WO2018168714A1 - オキシムエステル化合物及び該化合物を含有する光重合開始剤 - Google Patents
オキシムエステル化合物及び該化合物を含有する光重合開始剤 Download PDFInfo
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- WO2018168714A1 WO2018168714A1 PCT/JP2018/009317 JP2018009317W WO2018168714A1 WO 2018168714 A1 WO2018168714 A1 WO 2018168714A1 JP 2018009317 W JP2018009317 W JP 2018009317W WO 2018168714 A1 WO2018168714 A1 WO 2018168714A1
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- 0 CCC(CC)C(C)c1c(C2C(CC)C(C)C2C)c(C)c(*C)c(C=C)c1C Chemical compound CCC(CC)C(C)c1c(C2C(CC)C(C)C2C)c(C)c(*C)c(C=C)c1C 0.000 description 3
- BPFRSIOQRAGQBV-UHFFFAOYSA-N CCC(C)c1c(C)c(C)c(C)c(C)c1C Chemical compound CCC(C)c1c(C)c(C)c(C)c(C)c1C BPFRSIOQRAGQBV-UHFFFAOYSA-N 0.000 description 1
- YXFVVABEGXRONW-UHFFFAOYSA-N Cc1ccccc1 Chemical compound Cc1ccccc1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D307/00—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom
- C07D307/77—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D307/78—Benzo [b] furans; Hydrogenated benzo [b] furans
- C07D307/79—Benzo [b] furans; Hydrogenated benzo [b] furans with only hydrogen atoms, hydrocarbon or substituted hydrocarbon radicals, directly attached to carbon atoms of the hetero ring
- C07D307/80—Radicals substituted by oxygen atoms
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D333/00—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom
- C07D333/50—Heterocyclic compounds containing five-membered rings having one sulfur atom as the only ring hetero atom condensed with carbocyclic rings or ring systems
- C07D333/52—Benzo[b]thiophenes; Hydrogenated benzo[b]thiophenes
- C07D333/54—Benzo[b]thiophenes; Hydrogenated benzo[b]thiophenes with only hydrogen atoms, hydrocarbon or substituted hydrocarbon radicals, directly attached to carbon atoms of the hetero ring
- C07D333/56—Radicals substituted by oxygen atoms
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D405/00—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom
- C07D405/02—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing two hetero rings
- C07D405/10—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing two hetero rings linked by a carbon chain containing aromatic rings
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D405/00—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom
- C07D405/14—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing three or more hetero rings
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D409/00—Heterocyclic compounds containing two or more hetero rings, at least one ring having sulfur atoms as the only ring hetero atoms
- C07D409/02—Heterocyclic compounds containing two or more hetero rings, at least one ring having sulfur atoms as the only ring hetero atoms containing two hetero rings
- C07D409/10—Heterocyclic compounds containing two or more hetero rings, at least one ring having sulfur atoms as the only ring hetero atoms containing two hetero rings linked by a carbon chain containing aromatic rings
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D409/00—Heterocyclic compounds containing two or more hetero rings, at least one ring having sulfur atoms as the only ring hetero atoms
- C07D409/14—Heterocyclic compounds containing two or more hetero rings, at least one ring having sulfur atoms as the only ring hetero atoms containing three or more hetero rings
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D417/00—Heterocyclic compounds containing two or more hetero rings, at least one ring having nitrogen and sulfur atoms as the only ring hetero atoms, not provided for by group C07D415/00
- C07D417/02—Heterocyclic compounds containing two or more hetero rings, at least one ring having nitrogen and sulfur atoms as the only ring hetero atoms, not provided for by group C07D415/00 containing two hetero rings
- C07D417/10—Heterocyclic compounds containing two or more hetero rings, at least one ring having nitrogen and sulfur atoms as the only ring hetero atoms, not provided for by group C07D415/00 containing two hetero rings linked by a carbon chain containing aromatic rings
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D417/00—Heterocyclic compounds containing two or more hetero rings, at least one ring having nitrogen and sulfur atoms as the only ring hetero atoms, not provided for by group C07D415/00
- C07D417/14—Heterocyclic compounds containing two or more hetero rings, at least one ring having nitrogen and sulfur atoms as the only ring hetero atoms, not provided for by group C07D415/00 containing three or more hetero rings
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
Definitions
- the present invention relates to a novel oxime ester compound useful as a photopolymerization initiator for use in a photosensitive composition, a photopolymerization initiator containing the compound, and a photosensitizer containing the photopolymerization initiator and an ethylenically unsaturated compound.
- the present invention relates to a sex composition.
- the photosensitive composition is obtained by adding a photopolymerization initiator to an ethylenically unsaturated compound and can be polymerized and cured by irradiating energy rays (light). Therefore, a photocurable ink, a photosensitive printing plate It is used for various photoresists.
- Patent Document 1 discloses a highly sensitive oxime ester photoinitiator having a heteroaromatic ring
- Patent Document 2 discloses a photopolymerization initiator at 365 to 405 nm.
- a high-sensitivity photopolymerization initiator having a large absorption capacity is disclosed
- Patent Document 3 discloses a photopolymerization initiator that can achieve a photosensitive composition with high sensitivity and high resolution.
- the sensitivity of the oxime ester compounds described in these patent documents is not always satisfactory, and further improvement in sensitivity is desired.
- the colored alkali-developable photosensitive resin composition containing a colorant used for a color filter or the like is required to have particularly high sensitivity, and the photopolymerization initiator in the resist needs to have a high concentration.
- a high concentration photopolymerization initiator has caused residues due to deterioration of developability, contamination of the photomask and heating furnace due to sublimation, and the like.
- the photopolymerization initiator used has a high transmittance in the visible light region.
- the transmittance in the visible light region is low, a problem such as a decrease in luminance occurs.
- the photopolymerization initiator is used by being dissolved in an organic solvent when used in various applications, it is also required to have high solubility in the organic solvent.
- the problem to be solved is that there has been no photopolymerization initiator having satisfactory sensitivity, high solubility in an organic solvent, and high transmittance in the visible light region.
- an object of the present invention is a highly sensitive compound that can efficiently absorb and activate near ultraviolet light such as 365 nm, has high solubility in an organic solvent, and has high transmittance in the visible light region.
- the object is to provide a novel compound useful as a polymerization initiator, a photopolymerization initiator using the compound, and a photosensitive composition.
- the present invention achieves the above object by providing the following [1] to [11].
- R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are each independently a group represented by the following general formula (II), hydrogen atom, halogen atom, nitro group, cyano group , Hydroxyl group, carboxyl group, R 21 , OR 21 , SR 21 , NR 22 R 23 , COR 21 , SOR 21 , SO 2 R 21 or CONR 22 R 23 , At least one of R 1 , R 2 , R 3 , R 4 , R 5 and R 6 is a group represented by the following general formula (II), R 7 , R 8 , R 9 , R 10 and R 11 are each independently a group represented by the following general formula (III ⁇ ), a group represented by the following general formula (III ⁇ ), a hydrogen atom, a halogen atom, A nitro group, a cyano group, a hydroxyl group, a carboxyl group, R 21 , OR 21 , SR 21 , NR 22 R 23
- a mercapto group, an isocyanate group or a heterocycle-containing group, the hydrocarbon group having 2 to 20 carbon atoms or the methylene group in the heterocycle-containing group having 2 to 20 carbon atoms may be represented by —O— , —CO—, —COO—, —OCO—, —NR 24 —, —NR 24 CO—, —S—, —CS—, —SO 2 —, —SCO—, —COS—, —OCS— or CSO
- R 24 represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms
- X 1 represents absence, direct bond, —CO—, —O— or —S—, R 1 and R 2 , R 2 and R 3 , R 3 and R 4 , R 5 and R 6 , R 6 and R 7 , R 7 and R 8 , R 8 and R 9 , R 9 and R 10 , R 10 And R 11 , and R 11 and R 1 may combine to
- R 31 and R 32 each independently represent a hydrogen atom, a halogen atom, a nitro group, a cyano group, a hydrocarbon group having 1 to 20 carbon atoms, or a heterocyclic-containing group having 2 to 20 carbon atoms.
- the hydrogen atom of the hydrocarbon group having 1 to 20 carbon atoms or the heterocyclic group having 2 to 20 carbon atoms represented by R 31 and R 32 is a halogen atom, a nitro group, a cyano group, a hydroxyl group, an amino group, It may be substituted with a carboxyl group, a methacryloyl group, an acryloyl group, an epoxy group, a vinyl group, a vinyl ether group, a mercapto group, an isocyanate group or a heterocyclic group, and the number of carbon atoms represented by R 31 and R 32 is 2 to
- the methylene group in the hydrocarbon group having 20 or the heterocyclic group having 2 to 20 carbon atoms is —O—, —CO—, —COO—, —OCO—, —NR 33 —, —NR 33 CO—, May be substituted with —S—, —CS—, —SO 2 —, —SCO—, —COS
- R 41 , R 42 , R 43 , R 44 , R 45 , R 46 , R 47 , R 48 , R 49 and R 50 are each independently a hydrogen atom, a halogen atom, a nitro group, or a cyano group.
- R 51 , OR 51 , SR 51 , NR 52 R 53 , COR 51 , SOR 51 , SO 2 R 51 or CONR 52 R 53 , R 51 , R 52 and R 53 each independently represent a hydrocarbon group having 1 to 20 carbon atoms or a heterocyclic group containing 2 to 20 carbon atoms,
- the hydrogen atoms in the groups represented by R 51 , R 52 and R 53 are halogen atoms, nitro groups, cyano groups, hydroxyl groups, amino groups, carboxyl groups, methacryloyl groups, acryloyl groups, epoxy groups, vinyl groups, vinyl ether groups.
- a mercapto group, an isocyanate group or a heterocycle-containing group, the hydrocarbon group having 2 to 20 carbon atoms or the methylene group in the heterocycle-containing group having 2 to 20 carbon atoms may be represented by —O— , —CO—, —COO—, —OCO—, —NR 54 —, —NR 54 CO—, —S—, —CS—, —SO 2 —, —SCO—, —COS—, —OCS— or CSO May be replaced with- X 2 and X 3 represent —O—, —S— or —NR 54 —, R 54 represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms, * Represents a bond. )
- R 101 , R 102 , R 103 , R 104 , R 105 , R 106 , R 107 and R 108 are each independently a group represented by the above general formula (II), a hydrogen atom, a halogen atom , A nitro group, a cyano group, a hydroxyl group, a carboxyl group, R 121 , OR 121 , SR 121 , NR 122 R 123 , COR 121 , SOR 121 , SO 2 R 121 or CONR 122 R 123 , At least one of R 101 , R 102 , R 103 , R 104 , R 105 , R 106 , R 107 and R 108 is a group represented by the general formula (II), R 109 , R 110 , R 111 , R 112 and R 113 are each independently a group represented by the general formula (III ⁇ ), a group represented by the general formula (III ⁇ ), a hydrogen atom,
- a mercapto group, an isocyanate group or a heterocycle-containing group, the hydrocarbon group having 2 to 20 carbon atoms or the methylene group in the heterocycle-containing group having 2 to 20 carbon atoms may be represented by —O— , —CO—, —COO—, —OCO—, —NR 124 —, —NR 124 CO—, —S—, —CS—, —SO 2 —, —SCO—, —COS—, —OCS— or CSO May be replaced with- R 124 represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms, X 101 represents absence, direct bond, —CO—, —O— or —S—, R101 and R102 , R102 and R103 , R103 and R104 , R105 and R106 , R106 and R107 , R107 and R108 , R108 and R109 , R109 and R110 , R110 And R 111 , R 111
- a photosensitive composition comprising the photopolymerization initiator (A) according to [5] and an ethylenically unsaturated compound (B).
- a method for producing a cured product comprising the step of curing the composition using the photosensitive composition according to [6] or [7] or the alkali-developable photosensitive resin composition according to [8]. .
- the oxime ester compound of the present invention is a novel compound represented by the above general formula (I ⁇ ) or (I ⁇ ).
- the oxime ester compound has a geometric isomer due to an oxime double bond, but the present invention does not distinguish these. That is, in the present specification, the compound represented by the above general formula (I ⁇ ) or (I ⁇ ) and the exemplified compound thereof represent one or a mixture of two or more of these geometric isomers and have a structure. It is not limited to a specific isomer.
- the hydrocarbon groups having 1 to 20 carbon atoms represented by R 21 to R 24 in the general formula (I ⁇ ) and R 121 to R 124 in the general formula (I ⁇ ) are not particularly limited.
- an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, a cycloalkylalkyl group having 4 to 20 carbon atoms, a carbon atom Represents an aryl group having 6 to 20 carbon atoms and an arylalkyl group having 7 to 20 carbon atoms.
- alkyl group having 1 to 20 carbon atoms examples include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, s-butyl, t-butyl, amyl, isoamyl, t-amyl, hexyl, heptyl, octyl, isooctyl. 2-ethylhexyl, t-octyl, nonyl, isononyl, decyl, isodecyl, undecyl, dodecyl, tetradecyl, hexadecyl, octadecyl, icosyl and the like.
- alkenyl group having 2 to 20 carbon atoms examples include vinyl, ethylene, 2-propenyl, 3-butenyl, 2-butenyl, 4-pentenyl, 3-pentenyl, 2-hexenyl, 3-hexenyl, 5-hexenyl, Examples include 2-heptenyl, 3-heptenyl, 4-heptenyl, 3-octenyl, 3-nonenyl, 4-decenyl, 3-undecenyl, 4-dodecenyl and 4,8,12-tetradecatrienylallyl.
- the above cycloalkyl group having 3 to 20 carbon atoms means a saturated monocyclic or saturated polycyclic alkyl group having 3 to 20 carbon atoms.
- Examples include cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, adamantyl, decahydronaphthyl, octahydropentalene and bicyclo [1.1.1] pentanyl.
- the cycloalkylalkyl group having 4 to 20 carbon atoms means a group having 4 to 20 carbon atoms in which a hydrogen atom of the alkyl group is substituted with a cycloalkyl group.
- aryl group having 6 to 20 carbon atoms examples include phenyl, tolyl, xylyl, ethylphenyl, naphthyl, anthryl, phenanthrenyl, phenyl, biphenylyl, naphthyl, anthryl substituted with one or more of the above alkyl groups. It is done.
- the arylalkyl group having 7 to 20 carbon atoms means a group having 7 to 20 carbon atoms in which a hydrogen atom of the alkyl group is substituted with an aryl group.
- Examples include benzyl, ⁇ -methylbenzyl, ⁇ , ⁇ -dimethylbenzyl, phenylethyl and naphthylpropyl.
- hydrocarbon groups having 1 to 20 carbon atoms because of their high sensitivity as a photopolymerization initiator, an alkyl group having 1 to 12 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, and 3 to 3 carbon atoms
- a cycloalkyl group having 10 carbon atoms, a cycloalkylalkyl group having 4 to 15 carbon atoms, an aryl group having 6 to 15 carbon atoms and an arylalkyl group having 7 to 15 carbon atoms are particularly preferred.
- heterocyclic group containing 2 to 20 carbon atoms represented by R 21 to R 23 in the general formula (I ⁇ ) and R 121 to R 123 in the general formula (I ⁇ ) include pyrrolyl, Pyridyl, pyridylethyl, pyrimidyl, pyridazyl, piperazyl, piperidyl, pyranyl, pyranylethyl, pyrazolyl, triazyl, triazylmethyl, pyrrolidyl, quinolyl, isoquinolyl, imidazolyl, benzimidazolyl, triazolyl, furyl, furanyl, benzofuranyl, thienyl, thiophenyl, benzothiophenyl , Thiadiazolyl, thiazolyl, benzothiazolyl, oxazolyl, benzoxazolyl, isothiazolyl, isoxazolyl, indolyl, urolidy
- the heterocyclic group having 2 to 10 carbon atoms is particularly preferable because of its high sensitivity as a photopolymerization initiator.
- the methylene group in the group represented by R 21 to R 23 in the general formula (I ⁇ ) is —O—, —CO—, —COO—, —OCO—, —NR 24 —, —NR 24 CO—.
- —S—, —CS—, —SO 2 —, —SCO—, —COS—, —OCS— or CSO— may be substituted, and R 121 to R in the above general formula (I ⁇ ) methylene groups in the group represented by 123, -O -, - CO -, - COO -, - OCO -, - NR 124 -, - NR 124 CO -, - S -, - CS -, - SO 2 -, -SCO-, -COS-, -OCS- or CSO- may be substituted, and these substitutions are caused by one or more groups, and in the case of groups that can be substituted successively May be successively substituted by two
- R 1 and R 2 , R 2 and R 3 , R 3 and R 4 , R 5 and R 6 , R 6 and R 7 , R 7 and R 8 , R 8 and R 9 , R 9 and R 10 , R 10 R 11 , R 11 and R 1 , R 101 and R 102 , R 102 and R 103 , R 103 and R 104 , R 105 and R 106 , R 106 and R 107 , R 107 and R 108 , R 108 and R 109 , R 109 and R 110 , R 110 and R 111 , R 111 and R 112 , R 112 and R 113, and R 113 and R 101 may be combined to form, for example, cyclopentane, cyclohexane, cyclopentene, Benzene, pyrrolidine, pyrrole, piperazine, morpholine, thiomorpholine, tetrahydropyridine, 5- to 7-membered rings such as lactone
- Examples of the hydrocarbon group having 1 to 20 carbon atoms represented by R 31 to R 33 in the general formula (II) include R 21 to R 24 in the general formula (I ⁇ ) or the general formula (I ⁇ ). Examples thereof include the same hydrocarbon groups having 1 to 20 carbon atoms represented by R 121 to R 124 .
- heterocyclic group having 2 to 20 carbon atoms represented by R 31 and R 32 in the general formula (II) examples include R 21 to R 23 in the general formula (I ⁇ ) and the general formula (I Examples thereof include those similar to the heterocyclic group having 2 to 20 carbon atoms represented by R 121 to R 123 in I ⁇ ).
- the methylene group in the groups represented by R 31 and R 32 is —O—, —CO—, —COO—, —OCO—, —NR 33 —, —NR 33 CO May be substituted with —, —S—, —CS—, —SO 2 —, —SCO—, —COS—, —OCS— or CSO—, this substitution being by one or more groups
- the oxygen atom may be continuously substituted by two or more groups under the condition that they are not adjacent to each other.
- Examples of the hydrocarbon group having 1 to 20 carbon atoms represented by R 51 to R 54 in the general formulas (III ⁇ ) and (III ⁇ ) include R 21 to R 24 in the general formula (I ⁇ ) and the above general formulas Examples thereof include the same hydrocarbon groups having 1 to 20 carbon atoms represented by R 121 to R 124 in the formula (I ⁇ ).
- Examples of the heterocyclic group containing 2 to 20 carbon atoms represented by R 51 to R 53 in the general formulas (III ⁇ ) and (III ⁇ ) include R 21 to R 23 in the general formula (I ⁇ ) and the above Examples thereof include those similar to the heterocyclic group having 2 to 20 carbon atoms represented by R 121 to R 123 in the general formula (I ⁇ ).
- halogen atoms in the general formulas (I ⁇ ), (I ⁇ ), (II), (III ⁇ ) and (III ⁇ ) include fluorine, chlorine, bromine and iodine.
- the oxime ester compound in which at least one of R 3 and R 5 in the general formula (I ⁇ ) is a group represented by the general formula (II) has a good yield at the time of synthesis. It is preferable because purification is easy.
- an oxime ester compound in which at least one of R 103 and R 106 in the general formula (I ⁇ ) is a group represented by the general formula (II) has a yield during synthesis. It is preferable because it is well purified. From the same viewpoint, an oxime ester compound in which both R 103 and R 106 in the general formula (I ⁇ ) are groups represented by the general formula (II) is also preferable.
- R 1 and R 101 are groups or atoms other than the group represented by the general formula (II)
- R 1 and R 101 are hydrogen atoms or cyano groups
- a hydrogen atom is preferable because it is easy to synthesize.
- R 2 to R 5 and R 102 to R 107 is the same as R 1 . That is, when R 2 to R 5 and R 102 to R 106 are groups or atoms other than the group represented by formula (II), R 2 to R 5 and R 102 to R 106 are hydrogen atoms or cyano groups.
- a hydrogen atom is preferable because synthesis is easy.
- R 6 and R 108 are groups or atoms other than the group represented by the general formula (II), R 6 and R 108 are hydrogen atoms. Is preferable because it is easy to synthesize.
- the oxime ester compound in which X 1 in the general formula (I ⁇ ) is absent and R 5 and R 6 are bonded to form a benzene ring is effective in the near ultraviolet light (especially 365 nm). It is preferable because it can be absorbed well.
- X 1 is absent means that in the general formula (I ⁇ ), a bond represented by —X 1 — does not exist and a condensed ring skeleton containing an N atom and X 1 is formed. It means a state that is not done.
- oxime ester compounds in which X 1 is to form a benzene ring bonded R 5 and R 6 in the absence described above, the triphenylamine skeleton rather than a condensed ring skeleton containing N atoms and X 1
- Specific examples of the compound include compound Nos. Described later. 153 to 170.
- “X 101 is absent” means that a bond represented by —X 101 — does not exist and a condensed ring skeleton containing an N atom and X 101 is not formed. means.
- R 31 is an alkyl group having 1 to 12 carbon atoms are preferred because of their high solubility in organic solvents.
- R 32 is an alkyl group having 1 to 4 carbon atoms such as a methyl group or an ethyl group or a phenyl group. 4 is more preferable, and a methyl group is particularly preferable.
- R 9 is preferably a group represented by the general formula (III ⁇ ).
- R 9 is preferably a group represented by the general formula (III ⁇ ).
- R 111 is preferably a group represented by the general formula (III ⁇ ).
- R 111 is preferably a group represented by the general formula (III ⁇ ).
- X 2 in the group represented by the general formula (III ⁇ ) is preferably an oxygen atom or a sulfur atom, and particularly preferably an oxygen atom.
- R 41 to R 45 in the group represented by the general formula (III ⁇ ) are preferably hydrogen atoms.
- X 3 in the group represented by the general formula (III ⁇ ) is preferably an oxygen atom or a sulfur atom. This is because the oxime ester compound efficiently absorbs long-wavelength near-ultraviolet light and becomes highly sensitive as a photopolymerization initiator.
- R 46 to R 50 in the group represented by the general formula (III ⁇ ) are preferably hydrogen atoms.
- X 1 is preferably absent.
- X 101 is preferably absent, and X 101 is preferably sulfur.
- Preferred specific examples of the oxime ester compound of the present invention represented by the above general formula (I ⁇ ) or (I ⁇ ) include the following compound Nos. 1-No. 194. However, the present invention is not limited by the following compounds.
- the oxime ester compound of the present invention represented by the above general formula (I ⁇ ) or (I ⁇ ) is not particularly limited, but can be synthesized, for example, by the method shown below.
- an N-aryl compound that is an intermediate of the oxime ester compound of the present invention is obtained.
- An example of a method for synthesizing this N-aryl compound is as follows. That is, a known and commercially available aldehyde compound and a known and commercially available fluorinated benzene compound are reacted with potassium carbonate to obtain a halogenated aryl compound, which is known as a halogenated aryl compound and is commercially available. By reacting the N-containing heterocyclic compound, an N-aryl compound is obtained.
- the oxime compound of the present invention can be produced by the following method using the N-aryl compound according to the following reaction formula. That is, the ketone compound 1 is obtained by reacting the N-aryl compound with acid chloride, and the oxime compound 1 is obtained by reacting the ketone compound 1 with hydroxylamine hydrochloride. Subsequently, the oxime compound 1 is reacted with an acid anhydride or acid chloride to obtain the oxime ester compound 1 of the present invention represented by the above general formula (I ⁇ ) or (I ⁇ ).
- the oxime compound 1 and the oxime ester compound 1 can also be produced by the method described in Japanese Patent No. 4223071.
- the oxime compound of the present invention can be produced by the following method using the N-aryl compound according to the following reaction formula. That is, the ketone compound 2 is obtained by reacting the N-aryl compound with acid chloride, and the oxime compound 2 is obtained by reacting the ketone compound 2 with isobutyl nitrite. Subsequently, by reacting the oxime compound 2 with an acid anhydride or acid chloride, the oxime ester compound 2 of the present invention represented by the above general formula (I ⁇ ) or (I ⁇ ) is obtained.
- the N-containing heterocyclic compound is previously reacted with an acid chloride to prepare a ketone body of the N-containing heterocyclic compound, and the ketone body is replaced with the N-containing heterocyclic compound.
- the ketone compound 1 or 2 can also be obtained by reacting with the halogenated aryl compound.
- novel oxime ester compound of the present invention described above is useful as a radical polymerization initiator, particularly a photopolymerization initiator or a thermal polymerization initiator. Moreover, the novel oxime ester compound of the present invention can also be suitably used as a sensitizer.
- the photopolymerization initiator of the present invention contains at least one oxime ester compound of the present invention, and can further contain other photopolymerization initiators.
- the content of the oxime ester compound of the present invention in the photopolymerization initiator is preferably 30 to 100% by mass, more preferably 50 to 100% by mass.
- the photopolymerization initiator of the present invention is useful as a photopolymerization initiator for ethylenically unsaturated compounds.
- R 61 and R 62 are each independently a cyano group, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an arylalkyl group having 7 to 30 carbon atoms, or a carbon atom
- R 63 and R 64 are each independently a halogen atom, nitro group, cyano group, hydroxyl group, carboxyl group, R 65 , OR 66 , SR 67 , NR 68 R 69 , COR 70 , SOR 71 , SO 2 R 72 or Represents CONR 73 R 74 , R 63 and R 64 may combine with each other to form a ring, R 63 and R 64 may be the same or different when there are a plurality of R 63 and R 64 respectively.
- R 65 , R 66 , R 67 , R 68 , R 69 , R 70 , R 71 , R 72 , R 73 and R 74 are each independently an alkyl group having 1 to 20 carbon atoms, or 6 to 6 carbon atoms.
- X 4 represents a direct bond or CO
- X 5 represents an oxygen atom, a sulfur atom, a selenium atom, CR 75 R 76 , CO, or PR 77 ;
- R 75 , R 76 and R 77 each independently represents an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms or an arylalkyl group having 7 to 30 carbon atoms,
- a hydrogen atom in the alkyl group or arylalkyl group may be substituted with a halogen atom, a nitro group, a cyano group, a hydroxyl group, a carboxyl group or a heterocyclic group,
- the methylene group in the alkyl group or arylalkyl group may be substituted with —O—, a represents
- the photosensitive composition of the present invention contains the photopolymerization initiator (A) of the present invention and an ethylenically unsaturated compound (B), and as optional components, a colorant (C), an alkali developable compound (D), It contains a combination of a solvent and any additive described below.
- the content of the photopolymerization initiator (A) is not particularly limited, but is preferably 1 to 70 masses with respect to 100 mass parts of the ethylenically unsaturated compound (B). Parts, more preferably 1-50 parts by weight, most preferably 5-30 parts by weight.
- the ethylenically unsaturated compound (B) is not particularly limited as long as it has an ethylenically unsaturated bond, and those conventionally used in photosensitive compositions can be used.
- unsaturated aliphatic hydrocarbons such as ethylene, propylene, butylene, isobutylene, vinyl chloride, vinylidene chloride, vinylidene fluoride, tetrafluoroethylene; (meth) acrylic acid, ⁇ -chloroacrylic acid, itaconic acid, maleic acid, Citraconic acid, fumaric acid, hymic acid, crotonic acid, isocrotonic acid, vinyl acetic acid, allyl acetic acid, cinnamic acid, sorbic acid, mesaconic acid, succinic acid mono [2- (meth) acryloyloxyethyl], phthalic acid mono [2 -(Meth) acryloyloxyethyl], ⁇ -carboxypoly
- A1-No. A4 methyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, tert-butyl (meth) acrylate, cyclohexyl (meth) acrylate, n-octyl (meth) acrylate, ( Isooctyl (meth) acrylate, isononyl (meth) acrylate, stearyl (meth) acrylate, lauryl (meth) acrylate, methoxyethyl (meth) acrylate, dimethylaminomethyl (meth) acrylate, dimethyl (meth) acrylate Aminoethyl, aminopropyl (meth) acrylate, dimethylaminopropyl (meth) acrylate, ethoxyethyl (meth) acrylate, poly (ethoxy) ethyl (meth) acrylate, butoxyethoxy
- ethylenically unsaturated compound (B) examples include Kayrad DPHA, DPEA-12, PEG400DA, THE-330, RP-1040, NPGDA, and PET30 (Nippon Kayaku).
- SPC-1000, SPC-3000 manufactured by Showa Denko), Aronix M-140, M-215, M-350 (manufactured by Toagosei), NK ester A-DPHA-TMPT, A-DCP, A-HD -N, A-9300, TMPT, DCP, NPG and HD-N (manufactured by Shin-Nakamura Chemical Co., Ltd.).
- polyfunctional (meta) having a mono (meth) acrylate polymer having a carboxyl group and a hydroxyl group at both ends, one carboxyl group and two or more (meth) acryloyl groups is suitable for esters of acrylates, unsaturated monobasic acids and polyhydric alcohols or polyhydric phenols.
- the ethylenically unsaturated compounds can be used alone or in admixture of two or more, and when used in admixture of two or more, they are copolymerized in advance and used as a copolymer. You can also.
- the photosensitive composition of the present invention may further contain a colorant (C) to form a colored photosensitive composition.
- a colorant (C) examples include pigments, dyes, and natural pigments. These colorants can be used alone or in admixture of two or more.
- the pigment examples include nitroso compounds; nitro compounds; azo compounds; diazo compounds; xanthene compounds; quinoline compounds; anthraquinone compounds; coumarin compounds; phthalocyanine compounds; isoindolinone compounds; Compound; perylene compound; diketopyrrolopyrrole compound; thioindigo compound; dioxazine compound; triphenylmethane compound; quinophthalone compound; naphthalene tetracarboxylic acid; azo dye, metal complex compound of cyanine dye; lake pigment; furnace method, channel method or thermal Carbon black obtained by the method, or carbon black such as acetylene black, ketjen black or lamp black; Prepared by coating or coating with an epoxy resin, carbon black previously dispersed in a resin in a solvent and adsorbed with 20 to 200 mg / g of resin, an acid or alkaline surface treated carbon black, average Carbon black having a particle size of 8 nm or more and a DBP oil ab
- Graphitized carbon black activated carbon, carbon fiber, carbon nanotube, carbon microcoil, carbon nanohorn, carbon aerogel, fullerene
- aniline black pigment black 7, titanium black
- chromium oxide green, miloli blue, cobalt green, cobalt blue, manganese series Ferrus Organics such as fluoride, phosphate blue, bitumen, ultramarine, cerulean blue, pyridian, emerald green, lead sulfate, yellow lead, zinc yellow, red bean (red iron (III) oxide), cadmium red, synthetic iron black, amber, etc.
- an inorganic pigment can be used. These pigments can be used alone or in combination.
- pigments can also be used as the pigment, for example, Pigment Red 1, 2, 3, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48, 49, 88, 90, 97, 112, 119, 122, 123, 144, 149, 166, 168, 169, 170, 171, 177, 179, 180, 184, 185, 192, 200, 202, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254; Pigment Orange 13, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 65, 71; Pigment Yellow 1, 3, 12, 13, 14, 16, 17, 20, 24, 55, 60, 73, 81, 83, 86, 93, 95, 9 98, 100, 109, 110, 113, 114, 117, 120, 125, 126, 127, 129, 137, 138, 139, 147, 148,
- dyes As the above dyes, azo dyes, anthraquinone dyes, indigoid dyes, triarylmethane dyes, xanthene dyes, alizarin dyes, acridine dyes stilbene dyes, thiazole dyes, naphthol dyes, quinoline dyes, nitro dyes, indamine dyes, oxazine dyes, phthalocyanine dyes And dyes such as cyanine dyes, and the like. These may be used alone or in combination.
- the content of the colorant (C) is preferably 5 to 100 parts by mass, more preferably 10 to 50 parts per 100 parts by mass of the ethylenically unsaturated compound (B). Part by mass.
- the photosensitive composition of the present invention may further contain an alkali developable compound (D) to form an alkali developable photosensitive resin composition.
- an alkali developable compound (D) to form an alkali developable photosensitive resin composition.
- What contains a colorant (C) and an alkali developable compound (D) simultaneously is also called a colored alkali developable photosensitive resin composition.
- the alkali-developable compound (D) is not particularly limited as long as it is a compound soluble in an alkaline aqueous solution, and examples thereof include resins described in JP-A No. 2004-264414.
- alkali-developable compound (D) examples include acrylic acid ester copolymers, phenol and / or cresol novolac epoxy resins, polyphenylmethane type epoxy resins having polyfunctional epoxy groups, epoxy acrylate resins, A resin obtained by allowing an unsaturated monobasic acid to act on an epoxy group of an epoxy compound such as an epoxy compound represented by the formula (V) and further allowing a polybasic acid anhydride to act thereon can be used.
- the epoxy acrylate resin here is one obtained by allowing (meth) acrylic acid to act on the above-mentioned epoxy compound. Examples thereof include Lipoxy SPC-2000, Dicklight UE-777 manufactured by DIC, and Nippon Iupika. Examples include Eupica 4015.
- an epoxy acrylate resin and a resin obtained by allowing an unsaturated monobasic acid to act on an epoxy group of an epoxy compound represented by the following general formula (V) and further causing a polybasic acid anhydride to act Is preferred.
- X 6 is a direct bond, a methylene group, an alkylidene group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, —O—, —S—, —SO— 2 , —SS—, —SO—, —CO—, —OCO— or a group represented by the following [Chemical 35-1], [Chemical 35-2] or [Chemical 35-3], wherein the alkylidene group is a halogen atom.
- Each of R 81 and R 82 independently represents an alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an alkenyl group having 2 to 5 carbon atoms, or Represents a halogen atom, the alkyl group, alkoxy group and alkenyl group may be substituted with a halogen atom, R 81 and R 82 may be the same or different when there are a plurality of R 81 and R 82 , c is an integer from 0 to 4, d is an integer from 0 to 4, m is an integer from 0 to 10, When m is not 0, an optical isomer exists, but any isomer may be used. )
- Z 3 is a hydrogen atom, a phenyl group which may be substituted by an alkyl group having 1 to 10 carbon atoms or an alkoxy group having 1 to 10 carbon atoms, or an alkyl group having 1 to 10 carbon atoms
- Y 1 is an alkyl group having 1 to 10 carbon atoms, 1 to 10 carbon atoms
- An alkoxy group, an alkenyl group having 2 to 10 carbon atoms or a halogen atom wherein the alkyl group, alkoxy group and alkenyl group may be substituted with a halogen atom
- d is an integer of 0 to 5.
- Y 2 and Z 4 are each independently an alkyl group having 1 to 10 carbon atoms which may be substituted with a halogen atom, or 6 carbon atoms which may be substituted with a halogen atom.
- An arylalkenyl group having 6 to 20 carbon atoms that may be substituted, an arylalkyl group having 7 to 20 carbon atoms that may be substituted with a halogen atom, or a carbon that may be substituted with a halogen atom Represents a heterocyclic group having 2 to 20 atoms, or a halogen atom, and the alkylene moiety in the alkyl group and arylalkyl
- Z 4 may form a ring with adjacent Z 4 , p represents an integer of 0 to 4, q represents an integer of 0 to 8, r Represents an integer from 0 to 4, s represents an integer from 0 to 4, and the total number of r and s is an integer from 2 to 4.
- Examples of the unsaturated monobasic acid that acts on the epoxy compound include acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbic acid, hydroxyethyl methacrylate / malate, hydroxyethyl acrylate / malate, hydroxypropyl methacrylate / malate, hydroxypropyl Acrylate / malate, dicyclopentadiene / malate and the like can be mentioned.
- polybasic acid anhydride examples include biphenyltetracarboxylic dianhydride, tetrahydrophthalic anhydride, succinic anhydride, biphthalic anhydride, maleic anhydride, trimellit Acid anhydride, pyromellitic acid anhydride, 2,2'-3,3'-benzophenone tetracarboxylic acid anhydride, ethylene glycol bisanhydro trimellitate, glycerol tris anhydro trimellitate, hexahydrophthalic anhydride, methyl Tetrahydrophthalic anhydride, nadic anhydride, methyl nadic anhydride, trialkyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, 5- (2,5-dioxotetrahydrofuryl) -3-methyl-3-cyclohexene-1 , 2-Dicarboxylic an
- the reaction molar ratio of the epoxy compound, the unsaturated monobasic acid and the polybasic acid anhydride is preferably as follows. That is, in an epoxy adduct having a structure in which 0.1 to 1.0 carboxyl groups of the unsaturated monobasic acid are added to one epoxy group of the epoxy compound, the hydroxyl group 1 of the epoxy adduct is It is preferable that the ratio of the acid anhydride structure of the polybasic acid anhydride is 0.1 to 1.0. Reaction of the said epoxy compound, the said unsaturated monobasic acid, and the said polybasic acid anhydride can be performed in accordance with a conventional method.
- the alkali developable compound may have an ethylenically unsaturated bond. That is, the ethylenically unsaturated compound (B) and the alkali developable compound (D) may be the same compound.
- the compound having alkali developability and having an ethylenically unsaturated bond preferably contains 0.2 to 1.0 equivalent of an unsaturated group.
- this compound calculates content of the above-mentioned photoinitiator (A) and content of a coloring agent (C). Is included in the ethylenically unsaturated compound (B).
- the content of the alkali-developable compound (D) that may have an ethylenically unsaturated bond is determined by the alkali-developable photosensitive composition of the present invention. 1 to 20 mass%, particularly 3 to 12 mass% is preferable in the conductive resin composition.
- the alkali-developable compound (D) that may have an ethylenically unsaturated bond preferably has a solid content acid value in the range of 5 to 120 mgKOH / g, and is a monofunctional or polyfunctional epoxy compound.
- the amount used is preferably selected so as to satisfy the acid value.
- Examples of the monofunctional epoxy compound include glycidyl methacrylate, methyl glycidyl ether, ethyl glycidyl ether, propyl glycidyl ether, isopropyl glycidyl ether, butyl glycidyl ether, isobutyl glycidyl ether, t-butyl glycidyl ether, pentyl glycidyl ether, hexyl glycidyl ether, heptyl Glycidyl ether, octyl glycidyl ether, nonyl glycidyl ether, decyl glycidyl ether, undecyl glycidyl ether, dodecyl glycidyl ether, tridecyl glycidyl ether, tetradecyl glycidyl ether, pentadecy
- the polyfunctional epoxy compound when one or more compounds selected from the group consisting of bisphenol-type epoxy compounds and glycidyl ethers are used, a (colored) alkali-developable photosensitive resin composition having better characteristics is obtained. This is preferable.
- the epoxy compound represented by the said general formula (V) can be used,
- bisphenol-type epoxy compounds such as a hydrogenated bisphenol-type epoxy compound, can also be used.
- glycidyl ethers examples include ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, 1,8-octanediol diglycidyl ether, 1,10-decanediol diglycidyl ether, 2,2-dimethyl-1,3-propanediol diglycidyl ether, diethylene glycol diglycidyl ether, triethylene glycol diglycidyl ether, tetraethylene glycol diglycidyl ether, hexaethylene glycol diglycidyl Ether, 1,4-cyclohexanedimethanol diglycidyl ether, 1,1,1-tri (glycidyloxymethyl) propane, 1,1,1-to (Glycidyloxymethyl) ethane, 1,1,1-tri (glycidy
- novolac epoxy compounds such as phenol novolac epoxy compounds, biphenyl novolac epoxy compounds, cresol novolac epoxy compounds, bisphenol A novolac epoxy compounds, dicyclopentadiene novolac epoxy compounds; 3,4-epoxy-6-methyl Cycloaliphatic epoxy such as cyclohexylmethyl-3,4-epoxy-6-methylcyclohexanecarboxylate, 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, 1-epoxyethyl-3,4-epoxycyclohexane Compound: Glycidyl esters such as diglycidyl phthalate, diglycidyl tetrahydrophthalate, glycidyl dimer, tetraglycidyl diamino Glycidylamines such as phenylmethane, triglycidyl P-aminophenol and N, N-diglycidylaniline; heterocycl
- the photosensitive composition of the present invention can further contain a solvent.
- a solvent capable of dissolving or dispersing each of the above components (photopolymerization initiator (A), ethylenically unsaturated compound (B), etc.) as necessary, for example, methyl ethyl ketone, methyl amyl ketone, Ketones such as diethyl ketone, acetone, methyl isopropyl ketone, methyl isobutyl ketone, cyclohexanone, 2-heptanone; ethyl ether, dioxane, tetrahydrofuran, 1,2-dimethoxyethane, 1,2-diethoxyethane, dipropylene glycol dimethyl ether, etc.
- Ether solvents such as methyl acetate, ethyl acetate, acetate-n-propyl, isopropyl acetate, n-butyl acetate, cyclohexyl acetate, ethyl lactate, dimethyl succinate, texanol, etc .; ethylene glycol monomethyl ether, ethylene glycol Cellosolve solvents such as methanol monoethyl ether; alcohol solvents such as methanol, ethanol, iso- or n-propanol, iso- or n-butanol, amyl alcohol; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, propylene Ether ester solvents such as glycol-1-monomethyl ether-2-acetate (PGMEA), dipropylene glycol monomethyl ether acetate, 3-methoxybutyl ether acetate, ethoxyethyl ether propionate;
- solvents can be used as one or a mixture of two or more.
- ketones, ether ester solvents, etc., particularly propylene glycol-1-monomethyl ether-2-acetate, cyclohexanone, etc. have good compatibility between the resist and the photopolymerization initiator (A) in the photosensitive composition. Therefore, it is preferable.
- the content of the solvent is not particularly limited, but is preferably 30 to 95% by mass, more preferably 50 to 95% by mass in 100% by mass of the total amount of the photosensitive composition. It is.
- the thickness of the cured product can be appropriately controlled when obtaining a cured product.
- the photosensitive composition of the present invention may contain p-anisole, hydroquinone, pyrocatechol, t-butylcatechol, an inorganic compound, a latent additive, an organic polymer, a chain transfer agent, and a sensitizer as necessary.
- Surfactant silane coupling agent, melamine compound, thermal polymerization inhibitor; plasticizer; adhesion promoter; filler; antifoaming agent; leveling agent; surface conditioner; antioxidant;
- Conventional additives such as a dispersion aid, an ink repellent agent, an aggregation inhibitor, a catalyst, a curing accelerator, a cross-linking agent, and a thickener can be added.
- a colorant (C) and / or a dispersant for dispersing an inorganic compound can be added.
- the dispersant is not limited as long as it can disperse and stabilize the colorant (C) or the inorganic compound, and a commercially available dispersant, for example, BYK series manufactured by BYK Chemie, Inc. can be used.
- a polymer dispersant comprising a polyester, polyether, or polyurethane having a basic functional group, in particular, the basic functional group is an amine and / or a quaternary salt thereof, and the amine value is 1 to 100 mgKOH / g.
- the basic functional group is an amine and / or a quaternary salt thereof, and the amine value is 1 to 100 mgKOH / g.
- the latent additive is inactive at room temperature, in the light exposure step and in the pre-bake step, and is protected at 100 to 250 ° C. or heated at 80 to 200 ° C. in the presence of an acid / base catalyst. Is activated by desorption. Examples of the effects obtained by activation include oxidation prevention, ultraviolet absorption, antifouling property, recoatability and adhesion.
- the latent additive those described in International Publication No. 2014/021023 pamphlet can be preferably used.
- Preferred examples of the latent additive include those represented by the following general formulas (A) to (C) in addition to the latent additive described in International Publication No. 2014/021023 pamphlet.
- ring A 1 is a six-membered alicyclic ring, aromatic ring or heterocyclic ring;
- R 81 , R 82 , R 83 , R 84 and R 85 each have 1 to 40 carbon atoms which may have a hydrogen atom, a halogen atom, a cyano group, a hydroxyl group, a nitro group, a carboxyl group or a substituent.
- R 92 , R 93 , R 94 and R 95 are each a hydrogen atom, a halogen atom, a cyano group, a hydroxyl group, a nitro group, a carboxyl group, an alkyl group having 1 to 40 carbon atoms which may have a substituent, Represents an aryl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, or a heterocyclic group having 2 to 20 carbon atoms, and at least one of R 92 , R 93 , R 94 and R 95 One is not a hydrogen atom.
- X 8 represents —CR 97 R 98 —, —NR 99 —, a divalent aliphatic hydrocarbon group having 1 to 35 carbon atoms, and an aromatic group having 6 to 35 carbon atoms.
- the methylene group in the aliphatic hydrocarbon group may be —O—, —S—, —CO—, —COO—, —OCO— or —NH—, or a combination of these without adjacent oxygen atoms.
- R 97 and R 98 each represents a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, an aryl group having 6 to 20 carbon atoms, or an arylalkyl group having 7 to 20 carbon atoms
- Z 5 and Z 6 are each independently a direct bond, —O—, —S—, —CO—, —CO—O—, —O—CO—, —SO 2 —, —SS—, —SO—.
- Or -NR 100- R 99 and R 100 are each a hydrogen atom, an aliphatic hydrocarbon group having 1 to 35 carbon atoms that may have a substituent, or a 6 to 35 carbon atom that may have a substituent. Represents a heterocyclic group having 2 to 35 carbon atoms which may have an aromatic hydrocarbon group or a substituent, * Represents a bond. )
- R 101 represents a hydrogen atom, a phenyl group which may have a substituent or a cycloalkyl group having 3 to 10 carbon atoms
- R 102 represents an alkyl group having 1 to 10 carbon atoms
- the alkyl group, alkoxy group and alkenyl group may have a substituent
- f is 0 to (It is an integer of 5 and * represents a bond.)
- R 103 and R 104 are each independently an alkyl group having 1 to 10 carbon atoms which may have a substituent, or 6 carbon atoms which may have a substituent.
- An arylalkenyl group having 6 to 20 carbon atoms that may have, an arylalkyl group having 7 to 20 carbon atoms that may have a substituent, and a carbon that may have a substituent Represents a heterocyclic group having 2 to 20 atoms or a halogen atom, and the methylene group in the alkyl group and arylalkyl group may be interrupted by an unsaturated bond, —O— or —S—, and R 103 is , Ring between adjacent R 103 B represents a number from 0 to 4, c represents a number from 0 to 8, g represents a number from 0 to 4, h represents a number from 0 to 4, g and (The total number of h is 2 to 4.)
- R 111 , R 112 , R 113 and R 114 are a hydrogen atom, a halogen atom, a cyano group, a hydroxyl group, a nitro group, a carboxyl group, or an alkyl group having 1 to 40 carbon atoms which may have a substituent.
- Y 11 represents a trivalent aliphatic hydrocarbon group having 1 to 35 carbon atoms, an alicyclic hydrocarbon group having 3 to 35 carbon atoms, or 6 to 35 carbon atoms.
- Z 11 , Z 12 and Z 13 are each independently a direct bond, —O—, —S—, —CO—, —CO—O—, —O—CO—, —SO 2 —, —SS—, -SO -, - NR 121 -, - PR 121 -, which may have a substituent aliphatic hydrocarbon group having a carbon number of 1 to 35 carbon atoms which may have a substituent
- R 121 is a hydrogen atom, an aliphatic hydrocarbon group having 1 to 35 carbon atoms,
- Y 12 represents a carbon atom, a tetravalent aliphatic hydrocarbon group having 1 to 35 carbon atoms, an aromatic hydrocarbon group having 6 to 35 carbon atoms, or 2 carbon atoms. Represents a heterocyclic group of ⁇ 35,
- the methylene group in the aliphatic hydrocarbon group may be substituted with —COO—, —O—, —OCO—, —NHCO—, —NH— or —CONH—
- Z 11 to Z 14 are each independently a group within the same range as the group represented by Z 11 to Z 13 in the general formula (2).
- Y 13 represents a pentavalent aliphatic hydrocarbon group having 2 to 35 carbon atoms, an aromatic hydrocarbon group having 6 to 30 carbon atoms, or a complex having 2 to 30 carbon atoms. Represents a cyclic group, The aliphatic hydrocarbon group may be interrupted by —COO—, —O—, —OCO—, —NHCO—, —NH— or —CONH—, Z 11 to Z 15 are each independently a group in the same range as the group represented by Z 11 to Z 13 in the general formula (2).
- Y 14 represents a hexavalent aliphatic hydrocarbon group having 2 to 35 carbon atoms, an aromatic hydrocarbon group having 6 to 35 carbon atoms, or a complex having 2 to 35 carbon atoms. Represents a cyclic group, The aliphatic hydrocarbon group may be interrupted by —COO—, —O—, —OCO—, —NHCO—, —NH— or —CONH—, Z 11 to Z 16 are each independently a group in the same range as the group represented by Z 11 to Z 13 in the general formula (2).
- cured material can also be improved by using the said organic polymer (except an ethylenically unsaturated compound (B) and an alkali developable compound (D)).
- the organic polymer include polystyrene, polymethyl methacrylate, methyl methacrylate-ethyl acrylate copolymer, poly (meth) acrylic acid, styrene- (meth) acrylic acid copolymer, (meth) acrylic acid-methyl methacrylate.
- Copolymer ethylene-vinyl chloride copolymer, ethylene-vinyl copolymer, polyvinyl chloride resin, ABS resin, nylon 6, nylon 66, nylon 12, urethane resin, polycarbonate polyvinyl butyral, cellulose ester, polyacrylamide, saturated
- polyester phenol resin, phenoxy resin, polyamideimide resin, polyamic acid resin, epoxy resin, etc.
- polystyrene, (meth) acrylic acid-methyl methacrylate copolymer, and epoxy resin are preferred. Arbitrariness.
- the amount used is preferably 10 to 500 parts by mass with respect to 100 parts by mass of the ethylenically unsaturated compound (B).
- a sulfur atom-containing compound is generally used.
- Alkyl compounds trimethylolpropane tris (3-mercaptoisobutyrate), butanediol bis (3-mercaptoisobutyrate), hexanedithiol, decanedithiol, 1,4- Methyl mercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, trimethylolpropane tristhioglycolate, butanediol bisthiopropionate, trimethylolpropane tristhiopropionate , Trimethylolpropane tristhioglycolate, pentaerythritol tetrakisthiopropionate, pentaerythritol tetrakisthioglycolate, trishydroxyethyltristhiopropionate, diethylthioxanthone, diisopropyl
- the surfactant examples include fluorine-based surfactants such as perfluoroalkyl phosphates and perfluoroalkyl carboxylates; anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulfates; Cationic surfactants such as amine halides and quaternary ammonium salts; Nonionic surfactants such as polyethylene glycol alkyl ethers, polyethylene glycol fatty acid esters, sorbitan fatty acid esters and fatty acid monoglycerides; Amphoteric surfactants; Silicone interfaces Surfactants such as activators can be used, and these can be used alone or in combination.
- fluorine-based surfactants such as perfluoroalkyl phosphates and perfluoroalkyl carboxylates
- anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulf
- silane coupling agent for example, a silane coupling agent manufactured by Shin-Etsu Chemical Co., Ltd. can be used. Among them, an isocyanate group, a methacryloyl group, or an epoxy group, such as KBE-9007, KBM-502, and KBE-403, can be used. A silane coupling agent is preferably used.
- Examples of the melamine compound include all or part of active methylol groups (CH 2 OH groups) in nitrogen compounds such as (poly) methylol melamine, (poly) methylol glycoluril, (poly) methylol benzoguanamine, and (poly) methylol urea.
- nitrogen compounds such as (poly) methylol melamine, (poly) methylol glycoluril, (poly) methylol benzoguanamine, and (poly) methylol urea.
- Examples include compounds in which (at least two) are alkyl etherified.
- examples of the alkyl group constituting the alkyl ether include a methyl group, an ethyl group, and a butyl group, which may be the same or different from each other.
- methylol groups that are not alkyletherified may be self-condensed within one molecule, and may be condensed between two molecules, resulting in the formation of an oligomer component.
- hexamethoxymethyl melamine, hexabutoxymethyl melamine, tetramethoxymethyl glycoluril, tetrabutoxymethyl glycoluril and the like can be used.
- alkyl etherified melamines such as hexamethoxymethyl melamine and hexabutoxymethyl melamine are preferable.
- the leveling agent is not particularly limited as long as it has a leveling effect, and an existing leveling agent can be used. Among them, a silicone leveling agent and a fluorine leveling agent can be particularly preferably used. .
- silicone leveling agent commercially available silicone leveling agents can be used.
- fluorine leveling agent commercially available fluorine leveling agents can be used, such as OPTOOL DSX, OPTOOL DAC-HP (manufactured by Daikin Industries); Surflon S-242, Surflon S-243, Surflon S-420, Surflon S-611, Surflon S-651, Surflon S-386 (above, manufactured by AGC Seimi Chemical); BYK-340 (manufactured by Big Chemie Japan); AC110a, AC (100a (above, manufactured by Algin Chemie); Megafuck F-114, Megafuck F-410, Megafuck F-444, Megafuck EXPTP-2066, Megafuck F-430, Megafuck F-472SF, Megafuck F-477, Megafuck F-552, Megafuck F-553, Megafuck F- 54, Megafuck F-555, Megafuck R-94, Megafuck RS-72-K, Megafuck RS-75, Megafuck F-556, Mega
- the photopolymerization initiator (A), the ethylenically unsaturated compound (B), the colorant (C), the alkali developable compound (D), any solvent, and an organic polymer are excluded.
- the usage-amount of an additive is suitably selected according to the intended purpose and is not restrict
- the photosensitive composition, the alkali-developable photosensitive resin composition, or the cured product of the present invention is used for display display devices, and more specifically for color display of display display devices (color televisions, PC monitors, portable information terminals, digital cameras, etc.). It is suitably used for a color filter in a liquid crystal display element.
- Photocurable paint or varnish Photocurable adhesive; Printed circuit board; Color filter of CCD image sensor; Electrode material for plasma display panel; Powder coating; Printing ink; Printing plate; Adhesive; Photoresist for electronic engineering; Electroplating resist; Etching resist; Dry film; Solder resist; Resist to form various display device structures; Composition for encapsulating electrical and electronic parts; Solder resist Magnetic recording materials; micromechanical parts; waveguides; optical switches; plating masks; etching masks; color test systems; glass fiber cable coatings; screen printing stencils; materials for producing three-dimensional objects by stereolithography; Holographic recording material; Image recording Materials; fine electronic circuits; bleaching materials; bleaching materials for image recording materials; bleaching materials for image recording materials using microcapsules; photoresist materials for printed wiring boards; photoresists for UV and visible laser direct imaging systems Material: It can be used for various applications such as a photoresist material or a protective film used for forming a dielectric layer in the sequential lamination of printed circuit boards,
- the photosensitive composition or alkali-developable photosensitive resin composition of the present invention can also be used for the purpose of forming spacers for liquid crystal display panels and for forming protrusions for vertical alignment type liquid crystal display elements.
- it is useful as a photosensitive composition for simultaneously forming protrusions and spacers for a vertical alignment type liquid crystal display element.
- the photosensitive composition or alkali-developable photosensitive resin composition of the present invention can be cured by irradiation with energy rays.
- the photosensitive composition or alkali-developable photosensitive resin composition of the present invention is a known method such as spin coater, roll coater, bar coater, die coater, curtain coater, various printing, dipping, etc. It can be applied on a supporting substrate such as soda glass, quartz glass, semiconductor substrate, metal, paper, plastic.
- support bases such as a film, it can also transfer on another support base
- the energy ray used for curing the photosensitive composition alkali-developable photosensitive resin composition of the present invention includes an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a medium pressure mercury lamp, a low pressure mercury lamp, a mercury vapor arc.
- Electromagnetic energy rays having a wavelength of 2000 angstroms to 7000 angstroms obtained from light sources such as lamps, xenon arc lamps, carbon arc lamps, metal halide lamps, fluorescent lamps, tungsten lamps, excimer lamps, germicidal lamps, light emitting diodes, CRT light sources,
- High energy rays such as electron beams, X-rays and radiation can be used, but preferably an ultra-high pressure mercury lamp, a mercury vapor arc lamp, a carbon arc lamp, a xenon arc lamp, etc. that emits light having a wavelength of 300 to 450 nm.
- the light source is used.
- the laser direct drawing method that directly forms an image from digital information such as a computer without using a mask improves not only productivity but also resolution and positional accuracy.
- the laser light light having a wavelength of 340 to 430 nm is preferably used, but excimer laser, nitrogen laser, argon ion laser, helium cadmium laser, helium neon laser, krypton ion laser.
- lasers that emit light in the visible to infrared region such as various semiconductor lasers and YAG lasers, are also used. When these lasers are used, a sensitizing dye that absorbs the region from visible to infrared is added.
- the liquid crystal display panel spacer includes (1) a step of forming a coating film of the photosensitive composition of the present invention on a substrate, and (2) radiation through a mask having a predetermined pattern shape on the coating film. , (3) baking step after exposure, (4) step of developing the coating after exposure, and (5) step of heating the coating after development.
- the photosensitive composition of the present invention contains an ink repellent
- it is useful as a partition forming resin composition for an inkjet system, and the composition is used for a color filter, and particularly has a profile angle of 50 ° or more. It is preferably used for the partition for an inkjet color filter.
- the ink repellent agent a composition comprising a fluorosurfactant and a fluorosurfactant is preferably used.
- the partition formed from the photosensitive composition of the present invention is on the transfer target.
- an optical element is manufactured by a method of forming an image region by applying droplets to the recessed portions on the partitioned transfer target member by an ink jet method.
- the droplets contain a colorant and the image area is colored, whereby the pixel group composed of a plurality of colored areas is separated from the colored areas of the pixel group on the substrate.
- An optical element having at least a partition is obtained.
- Step 1 Preparation of intermediate 1A (halogenated aryl compound)
- 2-chloro-4'-fluoroacetophenone (3.59 g)
- salicylic aldehyde (5.08 g)
- potassium carbonate (5.75 g)
- acetone 15 g
- ion-exchanged water 41.6 g was added, and the precipitate was collected by filtration and sufficiently dried to obtain Intermediate 1A (4.74 g: yield 95%) as a pale yellow solid.
- Step 2 Production of Intermediate 1B (Ketone Compound)
- Intermediate 1A 4.42 g
- the following indole compound 1A 4.07 g
- potassium carbonate 4.62 g
- DMAc 23.25 g
- Ion-exchanged water (15.5 g) and ethyl acetate (23.25 g) were added to separate the oil and water, and the organic layer was washed with water three times to remove the solvent.
- Step 3 Production of Intermediate 1C (oxime compound)
- Intermediate 1B (3.74 g) and DMF (12.93 g) were weighed into a 30 ml two-necked flask and stirred at 5 ° C with 35% hydrochloric acid 1.
- 26 g and 0.87 g of isobutyl nitrite were added dropwise, and the mixture was stirred at room temperature for 30 hours.
- Step 4 Compound No. 1 (Oxime ester compound of the present invention) Intermediate 1C (2.21 g) and THF (7.2 g) were weighed in a 30 ml two-necked eggplant flask, respectively, and acetyl chloride (2. 12 g) and triethylamine (2.72 g) were added dropwise, and the mixture was stirred at room temperature for 1 hour. Ion-exchanged water (7.2 g) and ethyl acetate (7.2 g) were added to separate the oil and water, and the organic layer was washed with water three times.
- Step 2 Compound No. 189 (oxime ester compound of the present invention) Compound No. 1 was prepared in the same manner as in Step 4 of Example 1, except that Intermediate 1C was changed to Intermediate 2A. 189 was obtained.
- Example 3 Compound no. Production of 190 (Step 1) Production of Intermediate 3B
- the following Intermediate 3B was obtained in the same manner as in Step 2 of Example 1 except that the indole compound 1A was changed to the following carbazole compound 3A.
- Step 2 Production of Intermediate 3C
- Step 3 Preparation of Compound No. 190 was performed in the same manner as in Step 4 of Example 1, except that Intermediate 1C was changed to Intermediate 3C. 190 was obtained.
- Example 4 Compound no. In the same manner as in Example 1 except that the intermediate 1A used in Step 2 of Example 1 was changed to the following intermediate 4A, the above compound No. 191 was prepared. 191 was obtained.
- Example 5 Compound no. In the same manner as in Example 1 except that the intermediate 1A used in Step 2 of Example 1 was changed to the following Intermediate 5A, the above compound No. 192 was prepared. 192 was obtained.
- Example 6 Compound no. Production of 193 (Step 1) Production of Intermediate 6B The following Intermediate 6B was obtained in the same manner as in Step 2 of Example 1, except that the indole compound 1A was changed to the following phenothiazine compound 6A.
- Step 2 Production of Intermediate 6C
- Intermediate 3B was changed to Intermediate 6B described above, and the same procedure as in Step 2 of Example 3 was conducted except that the equivalent amount of the reagent used was doubled.
- Intermediate 6C was obtained.
- Step 3 Production of Intermediate 6D
- Intermediate 1B was changed to Intermediate 6C and the equivalent amount of the used reagent was doubled
- the following intermediate 6D was obtained.
- Step 4 Compound No.
- Step 4 of Example 1 In the same manner as in Step 4 of Example 1, except that Intermediate 1C was changed to Intermediate 6D and the equivalent amount of the reagent used was doubled, the above-mentioned Compound No. 193 was obtained.
- Example 7 Compound no. Production of 194 (Step 1) Production of Intermediate 7A Intermediate 7A shown below was obtained in the same manner as in Step 3 of Example 1 except that Intermediate 1B was changed to Intermediate 6C.
- Step 2 Compound No. In the same manner as in Step 4 of Example 1, except that Intermediate 1C was changed to Intermediate 7A, Compound No. 194 was obtained.
- the oxime ester compound of the present invention is useful because of its high solubility in a solvent represented by PGMEA.
- A-4 Compound No. 191 (photopolymerization initiator of the present invention obtained in Example 4)
- A-5 Compound No. 192 (photopolymerization initiator of the present invention obtained in Example 5)
- A-6 Compound No. 193 (photopolymerization initiator of the present invention obtained in Example 6)
- A-7 Compound No.
- A-8 OXE 02 (photopolymerization initiator not belonging to the present invention; manufactured by BASF)
- B-1 SPC-3000 (ethylenically unsaturated compound having an acid group; manufactured by Showa Denko; PGMEA solution having a solid content of 42.2% by mass)
- B-2 Kayalad DPHA (ethylenically unsaturated compound; manufactured by Nippon Kayaku; solid content: 100% by mass)
- C-1 Blue pigment dispersion No.
- the photosensitive composition No. 1-No. 7 (Examples 8 to 14) and comparative photosensitive composition No. 8 (Comparative Example 1) was spin coated (at 500 rpm for 2 seconds, then at 900 rpm for 5 seconds), prebaked at 90 ° C. for 90 seconds using a hot plate, and then cooled at 23 ° C. for 40 seconds. Then, it exposed through the mask (mask opening 30 micrometers) using the high pressure mercury lamp (exposure amount 40mJ / cm ⁇ 2 >). After developing using a 2.5% by mass aqueous sodium carbonate solution as a developing solution, it was washed thoroughly with water and post-baked at 230 ° C. for 30 minutes using an oven to fix the pattern.
- the obtained pattern was observed with an electron microscope, and the line width of the portion corresponding to the mask opening was measured.
- a line width of 30 ⁇ m or more was designated as A, and a line width of less than 30 ⁇ m was designated as B.
- the photosensitive composition No. 1-No. 7 (Examples 8 to 14) and comparative photosensitive composition No. 8 (Comparative Example 1) was spin coated (at 500 rpm for 2 seconds, then at 900 rpm for 5 seconds), prebaked at 90 ° C. for 90 seconds using a hot plate, and then cooled at 23 ° C. for 40 seconds. Then, it exposed at 100 mJ / cm ⁇ 2 > using the high pressure mercury lamp, and created the evaluation sample. From the transmittance of the obtained sample at 380 to 780 nm, the Y value was determined according to JIS Z8701. The higher the Y value, the higher the luminance and the higher the transmittance in the visible light region, which is useful.
- the photosensitive composition using the oxime ester compound of the present invention is excellent in photolithography properties and the brightness of the resulting cured product
- the oxime ester compound of the present invention is useful as a photopolymerization initiator. I understand that there is.
- the oxime ester compound of the present invention provides a highly sensitive alkali-developable photosensitive resin composition that is capable of efficiently generating radicals with respect to bright lines such as 365 nm (i-line) and has excellent developability. In addition, it has high solubility in an organic solvent, and also has high transmittance in the visible light region, and is useful as a photopolymerization initiator used in a photosensitive composition.
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Abstract
Description
更に、光重合開始剤は、各種用途に用いる際に有機溶剤に溶解して用いられるため、有機溶剤への溶解性が高いことも求められる。
R1、R2、R3、R4、R5及びR6のうち、少なくとも一つが下記一般式(II)で表される基であり、
R7、R8、R9、R10及びR11は、それぞれ独立に、下記一般式(IIIα)で表される基、下記一般式(IIIβ)で表される基、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R21、OR21、SR21、NR22R23、COR21、SOR21、SO2R21又はCONR22R23を表し、
R7、R8、R9、R10及びR11のうち、少なくとも一つが下記一般式(IIIα)で表される基又は下記一般式(IIIβ)で表される基であり、
R21、R22及びR23は、それぞれ独立に、炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基を表し、
R21、R22及びR23で表される基中の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、アミノ基、カルボキシル基、メタクリロイル基、アクリロイル基、エポキシ基、ビニル基、ビニルエーテル基、メルカプト基、イソシアネート基又は複素環含有基で置換される場合があり、炭素原子数2~20の炭化水素基又は炭素原子数2~20の複素環含有基中のメチレン基は、-O-、-CO-、-COO-、-OCO-、-NR24-、-NR24CO-、-S-、-CS-、-SO2-、-SCO-、-COS-、-OCS-又はCSO-で置換される場合があり、R24は、水素原子又は炭素原子数1~20の炭化水素基を表し、
X1は、不存在、直接結合、-CO-、-O-又は-S-を表し、
R1とR2、R2とR3、R3とR4、R5とR6、R6とR7、R7とR8、R8とR9、R9とR10、R10とR11、及びR11とR1は、結合して環を形成する場合がある。)
R31及びR32で表される炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、アミノ基、カルボキシル基、メタクリロイル基、アクリロイル基、エポキシ基、ビニル基、ビニルエーテル基、メルカプト基、イソシアネート基又は複素環含有基で置換される場合があり、R31及びR32で表される炭素原子数2~20の炭化水素基又は炭素原子数2~20の複素環含有基中のメチレン基は、-O-、-CO-、-COO-、-OCO-、-NR33-、-NR33CO-、-S-、-CS-、-SO2-、-SCO-、-COS-、-OCS-又はCSO-で置換される場合があり、R33は、水素原子又は炭素原子数1~20の炭化水素基を表し、
nは0又は1を表し、*は結合手を表す。)
R51、R52及びR53は、それぞれ独立に、炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基を表し、
R51、R52及びR53で表される基中の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、アミノ基、カルボキシル基、メタクリロイル基、アクリロイル基、エポキシ基、ビニル基、ビニルエーテル基、メルカプト基、イソシアネート基又は複素環含有基で置換される場合があり、炭素原子数2~20の炭化水素基又は炭素原子数2~20の複素環含有基中のメチレン基は、-O-、-CO-、-COO-、-OCO-、-NR54-、-NR54CO-、-S-、-CS-、-SO2-、-SCO-、-COS-、-OCS-又はCSO-で置換される場合があり、
X2及びX3は、-O-、-S-又は-NR54-を表し、
R54は、水素原子又は炭素原子数1~20の炭化水素基を表し、
*は結合手を表す。)
R101、R102、R103、R104、R105、R106、R107及びR108のうち、少なくとも一つが上記一般式(II)で表される基であり、
R109、R110、R111、R112及びR113は、それぞれ独立に、上記一般式(IIIα)で表される基、上記一般式(IIIβ)で表される基、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R121、OR121、SR121、NR122R123、COR121、SOR121、SO2R121又はCONR122R123を表し、
R109、R110、R111、R112及びR113のうち、少なくとも一つが下記一般式(IIIα)で表される基又は下記一般式(IIIβ)で表される基であり、
R121、R122及びR123は、それぞれ独立に、炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基を表し、
R121、R122及びR123で表される基中の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、アミノ基、カルボキシル基、メタクリロイル基、アクリロイル基、エポキシ基、ビニル基、ビニルエーテル基、メルカプト基、イソシアネート基又は複素環含有基で置換される場合があり、炭素原子数2~20の炭化水素基又は炭素原子数2~20の複素環含有基中のメチレン基は、-O-、-CO-、-COO-、-OCO-、-NR124-、-NR124CO-、-S-、-CS-、-SO2-、-SCO-、-COS-、-OCS-又はCSO-で置換される場合があり、
R124は、水素原子又は炭素原子数1~20の炭化水素基を表し、
X101は、不存在、直接結合、-CO-、-O-又は-S-を表し、
R101とR102、R102とR103、R103とR104、R105とR106、R106とR107、R107とR108、R108とR109、R109とR110、R110とR111、R111とR112、R112とR113及びR113とR101は、結合して環を形成する場合がある。)
即ち、本明細書において、上記一般式(Iα)又は(Iβ)で表わされる化合物及びその例示化合物は、これら幾何異性体の1種又は2種以上の混合物を表すものであり、構造を示した特定の異性体に限定されるものではない。
また、本発明のオキシムエステル化合物の中でも、一般式(Iβ)中のR103及びR106の少なくとも一つが、一般式(II)で表される基であるオキシムエステル化合物は、合成時に収率がよく、精製も容易なことから好ましい。同様の観点から、一般式(Iβ)中のR103及びR106の両方が、一般式(II)で表される基であるオキシムエステル化合物も好ましい。
また、上記一般式(Iα)及び(Iβ)において、R6及びR108が一般式(II)で表される基以外の基又は原子である場合、R6及びR108が水素原子であるものは、合成が容易なので好ましい。
尚、本明細書において、「X1が不存在」とは、一般式(Iα)において、-X1-で表される結合が存在せず、N原子及びX1を含む縮合環骨格が形成されていない状態を意味する。例えば、上述の「X1が不存在でR5とR6が結合してベンゼン環を形成するであるオキシムエステル化合物」は、N原子及びX1を含む縮合環骨格ではなくトリフェニルアミン骨格を有する化合物であり、該化合物の具体例としては後記の化合物No.153~170が挙げられる。
また、一般式(Iβ)中の「X101が不存在」とは、-X101-で表される結合が存在せず、N原子及びX101を含む縮合環骨格が形成されていない状態を意味する。
上記一般式(Iβ)で表される本発明のオキシムエステル化合物においては、R111が上記一般式(IIIα)で表される基であることが好ましい。また、上記一般式(Iβ)で表される本発明のオキシムエステル化合物においては、R111が上記一般式(IIIβ)で表される基であることが好ましい。
上記一般式(IIIα)で表される基中のX2は、酸素原子又は硫黄原子であることが好ましく、酸素原子であることが特に好ましい。オキシムエステル化合物が長波長の近紫外光を効率よく吸収するものとなり、光重合開始剤として高感度となるためである。上記一般式(IIIα)で表される基中のR41~R45は水素原子であることが好ましい。
上記一般式(IIIβ)で表される基中のX3は、酸素原子又は硫黄原子であることが好ましい。オキシムエステル化合物が長波長の近紫外光を効率よく吸収するものとなり、光重合開始剤として高感度となるためである。上記一般式(IIIβ)で表される基中のR46~R50は水素原子であることが好ましい。
上記一般式(Iβ)で表される本発明のオキシムエステル化合物においては、X101が不存在であることが好ましく、X101が硫黄であることも好ましい。
即ち、公知であり市販されているアルデヒド化合物と公知であり市販されているフッ化ベンゼン化合物とを炭酸カリウムを用いて反応させることでハロゲン化アリール化合物を得、ハロゲン化アリール化合物と公知であり市販されているN含有複素環化合物を反応させることで、N-アリール化合物を得る。
即ち、上記N-アリール化合物と酸クロリドと反応させることによりケトン化合物1を得、ケトン化合物1と塩酸ヒドロキシルアミンを反応させることにより、オキシム化合物1を得る。続いて、オキシム化合物1に、酸無水物又は酸クロリドを反応させることにより、上記一般式(Iα)又は(Iβ)で表される本発明のオキシムエステル化合物1を得る。
尚、オキシム化合物1及びオキシムエステル化合物1は、特許第4223071号公報に記載の方法でも製造できる。
即ち、上記N-アリール化合物と酸クロリドと反応させることによりケトン化合物2を得、ケトン化合物2と亜硝酸イソブチルを反応させることにより、オキシム化合物2を得る。続いて、オキシム化合物2に、酸無水物又は酸クロリドを反応させることにより、上記一般式(Iα)又は(Iβ)で表される本発明のオキシムエステル化合物2を得る。
本発明の光重合開始剤は、エチレン性不飽和化合物の光重合開始剤として有用なものである。
OXE 02(BASF社製)、過酸化ベンゾイル、下記一般式(IV)で表される化合物等が挙げられる。尚、これらの光重合開始剤は、1種又は2種以上を組み合わせて用いることができる。
R63及びR64は、それぞれ独立に、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R65、OR66、SR67、NR68R69、COR70、SOR71、SO2R72又はCONR73R74を表し、
R63及びR64は、互いに結合して環を形成する場合があり、
R63及びR64は、それぞれ複数存在する場合、同一の場合も異なる場合があり、
R65、R66、R67、R68、R69、R70、R71、R72、R73及びR74は、それぞれ独立に、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基、炭素原子数7~30のアリールアルキル基又は炭素原子数2~20の複素環基を表し、
X4は、直接結合又はCOを表し、
X5は、酸素原子、硫黄原子、セレン原子、CR75R76、CO、又はPR77を表し、
R75、R76及びR77は、それぞれ独立に、炭素原子数1~20のアルキル基、炭素原子数6~30のアリール基又は炭素原子数7~30のアリールアルキル基を表し、
該アルキル基又はアリールアルキル基中の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基又は複素環基で置換される場合があり、
該アルキル基又はアリールアルキル基中のメチレン基は、-O-で置換される場合があり、
aは、0~4の整数を表し、
bは、0~5の整数を表す。)
本発明の感光性組成物は、本発明の光重合開始剤(A)及びエチレン性不飽和化合物(B)を含有し、任意成分として、着色剤(C)、アルカリ現像性化合物(D)、溶剤や、後述の任意の添加物を組み合わせて含有するものである。
これらの中でも、エポキシアクリレート樹脂、及び、下記一般式(V)で表されるエポキシ化合物のエポキシ基に、不飽和一塩基酸を作用させ、更に多塩基酸無水物を作用させて得られた樹脂が好ましい。
R81及びR82は、それぞれ複数存在する場合は、同一の場合も異なる場合があり、
cは、0~4の整数であり、
dは、0~4の整数であり、
mは0~10の整数であり、
mが0でない場合には光学異性体が存在するが、いかなる異性体でもよい。)
即ち、上記エポキシ化合物のエポキシ基1個に対し、上記不飽和一塩基酸のカルボキシル基が0.1~1.0個で付加させた構造を有するエポキシ付加物において、該エポキシ付加物の水酸基1個に対し、上記多塩基酸無水物の酸無水物構造が0.1~1.0個となる比率となるようにするのが好ましい。
上記エポキシ化合物、上記不飽和一塩基酸及び上記多塩基酸無水物の反応は、常法に従って行なうことができる。
尚、アルカリ現像性を有し且つエチレン性不飽和結合を有する化合物を用いる場合、該化合物は、前述の光重合開始剤(A)の含有量及び着色剤(C)の含有量を算出する際には、エチレン性不飽和化合物(B)に含めるものとする。
上記ビスフェノール型エポキシ化合物としては、上記一般式(V)で表されるエポキシ化合物を用いることができる他、例えば、水添ビスフェノール型エポキシ化合物等のビスフェノール型エポキシ化合物も用いることができる。
また上記グリシジルエーテル類としては、エチレングリコールジグリシジルエーテル、プロピレングリコールジグリシジルエーテル、1,4-ブタンジオールジグリシジルエーテル、1,6-ヘキサンジオールジグリシジルエーテル、1,8-オクタンジオールジグリシジルエーテル、1,10-デカンジオールジグリシジルエーテル、2,2-ジメチル-1,3-プロパンジオールジグリシジルエーテル、ジエチレングリコールジグリシジルエーテル、トリエチレングリコールジグリシジルエーテル、テトラエチレングリコールジグリシジルエーテル、ヘキサエチレングリコールジグリシジルエーテル、1,4-シクロヘキサンジメタノールジグリシジルエーテル、1,1,1-トリ(グリシジルオキシメチル)プロパン、1,1,1-トリ(グリシジルオキシメチル)エタン、1,1,1-トリ(グリシジルオキシメチル)メタン、1,1,1,1-テトラ(グリシジルオキシメチル)メタン等を用いることができる。
その他、フェノールノボラック型エポキシ化合物、ビフェニルノボラック型エポキシ化合物、クレゾールノボラック型エポキシ化合物、ビスフェノールAノボラック型エポキシ化合物、ジシクロペンタジエンノボラック型エポキシ化合物等のノボラック型エポキシ化合物;3,4-エポキシ-6-メチルシクロヘキシルメチル-3,4-エポキシ-6-メチルシクロヘキサンカルボキシレート、3,4-エポキシシクロヘキシルメチル-3,4-エポキシシクロヘキサンカルボキシレート、1-エポキシエチル-3,4-エポキシシクロヘキサン等の脂環式エポキシ化合物;フタル酸ジグリシジルエステル、テトラヒドロフタル酸ジグリシジルエステル、ダイマー酸グリシジルエステル等のグリシジルエステル類;テトラグリシジルジアミノジフェニルメタン、トリグリシジルP-アミノフェノール、N,N-ジグリシジルアニリン等のグリシジルアミン類;1,3-ジグリシジル-5,5-ジメチルヒダントイン、トリグリシジルイソシアヌレート等の複素環式エポキシ化合物;ジシクロペンタジエンジオキシド等のジオキシド化合物;ナフタレン型エポキシ化合物;トリフェニルメタン型エポキシ化合物;ジシクロペンタジエン型エポキシ化合物等を用いることもできる。
これらの中でも、ケトン類、エーテルエステル系溶剤等、特にプロピレングリコール-1-モノメチルエーテル-2-アセテート、シクロヘキサノン等が、感光性組成物において、レジストと光重合開始剤(A)の相溶性がよいので好ましい。
本発明の感光性組成物において、溶剤の含有量は、特に限定されるものではないが、感光性組成物全量100質量%中で30~95質量%が好ましく、より好ましくは50~95質量%である。溶剤の含有量が上記範囲の場合、ハンドリング性(感光性組成物の粘度や濡れ性)、乾燥時のムラの低減、及び液安定性(組成物に含まれる成分の析出や沈降を伴わない)に優れる感光性組成物となり、硬化物を得る際に硬化物の厚さを適切にコントロールできることから好ましい。
上記潜在性添加剤としては国際公開第2014/021023号パンフレットに記載されているものを好ましく使うことができる。
R81、R82、R83、R84及びR85は、水素原子、ハロゲン原子、シアノ基、水酸基、ニトロ基、カルボキシル基、置換基を有している場合がある炭素原子数1~40のアルキル基、炭素原子数6~20のアリール基、炭素原子数7~20のアリールアルキル基若しくは炭素原子数2~20の複素環含有基、又は-O-R86を表し、R81、R82、R83、R84及びR85のうち少なくとも1つは水素原子でなく、
R86は、炭素原子数1~20のアルキル基、炭素原子数2~20のアルケニル基、炭素原子数6~20のアリール基、炭素原子数7~20のアリールアルキル基、炭素原子数2~20の複素環含有基又はトリアルキルシリル基を表す。)
X7は、下記一般式(1)で表される基であり、
R92、R93、R94及びR95は、水素原子、ハロゲン原子、シアノ基、水酸基、ニトロ基、カルボキシル基、置換基を有している場合がある炭素原子数1~40のアルキル基、炭素原子数6~20のアリール基、炭素原子数7~20のアリールアルキル基又は炭素原子数2~20の複素環含有基を表し、R92、R93、R94及びR95のうち少なくとも1つは水素原子でない。)
該脂肪族炭化水素基中のメチレン基は、-O-、-S-、-CO-、-COO-、-OCO-又は-NH-、或いは酸素原子が隣り合うことなしにこれらを組み合わせた結合基で置換される場合があり、
R97及びR98は、水素原子、炭素原子数1~8のアルキル基、炭素原子数6~20のアリール基又は炭素原子数7~20のアリールアルキル基を表し、
Z5及びZ6は、それぞれ独立に、直接結合、-O-、-S-、-CO-、-CO-O-、-O-CO-、-SO2-、-SS-、-SO-又は-NR100-を表し、
R99及びR100は、水素原子、置換基を有している場合がある炭素原子数1~35の脂肪族炭化水素基、置換基を有している場合がある炭素原子数6~35の芳香族炭化水素基又は置換基を有している場合がある炭素原子数2~35の複素環基を表し、
*は結合手を表す。)
R111、R112、R113及びR114は、水素原子、ハロゲン原子、シアノ基、水酸基、ニトロ基、カルボキシル基、又は置換基を有している場合がある炭素原子数1~40のアルキル基、炭素原子数6~20のアリール基、炭素原子数7~20のアリールアルキル基若しくは炭素原子数2~20の複素環含有基を表し、R111、R112、R113及びR114のうち少なくとも1つは水素原子でなく、
環A1及びR86は、上記一般式(A)と同じである。)
Z11、Z12及びZ13は、それぞれ独立に、直接結合、-O-、-S-、-CO-、-CO-O-、-O-CO-、-SO2-、-SS-、-SO-、-NR121-、-PR121-、置換基を有している場合がある炭素原子数1~35の脂肪族炭化水素基、置換基を有している場合がある炭素原子数6~35の芳香族炭化水素基、又は置換基を有している場合がある炭素原子数2~35の複素環基を表し、
R121は、水素原子、置換基を有している場合がある炭素原子数1~35の脂肪族炭化水素基、置換基を有している場合がある炭素原子数6~35の芳香族炭化水素基又は置換基を有している場合がある炭素原子数2~35の複素環基を表し、該脂肪族炭化水素基中のメチレン基は、炭素-炭素二重結合、-O-、-CO-、-O-CO-、-CO-O-又は-SO2-で置換される場合がある。)
該脂肪族炭化水素基中のメチレン基は、-COO-、-O-、-OCO-、-NHCO-、-NH-又は-CONH-で置換される場合があり、
Z11~Z14は、それぞれ独立に、上記一般式(2)におけるZ11~Z13で表される基と同じ範囲の基である。)
該脂肪族炭化水素基は、-COO-、-O-、-OCO-、-NHCO-、-NH-又は-CONH-で中断されている場合があり、
Z11~Z15は、それぞれ独立に、上記一般式(2)におけるZ11~Z13で表される基と同じ範囲の基である。)
該脂肪族炭化水素基は、-COO-、-O-、-OCO-、-NHCO-、-NH-又は-CONH-で中断されている場合があり、
Z11~Z16は、それぞれ独立に、上記一般式(2)におけるZ11~Z13で表される基と同じ範囲の基である。)
有機重合体を使用する場合、その使用量は、エチレン性不飽和化合物(B)100質量部に対して、好ましくは10~500質量部である。
ここで、アルキルエーテルを構成するアルキル基としては、メチル基、エチル基又はブチル基が挙げられ、互いに同一である場合があり、異なる場合がある。また、アルキルエーテル化されていないメチロール基は、一分子内で自己縮合している場合があり、二分子間で縮合して、その結果オリゴマー成分が形成されている場合がある。
具体的には、ヘキサメトキシメチルメラミン、ヘキサブトキシメチルメラミン、テトラメトキシメチルグリコールウリル、テトラブトキシメチルグリコールウリル等を用いることができる。これらの中でも、ヘキサメトキシメチルメラミン、ヘキサブトキシメチルメラミン等のアルキルエーテル化されたメラミンが好ましい。
本発明の感光性組成物又はアルカリ現像性感光性樹脂組成物は、硬化させるに先立って、スピンコーター、ロールコーター、バーコーター、ダイコーター、カーテンコーター、各種の印刷、浸漬等の公知の手段で、ソーダガラス、石英ガラス、半導体基板、金属、紙、プラスチック等の支持基体上に適用することができる。また、一旦フィルム等の支持基体上に施した後、他の支持基体上に転写することもでき、その適用方法に制限はない。
100mlの4つ口フラスコに、2-クロロ-4’-フルオロアセトフェノン(3.59g)、サリチル酸アルデヒド(5.08g)、炭酸カリウム(5.75g)、アセトン(15g)をそれぞれ秤量した後、加熱還流を1時間行った。室温まで冷却後、イオン交換水(41.6g)を添加し、析出物をろ取し、十分に乾燥させ、淡黄色固体として中間体1Aを(4.74g:収率95%)得た。
100mlの4つ口フラスコに、中間体1A(4.42g)、下記インドール化合物1A(4.07g)、炭酸カリウム(4.62g)及びDMAc(23.25g)をそれぞれ秤量した後、110℃で3時間反応させた。イオン交換水(15.5g)及び酢酸エチル(23.25g)を加え、油水分離し、有機層を3回水洗し脱溶媒を行った。その後、得られた残渣に酢酸エチル(15.5g)及びヘキサン(23.25g)を加え、加熱溶解後、冷却し再結晶を行った。5℃まで冷却後、析出物をろ取し、十分に乾燥させ、白色固体として中間体1Bを(6.8g:収率87%)得た。
30mlの2つ口フラスコに中間体1B(3.74g)及びDMF(12.93g)を秤量し、5℃で撹拌しながら35%塩酸1.26g及び亜硝酸イソブチル0.87gを滴下し、室温で30時間撹拌した。イオン交換水(11.9g)及び酢酸エチル(11.9g)を加え、油水分離し、有機層を3回水洗した。有機層を脱溶媒後、シリカゲルカラム(酢酸エチル/ヘキサン=1/9)により精製を行い淡黄色固体として中間体1C(3.0g:収率75%)を得た。
30mlの2口ナスフラスコに中間体1C(2.21g)及びTHF(7.2g)をそれぞれ秤量し、窒素気流、氷冷下において塩化アセチル(2.12g)、トリエチルアミン(2.72g)を滴下し、室温で1時間撹拌を行った。イオン交換水(7.2g)及び酢酸エチル(7.2g)を加え、油水分離し、有機層を3回水洗した。有機層を脱溶媒後、シリカゲルカラム(酢酸エチル/ヘキサン)により精製を行い、淡黄色固体として化合物No.1(1.5g:収率63%)を得た。
得られた化合物No.1の分析結果を[表1]~[表3]に示す。尚、[表1]に併記したOXE 02は、後述の比較例1で用いた市販の光重合開始剤である。
(工程1)中間体2Aの製造
上記中間体1Bを9.6g、ジメチルホルムアセトアミドを30.0g、ヒドロキシアミン塩酸塩を2.2g仕込んだ後、60℃で水酸化ナトリウムを1.2g仕込んだ。60℃で2時間反応させた後、イオン交換水、クロロホルムを仕込み、加温しながら抽出した。有機層を3回水洗し、脱溶媒後、シリカゲルカラム(酢酸エチル/ヘキサン=1/6)により精製を行い、下記中間体2A(2.0g:収率25%)を得た。
中間体1Cを上記中間体2Aに変更した以外は実施例1の工程4と同様にして、化合物No.189を得た。
(工程1)中間体3Bの製造
インドール化合物1Aを下記カルバゾール化合物3Aに変更した以外は実施例1の工程2と同様にして、下記中間体3Bを得た。
100mlの4つ口フラスコに塩化アルミニウムを2.72g、ジクロロエタンを30.0g仕込み、氷冷下、中間体3Bを7.54g添加し、次いでオクタノイルクロリドを3.32g添加した。室温で1時間反応させた後、反応液を氷水にあけ油水分離を行った。有機層を3回水洗後、脱溶媒を行い、シリカゲルカラム(酢酸エチル/ヘキサン=1/10)により下記中間体3C(1.1g:収率11%)を得た。
中間体1Cを上記中間体3Cに変更した以外は実施例1の工程4と同様にして、上記化合物No.190を得た。
実施例1の工程2で使用した中間体1Aを下記中間体4Aに変更した以外は実施例1と同様にして、上記化合物No.191を得た。
実施例1の工程2で使用した中間体1Aを下記中間体5Aに変更した以外は実施例1と同様にして、上記化合物No.192を得た。
(工程1)中間体6Bの製造
インドール化合物1Aを下記フェノチアジン化合物6Aに変更した以外は実施例1の工程2と同様にして、下記中間体6Bを得た。
中間体3Bを上記中間体6Bに変更し、用いた試薬の等量が2倍量になるように調製した以外は実施例3の工程2同様にして、下記中間体6Cを得た。
中間体1Bを上記中間体6Cに変更し、用いた試薬の等量が2倍量になるように調製した以外は実施例1の工程3と同様にして、下記中間体6Dを得た。
中間体1Cを上記中間体6Dに変更し、用いた試薬の等量が2倍量になるように調製した以外は実施例1の工程4と同様にして、上記化合物No.193を得た。
(工程1)中間体7Aの製造
中間体1Bを上記中間体6Cに変更した以外は実施例1の工程3と同様にして、下記中間体7Aを得た。
中間体1Cを上記中間体7Aに変更した以外は実施例1の工程4と同様にして、上記化合物No.194を得た。
分散剤としてDISPERBYK-161(12.5質量部;ビックケミージャパン製)及び着色剤としてピグメントブルー15:6(15質量部)を、PGMEA(72.5質量部)にビーズミルを使用して分散させて、ブルー顔料分散液No.1を製造した。
下記[表4]の配合に従って各成分を混合し、感光性組成物No.1~No.7(実施例8~14)及び比較用の感光性組成物No.8(比較例1)を得た。尚、表中の数字は質量部を表す。実施例8~14及び比較例1においては、光重合開始剤をそれぞれ単独で使用した。
また、表中の符号は、下記の成分を表す。
A-1: 化合物No.1(実施例1で得られた本発明の光重合開始剤)
A-2: 化合物No.189(実施例2で得られた本発明の光重合開始剤)
A-3: 化合物No.190(実施例3で得られた本発明の光重合開始剤)
A-4: 化合物No.191(実施例4で得られた本発明の光重合開始剤)
A-5: 化合物No.192(実施例5で得られた本発明の光重合開始剤)
A-6: 化合物No.193(実施例6で得られた本発明の光重合開始剤)
A-7: 化合物No.194(実施例7で得られた本発明の光重合開始剤)
A-8: OXE 02(本発明に属さない光重合開始剤;BASF社製)
B-1: SPC-3000(酸基を有するエチレン性不飽和化合物;昭和電工製;固形分42.2質量%のPGMEA溶液)
B-2: カヤラッドDPHA(エチレン性不飽和化合物;日本化薬製;固形分100質量%)
C-1: ブルー顔料分散液No.1(製造例1で得られた分散液)
X-1: KBE-403(シランカップリング剤;信越化学製)
X-2: F-554(フッ素系レベリング剤、含フッ素基・親油性基含有オリゴマー;DIC製)
Y-1: PGMEA(溶剤)
尚、SPC-3000(B-1)は、エチレン性不飽和結合を有し且つアルカリ現像性を有する化合物であり、カヤラッドDPHA(B-2)は、エチレン性不飽和結合を有する化合物であるがアルカリ現像性は有しない。
感光性組成物No.1~No.7及び比較用の感光性組成物No.8の感度並びにそれらから得られる硬化物の輝度の評価を下記の手順で行った。評価結果を[表4]に併記する。
ガラス基板上に感光性組成物No.1~No.7(実施例8~14)及び比較用の感光性組成物No.8(比較例1)をスピンコート(500rpmにて2秒間、次いで900rpmにて5秒間)し、ホットプレートを用いて、90℃で90秒間プリベークを行った後、23℃で40秒間冷却した。その後、高圧水銀ランプを用いてマスク(マスク開口30μm)を介して露光した(露光量40mJ/cm2)。現像液として2.5質量%炭酸ナトリウム水溶液を用いて現像した後、よく水洗し、オーブンを用いて、230℃で30分ポストベークを行い、パターンを定着させた。得られたパターンを電子顕微鏡で観察し、マスク開口に対応する部分の線幅を測定した。線幅が30μm以上のものをA、30μm未満のものをBとした。線幅が大きいほど感度が良好であることを意味する。
ガラス基板上に感光性組成物No.1~No.7(実施例8~14)及び比較用の感光性組成物No.8(比較例1)をスピンコート(500rpmにて2秒間、次いで900rpmにて5秒間)し、ホットプレートを用いて、90℃で90秒間プリベークを行った後、23℃で40秒間冷却した。その後、高圧水銀ランプを用いて100mJ/cm2で露光し、評価サンプルを作成した。得られたサンプルの380~780nmにおける透過率から、JIS Z8701に準拠してY値を求めた。Y値が高いほど輝度が高く可視光領域において高い透過率を有することを意味し、有用である。
Claims (11)
- 下記一般式(Iα)又は(Iβ)で表されるオキシムエステル化合物。
(式中、R1、R2、R3、R4、R5及びR6は、それぞれ独立に、下記一般式(II)で表される基、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R21、OR21、SR21、NR22R23、COR21、SOR21、SO2R21又はCONR22R23を表し、
R1、R2、R3、R4、R5及びR6のうち、少なくとも一つが下記一般式(II)で表される基であり、
R7、R8、R9、R10及びR11は、それぞれ独立に、下記一般式(IIIα)で表される基、下記一般式(IIIβ)で表される基、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R21、OR21、SR21、NR22R23、COR21、SOR21、SO2R21又はCONR22R23を表し、
R7、R8、R9、R10及びR11のうち、少なくとも一つが下記一般式(IIIα)で表される基又は下記一般式(IIIβ)で表される基であり、
R21、R22及びR23は、それぞれ独立に、炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基を表し、
R21、R22及びR23で表される基中の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、アミノ基、カルボキシル基、メタクリロイル基、アクリロイル基、エポキシ基、ビニル基、ビニルエーテル基、メルカプト基、イソシアネート基又は複素環含有基で置換される場合があり、炭素原子数2~20の炭化水素基又は炭素原子数2~20の複素環含有基中のメチレン基は、-O-、-CO-、-COO-、-OCO-、-NR24-、-NR24CO-、-S-、-CS-、-SO2-、-SCO-、-COS-、-OCS-又はCSO-で置換される場合があり、R24は、水素原子又は炭素原子数1~20の炭化水素基を表し、
X1は、不存在、直接結合、-CO-、-O-又は-S-を表し、
R1とR2、R2とR3、R3とR4、R5とR6、R6とR7、R7とR8、R8とR9、R9とR10、R10とR11、及びR11とR1は、結合して環を形成する場合がある。)
(式中、R31及びR32は、それぞれ独立に、水素原子、ハロゲン原子、ニトロ基、シアノ基、炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基を表し、
R31及びR32で表される炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、アミノ基、カルボキシル基、メタクリロイル基、アクリロイル基、エポキシ基、ビニル基、ビニルエーテル基、メルカプト基、イソシアネート基又は複素環含有基で置換される場合があり、R31及びR32で表される炭素原子数2~20の炭化水素基又は炭素原子数2~20の複素環含有基中のメチレン基は、-O-、-CO-、-COO-、-OCO-、-NR33-、-NR33CO-、-S-、-CS-、-SO2-、-SCO-、-COS-、-OCS-又はCSO-で置換される場合があり、R33は、水素原子又は炭素原子数1~20の炭化水素基を表し、
nは0又は1を表し、*は結合手を表す。)
(式中、R41、R42、R43、R44、R45、R46、R47、R48、R49及びR50は、それぞれ独立に、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R51、OR51、SR51、NR52R53、COR51、SOR51、SO2R51又はCONR52R53を表し、
R51、R52及びR53は、それぞれ独立に、炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基を表し、
R51、R52及びR53で表される基中の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、アミノ基、カルボキシル基、メタクリロイル基、アクリロイル基、エポキシ基、ビニル基、ビニルエーテル基、メルカプト基、イソシアネート基又は複素環含有基で置換される場合があり、炭素原子数2~20の炭化水素基又は炭素原子数2~20の複素環含有基中のメチレン基は、-O-、-CO-、-COO-、-OCO-、-NR54-、-NR54CO-、-S-、-CS-、-SO2-、-SCO-、-COS-、-OCS-又はCSO-で置換される場合があり、
X2及びX3は、-O-、-S-又は-NR54-を表し、
R54は、水素原子又は炭素原子数1~20の炭化水素基を表し、
*は結合手を表す。)
(式中、R101、R102、R103、R104、R105、R106、R107及びR108は、それぞれ独立に、上記一般式(II)で表される基、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R121、OR121、SR121、NR122R123、COR121、SOR121、SO2R121又はCONR122R123を表し、
R101、R102、R103、R104、R105、R106、R107及びR108のうち、少なくとも一つが上記一般式(II)で表される基であり、
R109、R110、R111、R112及びR113は、それぞれ独立に、上記一般式(IIIα)で表される基、上記一般式(IIIβ)で表される基、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R121、OR121、SR121、NR122R123、COR121、SOR121、SO2R121又はCONR122R123を表し、
R109、R110、R111、R112及びR113のうち、少なくとも一つが下記一般式(IIIα)で表される基又は下記一般式(IIIβ)で表される基であり、
R121、R122及びR123は、それぞれ独立に、炭素原子数1~20の炭化水素基又は炭素原子数2~20の複素環含有基を表し、
R121、R122及びR123で表される基中の水素原子は、ハロゲン原子、ニトロ基、シアノ基、水酸基、アミノ基、カルボキシル基、メタクリロイル基、アクリロイル基、エポキシ基、ビニル基、ビニルエーテル基、メルカプト基、イソシアネート基又は複素環含有基で置換される場合があり、炭素原子数2~20の炭化水素基又は炭素原子数2~20の複素環含有基中のメチレン基は、-O-、-CO-、-COO-、-OCO-、-NR124-、-NR124CO-、-S-、-CS-、-SO2-、-SCO-、-COS-、-OCS-又はCSO-で置換される場合があり、
R124は、水素原子又は炭素原子数1~20の炭化水素基を表し、
X101は、不存在、直接結合、-CO-、-O-又は-S-を表し、
R101とR102、R102とR103、R103とR104、R105とR106、R106とR107、R107とR108、R108とR109、R109とR110、R110とR111、R111とR112、R112とR113及びR113とR101は、結合して環を形成する場合がある。) - 一般式(Iα)中のR3及びR5のうち少なくとも一つが、一般式(II)で表される基である請求項1に記載のオキシムエステル化合物。
- 一般式(Iβ)中のR103及びR106のうち少なくとも一つが、一般式(II)で表される基である請求項1に記載のオキシムエステル化合物。
- 一般式(Iα)中のX1が不存在でR5とR6が結合してベンゼン環を形成する請求項1又は2に記載のオキシムエステル化合物。
- 請求項1~4の何れか一項に記載のオキシムエステル化合物を含有する光重合開始剤。
- 請求項5に記載の光重合開始剤(A)及びエチレン性不飽和化合物(B)を含有する感光性組成物。
- 更に着色剤(C)を含有する請求項6に記載の感光性組成物。
- 請求項6又は7に記載の感光性組成物にアルカリ現像性化合物(D)を含有させてなるアルカリ現像性感光性樹脂組成物。
- 請求項6若しくは7に記載の感光性組成物又は請求項8に記載のアルカリ現像性感光性樹脂組成物の硬化物。
- 請求項9に記載の硬化物を含有するディスプレイ表示装置。
- 請求項6若しくは7に記載の感光性組成物又は請求項8に記載のアルカリ現像性感光性樹脂組成物を用い、該組成物を硬化させる工程を有する、硬化物の製造方法。
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| JP7175168B2 (ja) | 2018-11-29 | 2022-11-18 | 東京応化工業株式会社 | 感光性樹脂組成物、パターン化された硬化膜の製造方法、及びパターン化された硬化膜 |
| WO2024004425A1 (ja) * | 2022-06-27 | 2024-01-04 | 富士フイルム株式会社 | 硬化性組成物、硬化物の製造方法、膜、光学素子、イメージセンサ、固体撮像素子、画像表示装置、及び、ラジカル重合開始剤 |
| WO2024143067A1 (ja) * | 2022-12-26 | 2024-07-04 | 三菱ケミカル株式会社 | 感光性樹脂組成物、硬化物、隔壁、有機電界発光素子、カラーフィルター、画像表示装置、及び硬化物の形成方法 |
| WO2025041644A1 (ja) * | 2023-08-24 | 2025-02-27 | 富士フイルム株式会社 | 硬化性組成物、画素の製造方法、膜、固体撮像素子、画像表示装置、化合物および光増感剤 |
| WO2025070233A1 (ja) * | 2023-09-27 | 2025-04-03 | 東レ株式会社 | 感光性組成物、硬化物、電子部品、及び硬化物の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110023307A (zh) | 2019-07-16 |
| KR102545326B1 (ko) | 2023-06-21 |
| CN110023307B (zh) | 2024-01-02 |
| JP7482628B2 (ja) | 2024-05-14 |
| TW201838986A (zh) | 2018-11-01 |
| TWI798206B (zh) | 2023-04-11 |
| KR20190131011A (ko) | 2019-11-25 |
| JPWO2018168714A1 (ja) | 2020-01-16 |
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