AU2002345366A1 - Plasma treating apparatus - Google Patents

Plasma treating apparatus

Info

Publication number: AU2002345366A1
Authority: AU; Australia
Prior art keywords: treating apparatus; plasma treating; plasma; treating
Prior art date: 2001-06-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002345366A

Inventor

Kiyoshi Arita

Hiroshi Haji

Tetsuhiro Iwai

Shoji Sakemi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Panasonic Holdings Corp

Original Assignee

Matsushita Electric Industrial Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-06-25

Filing date

2002-06-24

Publication date

2003-01-08

2002-06-24 Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd

2003-01-08 Publication of AU2002345366A1 publication Critical patent/AU2002345366A1/en

Status Abandoned legal-status Critical Current

Links

AU2002345366A 2001-06-25 2002-06-24 Plasma treating apparatus Abandoned AU2002345366A1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2001-190973		2001-06-25
JP2001-231469		2001-07-31

Publications (1)

Publication Number	Publication Date
AU2002345366A1 true AU2002345366A1 (en)	2003-01-08

Family

ID=

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