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WO2017221388A1 - Rouleau guide destiné à un fil hélicoïdal - Google Patents

Rouleau guide destiné à un fil hélicoïdal Download PDF

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Publication number
WO2017221388A1
WO2017221388A1 PCT/JP2016/068734 JP2016068734W WO2017221388A1 WO 2017221388 A1 WO2017221388 A1 WO 2017221388A1 JP 2016068734 W JP2016068734 W JP 2016068734W WO 2017221388 A1 WO2017221388 A1 WO 2017221388A1
Authority
WO
WIPO (PCT)
Prior art keywords
outer peripheral
guide roller
mounting groove
wire
wire saw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2016/068734
Other languages
English (en)
Japanese (ja)
Inventor
林　雅一
克彦 阿部
杉原　勉
和之 金井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukoku Co Ltd
Komatsu NTC Ltd
Original Assignee
Fukoku Co Ltd
Komatsu NTC Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fukoku Co Ltd, Komatsu NTC Ltd filed Critical Fukoku Co Ltd
Priority to PCT/JP2016/068734 priority Critical patent/WO2017221388A1/fr
Priority to JP2018523242A priority patent/JPWO2017221388A1/ja
Publication of WO2017221388A1 publication Critical patent/WO2017221388A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
    • B26D1/01—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
    • B26D1/46—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having an endless band-knife or the like
    • H10P52/00—

Definitions

  • the present invention relates to a guide roller for a wire saw.
  • a wire saw that cuts a workpiece such as a semiconductor material or a magnetic material with a wire
  • the traveling of the wire is guided by a plurality of guide rollers.
  • a guide roller for a wire saw a mounting groove is formed on the outer peripheral surface of a metal disc member, and an annular outer peripheral member made of urethane rubber is fitted into this mounting groove, and the guide groove is formed on the outer peripheral surface of the outer peripheral member. Is formed (see, for example, Patent Document 1).
  • the axial cross section of the mounting groove of the disk member is formed in a V shape, and the outer peripheral member is supported by the inclined surface of the mounting groove. Easy to shift in the width direction. Therefore, the conventional guide roller has a problem that the wire is likely to swing when the travel of the wire is guided by the guide groove of the outer peripheral member.
  • the present invention is a guide roller for a wire saw, and guides the traveling of a wire for workpiece machining.
  • the guide roller includes a disc member and an annular outer peripheral member fitted on the outer peripheral surface of the disc member.
  • the outer peripheral member is an elastic member, and the guide groove of the wire is formed over the entire outer peripheral surface of the outer peripheral member.
  • a mounting groove is formed on the outer peripheral surface of the disk member over the entire circumference.
  • the mounting groove has a bottom surface and a pair of inner side surfaces, and both the inner side surfaces are formed perpendicular to the central axis of the disk member. And the said outer peripheral member is press-fitted between the said both inner surfaces.
  • the outer peripheral member is supported from both sides in the groove width direction by both inner side surfaces of the mounting groove, the outer peripheral member is not easily displaced in the groove width direction in the mounting groove. Therefore, in the guide roller of the present invention, when the travel of the wire is guided by the guide groove of the outer peripheral member, it is possible to suppress the wire from swinging, so that it is possible to increase the processing accuracy of the workpiece by the wire saw. In the guide roller of the present invention, the travel of the wire can be stably guided by the guide groove, so that the speed of the travel of the wire can be increased and the wire can be thinned.
  • the outer peripheral member since the outer peripheral member is press-fitted into the attachment groove, the outer peripheral member can be reliably attached to the attachment groove.
  • both the inner surfaces of the mounting groove are parallel and the mounting groove has a simple shape, so that the mounting groove can be formed with high accuracy and the dimensional accuracy of the mounting groove is confirmed. Easy to do.
  • an inner peripheral surface of the outer peripheral member is fastened to the bottom surface of the mounting groove.
  • the outer peripheral member is supported from three directions by the bottom surface and both inner side surfaces of the mounting groove, the outer peripheral member can be further stabilized with respect to the mounting groove.
  • a pair of side walls are formed over the entire outer periphery of the disk member, and the mounting groove is formed between the side walls. And it is preferable to form the recessed part connected to the said mounting groove in the outer-periphery edge part of the said side wall.
  • the pin is inserted into the concave portion of the side wall from the side of the disk member, the tip of the pin is hooked on the outer peripheral member, and the outer peripheral member is pulled outward in the radial direction of the disk member. It can be easily removed from the mounting groove.
  • the guide roller according to the present invention can prevent the wire from swinging, the processing accuracy of the workpiece by the wire saw can be increased. Moreover, in the guide roller of the present invention, the traveling of the wire can be stably guided, so that the traveling of the wire can be speeded up and the wire can be thinned.
  • the guide roller 10 of the present embodiment is used for a wire saw, and guides the traveling of the wire W for workpiece machining as shown in FIG.
  • the guide roller 10 includes a disk member 20 and an annular outer peripheral member 30 fitted to the outer peripheral surface of the disk member 20, and a guide groove 31 is formed on the outer peripheral surface of the outer peripheral member 30. ing.
  • the disk member 20 is a disk made of aluminum alloy, and a circular center hole 21 passes through the center.
  • a circular center hole 21 passes through the center.
  • four mounting holes 22 penetrate.
  • the mounting holes 22 are arranged at equal intervals in the circumferential direction of the center hole 21.
  • the center hole 21 is a part through which the rotation axis S is inserted as shown in FIG. Further, a bolt B inserted through the hole S2 of the flange portion S1 of the rotating shaft S is attached to each mounting hole 22. In this way, the guide roller 10 is fixed to the rotation shaft S.
  • a pair of side walls 25, 25 are formed on both edges of the outer peripheral surface of the disk member 20 over the entire circumference. Both side walls 25, 25 are annular wall portions, and are arranged at intervals in the direction of the central axis A of the disk member 20. Both side walls 25, 25 are formed perpendicular to the central axis A of the disk member 20, as shown in FIG.
  • a mounting groove 26 is formed between the side walls 25, 25. As shown in FIG. 2, the mounting groove 26 is formed over the entire circumference of the outer peripheral surface of the disk member 20.
  • the mounting groove 26 is a concave groove having a rectangular axial section, and as shown in FIG. 3B, a bottom surface 26a and a pair of inner side surfaces 26b and 26b are formed.
  • the mounting groove 26 is formed such that the width of the bottom surface 26a is larger than the height of the inner surface 26b.
  • the bottom surface 26 a is a circumferential surface formed around the central axis A of the disk member 20.
  • the bottom surface 26a is formed in parallel to the central axis A.
  • Both inner side surfaces 26b, 26b are circumferential surfaces formed around the central axis A.
  • Both inner side surfaces 26b, 26b are formed perpendicular to the central axis A.
  • a concave portion 27 is formed on the outer peripheral edge of the side wall 25.
  • the recess 27 is a cut extending from the outer peripheral edge of the side wall 25 toward the inner side (center side) of the disk member 20 in the radial direction.
  • the recess 27 is open to one surface and the other surface of the side wall 25 and communicates with the mounting groove 31.
  • the bottom surface of the recess 27 is continuous with the bottom surface 26 a of the mounting groove 26.
  • each concave portion 27 on one side wall 25 and each concave portion 27 on the other side wall 25 face each other.
  • the outer peripheral member 30 is an annular member, and the outer peripheral member 30 of this embodiment is an elastic member made of urethane rubber. As shown in FIG. 1, the outer circumferential member 30 is fitted on the outer circumferential surface of the disk member 20 and is press-fitted into the mounting groove 26 of the disk member 20. On the outer circumferential surface of the outer circumferential member 30, a guide groove 31 having a V-shaped axial cross section is formed over the entire circumference. The guide groove 31 is a concave groove on which the wire W (see FIG. 4) is hung.
  • the inner diameter of the outer peripheral member 30 is slightly smaller than the outer diameter of the bottom surface 26 a of the mounting groove 26. Therefore, in a state where the outer peripheral member 30 is fitted in the mounting groove 26, the inner peripheral surface 30 a of the outer peripheral member 30 is fastened to the bottom surface 26 a of the mounting groove 26 as shown in FIG. Thus, the inner peripheral surface 30 a of the outer peripheral member 30 is pressed against the bottom surface 26 a of the mounting groove 26.
  • the width L1 in the direction (center axis A direction) perpendicular to the circumferential direction of the outer peripheral member 30 is the width L2 in the direction (center axis A direction) perpendicular to the circumferential direction of the mounting groove 26. It is formed slightly larger than. Therefore, in a state where the outer peripheral member 30 is fitted in the mounting groove 26, the outer peripheral member 30 is press-fitted between the inner side surfaces 26b, 26b of the mounting groove 26 as shown in FIG. Thus, the both side surfaces 30 b and 30 b of the outer peripheral member 30 are pressed against both the inner side surfaces 26 b and 26 b of the mounting groove 26.
  • the outer peripheral member 30 is clamped to the bottom surface 26a and sandwiched between both inner side surfaces 26b and 26b. Thereby, the outer peripheral member 30 is supported from the three directions of the bottom surface 26a of the mounting groove 26 and both inner side surfaces 26b and 26b. Thus, by pressing the outer peripheral member 30 into the mounting groove 26, the outer peripheral member 30 is less likely to be displaced in the groove width direction within the mounting groove 26.
  • the wire W when the travel of the wire W (see FIG. 4) is guided by the guide groove 31 of the outer peripheral member 30, the wire W can be prevented from swinging. Processing accuracy can be increased.
  • the travel of the wire W (see FIG. 4) can be stably guided by the guide groove 31, so that the travel of the wire W is increased and the wire W is thinned. can do.
  • the outer peripheral member 30 is press-fitted into the mounting groove 26, so that the outer peripheral member 30 can be securely attached to the mounting groove 26.
  • both the inner side surfaces 26b, 26b of the mounting groove 26 are parallel, and the mounting groove 26 is a simple rectangular concave groove. Therefore, the mounting groove 26 can be formed with high accuracy. In addition, it is easy to confirm the dimensional accuracy of the mounting groove 26.
  • a pin is inserted into the concave portion 27 of the side wall 25 from the side of the disk member 20, and the tip of the pin is hooked on the outer peripheral member 30,
  • the outer peripheral member 30 can be easily detached from the mounting groove 26 by pulling the outer peripheral member 30 outward in the radial direction of the disk member 20.
  • the guide roller 10 of this embodiment uses an outer peripheral member 30 made of urethane rubber.
  • the material of the outer peripheral member 30 is not limited, and various elastic members such as silicon rubber can be used. Can be used.
  • the disk member 20 made of aluminum alloy is used, but the material of the disk member 20 is not limited, and various metal materials and resin materials can be used. Moreover, it is preferable to reduce the weight of the disk member 20 by forming a plurality of openings in the disk member 20.
  • the three concave portions 27 are formed on the side wall 25, but the number of the concave portions 27 is not limited. Moreover, in the guide roller 10 of this embodiment, although the recessed part 27 is formed in the side walls 25 and 25, you may form the recessed part 27 only in one side wall 25. FIG.
  • the outer peripheral member 30 is supported by the bottom surface 26a of the mounting groove 26 and both inner side surfaces 26b, 26b, but the outer peripheral member 30 is supported by both inner side surfaces 26b, 26b.
  • the outer peripheral member 30 can be stabilized with respect to the mounting groove 26.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

L'invention concerne un rouleau guide pour fil hélicoïdale (10) pour guider le déplacement d'un fil comprenant un élément plaque circulaire (20), et un élément circonférentiel externe annulaire (30) placé dans la surface circonférentielle externe de l'élément plaque circulaire (20). L'élément circonférentiel externe (30) est un élément élastique, et une rainure de guidage (31) pour le fil est formée dans ledit élément. En outre, une rainure de fixation (26) est formée dans l'élément plaque circulaire (20). Dans la rainure de fixation (26), une surface inférieure (26a) et une paire de surfaces internes (26b, 26b) sont formées, et les deux surfaces internes (26b, 26b) sont formées perpendiculairement par rapport à la ligne d'axe central de l'élément plaque circulaire (20). L'élément circonférentiel externe (30) est placé par pression entre les surfaces internes (26b, 26b). De par cette configuration, l'élément circonférentiel externe (30) placé entre les surfaces périphériques externes de l'élément plaque circulaire (20) peut être stabilisé.
PCT/JP2016/068734 2016-06-23 2016-06-23 Rouleau guide destiné à un fil hélicoïdal Ceased WO2017221388A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2016/068734 WO2017221388A1 (fr) 2016-06-23 2016-06-23 Rouleau guide destiné à un fil hélicoïdal
JP2018523242A JPWO2017221388A1 (ja) 2016-06-23 2016-06-23 ワイヤソー用のガイドローラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2016/068734 WO2017221388A1 (fr) 2016-06-23 2016-06-23 Rouleau guide destiné à un fil hélicoïdal

Publications (1)

Publication Number Publication Date
WO2017221388A1 true WO2017221388A1 (fr) 2017-12-28

Family

ID=60783223

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/068734 Ceased WO2017221388A1 (fr) 2016-06-23 2016-06-23 Rouleau guide destiné à un fil hélicoïdal

Country Status (2)

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JP (1) JPWO2017221388A1 (fr)
WO (1) WO2017221388A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009001242A1 (fr) * 2007-06-27 2008-12-31 Simec S.P.A. Poulie pour machines-outils à plusieurs fils
WO2011032603A1 (fr) * 2009-09-18 2011-03-24 Applied Materials, Inc. Dispositif de sciage à fil et son procédé de fonctionnement
WO2011086403A1 (fr) * 2010-01-18 2011-07-21 Applied Materials, Inc. Pneu et roue de poulie, poulie pour dispositif de scie hélicoïdale et procédé d'assemblage de poulie
US20130061730A1 (en) * 2011-09-08 2013-03-14 Illinois Tool Works Inc. Wire saw for cutting pipe
JP2014079830A (ja) * 2012-10-15 2014-05-08 Yasunaga Corp ワイヤソー装置及びこれを用いたウエハの製造方法
CN204736348U (zh) * 2015-05-29 2015-11-04 邢台晶龙电子材料有限公司 一种硅棒切片机床用导向装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009001242A1 (fr) * 2007-06-27 2008-12-31 Simec S.P.A. Poulie pour machines-outils à plusieurs fils
WO2011032603A1 (fr) * 2009-09-18 2011-03-24 Applied Materials, Inc. Dispositif de sciage à fil et son procédé de fonctionnement
WO2011086403A1 (fr) * 2010-01-18 2011-07-21 Applied Materials, Inc. Pneu et roue de poulie, poulie pour dispositif de scie hélicoïdale et procédé d'assemblage de poulie
US20130061730A1 (en) * 2011-09-08 2013-03-14 Illinois Tool Works Inc. Wire saw for cutting pipe
JP2014079830A (ja) * 2012-10-15 2014-05-08 Yasunaga Corp ワイヤソー装置及びこれを用いたウエハの製造方法
CN204736348U (zh) * 2015-05-29 2015-11-04 邢台晶龙电子材料有限公司 一种硅棒切片机床用导向装置

Also Published As

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