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WO2018173390A1 - Plaque de couverture d'étanchéité de micropuits et micropuce - Google Patents

Plaque de couverture d'étanchéité de micropuits et micropuce Download PDF

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Publication number
WO2018173390A1
WO2018173390A1 PCT/JP2017/045315 JP2017045315W WO2018173390A1 WO 2018173390 A1 WO2018173390 A1 WO 2018173390A1 JP 2017045315 W JP2017045315 W JP 2017045315W WO 2018173390 A1 WO2018173390 A1 WO 2018173390A1
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WIPO (PCT)
Prior art keywords
microwell
convex portion
lid plate
sealing lid
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/045315
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English (en)
Japanese (ja)
Inventor
増原　慎
友照 阿部
加藤　義明
マルクオレル ブルン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
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Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of WO2018173390A1 publication Critical patent/WO2018173390A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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  • This technology relates to a microwell sealing lid plate and a microchip.
  • Patent Document 1 a microwell is formed by covering a cell solution on a dish with a film of ethylene vinyl alcohol (EVOH) having gas barrier properties attached to the surface of a microchip made of polydimethylsiloxane (PDMS).
  • EVOH ethylene vinyl alcohol
  • PDMS polydimethylsiloxane
  • Non-Patent Document 1 discloses a technique for measuring the oxygen consumption of cells in a microwell using an oxygen sensor film.
  • the main object of the present technology is to provide a microwell sealing lid plate capable of sealing the microwell.
  • the present technology includes a projecting portion for microwell sealing, and the projecting portion has E ⁇ 5 GPa or less, where Young's modulus is E, and a cross-sectional area in a direction perpendicular to the projecting portion.
  • E Young's modulus
  • a lid plate is provided.
  • the convex portion may include a tapered side surface.
  • the convex portion may have a tapered tip.
  • the convex portion may be formed of a resin having an oxygen permeability at 25 ° C.
  • the convex portion may be formed of a resin having an oxygen permeability at 25 ° C. of 0.1 mL ⁇ cm / m 2 ⁇ 24 h ⁇ atm or less.
  • the convex portion may be formed of an ethylene-vinyl alcohol copolymer resin or a polyvinylidene chloride resin.
  • the convex portion may be provided with a film of a metal, an inorganic compound, or a parylene resin.
  • the convex portion may include a parylene resin film on a metal or inorganic compound film.
  • An antibody or a fluorescent dye may be immobilized on the surface of the convex portion.
  • a reagent may be fixed or coated on the surface of the convex portion.
  • the convex portion may include an oxygen sensor.
  • the present technology includes a substrate on which a microwell is formed and a lid plate on which a convex portion is formed, and the convex portion has a Young's modulus at least at a tip portion corresponding to the microwell.
  • E E ⁇ 5 GPa or less
  • the average cross-sectional area obtained by averaging the cross-sectional area of the cross section in the direction orthogonal to the convex portion over the height direction is S (mm 2 )
  • the height is H
  • the convex section has a circular cross-sectional shape at the tip
  • the microwell has a cylindrical shape
  • the diameter of the tip of the convex is ⁇ 1 ( ⁇ m)
  • the diameter of the microwell is ⁇ 2 ( ⁇ m).
  • ⁇ 1 ⁇ ⁇ 2-10 ( ⁇ m) may be satisfied.
  • the height of the convex portion corresponding to the microwell having ⁇ 2 of 50 ⁇ m may be 150 ⁇ m or more.
  • the height of the convex portion corresponding to the microwell having ⁇ 2 of 40 ⁇ m may be 95 ⁇ m or more.
  • the height of the convex portion corresponding to the microwell having ⁇ 2 of 30 ⁇ m may be 55 ⁇ m or more.
  • microwell sealing lid plate capable of sealing a microwell.
  • the effect of this technique is not necessarily limited to the effect described here, The effect described in this specification may be sufficient.
  • FIG. 1 is a schematic diagram of a microchip 1 having a cover plate 10 and a substrate 20. As shown in FIG. 1, a microwell 21 is formed on the substrate 20. The microwell 21 can accommodate microparticles 30 such as cells. Further, the lid plate 10 includes a convex portion 11 to be inserted into the microwell 21. By inserting the convex portion 11 into the microwell 21, the microwell 21 is sealed, and liquid movement between the microwells 21 can be blocked.
  • FIG. 2 is a schematic diagram showing the process of sealing the microwell.
  • FIG. 2A shows a cover plate 10 and a microwell 21 having a convex portion 11.
  • FIG. 2B the microwell 21 is sealed by inserting the convex portion 11 of the cover plate 10 into the microwell 21. Thereafter, as shown in FIG. 2C, the sealing can be released by removing the convex portion 11 from the microwell 21.
  • a position shift of up to 5 ⁇ m may occur between the corresponding microwell and the convex portion due to shrinkage of the cover plate or substrate or manufacturing error.
  • a microchip has a large number of microwells, and in order to seal all the microwells by inserting convex portions into all the microwells, it is necessary to take measures to eliminate the above-mentioned misalignment. It is.
  • the convex portion provided in the microwell sealing lid plate of the present technology has a structure capable of sealing the microwell even when there is a maximum positional deviation of 5 ⁇ m between the microwell and the convex portion.
  • the convex portion has E ⁇ 5 GPa or less when the Young's modulus is E, and the average cross section of the cross section in the direction orthogonal to the convex portion is averaged over the height direction.
  • the area is S (mm 2 ) and the height is H (mm)
  • the convex portion is formed of a material having a Young's modulus E of 5 GPa or less, and thus has a deformable elasticity.
  • the rigidity of the convex portion is G
  • the shearing force applied in the lateral direction to the convex portion is F
  • the displacement in the lateral direction is ⁇ X
  • ⁇ X G ⁇ 1 ⁇ F ⁇ (H / S) is there.
  • the rigidity G is generally 30 to 40% with respect to the Young's modulus E, and is about 1.5 Gpa or less for plastic resin and about 0.001 Gpa for rubber material.
  • the required displacement ⁇ X is set to 5 ⁇ m
  • the realistic shearing force is assumed to be 10 g
  • the rigidity G is calculated as an assumed maximum value of 1.5 Gpa, H / S ⁇ 75 (mm ⁇ 1 ) If so, ⁇ X ⁇ 5 ⁇ m, and a maximum positional deviation of 5 ⁇ m can be corrected. Therefore, a convex portion satisfying E ⁇ 5 GPa and H / S ⁇ 75 (mm ⁇ 1 ) can be easily fitted into the microwell by elastic deformation even when there is a maximum positional deviation of 5 ⁇ m from the corresponding microwell. Clogging and microwells can be sealed.
  • FIG. 3 is a schematic diagram showing a state in which the convex portion 11 is inserted into the microwell 21.
  • the convex portions 11a and 11b are elastically deformed, respectively. However, it fits into the microwell 21a and the microwell 21b.
  • the material for forming the convex portion is not particularly limited as long as the Young's modulus is E ⁇ 5 GPa or less, but plastic resins such as acrylic and polystyrene, and silicone rubbers such as polydimethylsiloxane (PDMS) are suitable. From the viewpoint of manufacturing efficiency, it is preferable to form not only the convex portions but also the entire lid plate with a material of E ⁇ 5 GPa or less.
  • the shape of the convex portion is not particularly limited as long as the microwell can be sealed, and is cylindrical, elliptical, polygonal, frustoconical, inverted frustoconical, elliptical frustum, inverted elliptical frustum, polygonal frustum, A reverse polygon frustum shape, a taper shape, a reverse taper shape, etc. are mentioned.
  • the convex portion has a side surface that is tapered from the root side, which is the lid plate side, toward the tip portion, that is, a tapered side surface.
  • the tip of the convex portion is more tapered.
  • the shape of the convex portion that satisfies the above-mentioned H / S ⁇ 75 (mm ⁇ 1 ) is, for example, a cylindrical shape having a diameter of 50 ⁇ m and a height H of 150 ⁇ m or more, and a diameter of 40 ⁇ m. And a columnar shape having a height H of 95 ⁇ m or more and a columnar shape having a diameter of 30 ⁇ m and a height of 55 ⁇ m or more.
  • the height of the convex portion is preferably 150 ⁇ m or more for a microwell having a diameter of 50 ⁇ m, and the height of the convex portion is preferably 95 ⁇ m or more for a microwell having a diameter of 40 ⁇ m.
  • the height of the convex portion is preferably 55 ⁇ m or more for a microwell having a diameter of 30 ⁇ m.
  • the microchip of the present technology includes the substrate and the lid plate.
  • a material for forming the substrate a material known in the art can be used. Examples thereof include plastic resins such as acrylic and polystyrene, silicone rubbers such as PDMS, and glass.
  • the shape of the microwell formed on the substrate is not particularly limited as long as it can be sealed by the convex portion formed on the cover plate, and is cylindrical, elliptical, polygonal, frustoconical, inverted frustoconical, or elliptical cone.
  • a trapezoid, a reverse elliptical frustum, a polygonal frustum, a reverse polygon frustum, a taper shape, a reverse taper shape, etc. are mentioned.
  • At least the tip of the convex portion formed on the cover plate is at a position corresponding to the microwell formed on the substrate. That is, when the lid plate and the substrate are overlapped, it is preferable that the tip of the convex portion is located inside the corresponding microwell. With such a configuration, even if there is a positional shift between the corresponding convex portion and the microwell, the convex portion is fitted into the microwell while being elastically deformed, and the microwell is sealed. It is possible.
  • the convex portion when the convex portion is inserted into the microwell in a state where the convex portion and the microwell are coaxially located, it is preferable that a gap of 5 ⁇ m or more is provided between the tip portion of the convex portion and the inner side surface of the microwell. .
  • FIG. 4 is a schematic diagram showing the tip 111 and the microwell 21 of the protrusion 11.
  • the diameter of the tip portion 111 is ⁇ 1. ( ⁇ m), and when the diameter of the microwell 21 is ⁇ 2 ( ⁇ m), it is preferable that ⁇ 1 ⁇ ⁇ 2-10 ( ⁇ m).
  • FIG. 5 is a schematic diagram showing the convex portion 11 and the microwell 21.
  • the convex portion 11 shown in FIG. 5 has a cylindrical shape except for the tapered tip portion 111.
  • the microwell 21 has a cylindrical shape.
  • the height H of the convex portion 11 is 80 ⁇ m.
  • the height Ht of the tapered portion of the tip 111 is 30 ⁇ m.
  • the diameter ⁇ 1 of the tip 111 is 10 ⁇ m.
  • the diameter ⁇ 3 of the cylindrical portion of the convex portion 11 is 30 ⁇ m.
  • the diameter ⁇ 2 of the microwell 21 is 20 ⁇ m.
  • the depth Dw of the microwell 21 is 35 ⁇ m.
  • the convex portion 11 enters 15 ⁇ m into the microwell 21 and seals the microwell 21.
  • the substrate size may be 5.0 mm ⁇ 5.0 mm
  • the number of wells may be 500 ⁇ 500
  • the microwell pitch may be 80 ⁇ m in the vertical and horizontal directions.
  • the size of the cover plate may be 4.5 mm ⁇ 4.5 mm, and the number of protrusions and the pitch may be matched with the number of wells and the pitch of the substrate.
  • a space is formed between the substrate and the lid plate in a state where the convex portion is inserted into the microwell. Referring to FIG. 3 again, a space 40 is formed between the cover plate 10 and the substrate 20.
  • the liquid when a liquid such as a culture solution is stored in the microwell 21 together with the microparticles to be analyzed, the liquid may overflow from the microwell 21 by inserting the convex portion 11 into the microwell 21. is there.
  • the space 40 With the space 40 with the microchip of the present technology, it is possible to prevent the liquid overflowing from the microwell 21 from escaping into the space 40 and remaining between the lid plate 10 and the substrate 20.
  • the microchip of the present technology allows the liquid overflowing from the microwell to escape by the space formed between the cover plate and the substrate, and improves the sealing performance of the microwell.
  • Second embodiment (configuration example including a convex portion formed of a highly airtight material)
  • gas transfer as well as liquid transfer between the microwells is possible. It is also necessary to shut off.
  • high air tightness to the convex portion for sealing the microwell.
  • a resin having an oxygen permeability at 25 ° C. of 0.5 mL ⁇ cm / m 2 ⁇ 24 h ⁇ atm or less is preferable. If the material has an oxygen permeability in such a range, a change in the amount of gas dissolved in the liquid in the microwell can be measured.
  • a resin having an oxygen permeability at 25 ° C. of 0.1 mL ⁇ cm / m 2 ⁇ 24 h ⁇ atm or less is preferred.
  • the oxygen permeability is also referred to as “oxygen permeability” and can be calculated based on JIS K 7126 (reference: Japan Plastics Industry Federation “Plastics” 51 (6), 119-127, 2000-06. ).
  • the convex portion is formed of an elastically deformable material having a Young's modulus E ⁇ 5 GPa or less.
  • the resin having E ⁇ 5 GPa or less and oxygen permeability at 25 ° C. of 0.1 mL ⁇ cm / m 2 ⁇ 24 h ⁇ atm or less is an ethylene-vinyl alcohol copolymer (EVOH) resin or polyvinylidene chloride (PVDC). Resins are preferred.
  • Third embodiment (configuration example including a coating film on a convex portion)
  • a film having a gas barrier property on the convex portion.
  • the material for forming the film is not particularly limited as long as it has a gas barrier property, but is preferably a metal such as aluminum or aluminum oxide, an inorganic compound such as silicon dioxide or silicon nitride, or a parylene resin (paraxylylene resin). These materials have high gas barrier properties, and can impart high airtightness that can measure changes in the amount of dissolved gas in the microwell to the protrusions.
  • FIG. 6 is a cross-sectional view showing the convex portion 11 including a coating film having gas barrier properties.
  • FIG. 6A shows an example in which the convex portion 11 includes a metal film (metal vapor deposition film) 51 such as aluminum oxide.
  • Parylene resin is suitable not only for gas barrier properties but also for high biocompatibility, and is therefore suitable for handling biological samples such as cells in a microwell.
  • FIG. 6B shows an example in which the convex portion 11 includes a parylene resin coating 52.
  • a product “Parylene C” manufactured by Specialty Coating System can be deposited at room temperature using a vacuum deposition apparatus.
  • the convex portion may be provided with a parylene resin film on a metal or inorganic compound film. Since the parylene resin also has chemical resistance, the biocompatibility and chemical resistance of the convex portion can be improved by laminating the parylene resin film.
  • FIG. 6C shows an example in which the convex portion 11 includes a parylene resin film 52 on a metal film 51.
  • the convex part may be provided with a film having gas barrier properties on the entire surface, but it is sufficient that at least the part in contact with the microwell when the microwell is inserted has the film.
  • the tip of the convex portion is tapered, only the tapered portion may have a coating.
  • the corresponding microwell when the convex portion has a high airtightness, the corresponding microwell preferably has a high airtightness. Thereby, the inflow and outflow of the gas in a microwell can be interrupted
  • a gas barrier film in the microwell As a means for imparting high airtightness to the microwell, it is conceivable to form a gas barrier film in the microwell. From the viewpoint of manufacturing cost, a substrate having a microwell is formed of a material having a high gas barrier property. It is preferable to do. Since the substrate material does not necessarily need to be elastically deformable, glass may be used.
  • Fourth embodiment (configuration example having antibody, fluorescent dye or reagent on the surface of the convex portion)
  • An antibody or a fluorescent dye may be immobilized on the surface of the convex part, and a reagent may be fixed or coated.
  • a reagent may be fixed or coated.
  • the substance present in the microwell can be detected, captured and recovered.
  • cell-derived substances can be detected and captured.
  • the secretion of the cell may be detected and captured by immersing the convex portion according to the present embodiment in a microwell containing a culture solution containing cells.
  • cells may be crushed in a microwell to elute target substances such as nucleic acids and proteins, and the protrusions according to the present embodiment may be immersed therein to detect and capture the substances in the cells.
  • FIG. 7 is a cross-sectional view schematically showing an example of detecting cell secretions.
  • the convex portion 11 includes a parylene resin coating 52, and the antibody 55 is immobilized on the parylene resin coating 52.
  • FIG. 7B shows a state in which the convex portion 11 is inserted into the microwell 21.
  • the antibody 55 is bound to the cell secretion 63 in the microwell 21.
  • FIG. 7C shows a state in which the convex portion 11 is pulled out from the microwell 21.
  • FIG. 7D shows a state in which the cell secretion 63 bound to the antibody 55 present on the surface of the convex portion 11 is reacted with the antibody 72 present on the surface of the fluorescent bead 71.
  • the microchip of this embodiment can be used to optically detect a target substance.
  • the convex portion may have an antibody, a fluorescent dye or a reagent on the entire surface, but the portion inserted into the microwell only needs to have at least the antibody, the fluorescent dye or the reagent.
  • the tip of the convex portion is tapered, only the tapered portion may have an antibody, a fluorescent dye, or a reagent.
  • the convex portion includes an antibody, a fluorescent dye, or a reagent. It is preferable to do. For example, after detecting a target substance by inserting a convex portion coated with a reagent into a microwell containing cells, the convex portion is pulled out and another reagent is applied with the cells remaining in the microwell. By inserting the projected portions, it is possible to continuously observe a plurality of chemical reactions targeting a specific cell.
  • the convex portion may include an oxygen sensor.
  • the amount of oxygen in the microwell can be measured. For example, by immersing a convex portion having an oxygen sensor in a microwell containing a culture solution containing cells, the oxygen consumption of the cells can be measured from the change in the dissolved oxygen amount in the microwell.
  • the configuration according to the second embodiment or the third embodiment is adopted to increase the airtightness of the microwell. Is preferred.
  • the oxygen sensor is not particularly limited as long as measurement in a microwell is possible, and a known oxygen sensor may be used.
  • a configuration will be described in which a film-like oxygen sensor formed using platinum octaethylformylphylline (PlatinumtaOctaethylprophyrin, PtOEP) is provided on a convex portion.
  • FIG. 8 is a cross-sectional view showing a convex portion provided with a film-like oxygen sensor.
  • FIG. 8A shows an example in which the convex portion 11 includes a parylene resin coating 52 on a metal coating 51.
  • FIG. 8B shows an example in which an oxygen sensor 53 containing PtOEP is provided on a parylene resin coating.
  • the oxygen sensor may be provided on the entire convex portion, but may be provided at least in a portion to be inserted into the microwell.
  • the tip of the convex portion is tapered, only the tapered portion may include an oxygen sensor.
  • the oxygen sensor After the oxygen sensor is inserted into the microwell, laser light having a wavelength of about 350 nm collected by the objective lens is irradiated onto the oxygen sensor from the bottom surface of the substrate of the microwell, and phosphorescence having a wavelength of about 615 nm is emitted.
  • laser light having a wavelength of about 350 nm collected by the objective lens is irradiated onto the oxygen sensor from the bottom surface of the substrate of the microwell, and phosphorescence having a wavelength of about 615 nm is emitted.
  • FIG. 8C shows an example in which a protective film 54 is provided on the oxygen sensor 53.
  • the protective film is preferably formed of a material having a high oxygen permeability and low autofluorescence so that measurement by the oxygen sensor is not hindered.
  • a material having a high oxygen permeability and low autofluorescence so that measurement by the oxygen sensor is not hindered.
  • polystyrene can be used.
  • the protective film may be provided as long as the oxygen sensor can be protected, and may not be provided on the entire convex portion.
  • the convex portion has an oxygen sensor.
  • the oxygen consumption is measured using the convex part having an oxygen sensor. It is possible to analyze specific cells continuously from various viewpoints.
  • a unique address may be assigned to each of the convex portion and the microwell.
  • a projection for microwell sealing is provided,
  • the convex portion is When Young's modulus is E, E ⁇ 5 GPa or less, H / S ⁇ 75, where S (mm 2 ) is the average cross-sectional area obtained by averaging the cross-sectional areas in the direction perpendicular to the convex portions over the height direction, and H (mm) is the height.
  • the convex portion includes a metal, inorganic compound, or parylene resin coating.
  • the convex portion includes a parylene resin coating on a metal or inorganic compound coating.
  • microwell sealing lid plate according to any one of [1] to [8], wherein an antibody or a fluorescent dye is immobilized on the surface of the convex portion.
  • an antibody or a fluorescent dye is immobilized on the surface of the convex portion.
  • Young's modulus is E, E ⁇ 5 GPa or less, H / S ⁇ 75, where S (mm 2 ) is the average cross-sectional area obtained by averaging the cross-sectional areas in the direction perpendicular to the convex portions over the height direction, and H (mm) is the height.
  • the distance between the tip of the convex portion and the inner surface of the microwell is 5 ⁇ m or more.
  • the microchip according to [12].
  • the cross-sectional shape of the tip of the convex portion is circular,
  • the microwell is cylindrical, [12] or [13], wherein ⁇ 1 ⁇ ⁇ 2-10 ( ⁇ m) when the diameter of the tip of the convex portion is ⁇ 1 ( ⁇ m) and the diameter of the microwell is ⁇ 2 ( ⁇ m).

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  • Optical Measuring Cells (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)

Abstract

La présente invention concerne une plaque de recouvrement d'étanchéité de micropuits permettant de fermer de manière étanche des micropuits. Ladite plaque de couverture d'étanchéité de micropuits comprend des saillies permettant de fermer de manière étanche des micropuits, chacune des saillies satisfaisant la condition : E ≤ 5 GPa, E représentant le module de Young et satisfaisant en outre la condition : H/S ≥ 75 (mm-1), S (mm2) représentant une zone de section transversale moyenne obtenue par le moyennage, le long de la direction de hauteur, des zones de section transversale de sections transversales dans la direction orthogonale à la saillie, et H (mm) représentant la hauteur.
PCT/JP2017/045315 2017-03-21 2017-12-18 Plaque de couverture d'étanchéité de micropuits et micropuce Ceased WO2018173390A1 (fr)

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JP2017054217 2017-03-21
JP2017-054217 2017-03-21

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020067187A1 (fr) * 2018-09-28 2020-04-02 株式会社エンプラス Joint de type feuille

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Publication number Priority date Publication date Assignee Title
JPH04315946A (ja) * 1991-01-23 1992-11-06 Becton Dickinson & Co 試料を多数のアリコットに分画する装置
JP2002505440A (ja) * 1998-03-03 2002-02-19 メルク エンド カムパニー インコーポレーテッド マイクロプレートと共に使用するための密閉器
JP2005345203A (ja) * 2004-06-01 2005-12-15 Nippon Sheet Glass Co Ltd 凹部アレイ基板用蓋材およびその製造方法、並びに蓋付き凹部アレイ基板
JP2006090749A (ja) * 2004-09-21 2006-04-06 Olympus Corp 温度調整装置
JP2009069161A (ja) * 2002-12-04 2009-04-02 Applera Corp 生物学的試験において使用するためのサンプル物質とサンプル物質を充填するための方法
JP2009524407A (ja) * 2005-10-18 2009-07-02 ザ リージェンツ オブ ザ ユニバーシティ オブ ミシガン マイクロ流体細胞培養デバイス
JP2010249520A (ja) * 2009-04-10 2010-11-04 Olympus Corp 液体試料解析用容器及び液体試料の解析方法。
JP2011505548A (ja) * 2007-11-22 2011-02-24 サムスン エレクトロニクス カンパニー リミテッド 薄膜バルブ装置及びその制御装置
JP2014507937A (ja) * 2011-01-06 2014-04-03 メソ スケール テクノロジーズ エルエルシー アッセイカートリッジ及びその使用方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04315946A (ja) * 1991-01-23 1992-11-06 Becton Dickinson & Co 試料を多数のアリコットに分画する装置
JP2002505440A (ja) * 1998-03-03 2002-02-19 メルク エンド カムパニー インコーポレーテッド マイクロプレートと共に使用するための密閉器
JP2009069161A (ja) * 2002-12-04 2009-04-02 Applera Corp 生物学的試験において使用するためのサンプル物質とサンプル物質を充填するための方法
JP2005345203A (ja) * 2004-06-01 2005-12-15 Nippon Sheet Glass Co Ltd 凹部アレイ基板用蓋材およびその製造方法、並びに蓋付き凹部アレイ基板
JP2006090749A (ja) * 2004-09-21 2006-04-06 Olympus Corp 温度調整装置
JP2009524407A (ja) * 2005-10-18 2009-07-02 ザ リージェンツ オブ ザ ユニバーシティ オブ ミシガン マイクロ流体細胞培養デバイス
JP2011505548A (ja) * 2007-11-22 2011-02-24 サムスン エレクトロニクス カンパニー リミテッド 薄膜バルブ装置及びその制御装置
JP2010249520A (ja) * 2009-04-10 2010-11-04 Olympus Corp 液体試料解析用容器及び液体試料の解析方法。
JP2014507937A (ja) * 2011-01-06 2014-04-03 メソ スケール テクノロジーズ エルエルシー アッセイカートリッジ及びその使用方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020067187A1 (fr) * 2018-09-28 2020-04-02 株式会社エンプラス Joint de type feuille
JP2020048523A (ja) * 2018-09-28 2020-04-02 株式会社エンプラス シート状ガスケット

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