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DE69625404D1 - Mikromechanischer Drucksensor mit erweitertem Messbereich - Google Patents

Mikromechanischer Drucksensor mit erweitertem Messbereich

Info

Publication number
DE69625404D1
DE69625404D1 DE69625404T DE69625404T DE69625404D1 DE 69625404 D1 DE69625404 D1 DE 69625404D1 DE 69625404 T DE69625404 T DE 69625404T DE 69625404 T DE69625404 T DE 69625404T DE 69625404 D1 DE69625404 D1 DE 69625404D1
Authority
DE
Germany
Prior art keywords
pressure sensor
measuring range
micromechanical pressure
extended measuring
extended
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69625404T
Other languages
English (en)
Other versions
DE69625404T2 (de
Inventor
Jacob H Martin
William P Kelley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Application granted granted Critical
Publication of DE69625404D1 publication Critical patent/DE69625404D1/de
Publication of DE69625404T2 publication Critical patent/DE69625404T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases
    • G01L21/22—Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE69625404T 1995-03-21 1996-03-15 Mikromechanischer Drucksensor mit erweitertem Messbereich Expired - Fee Related DE69625404T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US407840 1995-03-21
US08/407,840 US5528939A (en) 1995-03-21 1995-03-21 Micromechanical pressure gauge having extended sensor range

Publications (2)

Publication Number Publication Date
DE69625404D1 true DE69625404D1 (de) 2003-01-30
DE69625404T2 DE69625404T2 (de) 2004-06-09

Family

ID=23613743

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69625404T Expired - Fee Related DE69625404T2 (de) 1995-03-21 1996-03-15 Mikromechanischer Drucksensor mit erweitertem Messbereich

Country Status (4)

Country Link
US (1) US5528939A (de)
EP (1) EP0735354B1 (de)
JP (1) JPH08338776A (de)
DE (1) DE69625404T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1287123B1 (it) * 1996-10-31 1998-08-04 Abb Kent Taylor Spa Dispositivo per la misura di una pressione
US5939635A (en) * 1997-12-02 1999-08-17 Varian Inc. Micromechanical pressure sensor-with improved range
US6301973B1 (en) 1999-04-30 2001-10-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Non-intrusive pressure/multipurpose sensor and method
US6301965B1 (en) 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
US6393913B1 (en) 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
DE10033182A1 (de) * 2000-07-07 2002-01-17 Mu Sen Mikrosystemtechnik Gmbh Vorrichtung und Verfahren zur Druckmessung
US6753664B2 (en) * 2001-03-22 2004-06-22 Creo Products Inc. Method for linearization of an actuator via force gradient modification
GB0116393D0 (en) * 2001-07-05 2001-08-29 Druck Ltd Improved sensor
JP2003266391A (ja) * 2002-03-19 2003-09-24 Japan Aviation Electronics Industry Ltd 静電駆動デバイス
JP2003266390A (ja) * 2002-03-19 2003-09-24 Japan Aviation Electronics Industry Ltd 静電駆動デバイス
US6575026B1 (en) 2002-06-28 2003-06-10 Eastman Kodak Company Measuring absolute static pressure at one or more positions along a microfluidic device
FI116097B (fi) * 2002-08-21 2005-09-15 Heikki Ruotoistenmaeki Voima- tai paineanturi ja menetelmä sen soveltamiseksi
US7047810B2 (en) * 2003-01-15 2006-05-23 Ahura Corporation Micro-electro-mechanical pressure sensor
US6843121B1 (en) 2003-08-25 2005-01-18 Eastman Kodak Company Measuring absolute static pressure at one or more positions along a microfluidic device
EP1808685B1 (de) * 2003-11-07 2010-01-06 VARIAN S.p.A. Drucksensor mit Schwingungselement
ITTO20050316A1 (it) 2005-05-10 2006-11-11 Varian Spa Sensore di pressione
DE102006024381B3 (de) * 2006-05-24 2007-12-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS Vakuumsensor nach dem Reibungsprinzip
KR100934217B1 (ko) * 2007-12-10 2009-12-29 한국전자통신연구원 진동 측정을 위한 미소센서
GB0809530D0 (en) * 2008-05-27 2008-07-02 Univ Durham Improved physical vapour deposition processes
JP5151934B2 (ja) * 2008-11-28 2013-02-27 富士電機株式会社 真空計
JP5151935B2 (ja) * 2008-11-28 2013-02-27 富士電機株式会社 真空計
WO2011033933A1 (ja) * 2009-09-15 2011-03-24 キヤノンアネルバ株式会社 平均自由行程を測定する装置、真空計、および平均自由行程を測定する方法
EP2309241B1 (de) 2009-10-07 2016-11-30 ams international AG MEMS-Drucksensor
JP5387468B2 (ja) * 2010-03-19 2014-01-15 富士電機株式会社 真空計
JP5387467B2 (ja) * 2010-03-19 2014-01-15 富士電機株式会社 真空計
JP5556363B2 (ja) * 2010-05-20 2014-07-23 富士電機株式会社 真空計
ITRM20110630A1 (it) * 2011-11-28 2013-05-29 Hypotheses S R L Trasduttore di pressione denominato lpcb
US8833171B2 (en) * 2012-08-23 2014-09-16 Nxp, B.V. Pressure sensor
US9290067B2 (en) * 2012-08-30 2016-03-22 Freescale Semiconductor, Inc. Pressure sensor with differential capacitive output
CN104880275A (zh) * 2015-06-08 2015-09-02 苏州谱道光电科技有限公司 一种样气压力测量装置
EP3211393A1 (de) * 2016-02-29 2017-08-30 ETH Zürich Mems-vorrichtung mit einer freigesetzten vorrichtungsschicht als membran
CN113551834B (zh) * 2021-06-30 2023-05-30 苏州容启传感器科技有限公司 一种真空传感器及真空计
CN114659706B (zh) * 2022-05-19 2022-08-02 季华实验室 真空度检测方法、装置、电子设备、存储介质及系统
EP4446714B1 (de) * 2023-04-12 2026-01-14 Deutsches Elektronen-Synchrotron DESY Sensor zur messung von zwei eigenschaften eines gases

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561327A (en) * 1979-06-19 1981-01-09 Nissan Motor Co Ltd Pressure detector
US4479070A (en) * 1983-06-10 1984-10-23 Sperry Corporation Vibrating quartz diaphragm pressure sensor
US4644804A (en) * 1984-07-17 1987-02-24 Franz Rittmeyer Ag Quartz resonating force and pressure transducer
JP2518814B2 (ja) * 1985-04-08 1996-07-31 株式会社日立製作所 真空計
JPS62218834A (ja) * 1986-03-20 1987-09-26 Seiko Instr & Electronics Ltd 気体圧力計
GB8610253D0 (en) * 1986-04-26 1986-05-29 Stc Plc Resonator device
EP0379841B2 (de) * 1989-01-23 1998-11-04 Balzers Aktiengesellschaft Gasdruck-Messgerät
CH687276A5 (de) * 1989-01-23 1996-10-31 Balzers Hochvakuum Stimmgabelquarz-Manometer.
US5060526A (en) * 1989-05-30 1991-10-29 Schlumberger Industries, Inc. Laminated semiconductor sensor with vibrating element
US5142912A (en) * 1990-06-15 1992-09-01 Honeywell Inc. Semiconductor pressure sensor
JPH0797060B2 (ja) * 1990-08-10 1995-10-18 バキュームプロダクツ株式会社 音叉型水晶振動子を用いた圧力の測定方法
US5136885A (en) * 1991-04-05 1992-08-11 Tif Instruments, Inc. Quartz crystal pressure sensor
DE4300893A1 (de) * 1993-01-15 1994-07-21 Bosch Gmbh Robert Drucksensor

Also Published As

Publication number Publication date
JPH08338776A (ja) 1996-12-24
EP0735354A1 (de) 1996-10-02
US5528939A (en) 1996-06-25
DE69625404T2 (de) 2004-06-09
EP0735354B1 (de) 2002-12-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee