CA813320A - Thin film deposition technique - Google Patents

Thin film deposition technique

Info

Publication number: CA813320A
Authority: CA; Canada
Prior art keywords: thin film; film deposition; deposition technique; technique; thin
Prior art date: 1969-05-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA813320A

Inventor

M. Mattox Donald

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

US Department of Navy

Original Assignee

US Department of Navy

Publication date

1969-05-20

1969-05-20 Application granted granted Critical

1969-05-20 Publication of CA813320A publication Critical patent/CA813320A/en

Status Expired legal-status Critical Current

Links

CA813320A Thin film deposition technique Expired CA813320A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA813320T

Publications (1)

Publication Number	Publication Date
CA813320A true CA813320A (en)	1969-05-20

Family

ID=36285819

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA813320A Expired CA813320A (en)			Thin film deposition technique

Country Status (1)

Country	Link
CA (1)	CA813320A (en)

0
- CA CA813320A patent/CA813320A/en not_active Expired

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