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WO2020110711A1 - Système d'inspection, procédé d'inspection et programme - Google Patents

Système d'inspection, procédé d'inspection et programme Download PDF

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Publication number
WO2020110711A1
WO2020110711A1 PCT/JP2019/044387 JP2019044387W WO2020110711A1 WO 2020110711 A1 WO2020110711 A1 WO 2020110711A1 JP 2019044387 W JP2019044387 W JP 2019044387W WO 2020110711 A1 WO2020110711 A1 WO 2020110711A1
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WO
WIPO (PCT)
Prior art keywords
inspection
image
unit
focus
evaluation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2019/044387
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English (en)
Japanese (ja)
Inventor
佑二 山内
加藤　豊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Publication of WO2020110711A1 publication Critical patent/WO2020110711A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
    • G03B13/32—Means for focusing
    • G03B13/34—Power focusing
    • G03B13/36—Autofocus systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules

Definitions

  • This technology relates to inspection systems, inspection methods, and programs.
  • Patent Document 1 discloses a focus adjustment device having an autofocus function for searching a focus position of a focus lens based on a contrast evaluation value of a subject image. Further, Patent Document 1 discloses that such a focus adjustment device is applied to an industrial device for inspection.
  • an image focused on the inspection target part of the object When performing an inspection using the captured image, it is necessary to obtain an image focused on the inspection target part of the object.
  • an image focused on a portion different from the inspection target portion of the target object may be obtained depending on the state of the target object.
  • the focus may be deviated from the inspection target portion of the object due to individual differences in the size of the object.
  • the focus may deviate from the inspection target portion of the object depending on the state of the transfer device that transfers the object. In such a case, since the image is focused on a portion different from the inspection target portion even though the object is defective, the defect at the inspection target portion cannot be recognized and the defect is overlooked.
  • the present invention has been made in view of the above problems, and an object thereof is to provide an inspection system, an inspection method, and a program that can reduce the risk of overlooking a defect in an object.
  • an inspection system includes an optical system having a variable focus position, an image sensor that generates an image by receiving light from an object via the optical system, and a focus that adjusts the focus position.
  • An adjustment unit, an inspection unit, and an evaluation unit are provided.
  • the inspection unit inspects the target object based on the first region in the inspection image generated when the focus position is adjusted by the focus adjustment unit, and outputs the inspection result.
  • the evaluation unit evaluates the reliability of focusing of the target object on the inspection target portion based on the second region of the inspection image, and outputs the evaluation result.
  • the reliability of focusing on the inspection target portion is evaluated based on the second area different from the first area. Therefore, for example, even when the contrast of the first region to be inspected is low, the reliability of focusing on the inspection target portion can be evaluated based on the second region different from the first region. Then, based on the evaluation result, it can be recognized that the inspection cannot be performed accurately due to the shift of the focus position. As a result, it is possible to reduce the risk of missing a defective target object as a non-defective product by an inspection based on an image focused on a position different from the inspection target position.
  • the inspection system uses the relative position of the first area and the second area with respect to the inspection image based on the deviation of the position and orientation of the object in the inspection image with respect to the position and orientation of the object in the reference image generated in advance.
  • a correction unit that corrects the position and orientation is further provided.
  • the inspection system determines that the object is a non-defective item when the inspection result satisfies the predetermined first standard and the evaluation result satisfies the predetermined second standard. Is further provided.
  • the correction unit obtains the deviation based on the correlation value obtained by the correlation calculation between the reference image and the inspection image.
  • the inspection system when the inspection result further satisfies a predetermined first criterion, the evaluation result satisfies a predetermined second criterion, and the correlation value satisfies a predetermined third criterion. Further, a determination unit that determines that the object is a non-defective item is further provided.
  • the evaluation result includes the evaluation value calculated based on the focus degree in the second area of the inspection image.
  • the degree of focus can be easily recognized by checking the evaluation value.
  • the inspection system further includes a search unit that searches for a focus position that is a focus position that focuses on the object.
  • the inspection image is generated when the focus position is adjusted to the in-focus position by the focus adjustment unit. Accordingly, by confirming the evaluation result, it is possible to recognize that the inspection cannot be performed accurately because the search for the in-focus position by the search unit is not performed properly.
  • an optical system having a variable focus position, an imaging element that generates an image by receiving light from an object via the optical system, and a focus adjustment unit that adjusts the focus position.
  • the inspection method in the inspection system includes a step of inspecting an object based on a first region of an inspection image generated when the focus position is adjusted by the focus adjustment unit, and outputting an inspection result; Based on the second region of the above, the step of evaluating the reliability of focusing of the object with respect to the inspection target portion, and outputting the evaluation result.
  • a program is a program for causing a computer to execute the above inspection method.
  • FIG. 3 is a block diagram showing an example of a hardware configuration of an image processing apparatus according to an embodiment.
  • FIG. It is a figure showing an example of functional composition of an image processing device. It is the figure which showed typically the imaging of the work W by an imaging device. It is a figure which shows an example of the setting screen of an inspection area
  • FIG. 6 is a flowchart showing an example of the flow of an inspection process of the inspection system according to the embodiment. It is a schematic diagram which shows the inspection system which concerns on the modification 1. It is a figure which shows an example of the setting screen of an inspection area
  • 9 is a flowchart showing the flow of inspection processing of the inspection system according to Modification 1.
  • 13 is a flowchart showing the flow of inspection processing of the inspection system according to Modification 3.
  • FIG. 1 is a schematic diagram showing one application example of the inspection system according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of an internal configuration of an image pickup apparatus included in the inspection system.
  • the inspection system 1 is realized as, for example, an appearance inspection system.
  • the inspection system 1 images an inspection target portion on an object (work W) placed on the stage 90 in, for example, a production line of an industrial product, and uses the obtained image to inspect the appearance of the work W. I do.
  • the work W is inspected for scratches, dirt, presence of foreign matter, dimensions, and the like.
  • the next work (not shown) is transported onto the stage 90.
  • the work W may stand still at a predetermined position on the stage 90 in a predetermined posture.
  • the work W may be imaged while the work W moves on the stage 90.
  • the inspection system 1 includes an imaging device 10 and an image processing device 20 as basic components.
  • the inspection system 1 further includes a PLC (Programmable Logic Controller) 30, an input device 40, and a display device 50.
  • PLC Programmable Logic Controller
  • the imaging device 10 is connected to the image processing device 20.
  • the imaging device 10 images a subject (workpiece W) existing in the imaging field of view according to a command from the image processing device 20, and generates image data including an image of the workpiece W.
  • the imaging device 10 and the image processing device 20 may be integrated.
  • the imaging device 10 includes an illumination unit 11, a lens module 12, an imaging device 13, an imaging device control unit 14, a lens control unit 16, registers 15 and 17, and a communication I/I. And an F (interface) unit 18.
  • the illumination unit 11 irradiates the work W with light.
  • the light emitted from the illumination unit 11 is reflected on the surface of the work W and enters the lens module 12.
  • the illumination unit 11 may be omitted.
  • the lens module 12 is an optical system for forming an image of the light from the work W on the image pickup surface 13a of the image pickup device 13.
  • the focus position of the lens module 12 is variable within a predetermined movable range.
  • the focal position is the position of a point where an incident light ray parallel to the optical axis intersects the optical axis.
  • the lens module 12 includes a lens 12a, a lens group 12b, a lens 12c, a movable portion 12d, and a focus adjusting portion 12e.
  • the lens 12a is a lens for changing the focal position of the lens module 12.
  • the focus adjustment unit 12e controls the lens 12a to adjust the focus position of the lens module 12.
  • the lens group 12b is a lens group for changing the focal length.
  • the zoom magnification is controlled by changing the focal length.
  • the lens group 12b is installed in the movable portion 12d and is movable along the optical axis direction.
  • the lens 12c is a lens fixed at a predetermined position in the image pickup apparatus 10.
  • the lens control unit 16 controls the focus adjustment unit 12e so that the focus position is in accordance with the instruction stored in the register 17.
  • the lens control unit 16 may adjust the position of the lens group 12b by controlling the movable unit 12d so that the size of the region included in the imaging field of view of the work W is substantially constant. In other words, the lens control unit 16 can control the movable unit 12d so that the size of the region of the work W included in the imaging visual field falls within a predetermined range.
  • the lens control unit 16 may adjust the position of the lens group 12b according to the distance between the imaging position and the work W. In this embodiment, zoom adjustment is not essential.
  • the image sensor 13 is a photoelectric conversion element such as a CMOS (Complementary Metal Oxide Semiconductor) image sensor, and generates an image signal by receiving light from the work W via the lens module 12.
  • CMOS Complementary Metal Oxide Semiconductor
  • the image sensor control unit 14 generates image data based on the image signal from the image sensor 13 when the focus position is adjusted by the focus adjustment unit 12e. At this time, the image sensor control unit 14 opens and closes the shutter so that the shutter speed (exposure time) is set in advance, and generates image data of the preset resolution. Information indicating the shutter speed and the resolution is stored in the register 15 in advance.
  • the communication I/F unit 18 sends and receives data to and from the image processing device 20.
  • the communication I/F unit 18 receives an imaging instruction from the image processing device 20.
  • the communication I/F unit 18 transmits the image data generated by the image sensor control unit 14 to the image processing device 20.
  • the PLC 30 is connected to the image processing device 20 and controls the image processing device 20.
  • the PLC 30 controls the timing for the image processing apparatus 20 to output an image capturing command (image capturing trigger) to the image capturing apparatus 10.
  • the input device 40 and the display device 50 are connected to the image processing device 20.
  • the input device 40 receives user's inputs regarding various settings of the inspection system 1.
  • the display device 50 displays information regarding the setting of the inspection system 1, the result of the image processing of the work W by the image processing device 20, and the like.
  • the image processing device 20 performs image processing on the image captured by the imaging device 10.
  • the image processing device 20 includes a setting unit 22, an inspection unit 25, and an evaluation unit 26.
  • the setting unit 22 sets the first area and the second area in the image indicated by the image data acquired from the image pickup apparatus 10 according to the input to the input apparatus 40.
  • the first area is an area to be inspected by the inspection unit 25 (hereinafter, referred to as “inspection area”).
  • the second area is an area (hereinafter, referred to as “reliability evaluation area”) used when evaluating the reliability of focus of the work W on the inspection target portion.
  • the inspection area is set according to the inspection target part. For example, when the work W is a glass substrate and it is desired to inspect for scratches near the center of the upper surface of the glass substrate, an area including the vicinity of the center of the upper surface is set as the inspection area.
  • the reliability evaluation area is used to evaluate the focus of the inspection target portion of the work W, an area having the same height as the inspection area of the inspection target portion of the work W and a high contrast is set. ..
  • the inspection unit 25 inspects the work W based on the inspection area in the inspection image indicated by the inspection image data received from the imaging device 10, and outputs the inspection result. Specifically, the inspection unit 25 inspects the work W by performing a process according to a pre-registered inspection program on the inspection area. The inspection unit 25 may perform the inspection using a known technique. When the inspection item is the presence/absence of scratches, the inspection result indicates “with scratches” or “without scratches”. When the inspection item is a dimension, the inspection result indicates whether or not the measured value of the dimension is within a predetermined range.
  • the evaluation unit 26 evaluates the reliability of focusing on the inspection target portion of the work W based on the reliability evaluation area in the inspection image represented by the inspection image data, and outputs the evaluation result. Specifically, the evaluation unit 26 evaluates the reliability of focusing on the inspection target portion of the work W by performing processing according to the evaluation program registered in advance on the reliability evaluation area. The evaluation unit 26 calculates, for example, an evaluation value that increases as the reliability increases, and outputs an evaluation result including the evaluation value.
  • the inspection system 1 includes the lens module 12 whose focal position is variable, the image sensor 13 which generates an image by receiving light from the work W via the lens module 12, and the focus.
  • a focus adjustment unit 12e for adjusting the position is provided.
  • the inspection system 1 includes an inspection unit 25 and an evaluation unit 26.
  • the inspection unit 25 inspects the work W based on the inspection region in the inspection image generated when the focus position is adjusted by the focus adjustment unit 12e, and outputs the inspection result.
  • the evaluation unit 26 evaluates the reliability of focusing on the inspection target portion of the work W based on the reliability evaluation region of the inspection image, and outputs the evaluation result.
  • the worker shifts the focus position. It is possible to recognize that the inspection cannot be performed accurately due to the fact that As a result, the worker can take appropriate measures such as reinspection of the work W.
  • FIG. 3 is a schematic diagram for explaining autofocus. To simplify the description, FIG. 3 shows only one lens of the lens module 12.
  • the distance from the principal point O of the lens module 12 to the target surface (the surface of the work W) is a
  • the distance from the principal point O of the lens module 12 to the imaging surface 13a is b
  • the lens module The distance (focal length) from the principal point O of 12 to the focal position (rear focal position) F of the lens module 12 is f.
  • the distance between the imaging surface 13a and the surface of the work W may change according to the height of the surface of the work W.
  • the focus position F of the lens module 12 is adjusted in order to obtain an image focused on the surface of the work W even when the distance between the imaging surface 13a and the surface of the work W changes.
  • the method of adjusting the focal position F of the lens module 12 includes the following method (A) and method (B).
  • the method (A) is a method in which at least one lens (for example, the lens 12a) forming the lens module 12 is translated in the optical axis direction.
  • the focal point F changes while the principal point O of the lens module 12 moves in the optical axis direction.
  • the distance b changes.
  • An image focused on the surface of the work W is obtained at the focal position F corresponding to the distance b satisfying the expression (1).
  • Method (B) is a method of changing the refraction direction of the lens 12a fixed at a fixed position. According to the method (B), the focal position F changes as the focal length f of the lens module 12 changes. An image focused on the surface of the work W is obtained at the focal position F corresponding to the focal length f that satisfies Expression (1).
  • the configuration of the lens 12a for changing the focal position F of the lens module 12 is not particularly limited. Below, the example of a structure of the lens 12a is demonstrated.
  • FIG. 4 is a diagram showing an example of a lens module whose focal position is variable.
  • the lens 12a forming the lens module 12 is moved in parallel.
  • at least one lens at least one of the lens 12a, the lens group 12b, and the lens 12c that configures the lens module 12 may be translated.
  • the focal position F of the lens module 12 changes according to the above method (A). That is, in the configuration shown in FIG. 4, the focus adjustment unit 12e moves the lens 12a along the optical axis direction. By moving the position of the lens 12a, the focus position F of the lens module 12 changes.
  • the focus adjusting lens is often composed of a plurality of lens groups.
  • the focus position F of the lens module 12 can be changed by controlling the movement amount of at least one lens forming the combined lens.
  • FIG. 5 is a diagram showing another example of a lens module whose focal position is variable.
  • the focal position F of the lens module 12 changes according to the above method (B).
  • the lens 12a shown in FIG. 5 is a liquid lens.
  • the lens 12a includes a translucent container 70, electrodes 73a, 73b, 74a, 74b, insulators 75a, 75b, and insulating layers 76a, 76b.
  • the conductive liquid 71 and the insulating liquid 72 are not mixed and have different refractive indexes.
  • the electrodes 73a and 73b are fixed between the insulators 75a and 75b and the translucent container 70, respectively, and are located in the conductive liquid 71.
  • the electrodes 74a and 74b are arranged near the ends of the interface between the conductive liquid 71 and the insulating liquid 72.
  • An insulating layer 76a is interposed between the electrode 74a and the conductive liquid 71 and the insulating liquid 72.
  • An insulating layer 76b is interposed between the electrode 74b and the conductive liquid 71 and the insulating liquid 72.
  • the electrodes 74a and 74b are arranged at positions symmetrical with respect to the optical axis of the lens 12a.
  • the focus adjustment unit 12e includes a voltage source 12e1 and a voltage source 12e2.
  • the voltage source 12e1 applies the voltage Va between the electrode 74a and the electrode 73a.
  • the voltage source 12e2 applies the voltage Vb between the electrode 74b and the electrode 73b.
  • the conductive liquid 71 is pulled by the electrode 74a.
  • the conductive liquid 71 is pulled by the electrode 74b.
  • the curvature of the interface between the conductive liquid 71 and the insulating liquid 72 changes. Since the conductive liquid 71 and the insulating liquid 72 have different refractive indexes, the focus position F of the lens module 12 changes as the curvature of the interface between the conductive liquid 71 and the insulating liquid 72 changes.
  • the curvature of the interface between the conductive liquid 71 and the insulating liquid 72 depends on the magnitude of the voltages Va and Vb. Therefore, the search unit 24 changes the focus position F of the lens module 12 by controlling the magnitudes of the voltages Va and Vb.
  • the voltage Va and the voltage Vb are controlled to the same value.
  • the interface between the conductive liquid 71 and the insulating liquid 72 changes symmetrically with respect to the optical axis.
  • the voltage Va and the voltage Vb may be controlled to different values.
  • the interface between the conductive liquid 71 and the insulating liquid 72 becomes asymmetric with respect to the optical axis, and the orientation of the imaging visual field of the imaging device 10 can be changed.
  • a liquid lens and a solid lens may be combined.
  • the focus position F of the lens module 12 is changed by using both the method (A) and the method (B) described above.
  • FIG. 6 is a block diagram showing an example of the hardware configuration of the image processing apparatus according to the embodiment.
  • the image processing apparatus 20 of the example illustrated in FIG. 6 includes a CPU (Central Processing Unit) 210 that is an arithmetic processing unit, a main memory 232 and a hard disk 234 that are storage units, a camera interface 216, an input interface 218, and a display controller. 220, PLC interface 222, communication interface 224, and data reader/writer 226. These units are connected to each other via a bus 228 so that they can communicate with each other.
  • a CPU Central Processing Unit
  • the CPU 210 expands the program (code) stored in the hard disk 234 into the main memory 232 and executes these in a predetermined order to perform various calculations.
  • the control program 236 includes an inspection program for inspecting the work W based on the inspection image and an evaluation program for evaluating the reliability of focusing on the work W.
  • the main memory 232 is typically a volatile storage device such as a DRAM (Dynamic Random Access Memory), and in addition to the program read from the hard disk 234, image data and work acquired by the imaging device 10 Holds data etc. Further, the hard disk 234 may store various setting values and the like. In addition to the hard disk 234 or in place of the hard disk 234, a semiconductor storage device such as a flash memory may be adopted.
  • a volatile storage device such as a DRAM (Dynamic Random Access Memory)
  • a semiconductor storage device such as a flash memory
  • the camera interface 216 mediates data transmission between the CPU 210 and the imaging device 10. That is, the camera interface 216 is connected to the imaging device 10 for imaging the work W and generating image data. More specifically, the camera interface 216 includes an image buffer 216a for temporarily storing image data from the image pickup apparatus 10. Then, when the image data of a predetermined number of frames is accumulated in the image buffer 216a, the camera interface 216 transfers the accumulated data to the main memory 232. The camera interface 216 also sends an image pickup command to the image pickup apparatus 10 in accordance with an internal command generated by the CPU 210.
  • the input interface 218 mediates data transmission between the CPU 210 and the input device 40. That is, the input interface 218 receives an operation command given by the operator operating the input device 40.
  • the display controller 220 is connected to the display device 50 and notifies the user of the result of processing in the CPU 210. That is, the display controller 220 controls the screen of the display device 50.
  • the PLC interface 222 mediates data transmission between the CPU 210 and the PLC 30. More specifically, the PLC interface 222 transmits the control command from the PLC 30 to the CPU 210.
  • the communication interface 224 mediates data transmission between the CPU 210 and the console (or personal computer or server device).
  • the communication interface 224 is typically composed of Ethernet (registered trademark) or USB (Universal Serial Bus).
  • Ethernet registered trademark
  • USB Universal Serial Bus
  • the data reader/writer 226 mediates data transmission between the CPU 210 and the memory card 206 which is a recording medium. That is, the memory card 206 circulates in a state in which a program executed by the image processing apparatus 20 is stored, and the data reader/writer 226 reads the program from the memory card 206. In addition, the data reader/writer 226 writes the image data acquired by the imaging device 10 and/or the processing result in the image processing device 20 to the memory card 206 in response to the internal command of the CPU 210.
  • the memory card 206 is a general-purpose semiconductor storage device such as SD (Secure Digital), a magnetic storage medium such as a flexible disk (Flexible Disk), or an optical storage medium such as a CD-ROM (Compact Disk Read Only Memory). Etc.
  • FIG. 7 is a diagram illustrating an example of the functional configuration of the image processing apparatus.
  • the image processing device 20 includes a command generation unit 21, a setting unit 22, a calculation unit 23, a search unit 24, an inspection unit 25, an evaluation unit 26, a determination unit 27,
  • the output unit 28 and the storage unit 230 are included.
  • the command generation unit 21, the setting unit 22, the calculation unit 23, the search unit 24, the inspection unit 25, the evaluation unit 26, and the determination unit 27 are realized by the CPU 210 shown in FIG. 6 executing the control program 236.
  • the storage unit 230 includes a main memory 232 and a hard disk 234 shown in FIG.
  • the output unit 28 is configured by the display controller 220 shown in FIG.
  • the command generation unit 21 receives a control command from the PLC 30 and outputs an imaging command (imaging trigger) to the imaging device 10.
  • the outline of the setting unit 22 is as described above.
  • the calculation unit 23 calculates the degree of focus from the image data generated by the imaging device 10.
  • the focus degree is a degree indicating how much the object is in focus, and is calculated using various known methods.
  • the calculation unit 23 extracts a high frequency component by applying a high pass filter to the image data, and calculates an integrated value of the extracted high frequency components as a focus degree.
  • Such a focus degree indicates a value that depends on the difference in brightness of the image.
  • the search unit 24 searches for a focus position which is a focus position where the work W is focused. Specifically, the search unit 24 acquires, from the calculation unit 23, the focus degree of each of the plurality of image data generated by changing the focal position of the lens module 12. The search unit 24 determines the focus position at which the acquired degree of focus reaches a peak as the focus position. The search unit 24 specifies the image data when the focal position of the lens module 12 is the in-focus position as the inspection image data. That is, the inspection image data is image data generated when the focus position is adjusted to the in-focus position by the focus adjustment unit 12e.
  • the hill climbing method is a focus at which the focus is maximized while changing the focus position of the lens module 12 within the set search range and ending the search when the focus position at which the focus is maximized is found.
  • This is a method of determining the position as the in-focus position.
  • the hill-climbing method is based on the magnitude relationship between the focus degree at the focus position at the start of the search and the focus degree at the adjacent focus position, and the direction of the focus position at which the focus degree increases becomes the search direction. decide.
  • the hill climbing method sequentially calculates the difference between the focus degree at the previous focus position and the focus degree at the next focus position while changing the focus position in the search direction. The focus position at the time of negative change is determined as the focus position.
  • the search unit 24 may specify the image data having the maximum focus degree as the inspection image data.
  • the all-scan method is to change the focal position of the lens module 12 over the entire set search range, obtain the in-focus degree at each in-focus position, and set the in-focus position to be the in-focus position with the maximum in-focus degree. It is a way to decide.
  • the full scan method also includes a method of performing a coarse second search process and then a fine second search process.
  • the first search process is a process of changing the focus position at a coarse pitch interval over the entire search range to search for the focus position having the maximum focus degree.
  • the second search process is a process of changing the focus position at fine pitch intervals in the entire local range including the focus position searched in the first search process, and searching the focus position with the maximum focus degree as the focus position. Is.
  • the search unit 24 stores the image data of each focus position, and specifies the image data of the focus position having the maximum focus degree as the inspection image data from the stored image data. To do.
  • the search unit 24 instructs the command generation unit 21 to output a command for adjusting the focus position to the in-focus position and outputting an image, and the image data received from the imaging device 10 according to the command is the inspection image data. May be specified as
  • the outline of the inspection unit 25 and the evaluation unit 26 is as described above. That is, the inspection unit 25 inspects the work W based on the inspection area in the inspection image indicated by the inspection image data specified by the search unit 24, and outputs the inspection result.
  • the evaluation unit 26 evaluates the reliability of focusing on the inspection target portion of the work W based on the reliability evaluation region of the inspection image indicated by the inspection image data specified by the search unit 24, and displays the evaluation result. Output.
  • the determination unit 27 makes a comprehensive determination of the work W based on the inspection result output from the inspection unit 25 and the evaluation result output from the evaluation unit 26.
  • the determination unit 27 determines whether the inspection result output from the inspection unit 25 satisfies a predetermined first criterion and the evaluation result output from the evaluation unit 26 satisfies a predetermined second criterion. It is determined that W is a good product.
  • the determination unit 27 determines that the work W is a defective product when the inspection result does not satisfy the first standard and the evaluation result satisfies the second standard. Further, when the evaluation result does not satisfy the second criterion, the determination unit 27 determines that the automatic adjustment of the focus position has a problem and the inspection cannot be performed accurately.
  • the output unit 28 outputs the determination result of the determination unit 27.
  • the output unit 28 causes the display device 50 to display the determination result.
  • the output unit 28 may also display the inspection result and the evaluation result on the display device 50.
  • the storage unit 230 stores various data, programs and the like.
  • the storage unit 230 stores the image data acquired from the imaging device 10 and the image data that has been subjected to predetermined processing.
  • the storage unit 230 may store the inspection result by the inspection unit 25, the evaluation result by the evaluation unit 26, and the determination result by the determination unit 27.
  • the storage unit 230 stores a program for causing the image processing apparatus 20 to execute various types of processing.
  • FIG. 8 is a diagram schematically showing the image pickup of the work W by the image pickup apparatus.
  • the work W has a region W1 and a region W2.
  • the region W1 is, for example, the surface of a transparent body (glass or the like).
  • the region W2 is a region surrounding the region W1 and is, for example, the surface of the housing of the electronic device.
  • an electronic device having a display a smartphone or a tablet in one example
  • the area W1 can be a display screen.
  • the region W1 does not have a clear pattern. That is, the area W1 is a plain area.
  • the inspection area A1 is set in the area W1.
  • An area including the inspection area A1 is imaged by the imaging device 10, and the image of the inspection area A1 is a target of image processing by the image processing apparatus 20.
  • the image processing apparatus 20 uses the image of the inspection area A1 to inspect whether the inspection area A1 has scratches, dirt, or foreign matter.
  • the setting unit 22 of the image processing apparatus 20 sets the inspection area and the reliability evaluation area in advance for the work W.
  • the worker places the reference work W0 at a predetermined position on the stage 90 (see FIG. 1) in a predetermined posture.
  • the image processing device 20 outputs an imaging command to the imaging device 10 and acquires reference image data from the imaging device 10.
  • the reference image data indicates a reference image including the reference work W0 placed at a predetermined position in a predetermined posture.
  • the setting unit 22 of the image processing device 20 causes the display device 50 to display the reference image represented by the reference image data acquired from the imaging device 10, and prompts the operator to specify the inspection region and the reliability evaluation region.
  • FIG. 9 is a diagram showing an example of a setting screen for the inspection area and the reliability evaluation area.
  • the setting unit 22 causes the screen of the display device 50 to display the reference image 80 indicated by the reference image data acquired from the imaging device 10.
  • the setting unit 22 sets the inspection area A1 and the reliability evaluation area B1 according to the input to the input device 40.
  • the worker inputs four vertices of the inspection area A1 and the reliability evaluation area B1 which are rectangular.
  • the operator designates a region having the same height as the inspection region A1 of the reference work W0 and including a high contrast as the reliability evaluation region B1.
  • a region including the edge portion of the reference work W0 is designated as the reliability evaluation region B1.
  • the high-contrast portion includes, in addition to the edge portion, a character printed on the surface, a pattern formed on the surface, a portion to which parts such as screws are attached, and the like.
  • a rectangular inspection area A1 and a reliability evaluation area B1 are set, but the shape of each area is not limited to this.
  • the shape of at least one of the inspection area A1 and the reliability evaluation area B1 may be circular or any free shape capable of forming an area.
  • at least one of the inspection area A1 and the reliability evaluation area B1 does not have to be limited to a single area.
  • at least one of the inspection area A1 and the reliability evaluation area B1 may be a plurality of areas that exist in a distributed manner.
  • FIG. 10 is a diagram showing another example of a setting screen for the inspection area and the reliability evaluation area.
  • a frame-shaped reliability evaluation area B1 is set along the edge portion of the reference work W0.
  • the setting unit 22 generates information for identifying each of the set inspection area A1 and reliability evaluation area B1, and stores the generated information in the storage unit 230.
  • the evaluation unit 26 calculates an evaluation value indicating the reliability of the focus on the inspection target portion of the work W based on the focus degree of the reliability evaluation area B1 in the inspection image represented by the inspection image data.
  • the focus degree is, for example, an integrated value of high frequency components extracted from the image of the reliability evaluation area B1.
  • the reference focus degree is, for example, the focus degree calculated from the reliability evaluation area B1 in the image focused on the inspection target portion of the reference work W0, and is calculated in advance by an experiment.
  • the evaluation unit 26 causes the in-focus level g and the second in-focus level g of the first peak of the in-focus level waveform obtained in the in-focus position search process.
  • the focus degree waveform is a waveform showing a change in the focus degree with respect to the focus position when the focus position of the lens module 12 is changed.
  • the first peak is the peak with the highest degree of focus.
  • the second peak is the peak having the second highest focus degree.
  • FIG. 11 is a diagram showing an example of the focus degree waveform.
  • the focus degree waveform of the example shown in FIG. 11 includes two peaks at focus positions F1 and F2.
  • the focus position F1 is the focus position when focusing on the inspection target portion of the work W. Therefore, when the autofocus process is normally performed, the focus degree waveform includes only one peak at the focus position F1. However, for some reason, a peak may occur at a focus position different from the focus position F1. For example, when a sheet on which a high-contrast pattern is formed is reflected in the inspection image, a peak occurs at a focus position different from the focus position F1.
  • the focus position F2 different from the focus position F1 is erroneously determined as the focus position, and the image data when adjusted to the focus position F2 is the inspection image data.
  • an evaluation value that increases as the reliability of focusing of the inspection target portion of the work W increases.
  • the evaluation unit 26 may calculate an evaluation value that becomes smaller as the reliability of focusing of the inspection target portion of the work W becomes higher.
  • the evaluation unit 26 may calculate the evaluation value using a known technique.
  • the evaluation unit 26 uses the technology described in International Publication No. 2017/056557 (Patent Document 2), JP 2010-78681 A (Patent Document 3), and JP 10-170817 A (Patent Document 4). You may use and calculate an evaluation value.
  • the determination unit 27 of the image processing apparatus 20 determines that the inspection result satisfies the predetermined first criterion and the evaluation result output from the evaluation unit 26 satisfies the predetermined second criterion.
  • the work W is a good product.
  • the first standard indicates that the inspection result is “no damage”.
  • the inspection item is a dimension
  • the first standard indicates that the measured value of the dimension is within a predetermined range.
  • the evaluation result includes an evaluation value that increases as the reliability of focusing on the inspection target portion of the work W increases
  • the second criterion indicates that the evaluation value exceeds a predetermined threshold value.
  • the first standard and the second standard are created in advance and stored in the storage unit 230.
  • the determination unit 27 reads the first criterion and the second criterion from the storage unit 230 and makes a comprehensive determination.
  • FIG. 12 is a flowchart showing an example of the flow of the inspection process of the inspection system according to the embodiment.
  • the setting unit 22 of the image processing apparatus 20 sets the inspection area A1 and the reliability evaluation area B1 using the image data including the reference work W0.
  • the inspection process shown in FIG. 12 is executed.
  • the work W is placed on the stage 90 at a predetermined position in a predetermined posture by the transfer device.
  • step S1 the imaging device 10 and the image processing device 20 execute a focus position search process (step S1).
  • step S1 the lens control unit 16 of the imaging device 10 changes the focal position of the lens module 12 within the search range.
  • the calculation unit 23 of the image processing apparatus 20 calculates the focus degree of the entire area for each of the plurality of image data generated by changing the focus position.
  • the search unit 24 of the image processing device 20 searches for a focus position at which the calculated focus degree has a peak as the focus position.
  • the search unit 24 identifies the image data when the focus position of the lens module 12 is adjusted to the in-focus position as inspection image data (step S2).
  • the inspection unit 25 of the image processing apparatus 20 inspects the work W based on the inspection area A1 in the inspection image indicated by the inspection image data, and outputs the inspection result (step S3).
  • the evaluation unit 26 of the image processing apparatus 20 calculates an evaluation value indicating the reliability of focus of the work W on the inspection target portion based on the reliability evaluation area B1 in the inspection image, and the calculated evaluation value.
  • the evaluation result including is output (step S4).
  • the processing order of step S3 and step S4 is not limited to this, and step S3 may be executed after step S4, or step S3 and step S4 may be executed in parallel.
  • the determination unit 27 of the image processing apparatus 20 makes a comprehensive determination based on the inspection result and the evaluation result (step S5). After that, the output unit 28 displays the determination result on the display device 50 (step S6). After step S6, the inspection process ends.
  • the determination result may be output to the PLC 30 other than the display device 50 and used for controlling other devices.
  • the transport device (not shown) transports the work W on the transport path for transporting the work W to the next process.
  • the transport device transports the work W to the defective product storage space.
  • the transfer device transfers the work W to the re-inspection product storage area.
  • the workpiece W to be inspected is assumed to be placed in a predetermined posture on the stage 90 by a transfer device (not shown).
  • the image processing device of the inspection system according to the first modification uses the inspection area A1 for the inspection image and the reliability evaluation based on the deviation of the position and orientation of the work W in the inspection image with respect to the position and orientation of the reference work in the reference image.
  • the relative position and orientation of the area B1 is corrected. As a result, even if the position and orientation of the work W included in the inspection image changes, it is possible to suppress deterioration of inspection accuracy and reliability evaluation accuracy.
  • FIG. 13 is a schematic diagram showing an inspection system according to Modification 1.
  • the inspection system 1A according to Modification 1 is different from the inspection system 1 shown in FIG. 1 in that an image processing apparatus 20A is provided instead of the image processing apparatus 20.
  • the image processing apparatus 20A is different from the image processing apparatus 20 shown in FIG. 1 in that it includes a setting unit 22A instead of the setting unit 22 and further includes a correction unit 29.
  • the setting unit 22A sets the inspection area A1 and the reliability evaluation area B1 from the reference image. Further, the setting unit 22A sets a model area from the reference image.
  • the model area is an area including a characteristic portion of the reference work W0 placed in a predetermined posture at a predetermined position.
  • the characteristic portion is a portion capable of specifying the position and orientation of the reference work W0.
  • FIG. 14 is a diagram showing an example of a setting screen for the inspection area, the reliability evaluation area, and the model area.
  • regions including two non-adjacent corners of the four corners of the rectangular reference work W0 in plan view are set as model regions C1 and C2.
  • the setting unit 22A stores in the storage unit 230 each image of the set model regions C1 and C2 and information indicating the position and orientation of the model regions C1 and C2 in the reference image.
  • FIG. 15 is a diagram illustrating the processing of the correction unit.
  • the correction unit 29 searches the inspection image 81 for the same partial image as the images of the model regions C1 and C2 in the reference image 80 using a known template matching method.
  • the correction unit 29 reads the images of the model areas C1 and C2 as the first and second template images from the storage unit 230, respectively.
  • the correction unit 29 searches the inspection image 81 for the first partial image D1 having the same pattern as the first template image corresponding to the model region C1, and at the same time, the second portion having the same pattern as the second template image corresponding to the model region C2.
  • the image D2 is searched from the inspection image 81.
  • the correction unit 29 performs the correlation calculation between the first template image and the inspection image 81 while changing the position and orientation of the first template image, and the first template having the highest degree of similarity indicated by the correlation value. Search the position and orientation of the image. Then, the correction unit 29 specifies the image of the region overlapping the first template image of the searched position and orientation as the first partial image D1. Similarly, by the method, the correction unit 29 identifies the image of the region overlapping the second template image of the position and orientation having the highest degree of similarity indicated by the correlation value as the second partial image D2.
  • the correction unit 29 may search for the position and orientation of the template image having the minimum correlation value.
  • the correction unit 29 may search the position and orientation of the template image whose correlation value is closest to 1.
  • the correction unit 29 compares the position and orientation of the searched partial images D1 and D2 with the position and orientation of the model areas C1 and C2, respectively, to determine the position and orientation of the reference work W0 in the reference image 80 (hereinafter, referred to as “reference position”).
  • the deviation of the position/orientation of the work W in the inspection image 81 with respect to the “orientation” is calculated (calculated).
  • the deviations indicate deviation amounts ⁇ X, ⁇ Y, and ⁇ in the X direction, the Y direction, and the rotation direction ( ⁇ direction), respectively.
  • the correction unit 29 corrects the relative position and orientation of the inspection area A1 and the reliability evaluation area B1 with respect to the inspection image 81 based on the calculated deviation. That is, the correction unit 29 corrects the position and orientation of the inspection area A1 and the reliability evaluation area B1 by the calculated deviation. Specifically, the correction unit 29 translates the inspection area A1 and the reliability evaluation area B1 by ⁇ X in the X direction and ⁇ Y in the Y direction with the inspection image 81 fixed, and ⁇ . Only rotate and move.
  • the correction unit 29 may correct the position and orientation of the inspection image 81 while fixing the inspection area A1 and the reliability evaluation area B1. In this case, the correction unit 29 may perform the reverse conversion of the position and orientation of the inspection area A1 and the reliability evaluation area B1 on the position and orientation of the inspection image 81.
  • FIG. 16 is a flowchart showing the flow of the inspection process of the inspection system according to the first modification.
  • the flowchart shown in FIG. 16 differs from the flowchart shown in FIG. 12 in that it further includes steps S11 and S12.
  • the correction unit 29 of the image processing device 20A calculates the deviation of the position and orientation of the work W in the inspection image 81 from the reference position and orientation in step S11.
  • step S12 the correction unit 29 corrects the relative position and orientation of the inspection area A1 and the reliability evaluation area B1 with respect to the inspection image 81 based on the calculated deviation. Then, the inspection of the workpiece W is executed using the corrected inspection area A1 (step S3), and the reliability evaluation is executed using the corrected reliability evaluation area B1 (step S4).
  • model areas C1 and C2 and the reliability evaluation area B1 are set separately. However, the same area as the reliability evaluation area B1 may be set as the model area. That is, the reliability evaluation area B1 may be shared as a model area.
  • the inspection system according to Modification 2 is a further modification of the inspection system according to Modification 1.
  • the determination unit 27 performs the following processing.
  • the determination unit 27 determines that the workpiece It is determined that W is a good product.
  • the correlation value calculated by the correction unit 29 does not satisfy the third criterion, the determination unit 27 determines that the work W is not normally imaged.
  • the correlation value calculated by the correction unit 29 indicates the degree of similarity between the template images of the model areas C1 and C2 and the partial images D1 and D2 searched from the inspection image.
  • the degree of similarity indicated by the correlation value is low, there is a high possibility that the work W to be inspected cannot be normally imaged for some reason. For example, the position of the work W on the stage 90 is largely deviated from the predetermined position, so that the work W is not included in the image.
  • the third criterion is, for example, a criterion that the degree of similarity indicated by the correlation value between the template images of the model areas C1 and C2 and the partial images D1 and D2 is higher than a predetermined degree of similarity. For example, when the higher the degree of similarity is, the smaller the correlation value is, the third criterion indicates that the correlation value is lower than a predetermined threshold value.
  • the second modification it is possible to further reduce the risk of overlooking a defective work W as a non-defective product even though the work W is not normally imaged.
  • the inspection system according to Modification 3 is a further modification of the inspection system according to Modification 1.
  • the autofocus process is executed using the reliability evaluation area B1 corrected by the correction unit 29.
  • FIG. 17 is a flowchart showing the flow of the inspection process of the inspection system according to the modified example 3.
  • the flowchart shown in FIG. 17 differs from the flowchart shown in FIG. 16 in that it includes steps S21 to S23 instead of steps S2, S11 and S12, and further includes steps S24 and S25.
  • step S1 the search unit 24 of the image processing apparatus 20 identifies the image data when the focus position of the lens module 12 is adjusted to the in-focus position as the correction image data in step S21.
  • the correction unit 29 calculates the deviation of the position and orientation of the work W in the correction image indicated by the correction image data from the reference position and orientation (step S22).
  • the correction unit 29 corrects the relative position and orientation of the inspection area A1 and the reliability evaluation area B1 with respect to the correction image based on the calculated deviation (step S23).
  • the correction unit 29 corrects the position and orientation of the inspection area A1 and the reliability evaluation area B1 with the correction image fixed, as in the first modification.
  • the correction unit 29 may correct the position and orientation of the correction image while the inspection area A1 and the reliability evaluation area B1 are fixed.
  • the image processing device 20 executes a focus position search process based on the corrected reliability evaluation area B1 (step S24). Specifically, the calculation unit 23 calculates the degree of focus of the reliability evaluation area B1 of each of the plurality of image data. The search unit 24 determines the focus position where the calculated focus degree is the peak, as the focus position.
  • the search unit 24 identifies the image data generated at the searched in-focus position as inspection image data (step S25). After that, the inspection of the work W is executed using the corrected inspection area A1 in the inspection image indicated by the inspection image data (step S3), and the reliability is evaluated using the corrected reliability evaluation area B1. Is executed (step S4).
  • the in-focus position searching process is executed again based on the corrected reliability evaluation area B1, and the inspection image data is generated. Therefore, it becomes easy to obtain the inspection image data focused on the inspection target portion.
  • the output unit 28 outputs the determination result by the determination unit 27.
  • the inspection system may not include the determination unit 27, and the output unit 28 may output the inspection result by the inspection unit 25 and the evaluation result by the evaluation unit 26.
  • the operator can recognize that there is some problem in the adjustment of the focal position and the inspection cannot be performed accurately by confirming the evaluation result. As a result, it is possible to reduce the risk of overlooking a defective work W as a non-defective product by an inspection based on an image focused on a position different from the inspection target part of the work W.
  • the search unit 24 searches for the in-focus position where the work W is in focus, based on a plurality of image data generated by changing the focal position of the lens module 12.
  • the imaging device 10 may include a distance measuring sensor that measures the distance to the work W, and the search unit 24 may search for the in-focus position based on the measurement result of the distance measuring sensor.
  • the distance-measuring sensor for example, emits infrared rays or ultrasonic waves toward the work W, and then is reflected by the work W and returned to the work W based on the distance a from the lens module 12 to the work W (see FIG. 3). Measurement).
  • the search unit 24 may determine the focus position F where the measured distance a satisfies the above expression (1) as the focus position. However, in this case, since a distance measuring sensor is required, the number of parts of the imaging device 10 increases. In order to suppress an increase in the number of components of the image pickup apparatus 10, it is preferable that the search unit 24 search for a focus position based on a plurality of image data generated by changing the focus position of the lens module 12.
  • the imaging device 10 changes the focus position and outputs a plurality of image data. Then, the image processing device 20 searches for a focus position at which the inspection target portion of the work W is focused from the plurality of focus positions.
  • the lens control unit 16 of the imaging device 10 may control the focal position of the lens module 12 so as to be a fixed position that is predetermined according to the type of the work W and the inspection target location. That is, the focus adjustment unit 12e adjusts the focus position of the lens module 12 to a predetermined fixed position. In this case, the image processing device 20 does not have to include the search unit 24.
  • the imaging device 10 and the work W may be different depending on the individual difference in the size of the work W or the state of the carrying device that carries the work W.
  • the distance from the inspection target varies. Therefore, it is not always possible to always obtain an inspection image focused on the inspection target portion of the work W. In such a case, it is possible to recognize that the image processing apparatus 20 includes the above-described evaluation unit 26, and that the inspection cannot be performed accurately due to the shift of the focus position.
  • (Structure 1) An optical system (12) whose focal position is variable, An image sensor (13) that generates an image by receiving light from an object (W) through the optical system (12); A focus adjustment unit (12e) for adjusting the focus position, An inspection unit (25) that inspects the object (W) based on the first region of the inspection image generated when the focus position is adjusted by the focus adjustment unit (12e) and outputs the inspection result. , 210), An inspection system (1), comprising: an evaluation unit (26, 210) that evaluates the reliability of focusing of the object with respect to the inspection object location based on the second region of the inspection image and outputs the evaluation result. , 1A).
  • (Structure 2) Based on the deviation of the position and orientation of the object (W) in the inspection image with respect to the position and orientation of the object (W) in the reference image generated in advance, the first region and the second region with respect to the inspection image.
  • a determination unit (27, 210) that determines that the object is a good product when the inspection result satisfies a predetermined first standard and the evaluation result satisfies a predetermined second standard.
  • the inspection system (1, 1A) according to Configuration 1 or 2 further provided.
  • the correction unit (29, 210) obtains the deviation based on a correlation value obtained by a correlation calculation between the reference image and the inspection image,
  • the inspection system (1A) further includes When the inspection result satisfies a predetermined first criterion, the evaluation result satisfies a predetermined second criterion, and the correlation value satisfies a predetermined third criterion, the target
  • the inspection system (1A) according to the configuration 2, further including a determination unit (27, 210) that determines that the product is non-defective.
  • the inspection system (1, 1A) according to any one of configurations 1 to 5, wherein the inspection image is generated when the focus position is adjusted to the in-focus position by the focus adjustment unit (12e).
  • (Structure 7) An optical system (12) whose focal position is variable, An image sensor (13) that generates an image by receiving light from an object (W) through the optical system (12); An inspection method in an inspection system including a focus adjustment unit (12e) for adjusting the focus position, Inspecting the object (W) based on a first region of an inspection image generated when the focus position is adjusted by the focus adjusting unit (12e), and outputting an inspection result, Based on a second region of the inspection image, evaluating the reliability of focusing of the object with respect to the inspection target portion, and outputting the evaluation result.
  • (Structure 8) An optical system (12) whose focal position is variable, An image sensor (13) that generates an image by receiving light from an object (W) through the optical system (12); A program for causing a computer to execute an inspection method in an inspection system including a focus adjustment unit (12e) for adjusting the focus position, The inspection method is Inspecting the object (W) based on a first region of an inspection image generated when the focus position is adjusted by the focus adjusting unit (12e), and outputting an inspection result, A step of evaluating the reliability of focusing of the object with respect to the inspection target portion based on the second region of the inspection image, and outputting the evaluation result.
  • 1, 1A inspection system 10 imaging device, 11 illumination unit, 12 lens module, 12a, 12c lens, 12b lens group, 12d movable part, 12e1 and 12e2 voltage source, 12e focus adjustment unit, 13 imaging device, 13a imaging surface, 14 image sensor control unit, 15, 17 register, 16 lens control unit, 18 communication I/F unit, 20, 20A image processing device, 21 command generation unit, 22, 22A setting unit, 23 calculation unit, 24 search unit, 25 Inspection unit, 26 evaluation unit, 27 judgment unit, 28 output unit, 29 correction unit, 30 PLC, 40 input device, 50 display device, 70 translucent container, 71 conductive liquid, 72 insulating liquid, 73a, 73b, 74a, 74b electrode, 75a, 75b insulator, 76a, 76b insulating layer, 80 reference image, 81 inspection image, 90 stage, 206 memory card, 216 camera interface, 216a image buffer, 218 input interface, 220 display controller, 222 PLC Interface, 224 communication interface, 226 data reader/writer, 228 bus

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Abstract

La présente invention concerne un système d'inspection comprenant : un système optique ayant un point focal variable ; un élément d'imagerie pour générer une image en raison de la réception de lumière provenant d'un objet à travers le système optique ; une unité de mise au point pour ajuster un point focal ; une unité d'inspection pour inspecter l'objet sur la base d'une première région dans une image d'inspection générée lorsqu'un point focal est ajusté par l'unité de mise au point, et fournir les résultats d'inspection ; et une unité d'évaluation pour évaluer la fiabilité de focalisation sur un site sujet à une inspection dans l'objet sur la base d'une seconde région dans l'image d'inspection, et fournir les résultats d'évaluation. En conséquence, le risque de négligence d'un défaut dans un objet peut être réduit.
PCT/JP2019/044387 2018-11-27 2019-11-12 Système d'inspection, procédé d'inspection et programme Ceased WO2020110711A1 (fr)

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WO2025253699A1 (fr) * 2024-06-04 2025-12-11 コニカミノルタ株式会社 Dispositif de réglage de zone d'inspection, procédé de réglage de zone d'inspection et programme de réglage de zone d'inspection

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JP2012202714A (ja) * 2011-03-23 2012-10-22 Bridgestone Corp 透明シート材の外観検査用治具、及びこれを用いた透明シート材の外観検査方法
WO2012144025A1 (fr) * 2011-04-20 2012-10-26 株式会社メガトレード Dispositif d'inspection automatique et procédé d'alignement pour dispositif d'inspection automatique
JP2017107201A (ja) * 2015-12-09 2017-06-15 由田新技股▲ふん▼有限公司 動的オートフォーカスシステム

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