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WO2024089840A1 - Silver-based metal powder and method for manufacturing silver-based metal powder - Google Patents

Silver-based metal powder and method for manufacturing silver-based metal powder Download PDF

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Publication number
WO2024089840A1
WO2024089840A1 PCT/JP2022/040147 JP2022040147W WO2024089840A1 WO 2024089840 A1 WO2024089840 A1 WO 2024089840A1 JP 2022040147 W JP2022040147 W JP 2022040147W WO 2024089840 A1 WO2024089840 A1 WO 2024089840A1
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Prior art keywords
silver
based metal
less
metal powder
ppm
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French (fr)
Japanese (ja)
Inventor
賢二 別府
渡辺 文也
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Fukuda Metal Foil and Powder Co Ltd
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Fukuda Metal Foil and Powder Co Ltd
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Priority to KR1020247004307A priority Critical patent/KR102767318B1/en
Priority to JP2023514796A priority patent/JP7416516B1/en
Priority to PCT/JP2022/040147 priority patent/WO2024089840A1/en
Priority to CN202280092075.XA priority patent/CN118742403A/en
Publication of WO2024089840A1 publication Critical patent/WO2024089840A1/en
Anticipated expiration legal-status Critical
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/0466Alloys based on noble metals
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals
    • C22C5/06Alloys based on silver

Definitions

  • the present invention relates to a silver-based metal powder. More specifically, the silver-based metal powder can be sintered and fired stably even at low temperatures or in an atmosphere with a high dew point, and the strength and dimensional variation of the sintered body is small, so the silver-based metal powder can be suitably used as a raw material powder for powder metallurgy applications or as a raw material powder for conductive paste materials.
  • Silver has excellent electrical conductivity, thermal conductivity, oxidation resistance, and corrosion resistance, and is popular as a precious metal for use in various accessories, so silver-based metal powders made of silver and silver alloys have traditionally been used as raw powders for metal powder injection molding and silver clay.
  • silver-based metal powders have also been increasingly used in the electronic materials field as raw powder for sintered or thermosetting conductive pastes.
  • Silver is a precious metal that does not oxidize easily, and silver oxides tend to decompose easily. As a result, as long as the temperature is raised sufficiently, a reducing atmosphere is not required, and sintering can be performed even in an atmosphere with a high oxygen partial pressure, such as air, which is an excellent characteristic.
  • Patent Document 1 discloses silver powder for silver clay that contains 20 ppm to 900 ppm in total of one or more of tin, lead, copper, bismuth, and iron, and states that the intentional addition of these elements improves sinterability.
  • the sintering temperature of the silver powder in Patent Document 1 is 900°C, and there is no indication of stability when sintered at low temperatures or in an atmosphere with a high dew point.
  • the inventors set out to solve the above problems as a technical task, and conducted extensive experiments focusing on impurity elements in silver and silver alloys. As a result, they discovered that if the silver-based metal powder contains a standard free energy of formation of oxides in a temperature range of 600°C or less that is less than the standard free energy of formation of silicon dioxide in the same temperature range, and the total content of impurity elements whose mixing enthalpy with silver is less than or equal to aluminum is 500 ppm or less, stable sintering and firing are possible even at low temperatures or in an atmosphere with a high dew point, and variations in the strength and dimensions of the sintered body can be suppressed, which led to the solution of the above technical tasks.
  • the present invention is a silver-based metal powder, which contains an oxide whose standard free energy of formation in a temperature range of 600°C or less is equal to or less than the standard free energy of formation of silicon dioxide in said temperature range, and which contains an impurity element whose mixing enthalpy with silver is equal to or less than that of aluminum, in a total content of 500 ppm or less.
  • the present invention also relates to the silver-based metal powder, in which the total content of the impurity rare earth elements is 100 ppm or less.
  • the present invention also relates to the silver-based metal powder, in which the content of the impurity element lithium is 100 ppm or less.
  • the present invention also relates to the silver-based metal powder, in which the total content of the impurity elements calcium and/or magnesium is 300 ppm or less.
  • the present invention also relates to the silver-based metal powder, in which the content of the impurity element zirconium is 300 ppm or less.
  • the present invention also relates to the silver-based metal powder, in which the content of silicon, an impurity element, is 300 ppm or less.
  • the present invention also relates to the silver-based metal powder, in which the content of the impurity element aluminum is 300 ppm or less.
  • the present invention also relates to a method for producing the silver-based metal powder by atomization.
  • the silver-based metal powder of the present invention has a standard free energy of formation of oxide in a temperature range of 600°C or less that is less than the standard free energy of formation of silicon dioxide in the same temperature range, and the total content of impurity elements whose mixing enthalpy with silver is less than that of aluminum is 500 ppm or less. This allows stable sintering and firing even at low temperatures or in an atmosphere with a high dew point, and there is little variation in the dimensions and strength of the sintered body. Therefore, this silver-based metal powder can be suitably used as a raw material powder for powder metallurgy applications or as a raw material powder for conductive paste materials.
  • the present invention is a silver-based metal powder made of silver and/or a silver alloy.
  • the silver-based metal powder of the present invention has a standard free energy of formation of an oxide in a temperature range of 600°C or less that is equal to or less than the standard free energy of formation of silicon dioxide in said temperature range, and the total content of impurity elements (hereinafter sometimes referred to as "specific impurity elements") whose mixing enthalpy with silver is equal to or less than that of aluminum is 500 ppm or less.
  • Impurity elements whose standard free energy of formation of oxides in the temperature range below 600°C is equal to or less than the standard free energy of formation of silicon dioxide in said temperature range tend to be easily oxidized in the temperature range below 600°C, and it is believed that even trace amounts of these elements present on the surface or within the powder particles react preferentially with oxygen in the atmosphere to form oxides.
  • the mixing enthalpy is a thermodynamic value that indicates the strength of the interaction between elements; the smaller the value, the easier the elements tend to bond with each other.
  • impurity elements whose mixing enthalpy with silver is equal to or lower than that of aluminum have a high affinity with silver, and therefore are thought to become oxides by uniformly coating the surface of silver-based metal powder particles or dispersing uniformly within the particles, rather than separating from the silver and forming an oxide locally.
  • the oxides of the specific impurity elements mentioned above have almost no effect on sintering when the sintering temperature is sufficiently high or under favorable conditions such as a reducing atmosphere or an inert atmosphere with a low dew point.
  • the total content of specific impurity elements in this invention is 500 ppm or less.
  • total content refers to the combined content of all specific impurity elements contained in the silver-based metal powder.
  • Specific impurity elements include rare earth elements such as yttrium (Y) and neodymium (Nd), lithium (Li), calcium (Ca), magnesium (Mg), zirconium (Zr), silicon (Si), and aluminum (Al).
  • rare earth elements such as yttrium (Y) and neodymium (Nd), lithium (Li), calcium (Ca), magnesium (Mg), zirconium (Zr), silicon (Si), and aluminum (Al).
  • the literature value for the standard free energy of formation of silicon dioxide at 600° C. is ⁇ 750 (kJ/mol-O 2 ), and the literature value for the enthalpy of mixing of aluminum with silver is ⁇ 4 (kJ/mol).
  • the total content of rare earth elements, which are specific impurity elements is 100 ppm or less.
  • the content of lithium, a specific impurity element is preferably 100 ppm or less.
  • lithium is an element that has a large effect of inhibiting stable sintering.
  • the total content of the specific impurity elements calcium and/or magnesium is preferably 300 ppm or less.
  • the content of the specific impurity element zirconium is preferably 300 ppm or less.
  • the content of silicon, a specific impurity element, is preferably 300 ppm or less.
  • the content of aluminum, a specific impurity element, is preferably 300 ppm or less.
  • Specific impurity elements can be quantified by dissolving silver-based metal powder in acid to create a solution, then analyzing it using ICP atomic emission spectrometry.
  • the oxide may contain an element whose standard free energy of formation in a temperature range of 600°C or less is higher than the standard free energy of formation of silicon dioxide in the same temperature range, or an impurity element whose mixing enthalpy with silver is higher than that of aluminum.
  • Palladium (Pd) is an example of an element whose standard free energy of formation of an oxide in a temperature range of 600°C or less is higher than the standard free energy of formation of silicon dioxide in the same temperature range
  • titanium (Ti) is an example of an element whose mixing enthalpy with silver is higher than that of aluminum
  • nickel (Ni), copper (Cu), and iron (Fe) are examples of elements whose standard free energy of formation of an oxide in a temperature range of 600°C or less is higher than the standard free energy of formation of silicon dioxide in the same temperature range and whose mixing enthalpy with silver is higher than that of aluminum.
  • the silver-based metal powder in the present invention may contain silver-copper alloys and silver-palladium alloys, which are used as brazing materials.
  • the method for producing the silver-based metal powder in the present invention is not particularly limited, but it is preferable to produce it by the atomization method.
  • the atomization method is relatively inexpensive and efficient, and can produce large quantities of silver-based metal powder.
  • the atomization method is not limited, and may be any known method such as water atomization, gas atomization, or centrifugal atomization.
  • the total content of specific impurity elements must be controlled to 500 ppm or less, so care must be taken with the silver bullion used as the raw material.
  • the specific impurity elements in the present invention are basically easily oxidized, when they are melted in an atmosphere containing a certain amount of oxygen, they become oxides and can be separated and removed from the molten silver and silver alloy. Therefore, the total content of specific impurity elements in the metal before melting does not need to be 500 ppm or less.
  • the average particle size of the silver-based metal powder in the present invention is not limited and may be determined as desired.
  • the average particle size of silver-based metal powders used in the field of electronic materials is generally 50 ⁇ m or less, and considering the formation of fine circuit patterns, it is more preferable for the average particle size to be 10 ⁇ m or less.
  • the average particle size of silver-based metal powder can be measured using a laser diffraction particle size distribution measuring device.
  • the molten metals of the Examples and Comparative Examples in a molten state were allowed to fall freely, and then high-pressure water was sprayed onto them, scattering the molten metal and rapidly cooling and solidifying it, using the water atomization method to obtain each silver-based metal powder.
  • the resulting silver-based metal powders were sieved through a 100 mesh sieve to remove coarse particles.
  • the average particle size of each silver-based metal powder was measured using a laser diffraction particle size distribution measuring device MT3000II (manufactured by Microtrack Bell Co., Ltd.).
  • the "average particle size” in the present invention is a cumulative 50% particle size ( D50 size) on a volume basis.
  • the content of each impurity element was measured by dissolving each of the obtained silver-based metal powders in acid to prepare a solution, and then using an ICP emission spectrometer iCAP7600 (manufactured by Thermo Fisher Scientific Co., Ltd.).
  • Blank cells in Tables 1 to 3 indicate levels below the detection limit of 10 ppm.
  • the radial crushing strength of each sintered body was measured in accordance with JIS Z 2507 using an Autograph AG-IS 50kN (manufactured by Shimadzu Corporation).
  • the silver-based metal powder of the present invention has a standard free energy of formation of oxide in a temperature range of 600°C or less that is equal to or less than the standard free energy of formation of silicon dioxide in the same temperature range, and the total content of impurity elements having a mixing enthalpy with silver equal to or less than that of aluminum is 500 ppm or less. Therefore, stable sintering and firing are possible even at low temperatures or in an atmosphere with a high dew point, and there is little variation in the strength and dimensions of the sintered body, and therefore the powder can be suitably used as a raw material powder for powder metallurgy applications or as a raw material powder for conductive paste materials. Therefore, the present invention has high industrial applicability.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Abstract

[Problem] To provide a silver-based metal powder with which stable sintering/burning is possible even in an atmosphere with a low temperature and/or high dew point and which, by having less variation in the strength and dimensions of the sintered bodies, can be used preferably as a raw material powder for powder metallurgy and/or a raw material powder for conductive paste material. [Solution] A silver-based metal powder wherein: the standard free energy of formation of an oxide contained in the silver-based metal powder in a temperature range at or below 600°C is equal to or lower than the standard free energy of formation of silicon dioxide in said temperature range; and the total content of an impurity element having a mixing enthalpy with silver of equal to or lower than aluminum is equal to or lower than 500 ppm.

Description

銀系金属粉末及び該銀系金属粉末の製造方法Silver-based metal powder and method for producing the same

 本発明は銀系金属粉末に関する。詳しくは、該銀系金属粉末は、低温や露点の高い雰囲気であっても安定した焼結・焼成が可能であり、焼結体の強度や寸法のばらつきが少ないので、粉末冶金用途の原料粉末や導電ペースト材料の原料粉末として好適に使用することができる銀系金属粉末に関する。 The present invention relates to a silver-based metal powder. More specifically, the silver-based metal powder can be sintered and fired stably even at low temperatures or in an atmosphere with a high dew point, and the strength and dimensional variation of the sintered body is small, so the silver-based metal powder can be suitably used as a raw material powder for powder metallurgy applications or as a raw material powder for conductive paste materials.

 銀は優れた導電性、熱伝導性、耐酸化性、耐食性を示し、貴金属として各種アクセサリとしての人気も高いため、金属粉末射出成形や銀粘土の原料粉末として銀及び銀合金からなる銀系金属の粉末が従来より用いられてきた。 Silver has excellent electrical conductivity, thermal conductivity, oxidation resistance, and corrosion resistance, and is popular as a precious metal for use in various accessories, so silver-based metal powders made of silver and silver alloys have traditionally been used as raw powders for metal powder injection molding and silver clay.

 また近年、銀系金属粉末は電子材料の分野において、焼成型もしくは熱硬化型の導電ペーストの原料粉末としての用途も拡大している。 In recent years, silver-based metal powders have also been increasingly used in the electronic materials field as raw powder for sintered or thermosetting conductive pastes.

 銀は酸化し難い貴金属であり、また、銀の酸化物は分解し易い性質を持つため、十分な温度まで昇温すれば、還元雰囲気を必要とせず、大気雰囲気等の酸素分圧の高い雰囲気であっても焼結が可能であるという優れた特性がある。 Silver is a precious metal that does not oxidize easily, and silver oxides tend to decompose easily. As a result, as long as the temperature is raised sufficiently, a reducing atmosphere is not required, and sintering can be performed even in an atmosphere with a high oxygen partial pressure, such as air, which is an excellent characteristic.

 しかし製造コストの観点から、焼結温度はできるだけ低く、露点が高い等の悪条件の雰囲気であっても焼結が可能な銀系金属粉末が望まれているが、低温や露点の高い雰囲気下においては銀系金属粉末であっても安定した焼結が進まず、焼結体の寸法や強度のばらつきが発生し易いという問題がある。 However, from the perspective of manufacturing costs, it is desirable to have a silver-based metal powder that can be sintered even in adverse conditions such as an atmosphere with a high dew point and a sintering temperature that is as low as possible. However, there is a problem in that stable sintering does not occur even with silver-based metal powder at low temperatures or in an atmosphere with a high dew point, and variations in the dimensions and strength of the sintered body tend to occur.

 そこで、低温や露点が高い雰囲気であっても安定して焼結が進み、焼結体の寸法や強度にばらつきが生じ難い銀系金属粉末の開発が望まれている。 Therefore, there is a need to develop a silver-based metal powder that can be sintered stably even in low temperatures or in an atmosphere with a high dew point, and that is less susceptible to variations in the dimensions and strength of the sintered body.

特開2001-3101JP2001-3101

 特許文献1にはスズ、鉛、銅、ビスマス、鉄のうち1種または2種以上を合計で20ppm~900ppm含む銀粘土用銀粉末が開示されており、上記の元素を意図的に添加することで焼結性が向上することが記載されている。 Patent Document 1 discloses silver powder for silver clay that contains 20 ppm to 900 ppm in total of one or more of tin, lead, copper, bismuth, and iron, and states that the intentional addition of these elements improves sinterability.

 しかしながら特許文献1の銀粉末の焼結温度は900℃であるため、低温や露点の高い雰囲気での焼結においての安定性については示されていない。 However, the sintering temperature of the silver powder in Patent Document 1 is 900°C, and there is no indication of stability when sintered at low temperatures or in an atmosphere with a high dew point.

 本発明者らは、前記諸問題を解決することを技術的課題とし、銀及び銀合金中の不純物元素に着目して鋭意実験を重ねた結果、銀系金属粉末が含有する600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギー以下であり、かつ、銀との混合エンタルピーがアルミニウム以下である不純物元素の総含有量が500ppm以下である銀系金属粉末であれば、低温や露点の高い雰囲気であっても安定した焼結・焼成が可能であり、焼結体の強度や寸法のばらつきを抑制できるという刮目すべき知見を得て前記技術的な課題を解決することに至った。 The inventors set out to solve the above problems as a technical task, and conducted extensive experiments focusing on impurity elements in silver and silver alloys. As a result, they discovered that if the silver-based metal powder contains a standard free energy of formation of oxides in a temperature range of 600°C or less that is less than the standard free energy of formation of silicon dioxide in the same temperature range, and the total content of impurity elements whose mixing enthalpy with silver is less than or equal to aluminum is 500 ppm or less, stable sintering and firing are possible even at low temperatures or in an atmosphere with a high dew point, and variations in the strength and dimensions of the sintered body can be suppressed, which led to the solution of the above technical tasks.

 前記技術的課題は次のとおりの本発明によって解決できる。 The above technical problems can be solved by the present invention as follows:

 本発明は、銀系金属粉末であって、前記銀系金属粉末が含有する600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギー以下であり、かつ、銀との混合エンタルピーがアルミニウム以下である不純物元素の総含有量が500ppm以下である銀系金属粉末である。 The present invention is a silver-based metal powder, which contains an oxide whose standard free energy of formation in a temperature range of 600°C or less is equal to or less than the standard free energy of formation of silicon dioxide in said temperature range, and which contains an impurity element whose mixing enthalpy with silver is equal to or less than that of aluminum, in a total content of 500 ppm or less.

 また本発明は、前記不純物元素である希土類元素を合計した含有量が100ppm以下である前記の銀系金属粉末である。 The present invention also relates to the silver-based metal powder, in which the total content of the impurity rare earth elements is 100 ppm or less.

 また本発明は、前記不純物元素であるリチウムの含有量が100ppm以下である前記の銀系金属粉末である。 The present invention also relates to the silver-based metal powder, in which the content of the impurity element lithium is 100 ppm or less.

 また本発明は、前記不純物元素であるカルシウム及び/又はマグネシウムを合計した含有量が300ppm以下である前記の銀系金属粉末である。 The present invention also relates to the silver-based metal powder, in which the total content of the impurity elements calcium and/or magnesium is 300 ppm or less.

 また本発明は、前記不純物元素であるジルコニウムの含有量が300ppm以下である前記の銀系金属粉末である。 The present invention also relates to the silver-based metal powder, in which the content of the impurity element zirconium is 300 ppm or less.

 また本発明は、前記不純物元素であるケイ素の含有量が300ppm以下である前記の銀系金属粉末である。 The present invention also relates to the silver-based metal powder, in which the content of silicon, an impurity element, is 300 ppm or less.

 また本発明は、前記不純物元素であるアルミニウムの含有量が300ppm以下である前記の銀系金属粉末である。 The present invention also relates to the silver-based metal powder, in which the content of the impurity element aluminum is 300 ppm or less.

 また本発明は、アトマイズ法によって製造する前記の銀系金属粉末の製造方法である。 The present invention also relates to a method for producing the silver-based metal powder by atomization.

 本発明における銀系金属粉末は、600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギー以下であり、かつ、銀との混合エンタルピーがアルミニウム以下である不純物元素の総含有量が500ppm以下であるので、低温や露点が高い雰囲気であっても安定した焼結・焼成が可能であり、焼結体の寸法や強度のばらつきが少ないので、粉末冶金用途の原料粉末や導電ペースト材料の原料粉末として好適に使用することができる銀系金属粉末である。 The silver-based metal powder of the present invention has a standard free energy of formation of oxide in a temperature range of 600°C or less that is less than the standard free energy of formation of silicon dioxide in the same temperature range, and the total content of impurity elements whose mixing enthalpy with silver is less than that of aluminum is 500 ppm or less. This allows stable sintering and firing even at low temperatures or in an atmosphere with a high dew point, and there is little variation in the dimensions and strength of the sintered body. Therefore, this silver-based metal powder can be suitably used as a raw material powder for powder metallurgy applications or as a raw material powder for conductive paste materials.

 本発明は銀及び/又は銀合金からなる銀系金属粉末である。 The present invention is a silver-based metal powder made of silver and/or a silver alloy.

 本発明における銀系金属粉末は、600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギー以下であり、かつ、銀との混合エンタルピーがアルミニウム以下である不純物元素(以下「特定の不純物元素」と言うことがある)の総含有量が500ppm以下である。 The silver-based metal powder of the present invention has a standard free energy of formation of an oxide in a temperature range of 600°C or less that is equal to or less than the standard free energy of formation of silicon dioxide in said temperature range, and the total content of impurity elements (hereinafter sometimes referred to as "specific impurity elements") whose mixing enthalpy with silver is equal to or less than that of aluminum is 500 ppm or less.

 600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギー以下の不純物元素は、600℃以下の温度域において酸化が容易な傾向があり、これらの元素が粉末粒子表面や粉末粒子中に微量でも存在すると雰囲気中の酸素と優先的に反応して、酸化物を生成すると考えられる。  Impurity elements whose standard free energy of formation of oxides in the temperature range below 600°C is equal to or less than the standard free energy of formation of silicon dioxide in said temperature range tend to be easily oxidized in the temperature range below 600°C, and it is believed that even trace amounts of these elements present on the surface or within the powder particles react preferentially with oxygen in the atmosphere to form oxides.

 また、混合エンタルピーは元素同士の相互作用の大きさを表す熱力学的な数値であり、小さいほどその元素同士が結合し易い傾向にあるが、銀との混合エンタルピーがアルミニウム以下の不純物元素は銀との親和性が高いため、銀から分離して局所的に酸化物を形成するのではなく、銀系金属の粉末粒子表面を均一に被覆したり、粒子中に均一に分散したりする状態で酸化物になると考えられる。 In addition, the mixing enthalpy is a thermodynamic value that indicates the strength of the interaction between elements; the smaller the value, the easier the elements tend to bond with each other. However, impurity elements whose mixing enthalpy with silver is equal to or lower than that of aluminum have a high affinity with silver, and therefore are thought to become oxides by uniformly coating the surface of silver-based metal powder particles or dispersing uniformly within the particles, rather than separating from the silver and forming an oxide locally.

 前記特定の不純物元素の酸化物は、焼結温度が十分高い場合や、還元雰囲気、露点の低い不活性雰囲気といった好条件での雰囲気では、ほとんど焼結に影響を及ぼさない。 The oxides of the specific impurity elements mentioned above have almost no effect on sintering when the sintering temperature is sufficiently high or under favorable conditions such as a reducing atmosphere or an inert atmosphere with a low dew point.

 しかし、低温や露点の高い雰囲気といった悪条件の雰囲気では、主成分である銀が粒子表面や粒子中で固相拡散するのを妨げるため、焼結の進展を遅らせたり、ばらつかせたりするので、焼結不良や焼結体の寸法や強度のばらつきとして顕在化すると推察される。 However, adverse atmospheric conditions such as low temperatures or high dew points prevent the main component, silver, from diffusing into the solid phase on or within the particle surface, slowing down or varying the progress of sintering, which is thought to manifest itself as poor sintering and variations in the dimensions and strength of the sintered body.

 本発明における特定の不純物元素の総含有量は500ppm以下である。 The total content of specific impurity elements in this invention is 500 ppm or less.

 特定の不純物元素の総含有量が500ppmを超えると、焼結・焼成が安定しないので、焼結体の寸法や強度にばらつきが生じる虞があるからである。 If the total content of certain impurity elements exceeds 500 ppm, sintering and firing will be unstable, and there is a risk of variation in the dimensions and strength of the sintered body.

 なお、本発明における「総含有量」とは銀系金属粉末が含有する全ての特定の不純物元素を合計した含有量を言う。 In addition, in this invention, "total content" refers to the combined content of all specific impurity elements contained in the silver-based metal powder.

 特定の不純物元素としては、イットリウム(Y)やネオジム(Nd)に代表される希土類元素、リチウム(Li)、カルシウム(Ca)、マグネシウム(Mg)、ジルコニウム(Zr)、ケイ素(Si)及びアルミニウム(Al)を例示する。 Specific impurity elements include rare earth elements such as yttrium (Y) and neodymium (Nd), lithium (Li), calcium (Ca), magnesium (Mg), zirconium (Zr), silicon (Si), and aluminum (Al).

 600℃以下の温度域における酸化物の標準生成自由エネルギー及び銀との混合エンタルピーについては文献に記載の数値を利用すればよい。 For the standard free energy of formation of oxides in the temperature range below 600°C and the enthalpy of mixing with silver, values given in the literature can be used.

 二酸化ケイ素の600℃における標準生成自由エネルギーの文献値は-750(kJ/mol-O)であり、アルミニウムの銀との混合エンタルピーの文献値は-4(kJ/mol)である。 The literature value for the standard free energy of formation of silicon dioxide at 600° C. is −750 (kJ/mol-O 2 ), and the literature value for the enthalpy of mixing of aluminum with silver is −4 (kJ/mol).

 本発明においては、特定の不純物元素である希土類元素を合計した含有量は100ppm以下であることが好ましい。 In the present invention, it is preferable that the total content of rare earth elements, which are specific impurity elements, is 100 ppm or less.

 希土類元素は安定な焼結を阻害する影響が大きい元素だからである。 This is because rare earth elements have a large effect of inhibiting stable sintering.

 特定の不純物元素であるリチウムの含有量は100ppm以下であることが好ましい。 The content of lithium, a specific impurity element, is preferably 100 ppm or less.

 リチウムは安定な焼結を阻害する影響が大きい元素だからである。 This is because lithium is an element that has a large effect of inhibiting stable sintering.

 特定の不純物元素であるカルシウム及び/又はマグネシウムを合計した含有量は300ppm以下であることが好ましい。 The total content of the specific impurity elements calcium and/or magnesium is preferably 300 ppm or less.

 特定の不純物元素であるジルコニウムの含有量は300ppm以下であることが好ましい。 The content of the specific impurity element zirconium is preferably 300 ppm or less.

 特定の不純物元素であるケイ素の含有量は300ppm以下であることが好ましい。 The content of silicon, a specific impurity element, is preferably 300 ppm or less.

 特定の不純物元素であるアルミニウムの含有量は300ppm以下であることが好ましい。 The content of aluminum, a specific impurity element, is preferably 300 ppm or less.

 カルシウム、マグネシウム、ジルコニウム、ケイ素、アルミニウムは希土類やリチウムに比べて影響は少ないものの、安定した焼結を阻害するからである。 Although calcium, magnesium, zirconium, silicon, and aluminum have less of an effect than rare earths and lithium, they still inhibit stable sintering.

 特定の不純物元素は、銀系金属粉末を酸溶解して溶液化したものをICP発光分光分析法により分析して定量することができる。 Specific impurity elements can be quantified by dissolving silver-based metal powder in acid to create a solution, then analyzing it using ICP atomic emission spectrometry.

 本発明においては、600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギーよりも高い元素や、銀との混合エンタルピーがアルミニウムよりも大きい不純物元素を含有してもよい。 In the present invention, the oxide may contain an element whose standard free energy of formation in a temperature range of 600°C or less is higher than the standard free energy of formation of silicon dioxide in the same temperature range, or an impurity element whose mixing enthalpy with silver is higher than that of aluminum.

 600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギーよりも高い元素としてパラジウム(Pd)、銀との混合エンタルピーがアルミニウムよりも大きい元素としてチタン(Ti)、600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギーよりも高く、かつ、銀との混合エンタルピーがアルミニウムよりも大きい元素としてニッケル(Ni)、銅(Cu)、鉄(Fe)を例示する。 Palladium (Pd) is an example of an element whose standard free energy of formation of an oxide in a temperature range of 600°C or less is higher than the standard free energy of formation of silicon dioxide in the same temperature range, titanium (Ti) is an example of an element whose mixing enthalpy with silver is higher than that of aluminum, and nickel (Ni), copper (Cu), and iron (Fe) are examples of elements whose standard free energy of formation of an oxide in a temperature range of 600°C or less is higher than the standard free energy of formation of silicon dioxide in the same temperature range and whose mixing enthalpy with silver is higher than that of aluminum.

 本発明における銀系金属粉末には、ろう材として用いられる銀銅合金、銀パラジウム合金を含有してもよい。 The silver-based metal powder in the present invention may contain silver-copper alloys and silver-palladium alloys, which are used as brazing materials.

 本発明における銀系金属粉末の製造方法は特に限定されないが、アトマイズ法で製造することが好ましい。 The method for producing the silver-based metal powder in the present invention is not particularly limited, but it is preferable to produce it by the atomization method.

 アトマイズ法は比較的安価に効率よく、多量に銀系金属粉末を製造できるからである。 The atomization method is relatively inexpensive and efficient, and can produce large quantities of silver-based metal powder.

 アトマイズ法は限定されず、水アトマイズ法、ガスアトマイズ法及び遠心アトマイズ法等の公知の方法でよい。 The atomization method is not limited, and may be any known method such as water atomization, gas atomization, or centrifugal atomization.

 なお、本発明においては特定の不純物元素の総含有量を500ppm以下に制御する必要があるため、原材料として使用する銀の地金に注意を払う必要があるが、本発明における特定の不純物元素は基本的に酸化し易いため、ある程度酸素が存在する雰囲気下で溶解すると酸化物になって銀及び銀合金の溶湯と分離除去が可能である。
 よって、溶解前の地金の状態で特定の不純物元素の総含有量が500ppm以下である必要はない。
In the present invention, the total content of specific impurity elements must be controlled to 500 ppm or less, so care must be taken with the silver bullion used as the raw material. However, since the specific impurity elements in the present invention are basically easily oxidized, when they are melted in an atmosphere containing a certain amount of oxygen, they become oxides and can be separated and removed from the molten silver and silver alloy.
Therefore, the total content of specific impurity elements in the metal before melting does not need to be 500 ppm or less.

 本発明における銀系金属粉末の平均粒子径は限定されず、所望により適宜、決定すればよい。 The average particle size of the silver-based metal powder in the present invention is not limited and may be determined as desired.

 電子材料の分野に用いられる銀系金属粉末の平均粒子径は50μm以下である事が一般的であり、微細な回路パターン形成を考慮すると平均粒子径は10μm以下である事がより好ましい。 The average particle size of silver-based metal powders used in the field of electronic materials is generally 50 μm or less, and considering the formation of fine circuit patterns, it is more preferable for the average particle size to be 10 μm or less.

 平均粒子径が10μm以下の微粉を製造するには、収率の観点から微粉化が容易な水アトマイズ法で製造するとよい。 To produce fine powder with an average particle size of 10 μm or less, it is recommended to use the water atomization method, which is easy to produce fine particles from the perspective of yield.

 平均粒子径は、銀系金属粉末をレーザー回折式粒度分布測定装置により測定することができる。 The average particle size of silver-based metal powder can be measured using a laser diffraction particle size distribution measuring device.

 本発明の実施例及び比較例を示すが、本発明はこれらに限定されるものではない。 The following examples and comparative examples are provided, but the present invention is not limited to these.

(粉末の作製)
 原料の高純度銀地金(99.99%以上)を加熱して溶解した後、表1~3記載の各不純物元素を適宜投入して成分を調整した。
(Preparation of Powder)
The raw material, high purity silver bullion (99.99% or higher), was heated and melted, and then the impurity elements shown in Tables 1 to 3 were appropriately added to adjust the composition.

 溶融状態の実施例及び比較例の各溶湯を自由落下させたところに高圧水を吹き付け、溶湯を飛散、急冷凝固させる水アトマイズ法により各銀系金属粉末を得た。 The molten metals of the Examples and Comparative Examples in a molten state were allowed to fall freely, and then high-pressure water was sprayed onto them, scattering the molten metal and rapidly cooling and solidifying it, using the water atomization method to obtain each silver-based metal powder.

 得られた各銀系金属粉末は100meshの篩を用いて粗大粒子を除去した。 The resulting silver-based metal powders were sieved through a 100 mesh sieve to remove coarse particles.

(平均粒子径の測定)
 各銀系金属粉末の平均粒子径は、レーザー回折式粒度分布測定装置MT3000II(マイクロトラック・ベル株式会社製)を用いて測定した。
(Measurement of average particle size)
The average particle size of each silver-based metal powder was measured using a laser diffraction particle size distribution measuring device MT3000II (manufactured by Microtrack Bell Co., Ltd.).

 本発明における「平均粒子径」は、体積基準の累積50%粒子径(D50径)である。 The "average particle size" in the present invention is a cumulative 50% particle size ( D50 size) on a volume basis.

(銀系金属粉末中の不純物元素の定量)
 各不純物元素の含有量は、得られた各銀系金属粉末を酸溶解して溶液化した後、ICP発光分光分析装置iCAP7600(サーモフィッシャーサイエンティフィック株式会社製)を用いて測定した。
(Quantitative determination of impurity elements in silver-based metal powder)
The content of each impurity element was measured by dissolving each of the obtained silver-based metal powders in acid to prepare a solution, and then using an ICP emission spectrometer iCAP7600 (manufactured by Thermo Fisher Scientific Co., Ltd.).

 表1~3中の空欄は検出限界である10ppm未満であることを示す。  Blank cells in Tables 1 to 3 indicate levels below the detection limit of 10 ppm.

 得られた各銀系金属粉末はZSX PrimusIV(株式会社リガク製)を用いて蛍光X線による定性分析を実施し、表1~3に記載する元素以外の元素のピークが検出されないことを確認した。 Qualitative analysis was performed on each of the obtained silver-based metal powders using X-ray fluorescence with a ZSX Primus IV (manufactured by Rigaku Corporation), and it was confirmed that no peaks of elements other than those listed in Tables 1 to 3 were detected.

(焼結性の評価)
 実施例及び比較例の各銀系金属粉末に潤滑剤としてステアリン酸亜鉛を用いて金型潤滑を行い、圧粉体密度が7.7g/cmとなるようにΦ14-7×5mmの円筒形に成形し、露点0℃の純窒素雰囲気中、400℃で15分保持して焼結体を得た。
(Evaluation of sinterability)
Each of the silver-based metal powders of the examples and comparative examples was subjected to die lubrication using zinc stearate as a lubricant, and molded into a cylindrical shape of Φ14-7×5 mm so that the green density was 7.7 g/ cm3 . The powder was then held at 400°C for 15 minutes in a pure nitrogen atmosphere with a dew point of 0°C to obtain a sintered body.

 得られた各焼結体について、オートグラフAG-IS 50kN(株式会社島津製作所製)を用いてJIS Z 2507に従って圧環強度を測定した。 The radial crushing strength of each sintered body was measured in accordance with JIS Z 2507 using an Autograph AG-IS 50kN (manufactured by Shimadzu Corporation).

 各粉末の焼結性の評価はn数:5で行い、測定した圧環強度が全て120MPa以上であれば焼結性評価は◎、100MPa以上であれば焼結性評価は〇、ひとつでも100MPa未満となれば焼結性評価は×として評価した。 The sinterability of each powder was evaluated with n=5. If all measured radial crushing strengths were 120 MPa or higher, the sinterability was evaluated as ◎. If they were 100 MPa or higher, the sinterability was evaluated as ◯. If even one was less than 100 MPa, the sinterability was evaluated as ×.

Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001

Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002

Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003

 表1に示す実施例1~9と比較例1~3の比較により、希土類元素に分類されるイットリウム(Y)とネオジム(Nd)を合計した含有量が500ppm以下であれば焼結性は安定しており、500ppmを超えると安定性が低下することが確認された。さらに、100ppm以下であれば焼結性が特に安定している事が確認された。 By comparing Examples 1 to 9 and Comparative Examples 1 to 3 shown in Table 1, it was confirmed that the sinterability is stable if the combined content of yttrium (Y) and neodymium (Nd), which are classified as rare earth elements, is 500 ppm or less, and that stability decreases if the combined content exceeds 500 ppm. Furthermore, it was confirmed that the sinterability is particularly stable if the combined content is 100 ppm or less.

 また、表1に示す実施例10~12と比較例4の比較により、リチウム(Li)が500ppm以下であれば焼結性は安定しており、500ppmを超えると安定性が低下することが確認された。さらに、100ppm以下であれば焼結性が特に安定している事が確認された。 In addition, by comparing Examples 10 to 12 and Comparative Example 4 shown in Table 1, it was confirmed that the sinterability was stable when the lithium (Li) content was 500 ppm or less, and that the stability decreased when the content exceeded 500 ppm. Furthermore, it was confirmed that the sinterability was particularly stable when the content was 100 ppm or less.

 また、表2に示す実施例13~21と比較例5~7の比較により、カルシウム(Ca)とマグネシウム(Mg)を合計した含有量が500ppm以下であれば焼結性は安定しており、500ppmを超えると安定性が低下することが確認された。さらに、300ppm以下であれば焼結性が特に安定している事が確認された。 In addition, by comparing Examples 13 to 21 and Comparative Examples 5 to 7 shown in Table 2, it was confirmed that the sinterability is stable if the total content of calcium (Ca) and magnesium (Mg) is 500 ppm or less, and that stability decreases if the total content exceeds 500 ppm. Furthermore, it was confirmed that the sinterability is particularly stable if the total content is 300 ppm or less.

 また、表2に示す実施例22~24と比較例8の比較により、ジルコニウム(Zr)が500ppm以下であれば焼結性は安定しており、500ppmを超えると安定性が低下することが確認された。さらに、300ppm以下であれば焼結性が特に安定している事が確認された。 In addition, by comparing Examples 22 to 24 and Comparative Example 8 shown in Table 2, it was confirmed that if zirconium (Zr) is 500 ppm or less, the sinterability is stable, and if it exceeds 500 ppm, the stability decreases. Furthermore, it was confirmed that if it is 300 ppm or less, the sinterability is particularly stable.

 また、表3に示す実施例25~27と比較例9の比較により、ケイ素(Si)が500ppm以下であれば焼結性は安定しており、500ppmを超えると安定性が低下することが確認された。さらに、300ppm以下であれば焼結性が特に安定している事が確認された。 In addition, by comparing Examples 25 to 27 and Comparative Example 9 shown in Table 3, it was confirmed that if silicon (Si) is 500 ppm or less, the sinterability is stable, and if it exceeds 500 ppm, the stability decreases. Furthermore, it was confirmed that if it is 300 ppm or less, the sinterability is particularly stable.

 また、表3に示す実施例28~30と比較例10の比較により、アルミニウム(Al)が500ppm以下であれば焼結性は安定しており、500ppmを超えると安定性が低下することが確認された。さらに、300ppm以下であれば焼結性が特に安定している事が確認された。 In addition, by comparing Examples 28 to 30 and Comparative Example 10 shown in Table 3, it was confirmed that if aluminum (Al) is 500 ppm or less, the sinterability is stable, and if it exceeds 500 ppm, the stability decreases. Furthermore, it was confirmed that if it is 300 ppm or less, the sinterability is particularly stable.

 また、表3に示す実施例31~34と比較例11~14の比較により、600℃以下の温度域における酸化物の標準生成自由エネルギーが当該温度域と同一の温度域における二酸化ケイ素の標準生成自由エネルギー以下であり、かつ、銀との混合エンタルピーがアルミニウム以下である不純物元素の総含有量が500ppm以下であれば焼結性は安定しており、500ppmを超えると安定性が低下することが確認された。 In addition, by comparing Examples 31 to 34 and Comparative Examples 11 to 14 shown in Table 3, it was confirmed that if the standard free energy of formation of an oxide in a temperature range of 600°C or less is equal to or less than the standard free energy of formation of silicon dioxide in the same temperature range, and the total content of impurity elements whose mixing enthalpy with silver is equal to or less than aluminum is 500 ppm or less, the sinterability is stable, and that stability decreases when the content exceeds 500 ppm.

 本発明における銀系金属粉末は、600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギー以下であり、かつ、銀との混合エンタルピーがアルミニウム以下である不純物元素の総含有量が500ppm以下であるから、低温や露点の高い雰囲気であっても安定した焼結・焼成が可能であり、焼結体の強度や寸法のばらつきが少ないので、粉末冶金用途の原料粉末や導電ペースト材料の原料粉末として好適に使用することができる。
 したがって、本発明は産業上の利用可能性の高い発明である。
The silver-based metal powder of the present invention has a standard free energy of formation of oxide in a temperature range of 600°C or less that is equal to or less than the standard free energy of formation of silicon dioxide in the same temperature range, and the total content of impurity elements having a mixing enthalpy with silver equal to or less than that of aluminum is 500 ppm or less. Therefore, stable sintering and firing are possible even at low temperatures or in an atmosphere with a high dew point, and there is little variation in the strength and dimensions of the sintered body, and therefore the powder can be suitably used as a raw material powder for powder metallurgy applications or as a raw material powder for conductive paste materials.
Therefore, the present invention has high industrial applicability.

Claims (8)

銀系金属粉末であって、前記銀系金属粉末が含有する600℃以下の温度域における酸化物の標準生成自由エネルギーが前記温度域における二酸化ケイ素の標準生成自由エネルギー以下であり、かつ、銀との混合エンタルピーがアルミニウム以下である不純物元素の総含有量が500ppm以下である銀系金属粉末。 A silver-based metal powder, the standard free energy of formation of oxides contained in the silver-based metal powder in a temperature range of 600°C or less is equal to or less than the standard free energy of formation of silicon dioxide in the same temperature range, and the total content of impurity elements having an enthalpy of mixing with silver equal to or less than that of aluminum is 500 ppm or less. 前記不純物元素である希土類元素を合計した含有量が100ppm以下である請求項1に記載の銀系金属粉末。 The silver-based metal powder according to claim 1, in which the total content of the impurity elements, rare earth elements, is 100 ppm or less. 前記不純物元素であるリチウムの含有量が100ppm以下である請求項1記載の銀系金属粉末。 The silver-based metal powder according to claim 1, wherein the content of the impurity element lithium is 100 ppm or less. 前記不純物元素であるカルシウム及び/又はマグネシウムを合計した含有量が300ppm以下である請求項1に記載の銀系金属粉末。 The silver-based metal powder according to claim 1, in which the total content of the impurity elements calcium and/or magnesium is 300 ppm or less. 前記不純物元素であるジルコニウムの含有量が300ppm以下である請求項1記載の銀系金属粉末。 The silver-based metal powder according to claim 1, wherein the content of the impurity element zirconium is 300 ppm or less. 前記不純物元素であるケイ素の含有量が300ppm以下である請求項1記載の銀系金属粉末。 The silver-based metal powder according to claim 1, wherein the content of the impurity element silicon is 300 ppm or less. 前記不純物元素であるアルミニウムの含有量が300ppm以下である請求項1記載の銀系金属粉末。 The silver-based metal powder according to claim 1, wherein the content of the impurity element aluminum is 300 ppm or less. アトマイズ法によって製造する請求項1乃至7記載の銀系金属粉末の製造方法。 A method for producing silver-based metal powder according to claims 1 to 7, which is produced by an atomization method.
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