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AU2001272418A1 - Differential pressure sensor - Google Patents

Differential pressure sensor

Info

Publication number
AU2001272418A1
AU2001272418A1 AU2001272418A AU7241801A AU2001272418A1 AU 2001272418 A1 AU2001272418 A1 AU 2001272418A1 AU 2001272418 A AU2001272418 A AU 2001272418A AU 7241801 A AU7241801 A AU 7241801A AU 2001272418 A1 AU2001272418 A1 AU 2001272418A1
Authority
AU
Australia
Prior art keywords
differential pressure
chambers
pressure sensor
outer edges
overload
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001272418A
Other languages
English (en)
Inventor
Dietfried Burczyk
Wolfgang Dannhauer
Frank Loffler
Ralf Nurnberger
Friedrich Schwabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of AU2001272418A1 publication Critical patent/AU2001272418A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Semiconductor Lasers (AREA)
  • Steroid Compounds (AREA)
AU2001272418A 2000-07-13 2001-05-23 Differential pressure sensor Abandoned AU2001272418A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00115175A EP1172640A1 (fr) 2000-07-13 2000-07-13 Capteur de pression différentielle
EP00115175 2000-07-13
PCT/EP2001/005929 WO2002006785A1 (fr) 2000-07-13 2001-05-23 Capteur de pression differentielle

Publications (1)

Publication Number Publication Date
AU2001272418A1 true AU2001272418A1 (en) 2002-01-30

Family

ID=8169241

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001272418A Abandoned AU2001272418A1 (en) 2000-07-13 2001-05-23 Differential pressure sensor

Country Status (9)

Country Link
US (1) US6631644B2 (fr)
EP (2) EP1172640A1 (fr)
JP (1) JP3684229B2 (fr)
CN (1) CN1188677C (fr)
AT (1) ATE271215T1 (fr)
AU (1) AU2001272418A1 (fr)
DE (1) DE50102860D1 (fr)
EA (1) EA005793B1 (fr)
WO (1) WO2002006785A1 (fr)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20311320U1 (de) * 2003-07-22 2003-10-09 Endress + Hauser GmbH + Co. KG, 79689 Maulburg Dynamischer Druckmittler
DE10334853A1 (de) * 2003-07-29 2005-03-24 Endress + Hauser Gmbh + Co. Kg Differenzdruckaufnehmer
DE102004017580A1 (de) * 2004-04-07 2005-12-01 Endress + Hauser Gmbh + Co. Kg Differenzdruckaufnehmer mit dynamischem Überlastschutz
DE102004019389A1 (de) * 2004-04-19 2005-11-03 Endress + Hauser Gmbh + Co. Kg Druckaufnehmer mit austauschbarem Prozessanschluss
DE102004047419B4 (de) * 2004-09-28 2011-09-15 Endress + Hauser Gmbh + Co. Kg Druckmittler und Drucksensor mit Druckmittler
JP4940786B2 (ja) * 2006-06-29 2012-05-30 株式会社デンソー 圧力センサ
US7467555B2 (en) * 2006-07-10 2008-12-23 Rosemount Inc. Pressure transmitter with multiple reference pressure sensors
DE102006057828A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckmeßaufnehmer
DE102006057829A1 (de) * 2006-12-06 2008-06-12 Endress + Hauser Gmbh + Co. Kg Differenzdruckaufnehmer
NO326583B1 (no) 2007-06-08 2009-01-12 Presens As Differensialtrykkmaler
DE102008054991A1 (de) 2008-12-19 2010-06-24 Endress + Hauser Gmbh + Co. Kg Differenzdruckmessumformer
DE102012025070A1 (de) 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Hydraulisches Messwerk mit koplanaren Druckeingängen und Differenzdrucksensor mit einem solchen Messwerk
DE102012113033A1 (de) 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Mechanische Stabilisierung und elektrische sowie hydraulische Adaptierung eines Silizium Chips durch Keramiken
DE102013106601B4 (de) 2013-06-25 2025-12-04 Endress+Hauser SE+Co. KG Druckmessgerät, insbesondere Differenzdruckmessgerät
DE102013113171A1 (de) 2013-11-28 2015-05-28 Endress + Hauser Gmbh + Co. Kg Piezoresistive Silizium-Differenzdruckmesszelle und Verfahren zu ihrer Herstellung
DE102014104831A1 (de) 2014-04-04 2015-10-08 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
DE102014109491A1 (de) 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
US9683675B2 (en) * 2014-11-24 2017-06-20 General Electric Company Pressure modulator
US9766145B2 (en) * 2015-07-03 2017-09-19 WIKA Alexander Weigand SE & Co. KG Active diaphragm seal assembly for pressure measurement
US9719872B2 (en) * 2015-09-29 2017-08-01 Rosemount Inc. High over-pressure capable silicon die pressure sensor with extended pressure signal output
US10060813B2 (en) 2015-09-29 2018-08-28 Rosemount Inc. High over-pressure capable silicon die pressure sensor
DE102016107236B4 (de) 2016-04-19 2025-12-24 Endress+Hauser SE+Co. KG Verfahren zum Fügen einer Differenzdruckmesszelle und Differenzdruckmesszelle
DE102016107235B3 (de) * 2016-04-19 2017-01-26 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
DE102016107238B4 (de) 2016-04-19 2025-12-04 Endress+Hauser SE+Co. KG Verfahren zum Fügen einer Differenzdruckmesszelle und Differenzdruckmesszelle
US10203258B2 (en) 2016-09-26 2019-02-12 Rosemount Inc. Pressure sensor diaphragm with overpressure protection
CN110383028B (zh) * 2017-03-10 2021-07-30 霍尼韦尔国际公司 输出误差减小的具有过压保护的压力传感器
WO2018165122A1 (fr) 2017-03-10 2018-09-13 Honeywell International Inc. Capteur de pression présentant un corps de compteur coplanaire doté d'une protection du capteur contre la surpression
US20180259413A1 (en) * 2017-03-10 2018-09-13 Honeywell International Inc. Pressure sensor having coplanar meter body with sensor overpressure protection
DE202017107618U1 (de) * 2017-12-14 2018-01-08 Endress + Hauser Gmbh + Co. Kg Differenzdruckmessaufnehmer
US12399076B2 (en) 2019-12-20 2025-08-26 Endress+Hauser SE+Co. KG Differential pressure sensor for determining the differential pressure between two pressures
DE102020132960A1 (de) 2020-12-10 2022-06-15 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer mit Überlastschutz
CN114413976A (zh) * 2021-12-13 2022-04-29 重庆市伟岸测器制造股份有限公司 一种电容式差压传感器稳形结构
CN116878720B (zh) * 2023-04-20 2024-10-11 汉斯韦尔(山东)物联技术有限公司 一种高稳硅差压传感器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2712846A1 (de) * 1976-03-24 1977-11-24 Ict Instr Inc Messumformer zum messen von druckunterschieden
US4091682A (en) * 1977-04-04 1978-05-30 Sensor-Matic, Inc. Digital differential pressure measurement apparatus
JPS5930444Y2 (ja) * 1980-05-09 1984-08-30 株式会社山武 差圧検出器
DE3222620A1 (de) * 1982-02-15 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Druck- oder druckdifferenzmessgeraet mit einer vor ueberlastung geschuetzten drucksonsor-einrichtung
JPS6073427A (ja) * 1983-09-30 1985-04-25 Toshiba Corp 差圧伝送器
US4713969A (en) * 1983-09-30 1987-12-22 Kabushiki Kaisha Toshiba Differential pressure transmission apparatus
DE3422945C2 (de) * 1984-06-20 1986-04-24 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Sensor
JPH0526985Y2 (fr) * 1987-09-08 1993-07-08
DE4244257A1 (de) * 1992-12-22 1994-06-23 Grw Druckmestechnik Teltow Gmb Druck-/Differenzdruckmeßumformer

Also Published As

Publication number Publication date
EP1172640A1 (fr) 2002-01-16
EA005793B1 (ru) 2005-06-30
CN1449489A (zh) 2003-10-15
WO2002006785A1 (fr) 2002-01-24
US20020017143A1 (en) 2002-02-14
JP3684229B2 (ja) 2005-08-17
EA200300140A1 (ru) 2003-06-26
DE50102860D1 (de) 2004-08-19
JP2004516454A (ja) 2004-06-03
EP1299701B1 (fr) 2004-07-14
EP1299701A1 (fr) 2003-04-09
ATE271215T1 (de) 2004-07-15
US6631644B2 (en) 2003-10-14
CN1188677C (zh) 2005-02-09

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