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WO2019093773A1 - Unité de capteur de déformation et module de capteur cutané le comprenant - Google Patents

Unité de capteur de déformation et module de capteur cutané le comprenant Download PDF

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Publication number
WO2019093773A1
WO2019093773A1 PCT/KR2018/013506 KR2018013506W WO2019093773A1 WO 2019093773 A1 WO2019093773 A1 WO 2019093773A1 KR 2018013506 W KR2018013506 W KR 2018013506W WO 2019093773 A1 WO2019093773 A1 WO 2019093773A1
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WO
WIPO (PCT)
Prior art keywords
layer
substrate
piezoelectric element
skin
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2018/013506
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English (en)
Korean (ko)
Inventor
한지연
연한울
김은주
김지환
이규상
이해광
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amorepacific Corp
Massachusetts Institute of Technology
Original Assignee
Amorepacific Corp
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US15/808,416 external-priority patent/US10952642B2/en
Application filed by Amorepacific Corp, Massachusetts Institute of Technology filed Critical Amorepacific Corp
Priority to CN201880086055.5A priority Critical patent/CN111655123B/zh
Priority to EP18875671.2A priority patent/EP3708065B1/fr
Priority to JP2020525988A priority patent/JP7345761B2/ja
Publication of WO2019093773A1 publication Critical patent/WO2019093773A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons

Definitions

  • the present invention relates to a deformation sensor unit capable of monitoring physiological skin movements in real time by wearing and a skin sensor module including the deformation sensor unit.
  • the deformation sensor unit can design an interface using a free standing deformation detection structure, Skin sensor module.
  • the elastic modulus of the skin was measured using techniques such as pressure-based suction, twisting, traction, nano-indentation, and ultrasound elastography.
  • the elastic modulus was measured only by the elastic modulus, Of the respondents.
  • the skin analysis method was affected by various environmental factors such as humidity, temperature, fine dust, etc., and it was difficult to measure how fast the skin pulling rate changed There was a problem that it was difficult to accurately identify the cause.
  • a wearable sensor was also used to measure skin or dry conditions.
  • the wearable sensor is a motion detection based controller that measures or diagnoses muscle movements and heart rate and convulsions as in Patent Document 1. And the sensor structure was adjusted to measure the maximum deformation rate by site.
  • Patent Document 1 KR 10-1746492 B1
  • a wearable structure it is possible to measure in a state wearing a sensor unit or a sensor module, and to measure the deformation of the skin due to the physiological behavior of the skin without affecting the skin condition Unit and a skin sensor module including the same.
  • a strain sensor unit includes a substrate having a through hole and including a first electrode and a second electrode formed on one side and the other side of the through hole on one surface of the substrate; A piezoelectric element drawn from the first electrode and extending into the through hole; And a piezoelectric resistor which is drawn out from the second electrode and extends to the inside of the through hole to overlap with a part or all of the piezoelectric element.
  • the piezoelectric element may be a piezoelectric semiconductor.
  • the piezoelectric resistor may be a metal piezoelectric resistor based on a nano crack-control.
  • An interface layer formed of an amorphous oxide semiconductor may be further formed on a contact surface between the piezoelectric element and the piezoelectric resistor.
  • a plurality of ventilation holes of 50 to 150 ⁇ ⁇ may be formed in the substrate.
  • the distance between the plurality of vent holes may be 50 to 150 mu m.
  • the plurality of vent holes may constitute the through holes.
  • the substrate may be comprised of a material comprising polydimethylsiloxane (PDMS).
  • PDMS polydimethylsiloxane
  • a plurality of micro suction cups for adhering to the skin may be patterned on the other surface opposite to the one surface of the substrate.
  • a skin sensor module includes a substrate having a plurality of through holes formed therein and including a first electrode and a second electrode formed on one side and the other side of each through hole on one surface of the substrate; A piezoelectric element drawn from each first electrode and extending into the through hole; And a piezoelectric resistor which is drawn out from each second electrode and extends to the inside of the through hole and is formed so as to overlap with a part or all of the piezoelectric element.
  • the piezoelectric element may be a piezoelectric semiconductor.
  • the piezoelectric resistor may be a metal piezoelectric resistor based on a nano crack-control.
  • An interface layer formed of an amorphous oxide semiconductor may be further formed on a contact surface between the piezoelectric element and the piezoelectric resistor.
  • a plurality of ventilation holes of 50 to 150 ⁇ ⁇ may be formed in the substrate.
  • the distance between the plurality of vent holes may be 50 to 150 mu m.
  • All or part of the plurality of vent holes may constitute the plurality of through holes.
  • the substrate may be comprised of a material comprising polydimethylsiloxane (PDMS).
  • PDMS polydimethylsiloxane
  • a plurality of micro suction cups for adhering to the skin may be patterned on the other surface opposite to the one surface of the substrate.
  • the deformation sensor unit includes the first electrode, the second electrode, and a deformation sensing structure composed of the piezoelectric element and the piezoresistive element, which are arranged around one through hole formed on the substrate, A plurality of strain sensor units are formed on the substrate, and the plurality of strain sensor units are arranged on the substrate in a radial array structure, a linear array structure, a curved array structure, a crossed array structure, a circular array structure, a rectangular array structure, Lt; / RTI > may be arranged in one or more array structures.
  • a method of manufacturing a strain sensor unit includes: stacking a substrate layer including a piezoelectric resistor on a sacrificial layer and extending inwardly from one side of a through hole of the substrate; Attaching a piezoelectric element layer to a transfer structure and transferring the transferred layer onto a substrate layer; Separating the transfer structure; And a region which covers all or a part of the piezoelectric resistor in the piezoelectric element layer and extends to the other side of the through hole, excluding a region corresponding to the piezoelectric element, and a sacrificial layer formed on one side of the substrate, And forming a first electrode and a second electrode on one side and the other side to cover the piezoelectric element and the piezoelectric resistor, respectively.
  • the step of attaching the piezoelectric element layer to a transcription structure and transferring the transducer element onto a substrate layer includes: mounting a piezoelectric element layer on the epitaxial graphene; Mounting a stressor layer on the piezoelectric element layer; Mounting a tape layer on the stressor layer; And separating and transferring the tape layer, the stressor layer, and the piezoelectric element layer onto the substrate layer.
  • a method of manufacturing a skin sensor module including: stacking a substrate layer on a sacrificial layer, the substrate layer including a piezoelectric resistor extending inwardly from one side of each of a plurality of through holes of the substrate; Attaching a piezoelectric element layer to a transfer structure and transferring the transferred layer onto a substrate layer; Separating the transfer structure; And a region which covers all or a part of each of the piezoelectric resistors in the piezoelectric element layer and extends to the other side of the through hole so as to exclude a region corresponding to the piezoelectric element and the sacrificial layer, And forming a first electrode and a second electrode on one side and the other side of the through hole of the piezoelectric element and the piezoelectric resistor, respectively.
  • the step of attaching the piezoelectric element layer to a transcription structure and transferring the transducer element onto a substrate layer includes: mounting a piezoelectric element layer on the epitaxial graphene; Mounting a stressor layer on the piezoelectric element layer; Mounting a tape layer on the stressor layer; And separating and transferring the tape layer, the stressor layer, and the piezoelectric element layer onto the substrate layer.
  • a skin deformation sensing apparatus including: a test point formed with a plurality of through holes and a magnetic pole to be tested; a first electrode formed on one side of each through- A substrate comprising a second electrode; A piezoelectric element drawn from each first electrode and extending into the through hole; And a piezoelectric resistor extending from each of the second electrodes and extending into the through-hole, the piezoelectric resistor being formed to overlap with a part or all of the piezoelectric elements.
  • the test point may be an injection opening through which a substance to be tested is injected or an indentation point to which vibration of a predetermined size or cycle is applied.
  • the plurality of through holes may be arranged in a radiation array structure around the test point.
  • a fixing band connected to the skin sensor module so as to surround the subject's arm or leg.
  • the skin sensor module may further be connected to the skin property calculating unit, wherein the skin sensor module measures a wave characteristic according to a pressure applied to the test point, and measures a skin property derived from the wave characteristic measured by the skin property calculating unit The skin elasticity is calculated.
  • a deformation sensor unit capable of measuring deformation of the skin and a skin sensor module including the deformation sensor unit can be provided.
  • a wearable structure it is possible to measure in a state wearing a sensor unit or a sensor module, and to measure the deformation of the skin due to the physiological behavior of the skin without affecting the skin condition Unit and a skin sensor module including the unit can be provided.
  • FIG. 1 is a view schematically showing a skin sensor module worn by a subject according to an embodiment of the present invention.
  • FIG. 2 is a schematic view of a strain sensor unit according to an embodiment of the present invention.
  • FIG 3 is a cross-sectional view of a strain sensor unit according to an embodiment of the present invention.
  • FIG. 4 is a circuit diagram of a strain sensor unit according to an embodiment of the present invention.
  • 5A and 5B are graphs showing changes in dislocations with and without an interfacial layer in a strain sensor unit according to an embodiment of the present invention.
  • FIG. 6 is a graph showing the change in electrical characteristics due to the interface layer.
  • FIG. 7 is a view schematically showing a manufacturing process of a flexible adhesive substrate according to an embodiment of the present invention.
  • 8A, 8B, 8C, and 8D are diagrams schematically illustrating a manufacturing process of a skin sensor module according to an embodiment of the present invention.
  • FIGS. 9A, 9B, and 9C are views schematically illustrating a process of measuring a skin change amount by a strain sensor unit according to an embodiment of the present invention.
  • FIG. 10 is a graph illustrating a skin change amount according to time measured by a strain sensor module according to an embodiment of the present invention.
  • FIG. 11 is a view schematically showing a skin sensor module according to another embodiment of the present invention.
  • FIG. 12 is a sectional view of the skin sensor module of Fig.
  • FIG. 13 is a view illustrating a skin deformation sensing apparatus according to an embodiment of the present invention.
  • 'module' or 'sub' performs at least one function or operation, and may be implemented in hardware or software, or a combination of hardware and software.
  • a plurality of 'modules' or a plurality of 'parts' may be integrated into at least one module except for 'module' or 'module' which need to be implemented by specific hardware, and implemented by at least one processor (not shown) .
  • FIG. 1 is a schematic view of a skin sensor module worn by a subject T according to an embodiment of the present invention.
  • the skin sensor module may be configured to attach to the skin and measure the mechanical change of the skin.
  • the skin sensor module S according to one embodiment includes a substrate 20 on which a plurality of air permeable through holes H are formed and a plurality of deformation sensor units 10 formed on the substrate.
  • the substrate 20 may be adhered to the skin to be adhered to the skin and the deformation sensor unit 10 may be a change sensing structure formed on the air permeable through hole H in a free standing manner. And can be configured to detect a skin change by sensing a change in pressure applied to the change sensing structure in accordance with a change in size of the through hole H attached to the skin, in a free standing manner on the through hole (H).
  • FIG. 2 is a schematic view of a strain sensor unit 10 according to an embodiment of the present invention
  • FIG. 3 is a sectional view of a strain sensor unit 10 according to an embodiment of the present invention.
  • a strain sensor unit 10 includes a through hole H formed on one surface of a substrate and formed on one side and the other side of a through hole H
  • a substrate 20 including a first electrode 15 and a second electrode 17, a piezoelectric element 11 extending from the first electrode 15 and extending into the through hole H, And a piezoelectric resistor 13 drawn from the second electrode 17 and extending to the inside of the through hole H so as to overlap with a part or the whole of the piezoelectric element 11.
  • the change sensing structure may be composed of a piezoelectric element 11 and a piezoelectric resistor 13.
  • the change detection structure may be formed so as to extend on both sides of the through hole H so that the pressure changes on the change detection structure in accordance with the change of the length. Accordingly, the change detection structure can be formed to detect the change in pressure through the piezoelectric element and the piezoelectric resistor to measure the skin change.
  • the piezoelectric element 11 is an element capable of generating an electrical signal according to mechanical pressure, and may be a piezoelectric semiconductor according to an embodiment.
  • the piezoelectric resistor 13 is a device whose resistance changes according to the deformation of the skin on the nanometer scale. According to one embodiment, the resistance of the cracked metal is changed by connection or disconnection of nanometer-scale cracks It can be a nanocrack-controlled based metal piezoresistive device that can measure skin strain on the nanometer scale.
  • the piezoelectric resistor 13 may be a piezo-resistive element capable of inducing resistance change due to connection or disconnection of cracks by forming metal grains by forming a silver (Ag) thin film formed on a polyimide have.
  • the piezoelectric element 11 may further include an interface layer 19 on the contact surface between the piezoelectric element 11 and the piezoelectric resistor 13.
  • the interface layer 19 may be a low-defective amorphous oxide semiconductor layer, and may be disposed under the transfer-printed piezoelectric element 11.
  • the interface layer 19 formed on the contact surface between the piezoelectric resistor 13 and the piezoelectric element 11 is composed of, for example, a Ga stoichiometric-controlled amorphous oxide interface layer, A low-defect Schottky barrier can be formed even under a deposition process, and the sensitivity of the strain sensor can be improved.
  • the amorphous structure Due to the amorphous structure, there is no one-dimensional and two-dimensional defects and a constant contact can be formed. Furthermore, Ga inhibits zero-dimensional defects such as oxygen deficiency and induces ideal Schottky thermal ion conduction. As a result, the electrical resistance changes with respect to the increase of the piezoelectric potential, i.e., the sensitivity of the sensor increases.
  • FIG. 4 is a circuit diagram of a strain sensor unit according to an embodiment of the present invention.
  • the strain sensor unit includes a piezoelectric element 11 of a piezoelectric semiconductor type and a piezoelectric resistor 13 of a variable resistance type, and a variable Schottky diode is interposed therebetween. (12) may be formed.
  • 5A and 5B are graphs showing energy band diagrams according to presence / absence of an interface layer in a strain sensor unit according to an embodiment of the present invention.
  • Fig. 5A relates to an energy band diagram of an embodiment of a strain sensor unit in which the piezoelectric element 11 and the piezoelectric resistor 13 are connected
  • Fig. 5B relates to an energy band diagram of an embodiment additionally including an interface layer 19.
  • the sensitivity of the strain sensor unit can be greatly enhanced through a series of interconnection of the piezoelectric element 11 and the piezoelectric resistor 13. As a result, it is possible to provide a deformation sensor unit capable of detecting skin changes on the nanometer scale.
  • the amorphous oxide interface layer 19 As the amorphous oxide interface layer 19 is added, the one-dimensional and two-dimensional defects are removed at the interface to suppress the tunneling conduction that occurs irrespective of the Schottky barrier height, It can be seen that thermionic conduction is formed.
  • FIG. 6 is a graph showing changes in electrical characteristics due to the amorphous oxide interface layer. It can be seen that as the amorphous oxide stoichiometry is controlled, the Schottky thermal ionic conduction parameter value is varied and optimal stoichiometry can be set to produce the ideal Schottky thermal ion conduction characteristic.
  • the skin sensor module according to another embodiment of the present invention may be formed of a plurality of strain sensor units and may be configured to detect physical changes of skin in a skin region within a predetermined range.
  • a skin sensor module includes a substrate having a plurality of through holes formed therein and including a first electrode and a second electrode formed on one surface and the other surface of each through hole on one surface of the substrate, And a piezoelectric resistor which is drawn out and extends to the inside of the through hole, a piezoelectric resistor which is drawn out from each second electrode and extends to the inside of the through hole so as to overlap with a part or all of the piezoelectric element.
  • the deformation sensor unit includes the first electrode, the second electrode, and the deformation sensing structure composed of the piezoelectric element and the piezoelectric resistor, which are disposed around a single through hole formed on the substrate And may be configured to detect skin deformation at a point as a single unit containing it.
  • a plurality of strain sensor units formed on the substrate are arranged on the substrate in such a manner that a plurality of strain sensor units are formed on the substrate in such a manner that a plurality of strain sensor units are formed on the substrate in the form of a radiation array structure, a linear array structure, a curved array structure, a crossed array structure, a circular array structure, As shown in FIG.
  • the content of the modified sensor unit may be applied to the skin sensor module.
  • the opposite is true.
  • the description of the overlapping contents will be omitted.
  • FIG. 7 is a view schematically showing a manufacturing process of a flexible adhesive substrate according to an embodiment of the present invention.
  • the size of pores of a normal skin is about 100 mu m, and the distance between adjacent pores is about 100 mu m.
  • a total of 2 to 4 million pieces are present, distributed in the skin at a density of approximately 11.4 / cm 2 .
  • the diameter of the water droplets discharged from the skin by the transpiration of the skin is approximately 2 to 5 ⁇ m and the main component is water (H 2 O) 99%, and components such as Na, Cl, K and N . And it is released to about 700 ml every day.
  • the flexible adhesive substrate 20 has a diameter d 1 of about 100 ⁇ (50 ⁇ to 150 ⁇ ) and a gap d 2 of about 100 ⁇ (50 ⁇ to 150 A plurality of vent holes P can be disposed.
  • the diameter (d 1 ) and the distance (d 2 ) are less than 50 ⁇ m, the flexible adhesive substrate is brought into close contact with the skin to prevent moisture from being released from the skin. If the diameter exceeds 150 ⁇ m, a desired degree of durability it's difficult.
  • the ventilation holes P have a circular shape.
  • the ventilation holes P may have various shapes such as a rectangular shape or a polygonal shape.
  • the vent hole P may be used as the through hole H of the deformation sensor unit. It is possible to form a deformation sensing structure on the vent hole P without manufacturing a separate through hole H to detect the skin change.
  • the present invention is not limited thereto, and it is needless to say that the vent hole P and the through hole H may be separately manufactured and used.
  • a mold 31 having a plurality of micro pillars is provided.
  • the micro pillars formed in the mold 31 are formed to have a size and shape corresponding to the through holes H.
  • the material constituting the substrate 20 may be formed on the mold 31.
  • an elastomer of a predetermined thickness may be formed on the mold 31.
  • the elastomer may be formed of a material including polydimethylsiloxane (PDMS) that can be adhered to the skin while minimizing the effect on the skin.
  • PDMS polydimethylsiloxane
  • the substrate 20 can be separated from the mold 31 to form the substrate 20 having the plurality of vent holes P formed thereon.
  • the substrate 20 according to another embodiment of the present invention includes a plurality of rectangular vent holes P, and the vent holes P are formed in a through hole (not shown) (H). Thereby, the strain sensor unit is mounted on each of the through holes H to form the skin sensor module.
  • a plurality of micro suction cups 21 may be patterned on the lower surface of the substrate 20. Accordingly, it is possible to provide a skin sensor module capable of measuring skin deformation more closely to the skin.
  • FIGS. 8A, 8B, 8C, and 8D are diagrams schematically illustrating a manufacturing process of a skin sensor module according to an embodiment of the present invention. A manufacturing process of mounting the deformation sensor unit on the substrate 20 formed as above will be described with reference to Figs. 8A, 8B, 8C, and 8D.
  • a substrate 20 is stacked on a sacrificial layer 101, and a piezoelectric resistor 13 extending inward from one side of a through hole H of the substrate is laminated to form a substrate layer 120 .
  • the substrate layer 120 including the piezoelectric resistor 13 extending inward from one side of the substrate on the sacrificial layer 101 may be laminated.
  • the piezoelectric element 110 may be transferred to the substrate layer 120 by attaching it to the transfer structure.
  • a piezoelectric element layer 110 is mounted on an epitaxial graphene (e.g., a SiC layer), and then a stressor layer 130 (e.g., Ni And a tape layer 140 can be formed thereon. Accordingly, the transfer structure of the stressor layer 130 and the tape layer 140 may be formed thereon in order to transfer the piezoelectric element layer 110.
  • an epitaxial graphene e.g., a SiC layer
  • a stressor layer 130 e.g., Ni And a tape layer 140
  • the transfer structure of the stressor layer 130 and the tape layer 140 may be formed thereon in order to transfer the piezoelectric element layer 110.
  • the piezoelectric elements 110 such as high performance, single crystal piezoelectric semiconductors (AlN, GaN), can be formed on the substrate layer (not shown) by using Graphene-Based Layer Transfer printing (GBLT) 120). ≪ / RTI >
  • the detection performance of the piezoelectric strain sensor can be improved by defects such as dislocation, grain boundaries, and reduction and modulation of the preferred crystal orientation.
  • the piezoelectric layer 110, the substrate layer 120 on which the piezoelectric resistor 13 is formed, and the sacrificial layer 110 are removed by removing the transfer layer structure 130 and the tape layer 140
  • the stacked layers are left in order.
  • the sacrificial layer 101 and the rest of the piezoelectric element layer 110, which do not correspond to the piezoelectric element 11, can be removed through a process such as etching.
  • the first electrode 15 and the second electrode 17 are printed through a process such as printing to form a skin sensor module in which a plurality of strain sensor units are formed, as shown in FIG. 8D.
  • FIGS. 9A, 9B, and 9C are views schematically illustrating a process of measuring a skin change amount by a strain sensor unit according to an embodiment of the present invention.
  • a strain sensor unit 10 may be detachably attached to the skin Ts, Td.
  • the skin includes the stratum corneum Ts and the dermal layer Td.
  • the strain sensor unit 10 may be formed to closely adhere to the surface of the stratum corneum Ts and measure the change in the through hole H.
  • the substrate 20 since the substrate 20 according to an embodiment of the present invention includes micro-sized holes, it does not affect the physiological activities of the skin and does not interfere with skin drying, .
  • the change sensing structure (the piezoelectric element 11 and the piezoelectric resistor 13) is suspended in a free standing state in a hole providing breathability of the substrate, it can be formed to effectively bend in accordance with the skin strain induced by mechanical stress have.
  • the skin consists of the horny layer up to about 20 ⁇ m, and the epidermal layer and the dermal layer up to about 2 mm. Accordingly, when the dermal layer is viewed as a substrate, the stratum corneum has a thin film structure at a ratio of about 1/100 to the dermal layer. Thus, when the skin is dried, the volume contraction of the stratum corneum, which is a relatively thin film, is induced.
  • the skin change rate can be defined as the following Equation 1 with respect to the initial length L 0 of the skin in a predetermined region and the length L t after the time t .
  • the skin change rate can be provided as a quantitative value.
  • the change sensing structure (the piezoelectric element 11 and the piezoelectric resistor 13) may have a length of d 3 in the state where no pressure is applied.
  • tensile stresses (F 5 , F 6 ) are generated in the stratum corneum when the substances containing moisture are released from the skin over time and the stratum corneum is dried first.
  • change detection structure piezoelectric element 11 and the piezoelectric resistor 13
  • d 4 will have a longer length as compared to d 3. In this case, it can be determined that the subject's skin pulling has occurred.
  • d 5 has a shorter length than d 4 .
  • the skin change amount can be measured according to the pressure applied to the change detection structure (the piezoelectric element 11 and the piezoelectric resistor 13) or the length of the change detection structure.
  • FIG. 10 is a graph showing the deformation rate of the skin according to the time measured by the deformation sensor module according to an embodiment of the present invention.
  • the exposure start time corresponds to the exposure start time in the graph of FIG. 10, and in the initial stage of FIG. 9B, tensile stress increases with the drying of the stratum corneum.
  • FIG. 11 is a view schematically showing a skin sensor module according to another embodiment of the present invention.
  • Diffusion epidemiology of skin-borne drug and cosmetic delivery can be assessed by examining images of skin cross-sections using fluorescence photomicroscopes, using progressive tape stripping, or using in vivo in-vitro test was used. All of these methods can cause damage to the skin, the testing process is very cumbersome and it is very difficult to derive the spread of drugs or cosmetics due to the discontinuity of the results.
  • the skin deformation sensing apparatus includes a skin sensor module, which includes a substrate 220 and a stimulus to be tested formed on the substrate 220, And a plurality of strain sensor units 210 disposed thereon.
  • the test point may be an injection opening 230 through which a substance to be tested is injected for a diffusion test, or an indentation point where vibration of a predetermined size is applied to the skin for an indentation test.
  • the plurality of strain sensor units 210 may be arranged in a radial array structure around the test points.
  • the skin sensor module comprises a substrate 220, an injection opening 230 formed on the substrate 220, and a radially disposed, , And a plurality of strain sensor units (210).
  • the strain sensor units 210 are arranged in an array of radiation patterns of 360 degrees so that the skin strain sensor injects a substance to be tested (for example, a drug or an extension product) into the injection opening 230, It can be used for measuring.
  • a substance to be tested for example, a drug or an extension product
  • the skin sensor module includes a substrate 220, indentation points (not shown) formed on the substrate 220, and a radiation array And a plurality of strain sensor units 210 arranged in a structure.
  • the indentation point may be disposed at a position corresponding to the injection opening 230 in FIG. 11, and may be arranged in the form of a mark indicating an opening shape or indentation reference point to indicate a reference point to which a certain amount of vibration pressure is applied.
  • the present invention is not necessarily limited thereto, and may have various forms for indicating the indentation reference point.
  • the skin sensor module can be used to measure the degree of diffusion of drugs or cosmetics in a simple, non-surgical, in-vivo manner.
  • the lateral diffusion and the diffusion length can be measured around the injection opening 230 through skin deformation measurement using the radially arranged strain sensor unit 210.
  • FIG. 12 is a sectional view of the skin sensor module of Fig. Referring to FIG. 12, the diffusion length and diffusion speed can be measured using the skin sensor module according to an embodiment of the present invention as follows.
  • the skin sensor module is mounted on the skin.
  • the drug or cosmetic to be tested is then injected into the injection opening 230.
  • the plurality of strain sensor units may be disposed respectively at the R 1 point, the R 2 point, the R 3 point, and the R 4 point from the injection opening 230.
  • the diffusion length and the diffusion velocity can be measured through the calculation of the length d 6 , d 7 , d 8 and d 9 of the change sensing structure of each sensor.
  • the time at which the change sensor unit at each point senses the change and the position of the corresponding point are measured. Then, the diffusion distance and diffusion speed can be calculated based on the position and time of the point where the deformation is detected from the opening.
  • the rate of change of d 6 the length of the R 1 point located at the center from the injection opening 230, is the largest, and the rate of change in length d 7 and d 8, which is the length at R 2 and R 3 ,
  • the deformation due to the cosmetic material may not be detected in the deformation sensor unit after the R 4 point. In this case, it can be determined that the cosmetic has spread to approximately the R 3 point.
  • the diffusion rate and effect can be calculated by measuring the diffusion rate and effect in the lateral direction (left / right direction) in order to measure the diffusion rate and its effect without damaging the skin.
  • FIG. 13 is a view showing a skin deformation sensing apparatus according to an embodiment.
  • Skin deformation in accordance with one embodiment of the present invention sensing devices are skin sensor module 220 and its secure the fixing band 240 is mounted to be provided, and the arm (T H) of the subject accordingly provided with a skin proliferation Can be used.
  • the arm (T H) of the subject accordingly provided with a skin proliferation Can be used.
  • in-vivo testing is possible without damaging the skin.
  • micro-sized pores can be formed on a substrate to provide a strain sensor unit having high breathability or breathability. Accordingly, it is possible to provide a strain sensor unit or a skin sensor module including the strain sensor unit, which can measure, in real time, mechanical strain on the skin without affecting the physiological activity of the skin (such as drying) .
  • the change detection structure of the strain sensor unit of the present invention may be formed as a free standing structure so as to hang on the hole of the substrate and may be bent effectively by mechanical stress inducing skin strain to measure skin strain.
  • the piezoelectric semiconductors are composed of a single crystal having a low defect density, excellent sensitivity performance can be exhibited. And the interface defect density at the Schottky contact can also be reduced by the amorphous oxide interface layer.
  • the skin sensor module can perform the non-surgical, in vivo, and real-time tests on the diffusion characteristics by measuring the skin diffusion from the injection opening by calculating the diffusion characteristics of the skin-based medicines and cosmetics.
  • strain sensor unit the skin sensor module including the skin sensor module, and the skin strain sensor according to various embodiments of the present invention can be used not only for measuring skin pulling but also for measuring skin elasticity .
  • the skin sensor module 220 may be further connected to the skin characteristic calculating section and used to calculate various skin characteristics.
  • the degree of skin deformation varies depending on the sex, age and skin condition because the skin elasticity is different. That is, when pressure is applied to the center of the array of sensors. It is possible to determine the physical properties of the skin by measuring the degree of deformation of the skin according to the difference in wave characteristics (such as wavelength, wave shape, cycle, propagation speed, etc.) Then, the difference in skin elasticity can be measured based on the physical properties of the skin.
  • the skin elasticity can be calculated on the basis of the skin property measured according to the wavelength characteristic measured by the skin characteristic calculating unit, by measuring the wave characteristic according to the pressure applied to the test point in the skin sensor module.
  • a strain sensor unit capable of measuring deformation of skin and a skin sensor module including the same.
  • the deformation sensor and the skin sensor module including the deformation sensor can be measured in a state wearing a sensor unit or a sensor module, and it is possible to measure the deformation of the skin sensor module It is predicted that the application to the skin related industry is unlimited.

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

La présente invention concerne une unité de capteur de déformation et un module de capteur cutané le comprenant. Une unité de capteur de déformation selon un mode de réalisation de la présente invention comprend : un substrat qui a un trou traversant formé à l'intérieur de celui-ci et comprend une première électrode et une seconde électrode formées sur un côté et l'autre côté du trou traversant sur une surface du substrat ; un élément piézoélectrique sortant de la première électrode et s'étendant dans le trou traversant ; et une résistance piézoélectrique qui sort de la seconde électrode et s'étend dans le trou traversant et est formée de manière à chevaucher une section ou l'ensemble de l'élément piézoélectrique.
PCT/KR2018/013506 2017-11-09 2018-11-08 Unité de capteur de déformation et module de capteur cutané le comprenant Ceased WO2019093773A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201880086055.5A CN111655123B (zh) 2017-11-09 2018-11-08 应变传感器单元及包括其的皮肤传感器模块
EP18875671.2A EP3708065B1 (fr) 2017-11-09 2018-11-08 Unité de capteur de déformation et module de capteur cutané le comprenant
JP2020525988A JP7345761B2 (ja) 2017-11-09 2018-11-08 変形センサユニット及びこれを含むスキンセンサモジュール

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US15/808,416 2017-11-09
US15/808,416 US10952642B2 (en) 2017-11-09 2017-11-09 Strain sensor unit and skin sensor module comprising the same
KR1020170155057A KR102371422B1 (ko) 2017-11-09 2017-11-20 변형 센서 유닛 및 이를 포함하는 스킨 센서 모듈
KR10-2017-0155057 2017-11-20

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WO2019093773A1 true WO2019093773A1 (fr) 2019-05-16

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WO (1) WO2019093773A1 (fr)

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