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AU2001281241A1 - Miniature broadband transducer - Google Patents

Miniature broadband transducer

Info

Publication number
AU2001281241A1
AU2001281241A1 AU2001281241A AU8124101A AU2001281241A1 AU 2001281241 A1 AU2001281241 A1 AU 2001281241A1 AU 2001281241 A AU2001281241 A AU 2001281241A AU 8124101 A AU8124101 A AU 8124101A AU 2001281241 A1 AU2001281241 A1 AU 2001281241A1
Authority
AU
Australia
Prior art keywords
broadband transducer
miniature broadband
miniature
film
raised micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001281241A
Other languages
English (en)
Inventor
Sung Bok Lee
Peter V. Loeppert
Michael Pedersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Knowles Electronics LLC
Original Assignee
Knowles Electronics LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/910,110 external-priority patent/US6987859B2/en
Application filed by Knowles Electronics LLC filed Critical Knowles Electronics LLC
Publication of AU2001281241A1 publication Critical patent/AU2001281241A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Silicon Compounds (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Amplifiers (AREA)
  • Silicon Polymers (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Inorganic Insulating Materials (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
AU2001281241A 2000-08-11 2001-08-10 Miniature broadband transducer Abandoned AU2001281241A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US63740100A 2000-08-11 2000-08-11
US09/637,401 2000-08-11
US09/910,110 US6987859B2 (en) 2001-07-20 2001-07-20 Raised microstructure of silicon based device
US09/910,110 2001-07-20
PCT/US2001/025184 WO2002015636A2 (fr) 2000-08-11 2001-08-10 Transducteur a bande large miniature

Publications (1)

Publication Number Publication Date
AU2001281241A1 true AU2001281241A1 (en) 2002-02-25

Family

ID=27092826

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001281241A Abandoned AU2001281241A1 (en) 2000-08-11 2001-08-10 Miniature broadband transducer

Country Status (9)

Country Link
EP (2) EP1469701B1 (fr)
JP (3) JP4338395B2 (fr)
KR (1) KR100571967B1 (fr)
CN (2) CN1498513B (fr)
AT (2) ATE321429T1 (fr)
AU (1) AU2001281241A1 (fr)
DE (2) DE60118208T2 (fr)
DK (2) DK1310136T3 (fr)
WO (1) WO2002015636A2 (fr)

Families Citing this family (124)

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Also Published As

Publication number Publication date
JP2009153203A (ja) 2009-07-09
CN1498513B (zh) 2010-07-14
KR100571967B1 (ko) 2006-04-18
DK1310136T3 (da) 2006-07-31
ATE392790T1 (de) 2008-05-15
WO2002015636A2 (fr) 2002-02-21
JP4338395B2 (ja) 2009-10-07
CN101867858A (zh) 2010-10-20
WO2002015636A3 (fr) 2002-10-24
DK1469701T3 (da) 2008-08-18
KR20030033026A (ko) 2003-04-26
JP5049312B2 (ja) 2012-10-17
DE60133679D1 (de) 2008-05-29
ATE321429T1 (de) 2006-04-15
EP1469701A3 (fr) 2005-11-16
CN101867858B (zh) 2012-02-22
JP2007116721A (ja) 2007-05-10
CN1498513A (zh) 2004-05-19
DE60118208T2 (de) 2007-04-12
DE60133679T2 (de) 2009-06-10
DE60118208D1 (de) 2006-05-11
JP2004506394A (ja) 2004-02-26
EP1310136B1 (fr) 2006-03-22
EP1469701A2 (fr) 2004-10-20
EP1310136A2 (fr) 2003-05-14
EP1469701B1 (fr) 2008-04-16

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