FI950715L - Pintamikromekaaninen, symmetrinen paine-eroanturi - Google Patents

Pintamikromekaaninen, symmetrinen paine-eroanturi Download PDF

Info

Publication number: FI950715L
Authority: FI; Finland
Prior art keywords: pressure sensor; differential pressure; symmetrical differential; surface micromechanical; micromechanical
Prior art date: 1995-02-17

Application number

FI950715A

Other languages

English (en)

Swedish (sv)

Other versions

FI100918B (fi

FI950715A0 (fi

Inventor

Tapani Ryhaenen

Original Assignee

Vaisala Oy

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-02-17

Filing date

1995-02-17

Publication date

1996-08-18

1995-02-17 Application filed by Vaisala Oy filed Critical Vaisala Oy

1995-02-17 Priority to FI950715A priority Critical patent/FI100918B/fi

1995-02-17 Publication of FI950715A0 publication Critical patent/FI950715A0/fi

1996-02-12 Priority to US08/600,182 priority patent/US5679902A/en

1996-02-14 Priority to DE69612576T priority patent/DE69612576T2/de

1996-02-14 Priority to EP96301002A priority patent/EP0727650B1/en

1996-02-16 Priority to NO960617A priority patent/NO960617L/no

1996-02-19 Priority to JP8030510A priority patent/JPH08247878A/ja

1996-08-18 Publication of FI950715L publication Critical patent/FI950715L/fi

1998-03-13 Application granted granted Critical

1998-03-13 Publication of FI100918B publication Critical patent/FI100918B/fi

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)
Pressure Sensors (AREA)

FI950715A 1995-02-17 1995-02-17 Pintamikromekaaninen, symmetrinen paine-eroanturi FI100918B (fi)

Priority Applications (6)

Application Number	Priority Date	Filing Date	Title
FI950715A FI100918B (fi)	1995-02-17	1995-02-17	Pintamikromekaaninen, symmetrinen paine-eroanturi
US08/600,182 US5679902A (en)	1995-02-17	1996-02-12	Surface-micromachined symmetrical differential pressure sensor with electrodes patterned into multiple conducting areas
DE69612576T DE69612576T2 (de)	1995-02-17	1996-02-14	Mikrobearbeiteter symmetrischer Differentialdrucksensor mit Polysilizium
EP96301002A EP0727650B1 (en)	1995-02-17	1996-02-14	Surface-micromachined symmetrical differential pressure sensor with polysilicon
NO960617A NO960617L (no)	1995-02-17	1996-02-16	Symmetrisk differensialtrykkföler med mikrostrukturert overflate
JP8030510A JPH08247878A (ja)	1995-02-17	1996-02-19	表面マイクロ加工された対称形差圧センサー

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
FI950715		1995-02-17
FI950715A FI100918B (fi)	1995-02-17	1995-02-17	Pintamikromekaaninen, symmetrinen paine-eroanturi

Publications (3)

Publication Number	Publication Date
FI950715A0 FI950715A0 (fi)	1995-02-17
FI950715L true FI950715L (fi)	1996-08-18
FI100918B FI100918B (fi)	1998-03-13

Family

ID=8542876

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FI950715A FI100918B (fi)	1995-02-17	1995-02-17	Pintamikromekaaninen, symmetrinen paine-eroanturi

Country Status (6)

Country	Link
US (1)	US5679902A (fi)
EP (1)	EP0727650B1 (fi)
JP (1)	JPH08247878A (fi)
DE (1)	DE69612576T2 (fi)
FI (1)	FI100918B (fi)
NO (1)	NO960617L (fi)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6012336A (en) *	1995-09-06	2000-01-11	Sandia Corporation	Capacitance pressure sensor
DE19648424C1 (de) *	1996-11-22	1998-06-25	Siemens Ag	Mikromechanischer Sensor
EP0941460B1 (de) *	1996-11-28	2000-05-10	Siemens Aktiengesellschaft	Verfahren zur herstellung von mikromechanischen sensoren
DE69702745T2 (de) *	1997-03-04	2000-12-07	Stmicroelectronics S.R.L., Agrate Brianza	Methode zur Herstellung von mikromechanischen Drucksensoren
CA2341182C (en)	1998-08-19	2005-01-04	Wisconsin Alumni Research Foundation	Sealed capacitive pressure sensors
FI20000339A7 (fi)	2000-02-16	2001-08-17	Nokia Corp	Mikromekaaninen säädettävä kondensaattori ja integroitu säädettävä resonaattori
FI115500B (fi)	2000-03-21	2005-05-13	Nokia Oyj	Menetelmä kalvoanturin valmistamiseksi
FI112644B (fi) *	2000-11-10	2003-12-31	Vaisala Oyj	Pintamikromekaaninen absoluuttipaineanturi ja menetelmä sen valmistamiseksi
EP1223420A3 (en) *	2001-01-16	2003-07-09	Fujikura Ltd.	Pressure sensor and manufacturing method thereof
JP4296728B2 (ja) *	2001-07-06	2009-07-15	株式会社デンソー	静電容量型圧力センサおよびその製造方法並びに静電容量型圧力センサに用いるセンサ用構造体
US6774457B2 (en) *	2001-09-13	2004-08-10	Texas Instruments Incorporated	Rectangular contact used as a low voltage fuse element
EP1359402B1 (en) *	2002-05-01	2014-10-01	Infineon Technologies AG	Pressure sensor
US6575026B1 (en)	2002-06-28	2003-06-10	Eastman Kodak Company	Measuring absolute static pressure at one or more positions along a microfluidic device
US6790699B2 (en)	2002-07-10	2004-09-14	Robert Bosch Gmbh	Method for manufacturing a semiconductor device
US6843121B1 (en)	2003-08-25	2005-01-18	Eastman Kodak Company	Measuring absolute static pressure at one or more positions along a microfluidic device
US7100453B2 (en) *	2003-12-30	2006-09-05	Honeywell International Inc.	Modified dual diaphragm pressure sensor
US6901807B1 (en) *	2003-12-30	2005-06-07	Honeywell International Inc.	Positive and negative pressure sensor
US7231832B2 (en) *	2004-09-13	2007-06-19	United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration	System and method for detecting cracks and their location
DE102005004877A1 (de) *	2005-02-03	2006-08-10	Robert Bosch Gmbh	Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
US7231829B2 (en) *	2005-03-31	2007-06-19	Medtronic, Inc.	Monolithic integrated circuit/pressure sensor on pacing lead
JP4535046B2 (ja) *	2006-08-22	2010-09-01	ヤマハ株式会社	静電容量センサ及びその製造方法
US9616223B2 (en)	2005-12-30	2017-04-11	Medtronic, Inc.	Media-exposed interconnects for transducers
FR2947629B1 (fr) *	2009-07-06	2012-03-30	Tronic S Microsystems	Dispositif de mesure de pression et son procede de fabrication
US8617960B2 (en) *	2009-12-31	2013-12-31	Texas Instruments Incorporated	Silicon microphone transducer
JP2011193342A (ja) *	2010-03-16	2011-09-29	Panasonic Corp	Ｍｅｍｓデバイス
US9775982B2 (en)	2010-12-29	2017-10-03	Medtronic, Inc.	Implantable medical device fixation
US10485435B2 (en)	2012-03-26	2019-11-26	Medtronic, Inc.	Pass-through implantable medical device delivery catheter with removeable distal tip
US8904876B2 (en) *	2012-09-29	2014-12-09	Stryker Corporation	Flexible piezocapacitive and piezoresistive force and pressure sensors
CN105067178B (zh)	2015-05-29	2018-01-19	歌尔股份有限公司	一种差分电容式mems压力传感器及其制造方法
JP6582273B2 (ja) *	2015-08-27	2019-10-02	新日本無線株式会社	Ｍｅｍｓ素子の製造方法
US12072252B2 (en) *	2021-09-24	2024-08-27	Apple Inc.	Gap-increasing capacitive pressure sensor for increased range

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3310643C2 (de) *	1983-03-24	1986-04-10	Karlheinz Dr. 7801 Schallstadt Ziegler	Drucksensor
US5177661A (en) *	1989-01-13	1993-01-05	Kopin Corporation	SOI diaphgram sensor
US5490034A (en) *	1989-01-13	1996-02-06	Kopin Corporation	SOI actuators and microsensors
US5431057A (en) *	1990-02-12	1995-07-11	Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V.	Integratable capacitative pressure sensor
US5188983A (en) *	1990-04-11	1993-02-23	Wisconsin Alumni Research Foundation	Polysilicon resonating beam transducers and method of producing the same
WO1992003740A1 (en) *	1990-08-17	1992-03-05	Analog Devices, Inc.	Monolithic accelerometer
DE4227819C2 (de) *	1991-08-22	1996-10-17	Yamatake Honeywell Co Ltd	Kapazitiver Drucksensor
US5332469A (en) *	1992-11-12	1994-07-26	Ford Motor Company	Capacitive surface micromachined differential pressure sensor
JPH06213747A (ja) *	1993-01-14	1994-08-05	Toyota Motor Corp	容量型半導体センサ
US5316619A (en) *	1993-02-05	1994-05-31	Ford Motor Company	Capacitive surface micromachine absolute pressure sensor and method for processing

1995
- 1995-02-17 FI FI950715A patent/FI100918B/fi active
1996
- 1996-02-12 US US08/600,182 patent/US5679902A/en not_active Expired - Fee Related
- 1996-02-14 DE DE69612576T patent/DE69612576T2/de not_active Expired - Fee Related
- 1996-02-14 EP EP96301002A patent/EP0727650B1/en not_active Expired - Lifetime
- 1996-02-16 NO NO960617A patent/NO960617L/no not_active Application Discontinuation
- 1996-02-19 JP JP8030510A patent/JPH08247878A/ja active Pending

Also Published As

Publication number	Publication date
EP0727650B1 (en)	2001-04-25
DE69612576T2 (de)	2002-05-29
NO960617L (no)	1996-08-19
DE69612576D1 (de)	2001-05-31
FI100918B (fi)	1998-03-13
JPH08247878A (ja)	1996-09-27
EP0727650A2 (en)	1996-08-21
US5679902A (en)	1997-10-21
EP0727650A3 (en)	1996-12-11
NO960617D0 (no)	1996-02-16
FI950715A0 (fi)	1995-02-17

Publication	Publication Date	Title
FI950715L (fi)	1996-08-18	Pintamikromekaaninen, symmetrinen paine-eroanturi
DE59607420D1 (de)	2001-09-06	Mikromechanischer drehratensensor
DK0735353T3 (da)	1999-09-06	Trykføler
DE59605295D1 (de)	2000-06-29	Mikromechanischer Beschleunigungssensor
BR9508763A (pt)	1998-06-02	Transmissor de pressão diferencial
DE69616198D1 (de)	2001-11-29	Druckwandler
DE69625404D1 (de)	2003-01-30	Mikromechanischer Drucksensor mit erweitertem Messbereich
DE59701961D1 (de)	2000-08-10	Druck- oder Differenzdruckmesser
DE59403558D1 (de)	1997-09-04	Kapazitiver Drucksensor bzw. kapazitiver Differenzdrucksensor
FI951462A0 (fi)	1995-03-28	Paine-erokytkin
DE69620010D1 (de)	2002-04-25	Druckmessgerät
DE69616706D1 (de)	2001-12-13	Piezoresistiver Kraftausgleichsbeschleunigungsmesser
BR9703820A (pt)	1998-08-25	Detector de pressão diferencial capacitiva
NL1002159A1 (nl)	1996-07-23	Verschildrukindicateur.
FR2687783B1 (fr)	1994-05-20	Micro-capteur de pression.
NL1002238A1 (nl)	1996-08-06	Verschildrukindicateur.
NO942410L (no)	1994-12-27	Kapasitiv differensial-trykkföler
DE69522739D1 (de)	2001-10-25	Differenzdruckwandler
DE59809419D1 (de)	2003-10-02	Druckdifferenz-messumformer
KR960034621U (ko)	1996-11-21	압력센서
DE59811819D1 (de)	2004-09-23	Differenzdruck-Ventil
NL1000559C2 (nl)	1996-12-13	Verplaatsingssensor.
DE59803456D1 (de)	2002-04-25	Differenzdruckmessgerät
NL1000502C2 (nl)	1996-01-19	Meter voor drukverschillen.
KR970049898U (ko)	1997-08-12	차압밸브