached to the sorting film 30; the mask plate 50 is a transparent plate with meshes and is a template for exposing the silicon wafer according to a designed route; the mask plate 50 is a template for the core particle a corresponding to the photolithography.
As shown in fig. 1, 2, 3 and 4, the position mark P is a position mark P carried on the sorting film 30; the sorting film 30 can be provided with the position mark P by printing the position mark P on the sorting film 30; to facilitate the use of the sorting film 30 for various applications, one side of the sorting film 30 is printed with the position marks P, so that the side of the sorting film 30 on which the position marks P are printed can be used for sorting and the side on which the position marks P are not printed can be used for conventional film spreading.
The technical scheme has the advantages that: the structure of using the sorting film 30 for sorting is simplified by printing the position mark P on the sorting film 30; this is simpler than using a mask 50 or other scheme for generating the position marks P.
As shown in fig. 1, 2, 3 and 4, the position marks P are grid lines printed on the sorting film 30; the production and the manufacture are simple, and the position marks P are uniformly and reliably distributed; the vision system 20 is convenient to recognize the position mark P, so that one side of the sorting film 30 has a function of film expansion and the other side has the position mark P for sorting.
As shown in fig. 1, 2, 3 and 4, the position of the sorting film 30 where the core particle a is placed corresponds to one position mark P; the positions where the core particles a are placed are provided with the position marks P, so that the position correction of each placed core particle a is ensured, and all the placed core particles a are accurate and reliable in position.
As shown in fig. 1, 2, 3, and 4, the vision system 20 sequentially scans the position marks P on the sorting film 30; the coordinate values of all the position marks P are obtained, so that the position accuracy of the sorting film 30 moving to the adjacent position marks P is improved in the process of moving the sorting film, the moving distance of the sorting film 30 in the calibration process of the vision system 20 is reduced, and the efficiency of correcting the position marks P is improved.
By adopting the technical scheme, the position precision of each position mark P is increased; the vision system 20 can be selected to correct the position marks P sequentially or at intervals according to the position accuracy requirement after sorting different core particles a.
As shown in fig. 1, 2, 3 and 4, in a core particle sorting method, a sorting film 30 reaches a position where a core particle a is placed by the above-described position correction method for placing a core particle by a sorting film, the sorting film 30 abuts against the core particle a on a conveying section 40 along a first movement path, and the core particle a is made to adhere to the sorting film 30 at a corresponding position mark P; that is, the position correction method for placing the core particles by the sorting film described above does not directly adhere the sorting film 30 to the core particles a, and the first movement path is a path in which the sorting film 30 is close to the core particles a, so that the core particles a are adhered to the sorting film 30 in two steps, the first step is the position correction, and the second step is the core particles a abutting against the conveying section 40 along the first movement path; the first step is to make the position mark P reach the position set by the vision system 20, and the second step is to make the sorting film 30 reach the core particle a along a specific first movement path, so that the position mark P on the sorting film 30 where the sorting core particle a is placed can reach the core particle a.
As shown in fig. 1, 2, 3 and 4, the conveying unit 40 can repeatedly reach the position Z so that the core particles a can be attached to the position marks P on the sorting film 30; on the premise that the position mark P on which the core particle a is arbitrarily placed can reach the specific position along the first movement path, the conveying part 40 conveys the core particle a to the specific position, so that the sorting film 30 can adhere the core particle a, and the sorting film 30 can be ensured to adhere the core particle a to the corresponding position mark P; the position mark P is a reference mark indicating that the core particle a is adhered, and it is not necessarily required that the core particle a must be covered or adhered along the position mark P; the schemes that can be explained here are: placing the core particle a along the covering position mark P; the core particle a is adhered at a specific position from the position mark P.
As shown in fig. 1, 2, 3, and 4, the carrying section 40 includes a first driving section 41, a rotating disk 42, and a plurality of nozzle sections 43;
a rotary disk 42 connected to the first driving unit 41 so that the first driving unit 41 can rotate the rotary disk 42; the plurality of nozzle portions 43 are uniformly distributed on the rotating disk 42 along the rotation axis H of the rotating disk 42; the plurality of sucker parts 43 are uniformly distributed on the rotating disc 42, so that the rotating disc 42 is uniformly stressed, the noise and vibration generated by the rotating motion of the rotating disc 42 are reduced, the structure is compact, and the occupied space is small; it is understood that all the same, similar or equivalent conveying units 40 capable of repeatedly conveying the core pellets a to a specific position should be included in the technical means of the conveying unit 40 disclosed or claimed in the present invention.
As shown in fig. 1, 2, 3 and 4, the plurality of mouthpiece sections 43 are respectively connected with a suction air pipe 44, and the rotary disk 42 is reciprocally rotated along a rotation axis H; the sucking function of the nozzle part 43 to the core particle a is satisfied, and the plurality of sucking air pipes 44 are prevented from being entangled and affecting the use by adopting a reciprocating rotation motion mode.
As shown in fig. 1, 2, 3 and 4, the two nozzle portions 43 are provided, and the rotary plate 42 performs a 180 ° reciprocating rotation along the rotation axis H; those skilled in the art can adopt more suction nozzle parts 43, such as M (M is a positive integer not less than 2), and uniformly distribute the M suction nozzle parts 43 to uniformly apply force to the rotating disk 42, in order to prevent entanglement of the suction air pipes 44 connected to the suction nozzle parts 43; taking the first position of the adsorption core particle a as 0 °, the rotary disk 42 is required to rotate clockwise or counterclockwise in steps of 360 °/M, and when 360 ° (M-1)/M is reached, the rotary disk retracts counterclockwise or clockwise by 360 ° (M-1)/M to return to the initial position.
As shown in fig. 1, 2, 3, and 4, after the sorting film 30 abuts on the core particle a, the nozzle unit 43 is switched from adsorbing the core particle a to blowing air to the core particle a; the separation of the core particles a from the suction nozzle part 43 is ensured, and the problem that the core particles a are adsorbed from the suction nozzle part 43 due to insufficient viscosity of the sorting film 30 is prevented; meanwhile, the nozzle part 43 blows air to the core particles a to make the core particles a adhere to the sorting film 30 with a certain kinetic energy, thereby enhancing the reliability of the adhesion of the core particles a to the sorting film 30.
As shown in fig. 1, 2, 3, and 4, the first movement path is a linear path along which the separation film 30 moves toward the conveying unit 40; the moving path is shortest, and the sorting efficiency is highest; the sorting film 30 returns along the first movement path to be far away from the conveying part 40 after adhering the core particles a, namely, the sorting film 30 moves to and fro near and far away from the conveying part 40; the moving path is shortest, and the sorting efficiency is highest; the sorting film 30 returns to the position where the vision system 20 corrects the position mark P after adhering the core particle a, and when the next core particle a needs to be placed, only the sorting film 30 needs to be moved so that the vision system 20 can correct the next position mark P.
The above are preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. It should be recognized that non-inventive variations and modifications to the disclosed embodiments of the invention that may occur to those skilled in the art upon a reading of the foregoing teachings are also within the scope of the invention as claimed and disclosed.

Claims (15)

1.一种分选膜放置芯粒的位置校正方法,其特征在于:能够相对于视觉系统(20)运动的分选膜(30)设置有放置芯粒(a)的位置标记(P),位置固定的视觉系统(20)通过所述位置标记(P)确定分选膜(30)运动到放置芯粒(a)的位置。1. A position correction method for placing core particles on a sorting film, characterized in that: a sorting film (30) capable of moving relative to a vision system (20) is provided with a position mark (P) for placing core particles (a), The position-fixed vision system (20) determines the movement of the sorting membrane (30) to the position where the core particles (a) are placed through the position mark (P). 2.根据权利要求1所述的分选膜放置芯粒的位置参数确定方法,其特征在于:所述位置标记(P)为多个,每个粘附芯粒(a)的位置对应至少一个位置标记(P)。2 . The method for determining position parameters for placing core particles on a sorting membrane according to claim 1 , wherein: the number of said position marks (P) is multiple, and each position of the adhering core particles (a) corresponds to at least one Position marker (P). 3.根据权利要求1所述的分选膜放置芯粒的位置参数确定方法,其特征在于:所述位置标记(P)为掩膜板(50)贴合于分选膜(30)产生的。3 . The method for determining the position parameters for placing core particles on a sorting film according to claim 1 , wherein the position mark (P) is generated by the mask plate ( 50 ) being attached to the sorting film ( 30 ). 4 . . 4.根据权利要求1所述的分选膜放置芯粒的位置参数确定方法,其特征在于:所述位置标记(P)为分选膜(30)上自带的位置标记(P)。4 . The method for determining position parameters for placing core particles on a sorting film according to claim 1 , wherein the position mark (P) is a position mark (P) on the sorting film ( 30 ). 5 . 5.根据权利要求4所述的分选膜放置芯粒的位置参数确定方法,其特征在于:所述位置标记(P)为印制在分选膜(30)上的网格线。5 . The method for determining position parameters for placing core particles on a sorting film according to claim 4 , wherein the position mark (P) is a grid line printed on the sorting film ( 30 ). 6 . 6.根据权利要求1所述的分选膜放置芯粒的位置参数确定方法,其特征在于:分选膜(30)放置芯粒(a)的位置对应一个位置标记(P)。6 . The method for determining a position parameter for placing core particles on a sorting membrane according to claim 1 , wherein: the position where the sorting membrane ( 30 ) places the core particles (a) corresponds to a position mark (P). 7 . 7.根据权利要求1所述的分选膜放置芯粒的位置参数确定方法,其特征在于:视觉系统(20)依次扫描分选膜(30)上的位置标记(P)。7 . The method for determining position parameters for placing core particles on a sorting film according to claim 1 , wherein the vision system ( 20 ) scans the position marks (P) on the sorting film ( 30 ) sequentially. 8 . 8.一种芯粒分选方法,其特征在于:分选膜(30)通过权利要求1-8任意一项所述的分选膜放置芯粒的位置校正方法到达放置芯粒(a)的位置,所述分选膜(30)沿第一运动路径抵靠于搬运部(40)上的芯粒(a),使芯粒(a)在对应位置标记(P)处粘附于分选膜(30)。8. A core particle sorting method, characterized in that: the sorting membrane (30) reaches the position where the core particles (a) are placed by the method for correcting the position of the sorting membrane for placing the core particles according to any one of claims 1-8. position, the sorting membrane (30) abuts against the core particles (a) on the conveying part (40) along the first movement path, so that the core particles (a) adhere to the sorting at the corresponding position mark (P) Membrane (30). 9.根据权利要求8所述的芯粒分选方法,其特征在于:所述搬运部(40)能够重复到达位置(Z),使芯粒(a)能够在分选膜(30)上位置标记(P)被粘附。9 . The core particle sorting method according to claim 8 , wherein the conveying part ( 40 ) can repeatedly reach the position (Z), so that the core particles (a) can be positioned on the sorting membrane ( 30 ). 10 . Marker (P) is adhered. 10.根据权利要求9所述的芯粒分选方法,其特征在于:所述搬运部(40)包括第一驱动部(41)、旋转盘(42)和多个吸嘴部(43);10 . The core particle sorting method according to claim 9 , wherein the conveying part ( 40 ) comprises a first driving part ( 41 ), a rotating disk ( 42 ) and a plurality of suction nozzle parts ( 43 ); 10 . 旋转盘(42)连接于所述第一驱动部(41),使所述第一驱动部(41)能够带动所述旋转盘(42)旋转;多个吸嘴部(43)沿旋转盘(42)的旋转轴(H)均匀分布于旋转盘(42)。The rotating disk (42) is connected to the first driving part (41), so that the first driving part (41) can drive the rotating disk (42) to rotate; The rotating shaft (H) of 42) is evenly distributed on the rotating disk (42). 11.根据权利要求10所述的芯粒分选方法,其特征在于:所述多个吸嘴部(43)分别连接有吸附气管(44),所述旋转盘(42)沿旋转轴(H)往复旋转。11. The core particle sorting method according to claim 10, characterized in that: the plurality of suction nozzles (43) are respectively connected with suction gas pipes (44), and the rotating disk (42) is along the rotating shaft (H) ) reciprocating rotation. 12.根据权利要求11所述的芯粒分选方法,其特征在于:所述吸嘴部(43)为两个,所述旋转盘(42)沿旋转轴(H)进行180°往复旋转。12 . The core particle sorting method according to claim 11 , wherein the number of the suction nozzles ( 43 ) is two, and the rotating disk ( 42 ) performs a 180° reciprocating rotation along the rotation axis (H). 13 . 13.根据权利要求10所述的芯粒分选方法,其特征在于:所述分选膜(30)抵靠芯粒(a)后,所述吸嘴部(43)由吸附芯粒(a)切换为向芯粒(a)吹气。13. The core particle sorting method according to claim 10, characterized in that: after the sorting film (30) abuts the core particles (a), the suction nozzle (43) is adsorbed by the core particles (a). ) to switch to blowing air to the core particles (a). 14.根据权利要求8所述的芯粒分选方法,其特征在于:所述第一运动路径为分选膜(30)向搬运部(40)运动的直线路径。14 . The core particle sorting method according to claim 8 , wherein the first moving path is a straight path for the sorting membrane ( 30 ) to move to the conveying part ( 40 ). 15 . 15.根据权利要求8所述的芯粒分选方法,其特征在于:所述分选膜(30)粘附芯粒(a)后沿第一运动路径返回而远离搬运部(40)。15 . The core particle sorting method according to claim 8 , wherein the sorting film ( 30 ) adheres to the core particles (a) and then returns along the first movement path and is away from the conveying part ( 40 ). 16 .
CN201911173373.8A 2019-11-26 2019-11-26 Position correction method for placing core particles on sorting film and core particle sorting method Pending CN111086906A (en)

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CN107818934A (en) * 2017-12-05 2018-03-20 桂林立德爱博半导体装备有限公司 A kind of device of double-pendulum arms correcting working table
TW201824443A (en) * 2016-12-28 2018-07-01 梭特科技股份有限公司 Chip positioning device comprising an absolute precision marking member, a chip attachment body, an image capturing member, an attaching member, and a positioning adjustment member
TW201935137A (en) * 2017-10-31 2019-09-01 日商亞多特克工程股份有限公司 Double sided exposure apparatus and double sided exposure method
CN110299312A (en) * 2019-07-04 2019-10-01 深圳市诺泰自动化设备有限公司 A kind of rotary type tower bonder

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4104372B2 (en) * 2002-04-23 2008-06-18 東京エレクトロン株式会社 Aligner accuracy measuring apparatus, method thereof, and storage medium storing program thereof
CN201989387U (en) * 2010-11-25 2011-09-28 东莞东聚电子电讯制品有限公司 A visual precision lamination equipment
CN203367243U (en) * 2013-05-27 2013-12-25 威控自动化机械股份有限公司 Chip picking device
TW201824443A (en) * 2016-12-28 2018-07-01 梭特科技股份有限公司 Chip positioning device comprising an absolute precision marking member, a chip attachment body, an image capturing member, an attaching member, and a positioning adjustment member
TW201935137A (en) * 2017-10-31 2019-09-01 日商亞多特克工程股份有限公司 Double sided exposure apparatus and double sided exposure method
CN107818934A (en) * 2017-12-05 2018-03-20 桂林立德爱博半导体装备有限公司 A kind of device of double-pendulum arms correcting working table
CN110299312A (en) * 2019-07-04 2019-10-01 深圳市诺泰自动化设备有限公司 A kind of rotary type tower bonder

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Application publication date: 20200501