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AU2002346204A1 - Substrate treating device and substrate treating method - Google Patents

Substrate treating device and substrate treating method

Info

Publication number
AU2002346204A1
AU2002346204A1 AU2002346204A AU2002346204A AU2002346204A1 AU 2002346204 A1 AU2002346204 A1 AU 2002346204A1 AU 2002346204 A AU2002346204 A AU 2002346204A AU 2002346204 A AU2002346204 A AU 2002346204A AU 2002346204 A1 AU2002346204 A1 AU 2002346204A1
Authority
AU
Australia
Prior art keywords
substrate treating
treating device
treating method
substrate
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002346204A
Inventor
Hiroshi Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002346204A1 publication Critical patent/AU2002346204A1/en
Abandoned legal-status Critical Current

Links

AU2002346204A 2001-06-25 2002-06-24 Substrate treating device and substrate treating method Abandoned AU2002346204A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-191978 2001-06-25

Publications (1)

Publication Number Publication Date
AU2002346204A1 true AU2002346204A1 (en) 2003-01-08

Family

ID=

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