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AU2001273553A1 - Non-volatile memory element on a monocrystalline semiconductor substrate - Google Patents

Non-volatile memory element on a monocrystalline semiconductor substrate

Info

Publication number
AU2001273553A1
AU2001273553A1 AU2001273553A AU7355301A AU2001273553A1 AU 2001273553 A1 AU2001273553 A1 AU 2001273553A1 AU 2001273553 A AU2001273553 A AU 2001273553A AU 7355301 A AU7355301 A AU 7355301A AU 2001273553 A1 AU2001273553 A1 AU 2001273553A1
Authority
AU
Australia
Prior art keywords
semiconductor substrate
volatile memory
memory element
monocrystalline semiconductor
monocrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001273553A
Other languages
English (en)
Inventor
Kurt Eisenbeiser
Jeffrey M. Finder
Jerald A. Hallmark
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of AU2001273553A1 publication Critical patent/AU2001273553A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10P14/69398
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/68Capacitors having no potential barriers
    • H10D1/682Capacitors having no potential barriers having dielectrics comprising perovskite structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0415Manufacture or treatment of FETs having insulated gates [IGFET] of FETs having ferroelectric gate insulators
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/701IGFETs having ferroelectric gate insulators, e.g. ferroelectric FETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/68Capacitors having no potential barriers
    • H10D1/682Capacitors having no potential barriers having dielectrics comprising perovskite structures
    • H10D1/684Capacitors having no potential barriers having dielectrics comprising perovskite structures the dielectrics comprising multiple layers, e.g. comprising buffer layers, seed layers or gradient layers
    • H10P14/6329
    • H10P14/6332
    • H10P14/6339
    • H10P14/69215
AU2001273553A 2000-07-24 2001-07-18 Non-volatile memory element on a monocrystalline semiconductor substrate Abandoned AU2001273553A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US62475400A 2000-07-24 2000-07-24
US09624754 2000-07-24
PCT/US2001/022569 WO2002009191A2 (fr) 2000-07-24 2001-07-18 Element de memoire non volatile sur un substrat semi-conducteur monocristallin

Publications (1)

Publication Number Publication Date
AU2001273553A1 true AU2001273553A1 (en) 2002-02-05

Family

ID=24503188

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001273553A Abandoned AU2001273553A1 (en) 2000-07-24 2001-07-18 Non-volatile memory element on a monocrystalline semiconductor substrate

Country Status (3)

Country Link
AU (1) AU2001273553A1 (fr)
TW (1) TW503580B (fr)
WO (1) WO2002009191A2 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019066959A1 (fr) * 2017-09-29 2019-04-04 Intel Corporation Neurones et synapses ferroélectriques
DE102020127831A1 (de) 2020-05-29 2021-12-02 Taiwan Semiconductor Manufacturing Co., Ltd. Speicherarray-gatestrukturen
US11695073B2 (en) 2020-05-29 2023-07-04 Taiwan Semiconductor Manufacturing Co., Ltd. Memory array gate structures
DE102021101243A1 (de) 2020-05-29 2021-12-02 Taiwan Semiconductor Manufacturing Co., Ltd. Speicherblock-kanalregionen
US11710790B2 (en) 2020-05-29 2023-07-25 Taiwan Semiconductor Manufacturing Company, Ltd. Memory array channel regions
US11640974B2 (en) 2020-06-30 2023-05-02 Taiwan Semiconductor Manufacturing Co., Ltd. Memory array isolation structures
US11729987B2 (en) 2020-06-30 2023-08-15 Taiwan Semiconductor Manufacturing Company, Ltd. Memory array source/drain electrode structures
US11647634B2 (en) 2020-07-16 2023-05-09 Taiwan Semiconductor Manufacturing Co., Ltd. Three-dimensional memory device and method
US11355516B2 (en) 2020-07-16 2022-06-07 Taiwan Semiconductor Manufacturing Co., Ltd. Three-dimensional memory device and method
CN117016050A (zh) * 2021-08-27 2023-11-07 华为技术有限公司 铁电存储器及其形成方法、电子设备
US20230200081A1 (en) * 2021-12-21 2023-06-22 Intel Corporation Transistor devices with perovskite films
CN116056551A (zh) * 2023-03-31 2023-05-02 北京航空航天大学 一种反铁磁隧道结及其制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06151872A (ja) * 1992-11-09 1994-05-31 Mitsubishi Kasei Corp Fet素子
US5248564A (en) * 1992-12-09 1993-09-28 Bell Communications Research, Inc. C-axis perovskite thin films grown on silicon dioxide
KR100243294B1 (ko) * 1997-06-09 2000-02-01 윤종용 반도체장치의 강유전체 메모리 셀 및 어레이

Also Published As

Publication number Publication date
TW503580B (en) 2002-09-21
WO2002009191A3 (fr) 2002-05-23
WO2002009191A2 (fr) 2002-01-31

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