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WO2018180388A1 - Palier à feuille - Google Patents

Palier à feuille Download PDF

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Publication number
WO2018180388A1
WO2018180388A1 PCT/JP2018/009344 JP2018009344W WO2018180388A1 WO 2018180388 A1 WO2018180388 A1 WO 2018180388A1 JP 2018009344 W JP2018009344 W JP 2018009344W WO 2018180388 A1 WO2018180388 A1 WO 2018180388A1
Authority
WO
WIPO (PCT)
Prior art keywords
foil
bearing
film
shaft
chemical conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/009344
Other languages
English (en)
Japanese (ja)
Inventor
純 御堂前
真人 吉野
晶美 多田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Corp
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Corp, NTN Toyo Bearing Co Ltd filed Critical NTN Corp
Publication of WO2018180388A1 publication Critical patent/WO2018180388A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/02—Sliding-contact bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/10—Construction relative to lubrication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/14—Special methods of manufacture; Running-in

Definitions

  • the present invention relates to a foil bearing.
  • Foil bearings are attracting attention as bearings that support the shafts of turbomachines such as gas turbines and turbochargers.
  • a bearing surface is constituted by a thin film (foil) having low rigidity with respect to bending, and the load is supported by allowing the bearing surface to bend.
  • a fluid film for example, an air film
  • the flexibility of the foil automatically forms an appropriate bearing gap according to the operating conditions such as the rotational speed, load and ambient temperature of the shaft. It can be used at high speed.
  • Patent Document 1 the top foil is elastically supported by cutting and raising provided in the back foil
  • Patent Document 2 the bearing foil is elastically supported by an elastic body knitted in a net shape
  • Patent Document 3 a back foil provided with a support portion that contacts the inner surface of the outer ring and does not move in the circumferential direction, and an elastic portion that is elastically bent by the surface pressure from the top foil
  • Patent Documents 4 and 5 show so-called multi-arc type foil bearings in which a plurality of foils are arranged side by side in the circumferential direction, and both circumferential ends of each foil are attached to an outer member.
  • a wear-resistant coating on the sliding surface with the top foil shaft.
  • a fluororesin fired film, a film made of graphite, molybdenum disulfide, or the like is formed on the surface of the top foil to improve the wear resistance of the top foil.
  • the foil bearing can form an appropriate bearing gap with the shaft by elastically deforming the thin plate-like foil having flexibility during the rotational movement of the shaft.
  • the shape of the coating cannot sufficiently follow the deformation of the foil, and the coating peels off from the foil and the wear resistance of the sliding surface is reduced. There is a risk of damage.
  • an object of the present invention is to provide a foil bearing capable of preventing foil adhesion without impairing the wear resistance of the sliding surface of the foil due to peeling of the coating or the like.
  • the present invention includes a foil having a film formed thereon and a foil holder that supports the foil, and the shaft is formed by a fluid film formed in a bearing gap between the film and the shaft.
  • the coating film is formed on an uneven surface formed by a chemical conversion treatment.
  • the adhesion between the uneven surface and the film can be improved by increasing the surface area of the contact surface with the film and the anchor effect. Therefore, peeling of the coating can be suppressed, and the effect of improving the wear resistance can be stably brought about on the sliding surface of the foil.
  • the uneven surface by chemical conversion treatment, it is possible to form finer and more complicated unevenness, and to further improve the adhesion of the protective film.
  • a film containing at least one of PTFE, MoS 2 and a carbon-based material can be formed.
  • the film having such a structure is particularly likely to be peeled off from the foil, and it is important to improve the adhesion between the foil and the film by forming an uneven surface.
  • the present invention provides a foil bearing that includes a foil that forms a bearing surface, and a foil holder that supports the foil, and that supports the shaft with a fluid film formed in a bearing gap between the bearing surface and the shaft.
  • An uneven surface formed by chemical conversion treatment is provided on the bearing surface, and a concave portion of the uneven surface is filled with a filler.
  • the wear resistance of the bearing surface can be improved without providing a wear-resistant film by filling the concave portion of the uneven surface formed in the foil with a filler.
  • a solid lubricant can be used as a filler.
  • an uneven surface can be formed on the foil.
  • the uneven surface can be formed on a chemical conversion film obtained by chemical conversion treatment.
  • the adhesion of the film to the foil can be improved by providing the film on the uneven surface formed by the chemical conversion treatment. Therefore, the wear resistance is not deteriorated due to peeling of the coating, and the effect of improving the wear resistance stably for a long time can be provided on the sliding surface of the foil.
  • the foil bearing 10 includes a foil holder 11 having a cylindrical inner peripheral surface 11a, and three foils 12 attached to the inner peripheral surface 11a.
  • the foil bearing 10 is a so-called multi-arc type foil bearing in which three foils 12 are arranged in the circumferential direction on the inner peripheral surface 11a.
  • a shaft 13 is inserted into the foil bearing 10 inside the foil 12 on the inner peripheral surface 11a side.
  • the foil bearing 10 and the shaft 13 constitute a foil bearing device 14.
  • the foil bearing 10 supports the shaft 13 in a relatively rotatable manner with a fluid film formed between a bearing surface X (described later) of the foil 12 and the shaft 13.
  • the foil holder 11 is formed of a metal (for example, a steel material) such as a sintered metal or a melted material.
  • a metal for example, a steel material
  • axial grooves 11b serving as holding portions are formed at a plurality of locations (three locations in the illustrated example) separated in the circumferential direction.
  • the foil 12 is formed of a strip-like foil having a thickness of about 20 ⁇ m to 200 ⁇ m made of a metal having high spring properties and good workability, such as a steel material or a copper alloy.
  • a metal having high spring properties and good workability such as a steel material or a copper alloy.
  • steel materials and copper alloys include carbon steel and brass, but general carbon steel is susceptible to corrosion due to rust, and brass may cause cracks due to processing strain (in brass) This tendency increases as the Zn content increases.) Therefore, it is preferable to use a stainless steel or bronze foil as the belt-like foil.
  • the foil 12 has a first region 12a and a second region 12b that are arranged side by side in the circumferential direction of the foil holder 11.
  • the first region 12a has a top foil portion 12a1 having a bearing surface, and an insertion portion 12a2 protruding at one end side in the circumferential direction at the upper end, the center, and the lower end in the axial direction.
  • a minute circumferential notch 12a3 is provided at a position close to the insertion portion 12a2.
  • the second region 12b is provided with a protruding portion 12b1 as an under-foil portion, which is three protruding portions whose axial width is gradually narrowed toward the other end in the circumferential direction.
  • the protrusions 12b1 are provided at the upper end, the center, and the lower end in the axial direction, respectively, and a notch 12b2 formed in a substantially arc shape is provided between the protrusions 12b1.
  • the cutout portion 12b2 may have a substantially V shape in which a straight line is bent at the center of each protruding portion 12b1.
  • the top foil portion 12a1 is disposed on the shaft 13 side, and the inner peripheral surface thereof forms a bearing surface X.
  • underfoil part 12b1 is arranged at the foil holder 11 side, and gives elasticity to top foil part 12a1 by overlapping with top foil part 12a1 of other foil 12 adjacent.
  • the insertion ports 12 c 1, 12 c 2, and 12 c 1 into which the insertion portions 12 a 2 of the adjacent foil 12 are inserted are respectively the upper end, the center, Provided at the lower end.
  • the insertion port 12c1 is a rectangular cutout portion and is provided to reach the axial end of the foil 12.
  • the insertion port 12c2 has a rectangular cutout portion provided at the same position in the circumferential direction as the insertion port 12c1, and a rectangular cutout portion that protrudes toward the other end in the circumferential direction and has a circular arc at the tip. It consists of a notch part whose width is narrower than that.
  • the connection part 12c3 which connects both is formed in the boundary of the 1st area
  • the two foils 12 can be connected by inserting the insertion portions 12a2, 12a2, 12a2 of one foil 12 into the insertion ports 12c1, 12c2, 12c1 of the adjacent foils 12. it can.
  • the foil 12 constitutes a foil overlap portion C that overlaps in the radial direction of the shaft 13 in a state where the foil 12 is assembled to a foil bearing 10 described later.
  • the three foils 12 can be temporarily assembled by connecting the three foils 12 in a circumferential manner by the method.
  • the foil bearing 10 is assembled by making this temporary assembly into a cylindrical shape and inserting it into the inner periphery of the foil holder 11 in the direction of arrow B2, as shown in FIG. Specifically, while inserting the temporary assembly of the three foils 12 into the inner periphery of the foil holder 11, the insertion portion 12 a 2 of each foil 12 is opened in the axial groove 11 b opened on one end surface of the foil holder 11. Insert from one end in the axial direction. Thus, the three foils 12 are attached to the inner peripheral surface 11a of the foil holder 11 in a state of being arranged in the circumferential direction.
  • the insertion portion 12 a 2 which is one end in the circumferential direction of each foil 12 is held in contact with the foil holder 11.
  • the insertion part 12a2 of each foil 12 is distribute
  • the insertion portion 12a2 provided at one end in the circumferential direction of each foil 12 has an axial groove on the inner peripheral surface 11a of the foil holder 11 via the insertion port 12c1 (12c2) of the adjacent foil 12. 11b.
  • each foil 12 is disposed between the top foil portion 12a1 of the adjacent foil 12 and the inner peripheral surface 11a of the foil holder 11, and the top of the adjacent foil 12 is disposed.
  • the foil part 12a1 is supported from behind, and the underfoil part 12b1 is configured.
  • the adjacent foils 12 are engaged with each other in the circumferential direction so as to stick to each other.
  • the top foil part 12a1 of each foil 12 protrudes to the outer diameter side, and is curved into a shape along the inner peripheral surface 11a of the foil holder 11.
  • a step along the notch portion 12b2 is formed in the top foil portion 12a1 riding on this.
  • the fluid flowing along the top foil portion 12a1 flows along the above steps and is collected on the center side in the axial direction, so that the pressure improvement effect is enhanced (see the arrow in FIG. 3).
  • the rigidity of this portion is lowered.
  • the top foil part 12a1 can be easily deformed along the notch part 12b2 of the second region 12b arranged behind the top foil part 12a1.
  • the rotation of the shaft 13 is slowed down and the fluid pressure between the foil bearing 10 and the shaft 13 is lowered, so that the shaft 13 is lowered by gravity, and the shaft 13 13 and the top foil part 12a1 contact (so-called touchdown) occurs.
  • the shaft 13 and the top foil portion 12a1 are repeatedly contacted and slid, adhesion occurs on the sliding surface, which may increase frictional torque and eventually cause seizure and damage to the bearing surface. Therefore, the top foil portion 12a1 that slides with the shaft 13 (sliding surface of the foil 12 with the shaft 13) is required to have high wear resistance.
  • a wear-resistant protective coating coating
  • protective coatings provided on the surface of the top foil portion 12a1 include hard coatings using chromium plating, nickel plating, DLC, carbon-based materials such as graphite, molybdenum disulfide (MoS 2 ), tungsten disulfide ( A coating using a solid lubricant having excellent friction characteristics such as WS 2) and PTFE can be employed.
  • the wear resistance of the top foil portion 12a1 can be improved and adhesion between the sliding surface and the shaft 13 can be prevented.
  • the adhesion of the coating to the top foil portion 12a1 becomes a problem. That is, as described above, the flexible thin plate-like foil 12 is elastically deformed by the pressure of the fluid film generated in the bearing gap, and the foil bearing 10 allows the shaft 13 to be deformed by allowing the bearing surface to bend. Non-contact support. Therefore, when the adhesive force of the protective film to the top foil portion 12a1 is small during elastic deformation of the foil 12, the shape of the protective film cannot sufficiently follow the foil 12, and the protective film peels off from the foil 12. End up.
  • a film using DLC or PTFE has a problem in adhesion to the foil, and such a peeling is likely to occur. Therefore, countermeasures are important.
  • a chemical reaction is caused by reacting a treatment agent on the surface (sliding surface) on the side where the bearing surface is formed among the surfaces of the top foil portion 12a1.
  • the chemical conversion film 15 provided with the uneven surface 15a is formed on the surface of the top foil part 12a1.
  • the above-described wear-resistant protective film (film) 16 is provided on the uneven surface 15a.
  • the uneven surface 15a formed by the chemical conversion treatment has a shape in which fine unevenness is provided in a complicated manner on the surface. Then, the protective coating 16 is formed on the uneven surface 15a, so that the protective coating 16 enters the fine unevenness. Thereby, the adhesion degree with respect to the chemical conversion film 15 (top foil part 12a1) of the protective film 16 can be improved according to the increase in the area which the protective film 16 adheres, and an anchor effect.
  • the protective coating 16 can be made difficult to peel from the top foil portion 12a1. Further, even if a part of the protective coating 16 is peeled off or worn due to repeated use of the foil bearing, the portion of the protective coating 16 that has entered the concave and convex surface 15a remains, and a certain wear resistance effect is obtained. Can be imparted to the sliding surface. Therefore, adhesion of the top foil part 12a1 and the shaft 13 can be prevented over a long period of time.
  • an intermediate layer (chemical conversion film 15) is provided between the top foil portion 12a1 and the protective film 16, and the protective film 16 is in close contact with the intermediate layer.
  • This is effective when DLC or PTFE having poor adhesion to the top foil portion 12a1 is used. Further, when DLC is used for the protective coating 16, peeling of the coating is difficult to propagate, and when the protective coating 16 is peeled off, a part of the protective coating 16 can easily remain.
  • the chemical conversion film 15 can be formed by allowing phosphate or oxalate such as iron phosphate, zinc phosphate, or manganese phosphate to act on the surface of the foil 12. Further, a chromate treatment in which chromate is applied to the surface of the foil 12 to form the chemical conversion film 15 or a black dyeing treatment in which a high temperature and high concentration alkaline solution is applied to the surface of the foil 12 to form the chemical conversion film 15 is used. You can also These methods can be selected as appropriate according to the material used for the foil 12, the roughness of the target uneven surface, and the like.
  • a chemical conversion film 15 having a maximum height roughness (Rz) of an uneven surface of 0.5 to 4.0 ⁇ m is formed on the surface of the top foil portion 12a1 by chemical conversion using zinc phosphate as a processing agent. Can do.
  • the maximum height roughness of the uneven surface here is the maximum height roughness defined by JIS B0601-2001.
  • the treatment can be performed at a low temperature.
  • the deformation of the foil 12 due to heating can be suppressed.
  • no external force is applied to the foil 12, so that deformation and distortion of the foil 12 do not occur.
  • the uneven surface 15a having a uniform roughness can be formed without causing unevenness of the height of the uneven surface 15a.
  • a method of removing the chemical conversion film after forming the surface on the bearing surface side of the top foil portion 12a1 into an uneven surface by chemical conversion treatment can be employed. Specifically, first, as shown in FIG. 8a, a chemical conversion treatment is performed on the surface of the top foil portion 12a1. By this chemical conversion treatment, as shown in FIG. 8 b, a chemical conversion coating 15 is formed on the surface of the top foil portion 12 a 1, and unevenness is formed at the interface between the chemical conversion coating 15 and the foil 12 by the action of the treatment agent. Thereafter, as shown in FIG.
  • the chemical conversion film 15 is chemically removed from the top foil portion 12a1, thereby forming a top foil portion 12a1 having an uneven surface 12d on the surface thereof. Then, as shown in FIG. 8d, a protective coating 16 is applied to the uneven surface 12d of the top foil portion 12a1.
  • the protective coating 16 can be formed so as to enter the uneven surface 12d of the top foil portion 12a1, and the adhesion of the protective coating 16 to the top foil portion 12a1 can be improved.
  • This embodiment can be employed particularly when a material having good adhesion to the top foil portion 12a1 is used for the protective coating 16, and as in the above-described embodiment, an intermediate for bringing the protective coating 16 into close contact.
  • the foil 12 having the protective coating 16 on the sliding surface can be formed without providing a layer (chemical conversion coating). Therefore, the thickness change of the foil 12 can be reduced as compared with the above-described configuration, and the influence on the flexibility due to the thickness change can be minimized. Note that even when the top foil portion 12a1 shown in FIG. 8c is formed with a concavo-convex surface, the concavo-convex surface can provide a certain effect of preventing adhesion to the shaft and prevent the top foil portion 12a1 from being seized. can do.
  • the foil does not deform due to heating or external force in the course of processing, and an uneven surface can be formed with uniform roughness.
  • Chemiblast registered trademark
  • Nippon Parkerizing Co., Ltd. can be used as an example of the method for removing the chemical conversion film.
  • chemiblast treatment an uneven surface is formed on the surface of the foil by the etching action of the treating agent, and then the chemical conversion film formed on the surface of the foil is removed.
  • the surface roughness of the foil can be given a roughness having a maximum height roughness (Rz) of 0.2 to 5.0 ⁇ m as an example.
  • FIG. 9 shows an enlarged view of the uneven surface of the foil 12 formed by the above-described chemiblasting process.
  • a finer and sharper uneven surface can be formed, and the surface area can be increased. Accordingly, the adhesion of the protective coating 16 to the top foil portion 12a1 can be further increased.
  • the present invention is not limited to the configuration in which the protective coating 16 is provided, and a configuration in which the uneven surface is filled with a lubricant (filler) can also be employed.
  • a heat-resistant solid powder lubricant 17 is filled in the uneven surface 12d of the top foil portion 12a1 formed by the chemical conversion treatment described above.
  • Examples of the heat-resistant solid lubricant 17 include molybdenum compounds (MoS 2 , MoO 3 , molybdate, etc.), tungsten disulfide (WS 2 ), graphite, boron nitride (BN), metals (Cu, Ag, etc.) Metal oxides (Fe 2 O 3 , SnO, ZnO, etc.) can be used.
  • MoS 2 , MoO 3 , molybdate, etc. tungsten disulfide
  • BN boron nitride
  • metals Cu, Ag, etc.
  • Metal oxides Fe 2 O 3 , SnO, ZnO, etc.
  • the lubricant 17 By filling the uneven surface 12d with the lubricant 17 described above, it is possible to improve the wear resistance of the sliding surface of the top foil portion 12a1 without providing the protective coating 16, and to prevent adhesion between the foil and the shaft. it can. Further, since the lubricant 17 has heat resistance, excellent lubricity can be imparted to the sliding surface even under a high temperature atmosphere. In order to fill the lubricant 17 in the gaps between the uneven surfaces 12d, the particle size of the lubricant 17 needs to be smaller than the unevenness of the uneven surface 12d. Further, the particle size of the lubricant shown in FIG. 10 is an example, and by selecting the type of lubricant to be used, the method for forming the uneven surface, the method of surface treatment, and the like, the particle size of the lubricant, and The size of the uneven surface can be adjusted.
  • the lubricant 17 is embedded in the uneven surface 12d of the top foil portion 12a1 as an example, but the uneven surface 15d of the chemical conversion film 15 as in the embodiment shown in FIG. Alternatively, the lubricant 17 may be embedded.
  • the present invention is not limited thereto, and one end in the circumferential direction of each foil is attached to the inner peripheral surface 11a of the foil holder 11, and A so-called leaf-type radial bearing foil with the other end in the circumferential direction as a free end, or a so-called bump foil-type radial bearing foil with a corrugated back foil arranged on the outer diameter of a cylindrical top foil can be used. Good.
  • the present invention can be applied to a thrust foil bearing.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding-Contact Bearings (AREA)
  • Support Of The Bearing (AREA)

Abstract

Un palier (10) à feuille selon l'invention est équipé d'une feuille (12) sur laquelle est formé un film de protection (16), et un support (11) de feuille supportant la feuille (12), et qui supporte un arbre (13) avec un film fluide formé dans un espace de support entre le film de protection (16) et l'arbre (13), ledit palier (10) à feuille ayant sur le côté surface de coulissement de la feuille (12) un film de conversion chimique (15) ayant une surface irrégulière (15a) formée par un procédé de conversion chimique, et le film de protection (16), qui est disposé au-dessus de la surface irrégulière (15a).
PCT/JP2018/009344 2017-03-28 2018-03-09 Palier à feuille Ceased WO2018180388A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017062605A JP2018165523A (ja) 2017-03-28 2017-03-28 フォイル軸受
JP2017-062605 2017-03-28

Publications (1)

Publication Number Publication Date
WO2018180388A1 true WO2018180388A1 (fr) 2018-10-04

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PCT/JP2018/009344 Ceased WO2018180388A1 (fr) 2017-03-28 2018-03-09 Palier à feuille

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JP (1) JP2018165523A (fr)
WO (1) WO2018180388A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7494763B2 (ja) 2021-02-26 2024-06-04 株式会社豊田自動織機 流体機械
JPWO2024195119A1 (fr) * 2023-03-23 2024-09-26

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003056561A (ja) * 2001-08-20 2003-02-26 Mitsubishi Heavy Ind Ltd フォイルガス軸受
JP2008241015A (ja) * 2007-03-29 2008-10-09 Daido Metal Co Ltd 多円弧フォイル流体軸受及びその製造方法
JP2014119094A (ja) * 2012-12-19 2014-06-30 Ntn Corp フォイル軸受

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003056561A (ja) * 2001-08-20 2003-02-26 Mitsubishi Heavy Ind Ltd フォイルガス軸受
JP2008241015A (ja) * 2007-03-29 2008-10-09 Daido Metal Co Ltd 多円弧フォイル流体軸受及びその製造方法
JP2014119094A (ja) * 2012-12-19 2014-06-30 Ntn Corp フォイル軸受

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