GB2385057B - Polishing composition - Google Patents
Polishing compositionInfo
- Publication number
- GB2385057B GB2385057B GB0229161A GB0229161A GB2385057B GB 2385057 B GB2385057 B GB 2385057B GB 0229161 A GB0229161 A GB 0229161A GB 0229161 A GB0229161 A GB 0229161A GB 2385057 B GB2385057 B GB 2385057B
- Authority
- GB
- United Kingdom
- Prior art keywords
- polishing composition
- polishing
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/06—Other polishing compositions
- C09G1/14—Other polishing compositions based on non-waxy substances
- C09G1/18—Other polishing compositions based on non-waxy substances on other substances
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001387175A JP4095798B2 (en) | 2001-12-20 | 2001-12-20 | Polishing composition |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB0229161D0 GB0229161D0 (en) | 2003-01-22 |
| GB2385057A GB2385057A (en) | 2003-08-13 |
| GB2385057B true GB2385057B (en) | 2005-02-09 |
Family
ID=19188039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB0229161A Expired - Lifetime GB2385057B (en) | 2001-12-20 | 2002-12-13 | Polishing composition |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4095798B2 (en) |
| CN (2) | CN1285686C (en) |
| GB (1) | GB2385057B (en) |
| MY (1) | MY131820A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4291665B2 (en) * | 2003-10-15 | 2009-07-08 | 日本化学工業株式会社 | Abrasive composition for siliceous material and polishing method using the same |
| JP2006077127A (en) * | 2004-09-09 | 2006-03-23 | Fujimi Inc | Polishing composition and polishing method using the composition |
| JPWO2023140049A1 (en) * | 2022-01-24 | 2023-07-27 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0401147A2 (en) * | 1989-03-07 | 1990-12-05 | International Business Machines Corporation | A method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor |
| WO2001012740A1 (en) * | 1999-08-13 | 2001-02-22 | Cabot Microelectronics Corporation | Polishing system and method of its use |
| GB2354526A (en) * | 1999-09-27 | 2001-03-28 | Fujimi America Inc | Polishing compositions for magnetic disks |
| GB2354524A (en) * | 1999-09-21 | 2001-03-28 | Fujimi Inc | Polishing Compositions for Magnetic Disks |
| US6280489B1 (en) * | 1999-10-29 | 2001-08-28 | Nihon Micro Coating Co., Ltd. | Polishing compositions |
| WO2001098201A2 (en) * | 2000-06-16 | 2001-12-27 | Cabot Microelectronics Corporation | Method for polishing a memory or rigid disk with a phosphate ion-containing polishing system |
| WO2002031072A1 (en) * | 2000-10-12 | 2002-04-18 | Anam Semiconductor Inc. | Cmp slurry composition and a method for planarizing semiconductor device using the same |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61291674A (en) * | 1985-06-17 | 1986-12-22 | Kobe Steel Ltd | Polishing agent |
| JPS62236669A (en) * | 1986-04-07 | 1987-10-16 | Kobe Steel Ltd | Abrasive |
| JP3653133B2 (en) * | 1996-01-30 | 2005-05-25 | 昭和電工株式会社 | Polishing composition, magnetic disk substrate polishing method, and manufacturing method |
| JP3825827B2 (en) * | 1996-01-30 | 2006-09-27 | 昭和電工株式会社 | Polishing composition, magnetic disk substrate polishing method, and manufacturing method |
| JPH10172935A (en) * | 1996-12-05 | 1998-06-26 | Fujimi Inkooporeetetsudo:Kk | Composition for polishing |
| JPH10172936A (en) * | 1996-12-05 | 1998-06-26 | Fujimi Inkooporeetetsudo:Kk | Composition for polishing |
| JPH10172937A (en) * | 1996-12-05 | 1998-06-26 | Fujimi Inkooporeetetsudo:Kk | Composition for polishing |
| JPH10172934A (en) * | 1996-12-05 | 1998-06-26 | Fujimi Inkooporeetetsudo:Kk | Composition for polishing |
| JPH1180708A (en) * | 1997-09-09 | 1999-03-26 | Fujimi Inkooporeetetsudo:Kk | Composition for polishing |
| JP4090589B2 (en) * | 1998-09-01 | 2008-05-28 | 株式会社フジミインコーポレーテッド | Polishing composition |
| US6258140B1 (en) * | 1999-09-27 | 2001-07-10 | Fujimi America Inc. | Polishing composition |
| JP4213858B2 (en) * | 2000-02-03 | 2009-01-21 | 花王株式会社 | Polishing liquid composition |
| TW528645B (en) * | 2000-04-17 | 2003-04-21 | Showa Denko Kk | Composition for polishing magnetic disk substrate |
| JP2001294848A (en) * | 2000-04-17 | 2001-10-23 | Sanyo Chem Ind Ltd | Abrasive grain dispersant for polishing, and slurry for polishing |
| JP4251516B2 (en) * | 2000-05-12 | 2009-04-08 | 花王株式会社 | Polishing liquid composition |
| JP4231632B2 (en) * | 2001-04-27 | 2009-03-04 | 花王株式会社 | Polishing liquid composition |
-
2001
- 2001-12-20 JP JP2001387175A patent/JP4095798B2/en not_active Expired - Lifetime
-
2002
- 2002-12-13 GB GB0229161A patent/GB2385057B/en not_active Expired - Lifetime
- 2002-12-17 CN CNB021574022A patent/CN1285686C/en not_active Expired - Fee Related
- 2002-12-17 CN CNA2006100847456A patent/CN1854224A/en active Pending
- 2002-12-18 MY MYPI20024756A patent/MY131820A/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0401147A2 (en) * | 1989-03-07 | 1990-12-05 | International Business Machines Corporation | A method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor |
| WO2001012740A1 (en) * | 1999-08-13 | 2001-02-22 | Cabot Microelectronics Corporation | Polishing system and method of its use |
| GB2354524A (en) * | 1999-09-21 | 2001-03-28 | Fujimi Inc | Polishing Compositions for Magnetic Disks |
| GB2354526A (en) * | 1999-09-27 | 2001-03-28 | Fujimi America Inc | Polishing compositions for magnetic disks |
| US6280489B1 (en) * | 1999-10-29 | 2001-08-28 | Nihon Micro Coating Co., Ltd. | Polishing compositions |
| WO2001098201A2 (en) * | 2000-06-16 | 2001-12-27 | Cabot Microelectronics Corporation | Method for polishing a memory or rigid disk with a phosphate ion-containing polishing system |
| WO2002031072A1 (en) * | 2000-10-12 | 2002-04-18 | Anam Semiconductor Inc. | Cmp slurry composition and a method for planarizing semiconductor device using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| GB0229161D0 (en) | 2003-01-22 |
| JP4095798B2 (en) | 2008-06-04 |
| CN1854224A (en) | 2006-11-01 |
| GB2385057A (en) | 2003-08-13 |
| CN1427055A (en) | 2003-07-02 |
| MY131820A (en) | 2007-09-28 |
| CN1285686C (en) | 2006-11-22 |
| JP2003183630A (en) | 2003-07-03 |
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