[go: up one dir, main page]

AU2001278105A1 - Silicon wafer with embedded optoelectronic material for monolithic oeic - Google Patents

Silicon wafer with embedded optoelectronic material for monolithic oeic

Info

Publication number
AU2001278105A1
AU2001278105A1 AU2001278105A AU7810501A AU2001278105A1 AU 2001278105 A1 AU2001278105 A1 AU 2001278105A1 AU 2001278105 A AU2001278105 A AU 2001278105A AU 7810501 A AU7810501 A AU 7810501A AU 2001278105 A1 AU2001278105 A1 AU 2001278105A1
Authority
AU
Australia
Prior art keywords
layer
embedded
silicon wafer
cmos
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001278105A
Inventor
Eugene A. Fitzgerald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amber Wave Systems Inc
Original Assignee
Amber Wave Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amber Wave Systems Inc filed Critical Amber Wave Systems Inc
Publication of AU2001278105A1 publication Critical patent/AU2001278105A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/026—Wafer-level processing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/809—Constructional details of image sensors of hybrid image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/127—The active layers comprising only Group III-V materials, e.g. GaAs or InP
    • H10F71/1272—The active layers comprising only Group III-V materials, e.g. GaAs or InP comprising at least three elements, e.g. GaAlAs or InGaAsP
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/127—The active layers comprising only Group III-V materials, e.g. GaAs or InP
    • H10F71/1276—The active layers comprising only Group III-V materials, e.g. GaAs or InP comprising growth substrates not made of Group III-V materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018—Bonding of wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10P90/1922—
    • H10W10/181—
    • H10W90/00—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/021—Silicon based substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/0215—Bonding to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/0217—Removal of the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/0218—Substrates comprising semiconducting materials from other groups of the Periodic Table than the materials of the active layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0261—Non-optical elements, e.g. laser driver components, heaters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10P72/743—
    • H10P72/7432—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/544—Solar cells from Group III-V materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/902—Capping layer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Integrated Circuits (AREA)
  • Recrystallisation Techniques (AREA)
  • Orthopedics, Nursing, And Contraception (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Prostheses (AREA)
  • Element Separation (AREA)

Abstract

A structure with an optically active layer embedded in a Si wafer, such that the outermost epitaxial layer exposed to the CMOS processing equipment is always Si or another CMOS-compatible material such as SiO2. Since the optoelectronic layer is completely surrounded by Si, the wafer is fully compatible with standard Si CMOS manufacturing. For wavelengths of light longer than the bandgap of Si (1.1 mum), Si is completely transparent and therefore optical signals can be transmitted between the embedded optoelectronic layer and an external waveguide using either normal incidence (through the Si substrate or top Si cap layer) or in-plane incidence (edge coupling).
AU2001278105A 2000-08-04 2001-08-01 Silicon wafer with embedded optoelectronic material for monolithic oeic Abandoned AU2001278105A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22340700P 2000-08-04 2000-08-04
US60/223,407 2000-08-04
PCT/US2001/024075 WO2002013342A2 (en) 2000-08-04 2001-08-01 Silicon wafer with embedded optoelectronic material for monolithic oeic

Publications (1)

Publication Number Publication Date
AU2001278105A1 true AU2001278105A1 (en) 2002-02-18

Family

ID=22836361

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001278105A Abandoned AU2001278105A1 (en) 2000-08-04 2001-08-01 Silicon wafer with embedded optoelectronic material for monolithic oeic

Country Status (7)

Country Link
US (4) US20020066899A1 (en)
EP (1) EP1350290B1 (en)
JP (1) JP5066321B2 (en)
AT (1) ATE346410T1 (en)
AU (1) AU2001278105A1 (en)
DE (1) DE60124766T2 (en)
WO (1) WO2002013342A2 (en)

Families Citing this family (141)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6807328B2 (en) * 1998-04-17 2004-10-19 John Farah Polished polyimide substrate
US6392257B1 (en) 2000-02-10 2002-05-21 Motorola Inc. Semiconductor structure, semiconductor device, communicating device, integrated circuit, and process for fabricating the same
JP2004503920A (en) 2000-05-31 2004-02-05 モトローラ・インコーポレイテッド Semiconductor device and method of manufacturing the semiconductor device
US20060125092A1 (en) * 2000-07-18 2006-06-15 Marshall Paul N High density integrated circuit package architecture
AU2001277001A1 (en) 2000-07-24 2002-02-05 Motorola, Inc. Heterojunction tunneling diodes and process for fabricating same
US20020096683A1 (en) 2001-01-19 2002-07-25 Motorola, Inc. Structure and method for fabricating GaN devices utilizing the formation of a compliant substrate
WO2002082551A1 (en) 2001-04-02 2002-10-17 Motorola, Inc. A semiconductor structure exhibiting reduced leakage current
US20020158245A1 (en) * 2001-04-26 2002-10-31 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices utilizing binary metal oxide layers
US7057256B2 (en) 2001-05-25 2006-06-06 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
US7442629B2 (en) 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
US20030012965A1 (en) * 2001-07-10 2003-01-16 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices utilizing the formation of a compliant substrate comprising an oxygen-doped compound semiconductor layer
US6992321B2 (en) * 2001-07-13 2006-01-31 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices utilizing piezoelectric materials
US7019332B2 (en) * 2001-07-20 2006-03-28 Freescale Semiconductor, Inc. Fabrication of a wavelength locker within a semiconductor structure
US6855992B2 (en) 2001-07-24 2005-02-15 Motorola Inc. Structure and method for fabricating configurable transistor devices utilizing the formation of a compliant substrate for materials used to form the same
US20030022412A1 (en) * 2001-07-25 2003-01-30 Motorola, Inc. Monolithic semiconductor-piezoelectric device structures and electroacoustic charge transport devices
US20030034491A1 (en) * 2001-08-14 2003-02-20 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices for detecting an object
US20030071327A1 (en) 2001-10-17 2003-04-17 Motorola, Inc. Method and apparatus utilizing monocrystalline insulator
JP3970011B2 (en) * 2001-12-11 2007-09-05 シャープ株式会社 Semiconductor device and manufacturing method thereof
US6924510B2 (en) * 2002-05-06 2005-08-02 Intel Corporation Silicon and silicon/germanium light-emitting device, methods and systems
US7157119B2 (en) * 2002-06-25 2007-01-02 Ppg Industries Ohio, Inc. Method and compositions for applying multiple overlying organic pigmented decorations on ceramic substrates
US20040012037A1 (en) * 2002-07-18 2004-01-22 Motorola, Inc. Hetero-integration of semiconductor materials on silicon
US7110629B2 (en) * 2002-07-22 2006-09-19 Applied Materials, Inc. Optical ready substrates
US7072534B2 (en) * 2002-07-22 2006-07-04 Applied Materials, Inc. Optical ready substrates
WO2004010192A2 (en) * 2002-07-22 2004-01-29 Applied Materials Inc. Optical-ready substrates with optical waveguide circuits and microelectronic circuits
US7043106B2 (en) 2002-07-22 2006-05-09 Applied Materials, Inc. Optical ready wafers
US20050072979A1 (en) * 2002-07-22 2005-04-07 Applied Materials, Inc. Optical-ready wafers
US7375385B2 (en) * 2002-08-23 2008-05-20 Amberwave Systems Corporation Semiconductor heterostructures having reduced dislocation pile-ups
JP2004140038A (en) * 2002-10-15 2004-05-13 Sumitomo Chem Co Ltd Method for manufacturing thin film crystal wafer, semiconductor device, and method for manufacturing the same
US20040079285A1 (en) * 2002-10-24 2004-04-29 Motorola, Inc. Automation of oxide material growth in molecular beam epitaxy systems
US7169619B2 (en) * 2002-11-19 2007-01-30 Freescale Semiconductor, Inc. Method for fabricating semiconductor structures on vicinal substrates using a low temperature, low pressure, alkaline earth metal-rich process
US6885065B2 (en) * 2002-11-20 2005-04-26 Freescale Semiconductor, Inc. Ferromagnetic semiconductor structure and method for forming the same
US7453129B2 (en) * 2002-12-18 2008-11-18 Noble Peak Vision Corp. Image sensor comprising isolated germanium photodetectors integrated with a silicon substrate and silicon circuitry
US6965128B2 (en) 2003-02-03 2005-11-15 Freescale Semiconductor, Inc. Structure and method for fabricating semiconductor microresonator devices
US7020374B2 (en) 2003-02-03 2006-03-28 Freescale Semiconductor, Inc. Optical waveguide structure and method for fabricating the same
US6993225B2 (en) 2004-02-10 2006-01-31 Sioptical, Inc. Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same
US6897498B2 (en) * 2003-03-31 2005-05-24 Sioptical, Inc. Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform
DE10318284A1 (en) * 2003-04-22 2004-11-25 Forschungszentrum Jülich GmbH Process for producing a strained layer on a substrate and layer structure
US7529435B2 (en) * 2003-05-29 2009-05-05 Applied Materials, Inc. Serial routing of optical signals
US7001788B2 (en) * 2003-05-29 2006-02-21 Applied Materials, Inc. Maskless fabrication of waveguide mirrors
CN1813381A (en) 2003-06-27 2006-08-02 应用材料公司 Pulsed quantum dot laser system with low jitter
US7164182B2 (en) 2003-07-07 2007-01-16 Micron Technology, Inc. Pixel with strained silicon layer for improving carrier mobility and blue response in imagers
US20050016446A1 (en) * 2003-07-23 2005-01-27 Abbott John S. CaF2 lenses with reduced birefringence
US7279369B2 (en) * 2003-08-21 2007-10-09 Intel Corporation Germanium on insulator fabrication via epitaxial germanium bonding
US7579263B2 (en) * 2003-09-09 2009-08-25 Stc.Unm Threading-dislocation-free nanoheteroepitaxy of Ge on Si using self-directed touch-down of Ge through a thin SiO2 layer
US20050067377A1 (en) * 2003-09-25 2005-03-31 Ryan Lei Germanium-on-insulator fabrication utilizing wafer bonding
US7084460B2 (en) * 2003-11-03 2006-08-01 International Business Machines Corporation Method for fabricating SiGe-on-insulator (SGOI) and Ge-on-insulator (GOI) substrates
KR100624415B1 (en) * 2003-12-17 2006-09-18 삼성전자주식회사 Optical device and manufacturing method
US7369718B2 (en) * 2004-01-23 2008-05-06 Intel Corporation Package substrate pattern to accommodate optical waveguide
US7791061B2 (en) 2004-05-18 2010-09-07 Cree, Inc. External extraction light emitting diode based upon crystallographic faceted surfaces
US7332365B2 (en) * 2004-05-18 2008-02-19 Cree, Inc. Method for fabricating group-III nitride devices and devices fabricated using method
CN103199039B (en) * 2004-06-02 2016-01-13 应用材料公司 Electron device manufacturing chamber and forming method thereof
GB0423599D0 (en) * 2004-10-23 2004-11-24 Univ Belfast Electro-optical device
US20060227825A1 (en) * 2005-04-07 2006-10-12 Nl-Nanosemiconductor Gmbh Mode-locked quantum dot laser with controllable gain properties by multiple stacking
WO2007027615A1 (en) * 2005-09-01 2007-03-08 Applied Materials, Inc. Ridge technique for fabricating an optical detector and an optical waveguide
WO2007044554A2 (en) * 2005-10-07 2007-04-19 Lee, Michael, J. Amorphous silicon waveguides on iii/v substrates with a barrier layer
KR101316947B1 (en) 2005-11-01 2013-10-15 메사추세츠 인스티튜트 오브 테크놀로지 Monolithically integrated semiconductor materials and devices
US20070252223A1 (en) * 2005-12-05 2007-11-01 Massachusetts Institute Of Technology Insulated gate devices and method of making same
US7561607B2 (en) * 2005-12-07 2009-07-14 Innolume Gmbh Laser source with broadband spectrum emission
US7835408B2 (en) * 2005-12-07 2010-11-16 Innolume Gmbh Optical transmission system
WO2007065614A2 (en) 2005-12-07 2007-06-14 Innolume Gmbh Laser source with broadband spectrum emission
US8410523B2 (en) * 2006-01-11 2013-04-02 Diana L. Huffaker Misfit dislocation forming interfacial self-assembly for growth of highly-mismatched III-SB alloys
US8063397B2 (en) * 2006-06-28 2011-11-22 Massachusetts Institute Of Technology Semiconductor light-emitting structure and graded-composition substrate providing yellow-green light emission
US7805826B1 (en) * 2006-07-06 2010-10-05 Hewlett-Packard Development Company, L.P. Fabrication of slot waveguide
SG174772A1 (en) * 2006-09-11 2011-10-28 Curis Inc Multi-functional small molecules as anti-proliferative agents
US7442599B2 (en) * 2006-09-15 2008-10-28 Sharp Laboratories Of America, Inc. Silicon/germanium superlattice thermal sensor
FR2912552B1 (en) * 2007-02-14 2009-05-22 Soitec Silicon On Insulator MULTILAYER STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
US8617997B2 (en) 2007-08-21 2013-12-31 Cree, Inc. Selective wet etching of gold-tin based solder
US8053810B2 (en) * 2007-09-07 2011-11-08 International Business Machines Corporation Structures having lattice-mismatched single-crystalline semiconductor layers on the same lithographic level and methods of manufacturing the same
JP2009094144A (en) * 2007-10-04 2009-04-30 Canon Inc Method for manufacturing light emitting device
WO2009051902A1 (en) 2007-10-17 2009-04-23 Bae Systems Information And Electronic Systems Integration Inc. Method for fabricating selectively coupled optical waveguides on a substrate
WO2009051903A1 (en) 2007-10-18 2009-04-23 Bae Systems Information And Electronic Systems Integration Inc. Method for manufacturing multiple layers of waveguides
WO2009052479A2 (en) 2007-10-19 2009-04-23 Bae Systems Information And Electronic Systems Integration Inc. Method for manufacturing vertical germanium detectors
US20100092682A1 (en) * 2007-10-24 2010-04-15 Bae Systems Information And Electronic Systems Int Method for Fabricating a Heater Capable of Adjusting Refractive Index of an Optical Waveguide
WO2009055778A1 (en) 2007-10-25 2009-04-30 Bae Systems Information And Electronic Systems Integration Inc. Method for manufacturing lateral germanium detectors
US7811844B2 (en) 2007-10-26 2010-10-12 Bae Systems Information And Electronic Systems Integration Inc. Method for fabricating electronic and photonic devices on a semiconductor substrate
US8031343B2 (en) * 2007-10-29 2011-10-04 Bae Systems Information And Electronic Systems Integration Inc. High-index contrast waveguide optical gyroscope having segmented paths
US8871554B2 (en) * 2007-10-30 2014-10-28 Bae Systems Information And Electronic Systems Integration Inc. Method for fabricating butt-coupled electro-absorptive modulators
US20100140587A1 (en) * 2007-10-31 2010-06-10 Carothers Daniel N High-Injection Heterojunction Bipolar Transistor
GB0802088D0 (en) * 2008-02-05 2008-03-12 Panalytical Bv Imaging detector
WO2009115859A1 (en) * 2008-03-19 2009-09-24 S.O.I. Tec Silicon On Insulator Technologies Substrates for monolithic optical circuits and electronic circuits
US20100116329A1 (en) * 2008-06-09 2010-05-13 Fitzgerald Eugene A Methods of forming high-efficiency solar cell structures
US8148265B2 (en) * 2008-08-29 2012-04-03 Bae Systems Information And Electronic Systems Integration Inc. Two-step hardmask fabrication methodology for silicon waveguides
US7715663B2 (en) * 2008-08-29 2010-05-11 Bae Systems Information And Electronic Systems Integration Inc. Integrated optical latch
US7693354B2 (en) * 2008-08-29 2010-04-06 Bae Systems Information And Electronic Systems Integration Inc. Salicide structures for heat-influenced semiconductor applications
US8288290B2 (en) * 2008-08-29 2012-10-16 Bae Systems Information And Electronic Systems Integration Inc. Integration CMOS compatible of micro/nano optical gain materials
US7853101B2 (en) * 2008-08-29 2010-12-14 Bae Systems Information And Electronic Systems Integration Inc. Bi-rate adaptive optical transfer engine
US7987066B2 (en) * 2008-08-29 2011-07-26 Bae Systems Information And Electronic Systems Integration Inc. Components and configurations for test and valuation of integrated optical busses
US8877616B2 (en) 2008-09-08 2014-11-04 Luxtera, Inc. Method and system for monolithic integration of photonics and electronics in CMOS processes
US8831437B2 (en) 2009-09-04 2014-09-09 Luxtera, Inc. Method and system for a photonic interposer
US8018821B2 (en) * 2008-09-30 2011-09-13 Intel Corporation Protection layers for media protection during fabrication of probe memory device
WO2010065731A2 (en) * 2008-12-03 2010-06-10 Innolume Gmbh Semiconductor laser with low relative intensity noise of individual longitudinal modes and optical transmission system incorporating the laser
US7847353B2 (en) * 2008-12-05 2010-12-07 Bae Systems Information And Electronic Systems Integration Inc. Multi-thickness semiconductor with fully depleted devices and photonic integration
US20110132445A1 (en) * 2009-05-29 2011-06-09 Pitera Arthur J High-efficiency multi-junction solar cell structures
US9305779B2 (en) * 2009-08-11 2016-04-05 Bae Systems Information And Electronic Systems Integration Inc. Method for growing germanium epitaxial films
US9673243B2 (en) 2009-09-17 2017-06-06 Sionyx, Llc Photosensitive imaging devices and associated methods
US9911781B2 (en) 2009-09-17 2018-03-06 Sionyx, Llc Photosensitive imaging devices and associated methods
EP2743981A1 (en) * 2009-10-30 2014-06-18 Imec Method of manufacturing an integrated semiconductor substrate structure
FR2954585B1 (en) * 2009-12-23 2012-03-02 Soitec Silicon Insulator Technologies METHOD FOR MAKING A HETEROSTRUCTURE WITH MINIMIZATION OF STRESS
US8692198B2 (en) 2010-04-21 2014-04-08 Sionyx, Inc. Photosensitive imaging devices and associated methods
EP2583312A2 (en) 2010-06-18 2013-04-24 Sionyx, Inc. High speed photosensitive devices and associated methods
US8824837B2 (en) 2010-08-26 2014-09-02 The Board Of Trustees Of The Leland Stanford Junior University Integration of optoelectronics with waveguides using interposer layer
US8124470B1 (en) * 2010-09-29 2012-02-28 International Business Machines Corporation Strained thin body semiconductor-on-insulator substrate and device
EP2461352B1 (en) * 2010-12-06 2013-07-10 Imec Method of manufacturing low resistivity contacts on n-type germanium
US8604330B1 (en) 2010-12-06 2013-12-10 4Power, Llc High-efficiency solar-cell arrays with integrated devices and methods for forming them
FR2974413B1 (en) 2011-04-21 2014-06-13 Commissariat Energie Atomique PHOTOACOUSTIC GAS DETECTOR WITH HELMHOLTZ CELL
US9496308B2 (en) 2011-06-09 2016-11-15 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
EP2732402A2 (en) 2011-07-13 2014-05-21 Sionyx, Inc. Biometric imaging devices and associated methods
US9064764B2 (en) 2012-03-22 2015-06-23 Sionyx, Inc. Pixel isolation elements, devices, and associated methods
WO2013152176A1 (en) * 2012-04-04 2013-10-10 Massachusetts Institute Of Technology Monolithic integration of cmos and non-silicon devices
US8735219B2 (en) 2012-08-30 2014-05-27 Ziptronix, Inc. Heterogeneous annealing method and device
US10094988B2 (en) * 2012-08-31 2018-10-09 Micron Technology, Inc. Method of forming photonics structures
KR20150130303A (en) 2013-02-15 2015-11-23 사이오닉스, 아이엔씨. High dynamic range cmos image sensor having anti-blooming properties and associated methods
JP2014165292A (en) * 2013-02-25 2014-09-08 Hitachi Ltd Light-emitting element, manufacturing method of the same and optical transmitter/receiver
US9939251B2 (en) 2013-03-15 2018-04-10 Sionyx, Llc Three dimensional imaging utilizing stacked imager devices and associated methods
US8896008B2 (en) 2013-04-23 2014-11-25 Cree, Inc. Light emitting diodes having group III nitride surface features defined by a mask and crystal planes
WO2014209421A1 (en) 2013-06-29 2014-12-31 Sionyx, Inc. Shallow trench textured regions and associated methods
US9696486B2 (en) * 2013-07-31 2017-07-04 Oracle International Corporation Surface-normal coupler for silicon-on-insulator platforms
US9331227B2 (en) * 2014-01-10 2016-05-03 The Boeing Company Directly bonded, lattice-mismatched semiconductor device
US9766410B1 (en) * 2014-07-11 2017-09-19 Acacia Communications, Inc. Wafer-level testing of photonic integrated circuits with optical IOs
CN104090334A (en) * 2014-07-30 2014-10-08 四川飞阳科技有限公司 Method for preparing core film of planar optical waveguide device
US9678273B2 (en) * 2015-06-01 2017-06-13 International Business Machines Corporation Device for propagating light and method for fabricating a device
US9658400B2 (en) 2015-06-01 2017-05-23 International Business Machines Corporation Method for fabricating a device for propagating light
US10109983B2 (en) * 2016-04-28 2018-10-23 Hewlett Packard Enterprise Development Lp Devices with quantum dots
US10122153B2 (en) 2016-08-29 2018-11-06 International Business Machines Corporation Resonant cavity strained group III-V photodetector and LED on silicon substrate and method to fabricate same
US10566765B2 (en) 2016-10-27 2020-02-18 Hewlett Packard Enterprise Development Lp Multi-wavelength semiconductor lasers
EP3568873B1 (en) * 2017-01-13 2023-11-08 Massachusetts Institute of Technology A method of forming a multilayer structure for a pixelated display and a multilayer structure for a pixelated display
US10680407B2 (en) 2017-04-10 2020-06-09 Hewlett Packard Enterprise Development Lp Multi-wavelength semiconductor comb lasers
US11664357B2 (en) 2018-07-03 2023-05-30 Adeia Semiconductor Bonding Technologies Inc. Techniques for joining dissimilar materials in microelectronics
US11929442B2 (en) 2020-01-10 2024-03-12 Newport Fab, Llc Structure and method for process control monitoring for group III-V devices integrated with group IV substrate
US11233159B2 (en) * 2020-01-10 2022-01-25 Newport Fab, Llc Fabrication of semiconductor structure having group III-V device on group IV substrate with separately formed contacts using different metal liners
US11349280B2 (en) 2020-01-10 2022-05-31 Newport Fab, Llc Semiconductor structure having group III-V device on group IV substrate
US11296482B2 (en) 2020-01-10 2022-04-05 Newport Fab, Llc Semiconductor structure having group III-V chiplet on group IV substrate and cavity in proximity to heating element
US11581452B2 (en) 2020-01-10 2023-02-14 Newport Fab, Llc Semiconductor structure having group III-V device on group IV substrate and contacts with precursor stacks
US11545587B2 (en) 2020-01-10 2023-01-03 Newport Fab, Llc Semiconductor structure having group III-V device on group IV substrate and contacts with liner stacks
US11495631B2 (en) * 2020-02-07 2022-11-08 Sensors Unlimited, Inc. Pin mesa diodes with over-current protection
US10951003B1 (en) * 2020-02-25 2021-03-16 Inphi Corporation Light source for integrated silicon photonics
WO2021188846A1 (en) 2020-03-19 2021-09-23 Invensas Bonding Technologies, Inc. Dimension compensation control for directly bonded structures
CA3177142A1 (en) * 2020-04-27 2021-11-04 Oussama MOUTANABBIR Short-wave infrared and mid-wave infrared optoelectronic device and methods for manufacturing the same
US11165509B1 (en) 2020-06-05 2021-11-02 Marvell Asia Pte, Ltd. Method for co-packaging light engine chiplets on switch substrate
US11428646B2 (en) * 2020-08-28 2022-08-30 Openlight Photonics, Inc. Loss monitoring in photonic circuit fabrication
US12074243B1 (en) * 2023-08-24 2024-08-27 Amplification Technologies, Corp. Method for fabricating high-sensitivity photodetectors

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370510A (en) * 1980-09-26 1983-01-25 California Institute Of Technology Gallium arsenide single crystal solar cell structure and method of making
US4774205A (en) 1986-06-13 1988-09-27 Massachusetts Institute Of Technology Monolithic integration of silicon and gallium arsenide devices
US4888302A (en) * 1987-11-25 1989-12-19 North American Philips Corporation Method of reduced stress recrystallization
WO1989006050A1 (en) 1987-12-23 1989-06-29 British Telecommunications Public Limited Company Semiconductor heterostructures
JPH01315127A (en) 1988-03-18 1989-12-20 Fujitsu Ltd Formation of gallium arsenide layer
US5068695A (en) 1988-04-29 1991-11-26 Sri International Low dislocation density semiconductor device
JPH02194519A (en) * 1989-01-23 1990-08-01 Nippon Telegr & Teleph Corp <Ntt> Composite semiconductor substrate and manufacture thereof
JPH02306680A (en) 1989-05-22 1990-12-20 Hikari Gijutsu Kenkyu Kaihatsu Kk Optoelectronic integrated circuit device and manufacture thereof
US5013681A (en) * 1989-09-29 1991-05-07 The United States Of America As Represented By The Secretary Of The Navy Method of producing a thin silicon-on-insulator layer
US5102812A (en) 1989-11-09 1992-04-07 Bell Communications Research Method of making a lateral bipolar heterojunction structure
US5221413A (en) 1991-04-24 1993-06-22 At&T Bell Laboratories Method for making low defect density semiconductor heterostructure and devices made thereby
JPH0594929A (en) * 1991-10-02 1993-04-16 Hitachi Ltd Compound substrate and its manufacturing method and semiconductor device
KR970003848B1 (en) 1991-10-17 1997-03-22 미쓰비시덴키 가부시키가이샤 Semiconductor device and manufacturing method thereof
US5207864A (en) 1991-12-30 1993-05-04 Bell Communications Research Low-temperature fusion of dissimilar semiconductors
US5401983A (en) * 1992-04-08 1995-03-28 Georgia Tech Research Corporation Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices
DE69315811T2 (en) 1992-12-16 1998-06-10 Koninkl Philips Electronics Nv Method of manufacturing an optoelectric semiconductor device
US5314107A (en) 1992-12-31 1994-05-24 Motorola, Inc. Automated method for joining wafers
US5346848A (en) 1993-06-01 1994-09-13 Motorola, Inc. Method of bonding silicon and III-V semiconductor materials
US5461243A (en) 1993-10-29 1995-10-24 International Business Machines Corporation Substrate for tensilely strained semiconductor
JP2669368B2 (en) 1994-03-16 1997-10-27 日本電気株式会社 Method for manufacturing compound semiconductor laminated structure on Si substrate
US5534713A (en) * 1994-05-20 1996-07-09 International Business Machines Corporation Complementary metal-oxide semiconductor transistor logic using strained SI/SIGE heterostructure layers
US5937274A (en) 1995-01-31 1999-08-10 Hitachi, Ltd. Fabrication method for AlGaIn NPAsSb based devices
JP3147141B2 (en) 1995-08-30 2001-03-19 株式会社日立製作所 Light assembly
JPH09127352A (en) * 1995-10-30 1997-05-16 Hitachi Ltd Semiconductor device and manufacturing method thereof
US6151347A (en) 1996-01-17 2000-11-21 Nortel Networks Corporation Laser diode and method of fabrication thereof
US5726462A (en) 1996-02-07 1998-03-10 Sandia Corporation Semiconductor structures having electrically insulating and conducting portions formed from an AlSb-alloy layer
JP2748917B2 (en) 1996-03-22 1998-05-13 日本電気株式会社 Semiconductor device
FR2748851B1 (en) 1996-05-15 1998-08-07 Commissariat Energie Atomique PROCESS FOR PRODUCING A THIN FILM OF SEMICONDUCTOR MATERIAL
US5805755A (en) 1996-06-17 1998-09-08 Tellium, Inc. Self-aligned transition from ridge to buried heterostructure waveguide, especially for multi-wavelength laser array integration
US5906951A (en) * 1997-04-30 1999-05-25 International Business Machines Corporation Strained Si/SiGe layers on insulator
JP3535527B2 (en) 1997-06-24 2004-06-07 マサチューセッツ インスティテュート オブ テクノロジー Controlling threading dislocations in germanium-on-silicon using graded GeSi layer and planarization
US6136667A (en) 1997-10-08 2000-10-24 Lucent Technologies Inc. Method for bonding two crystalline substrates together
US5966622A (en) 1997-10-08 1999-10-12 Lucent Technologies Inc. Process for bonding crystalline substrates with different crystal lattices
US6232138B1 (en) * 1997-12-01 2001-05-15 Massachusetts Institute Of Technology Relaxed InxGa(1-x)as buffers
JPH11238902A (en) 1998-02-19 1999-08-31 Nec Corp Semiconductor photodetector and method of manufacturing semiconductor photodetector
JPH11274467A (en) * 1998-03-26 1999-10-08 Murata Mfg Co Ltd Optoelectronic integrated circuit device
US6066513A (en) 1998-10-02 2000-05-23 International Business Machines Corporation Process for precise multichip integration and product thereof
US6323108B1 (en) * 1999-07-27 2001-11-27 The United States Of America As Represented By The Secretary Of The Navy Fabrication ultra-thin bonded semiconductor layers
US6346453B1 (en) 2000-01-27 2002-02-12 Sige Microsystems Inc. Method of producing a SI-GE base heterojunction bipolar device
US6392257B1 (en) * 2000-02-10 2002-05-21 Motorola Inc. Semiconductor structure, semiconductor device, communicating device, integrated circuit, and process for fabricating the same

Also Published As

Publication number Publication date
EP1350290B1 (en) 2006-11-22
ATE346410T1 (en) 2006-12-15
US20020068396A1 (en) 2002-06-06
US20020052061A1 (en) 2002-05-02
JP2004506336A (en) 2004-02-26
DE60124766D1 (en) 2007-01-04
EP1350290A2 (en) 2003-10-08
WO2002013342A3 (en) 2003-08-07
US20020040983A1 (en) 2002-04-11
US6680495B2 (en) 2004-01-20
US6677655B2 (en) 2004-01-13
WO2002013342A2 (en) 2002-02-14
US20020066899A1 (en) 2002-06-06
DE60124766T2 (en) 2007-10-11
JP5066321B2 (en) 2012-11-07
US6645829B2 (en) 2003-11-11

Similar Documents

Publication Publication Date Title
AU2001278105A1 (en) Silicon wafer with embedded optoelectronic material for monolithic oeic
WO2007082059B1 (en) Wideband optical coupling into thin soi cmos photonic integrated circuit
WO2021175072A1 (en) Semiconductor optical coupling structure and silicon-optical integrated chip
EP0763757A3 (en) Wavelength-selective devices using silicon-on-insulator
US7343058B2 (en) Efficient light coupler from off-chip to on-chip waveguides
GB2552264A9 (en) Integrated structure and manufacturing method thereof
WO2004054001A3 (en) Cmos image sensor
WO2001003255A3 (en) A closely-spaced vcsel and photodetector for applications requiring their independent operation
US7095928B2 (en) Surface-mounted photodetector for an optical waveguide
US7352924B2 (en) Micro-optical device
WO2005120187A3 (en) Optical coupler for coupling an optical fiber into a waveguide
WO2003023465A3 (en) Method for polarization compensation in a waveguide using a high refractive index capping layer
WO2002008806A3 (en) Monolithic optical system
CA2328789A1 (en) Multifunction integrated optics chip having improved polarization extinction ratio
KR100492980B1 (en) Optical device using vertical photo detector
CN111446309A (en) Waveguide integrated photoelectric detector and manufacturing method thereof
CN112698452A (en) Optical waveguide chip probe and reflective vertical optical coupling structure based on same
KR910005948B1 (en) Device including a component in alignement with a substrate supported waveguide
CA2013849A1 (en) Optical waveguide and method for its manufacture
JP2011077133A (en) Optical two-way communication module and optical two-way communication device
CN111129201A (en) a photodetector
WO2006091741A3 (en) Edge viewing photodetector
WO2018072489A1 (en) Multi-mode 90-degree-bend waveguide array chip
EP1416598A3 (en) Semiconductor light emitting device in which high-power light output can be obtained with a simple structure
KR20230004199A (en) High bandwidth photonic integrated circuit with etalon compensation