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AU426428B2 - Improvements in or relating to vapor deposition of material - Google Patents

Improvements in or relating to vapor deposition of material

Info

Publication number
AU426428B2
AU426428B2 AU53433/69A AU5343369A AU426428B2 AU 426428 B2 AU426428 B2 AU 426428B2 AU 53433/69 A AU53433/69 A AU 53433/69A AU 5343369 A AU5343369 A AU 5343369A AU 426428 B2 AU426428 B2 AU 426428B2
Authority
AU
Australia
Prior art keywords
relating
vapor deposition
deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU53433/69A
Other versions
AU5343369A (en
Inventor
HANS HOHL and KARLHEINZ RASCHE JAKOB
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of AU5343369A publication Critical patent/AU5343369A/en
Publication of AU426428B2 publication Critical patent/AU426428B2/en
Expired legal-status Critical Current

Links

AU53433/69A 1968-04-25 1969-04-14 Improvements in or relating to vapor deposition of material Expired AU426428B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS724,179 1968-04-25

Publications (2)

Publication Number Publication Date
AU5343369A AU5343369A (en) 1970-10-22
AU426428B2 true AU426428B2 (en) 1970-10-22

Family

ID=

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