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AU2001286282A1 - Chemical mechanical polishing pad having wave-shaped grooves - Google Patents

Chemical mechanical polishing pad having wave-shaped grooves

Info

Publication number
AU2001286282A1
AU2001286282A1 AU2001286282A AU2001286282A AU2001286282A1 AU 2001286282 A1 AU2001286282 A1 AU 2001286282A1 AU 2001286282 A AU2001286282 A AU 2001286282A AU 2001286282 A AU2001286282 A AU 2001286282A AU 2001286282 A1 AU2001286282 A1 AU 2001286282A1
Authority
AU
Australia
Prior art keywords
wave
polishing pad
mechanical polishing
chemical mechanical
shaped grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001286282A
Inventor
In-Ju Hwang
Jae-Seok Kim
Tae-Kyoung Kwon
In-Ha Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SKC Co Ltd
Original Assignee
SKC Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SKC Co Ltd filed Critical SKC Co Ltd
Publication of AU2001286282A1 publication Critical patent/AU2001286282A1/en
Abandoned legal-status Critical Current

Links

AU2001286282A 2001-08-16 2001-08-29 Chemical mechanical polishing pad having wave-shaped grooves Abandoned AU2001286282A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2001/49354 2001-08-16

Publications (1)

Publication Number Publication Date
AU2001286282A1 true AU2001286282A1 (en) 2003-03-03

Family

ID=

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