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AU1114770A - Vapor collimation in vacuum deposition of coatings - Google Patents

Vapor collimation in vacuum deposition of coatings

Info

Publication number
AU1114770A
AU1114770A AU11147/70A AU1114770A AU1114770A AU 1114770 A AU1114770 A AU 1114770A AU 11147/70 A AU11147/70 A AU 11147/70A AU 1114770 A AU1114770 A AU 1114770A AU 1114770 A AU1114770 A AU 1114770A
Authority
AU
Australia
Prior art keywords
collimation
coatings
vapor
vacuum deposition
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU11147/70A
Inventor
MITCHELL JOSEPH BALA RICHARD CARROLL KRUTENAT and JOHANNES GRAFWALLNER SOL SIDNEY BLECHERMAN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of AU1114770A publication Critical patent/AU1114770A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
AU11147/70A 1969-03-13 1970-02-06 Vapor collimation in vacuum deposition of coatings Expired AU1114770A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80695469A 1969-03-13 1969-03-13
USUS806954 1969-03-13

Publications (1)

Publication Number Publication Date
AU1114770A true AU1114770A (en) 1971-08-12

Family

ID=25195210

Family Applications (1)

Application Number Title Priority Date Filing Date
AU11147/70A Expired AU1114770A (en) 1969-03-13 1970-02-06 Vapor collimation in vacuum deposition of coatings

Country Status (3)

Country Link
AU (1) AU1114770A (en)
DE (1) DE2012076A1 (en)
FR (1) FR2038884A5 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100221450A1 (en) * 2006-01-13 2010-09-02 State Enterprise Internation Center For Electron Beam Technologies Of E.O. Paton Electric Welding Method for Producing a Carbon-Containing Material by Carbon Electron-Beam Vaporisation in a Vacuum and a Subsequent Condensation Thereof on a Substrate and a Device for Carrying Out Said Method
WO2023011733A1 (en) * 2021-08-06 2023-02-09 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Method of operating an evaporation system, deflection device, and evaporation system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047602A1 (en) * 1976-06-26 1982-07-22 Leybold-Heraeus GmbH, 5000 Köln Vacuum evaporator, esp. for substances which sublime - has labyrinthine outlet channel so vapour with constant compsn. can be obtd.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100221450A1 (en) * 2006-01-13 2010-09-02 State Enterprise Internation Center For Electron Beam Technologies Of E.O. Paton Electric Welding Method for Producing a Carbon-Containing Material by Carbon Electron-Beam Vaporisation in a Vacuum and a Subsequent Condensation Thereof on a Substrate and a Device for Carrying Out Said Method
WO2023011733A1 (en) * 2021-08-06 2023-02-09 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Method of operating an evaporation system, deflection device, and evaporation system

Also Published As

Publication number Publication date
FR2038884A5 (en) 1971-01-08
DE2012076A1 (en) 1970-10-01

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