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WO2017126729A1 - Procédé d'extraction de montage de test pour désintégration - Google Patents

Procédé d'extraction de montage de test pour désintégration Download PDF

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Publication number
WO2017126729A1
WO2017126729A1 PCT/KR2016/000771 KR2016000771W WO2017126729A1 WO 2017126729 A1 WO2017126729 A1 WO 2017126729A1 KR 2016000771 W KR2016000771 W KR 2016000771W WO 2017126729 A1 WO2017126729 A1 WO 2017126729A1
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WO
WIPO (PCT)
Prior art keywords
comparison
test fixture
transmission line
test
fixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2016/000771
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English (en)
Korean (ko)
Inventor
조재용
정성일
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huwin Co Ltd
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Huwin Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huwin Co Ltd filed Critical Huwin Co Ltd
Publication of WO2017126729A1 publication Critical patent/WO2017126729A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
    • B62B9/00—Accessories or details specially adapted for children's carriages or perambulators
    • B62B9/10—Perambulator bodies; Equipment therefor
    • B62B9/12—Perambulator bodies; Equipment therefor involving parts that are adjustable, attachable or detachable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
    • B62B9/00—Accessories or details specially adapted for children's carriages or perambulators
    • B62B9/02—Accessories or details specially adapted for children's carriages or perambulators providing for travelling up or down a flight of stairs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60Y—INDEXING SCHEME RELATING TO ASPECTS CROSS-CUTTING VEHICLE TECHNOLOGY
    • B60Y2200/00—Type of vehicle
    • B60Y2200/80—Other vehicles not covered by groups B60Y2200/10 - B60Y2200/60
    • B60Y2200/83—Perambulators; Buggies; Strollers

Definitions

  • the present invention relates to a method for extracting a test fixture for de-embedding, and more particularly, a test fixture that is measured together when the instrument measures (de-embedding) characteristics of a device under test (DUT). It is to extract the characteristics of the test fixture to accurately remove the characteristics of the test fixture.
  • SI and PI include measurement-based analysis and simulation-based analysis.
  • Simulation-based analysis can be used to predict SI and PI problems at the design stage without measurement-based analysis.
  • Simulation-based analysis can reduce development and manufacturing time and reduce costs. can do.
  • a test fixture is used to perform the measurement of the device under test (DUT), which is an interface with the instrument for measuring the device under test (DUT). Since the measurement result includes the characteristics of the device (DUT) to be measured and the characteristics of the test fixture, it is necessary to accurately grasp the characteristics of the test fixture in order to extract the characteristics of the device (DUT) from the measurement results of the measuring instrument.
  • Patent Document 1 Republic of Korea Patent Publication No. 10-2014-0096350
  • the technical problem to be achieved by the present invention is to measure the device to be measured by measuring the characteristics of the device to be measured by accurately measuring the characteristics of the device to be measured and the characteristics of the test fixture included in the measurement results of the instrument It was extracted correctly.
  • a method for extracting a test fixture for de-embedding includes (a) adding a first comparison transmission line to the discontinuity interval of the test fixture including a transmission line and a discontinuity interval, and thereby performing a first comparison test fixture. Generating (a-1) connecting the first comparison test fixtures to form a first comparison test fixture having a through structure; and (b) a second comparison to the discontinuity section of the test fixture.
  • the first comparison transmission line is formed to have a first length
  • the second comparison transmission line is formed to have a second length corresponding to twice the first length
  • the discontinuity section is an impedance discontinuous portion, characterized in that the via (via).
  • step (c) it is a common part of the first comparison test fixture and the second comparison test fixture from the multiplication operation of the inverse value of the first comparison test fixture and the second comparison test fixture.
  • the transmission line and the discontinuity section are canceled, and a portion corresponding to the first comparison transmission line in the second comparison transmission line is canceled to obtain the first comparison transmission line having a first length. do.
  • the comparison test fixture of the through structure having two comparison test fixtures successively includes one comparison test fixture and the other comparison test fixture.
  • the comparison transmission line may be connected continuously.
  • the first comparison test fixture and the second comparison test fixture are four-port type test fixtures, and the four-port type first comparison test fixture is A pair of test fixtures including the first comparison transmission line are provided in a pair of test fixtures through which two test fixtures are successively formed, and the second comparison test fixture having a four-port shape includes two test fixtures in succession. And a pair of forms including the second comparison transmission line in the test fixture through.
  • the four-port type first comparison test fixture includes a pair in which a first comparison transmission line is added between the two test fixtures included in the test fixture through, and the four-port type
  • the second comparison test fixture has a form in which a second transmission line for comparison is added between the two test fixtures included in the test fixture through, and the first comparison is added between two test fixtures.
  • the transmission line for the comparison or the second transmission line for comparison may be added to be connected to a discontinuity section formed in each of the two test fixtures.
  • a test fixture extraction method for de-embedding includes a first comparison test fixture generated by adding an arbitrary first transmission line to a test fixture, and an arbitrary first addition to the test fixture.
  • the test fixture may be accurately separated and its characteristics may be extracted.
  • FIG. 1 is a view schematically showing a change in a test fixture according to a test fixture extraction method for de-embedding according to an embodiment of the present invention.
  • FIGS. 2A and 2B are circuit diagrams schematically illustrating comparative test fixtures generated by a test fixture extraction method for de-embedding according to an embodiment of the present invention.
  • FIG. 3 is a graph comparing characteristics of a test fixture extracted by a test fixture extraction method for de-embedding according to an embodiment of the present invention with characteristics of an actual test fixture.
  • 4A and 4B are circuit diagrams schematically illustrating a comparison test fixture generated by a test fixture extraction method for de-embedding according to an embodiment of the present invention.
  • FIG. 5 is a graph comparing characteristics of a test fixture extracted by a test fixture extraction method for de-embedding according to an embodiment of the present invention with characteristics of an actual test fixture.
  • FIG. 6 is a flowchart illustrating a test fixture extraction method for de-embedding according to an embodiment of the present invention.
  • test fixture to which a test fixture extraction method for de-embedding according to an embodiment of the present invention is applied, and a change according to the present invention to the corresponding test fixture will be described.
  • a test fixture The test fixture includes a transmission line 11 and a discontinuity 12 as shown in FIG. 1A, where the discontinuity 12 is the end of the test fixture 10.
  • An impedance discontinuous portion formed in the portion in one example, may be a via.
  • the test fixture 10 When the discontinuity section 12 is formed in the test fixture 10, ringing occurs in a time domain reflectometer (TDR) waveform generated for the characteristic calculation of the test fixture 10, and thus the test fixture 10 The accuracy of the extraction of the features is reduced, and in one embodiment of the present invention, the test fixture 10 having such a discontinuity section 12 is shown in FIGS. 1A and 1B and 1C. As described above, each of the first and second comparison test fixtures 20 and 30 is generated.
  • TDR time domain reflectometer
  • the discontinuity section 12 formed in the test fixture 10 may be another impedance discontinuity section other than the via, but is not limited thereto, and the via or other impedance discontinuity section that may be formed in the test fixture 10 may be a TDR.
  • Waveforms and ringing are interpreted in conventional techniques for computing the properties of the test fixture 10 and will not be described in detail herein.
  • the first comparison test fixture 20 includes a transmission line 11a and a discontinuity section 12a.
  • a first comparison transmission line 21 is included.
  • the first comparison transmission line 21 is formed in a form in which the first comparison transmission line 21 is added to the test fixture 10 and is connected to the discontinuity section 12.
  • the first comparison transmission line 21 may be formed of the same transmission line as the transmission line 11 included in the test fixture 10, and the first comparison transmission line 21 deforms the test fixture 10. This is a part added to the test fixture 10 in order to compare the first comparison test fixture 20 and the other test fixtures that are generated by the comparison.
  • the length of the first comparison transmission line 21 may be formed as a first length, and the first length may be the same as or different from the length of the first comparison transmission line 21, but is not limited thereto. Do not.
  • the first comparison transmission line 21 has a shorter length than the transmission line 11 of the test fixture 10, that is, the existing transmission line 11a included in the first comparison transmission line 21. It is preferable to have, the length may be L1mm.
  • the first comparison test fixture 20 is generated using the test fixture 10 as described with reference to FIG. 1B, but the transmission line 11a has the same structure as the test fixture 10. ) And a first comparison transmission line 21 included as the discontinuity section 12a and added to the discontinuity section 12a.
  • the transmission line 11b and the discontinuity section 12b of the second comparison test fixture 30 are the transmission line 11 and the discontinuity section 12 of the test fixture 10 and the second comparison transmission line 31. ) Is added to the discontinuity section 12b similarly to the first comparison transmission line 21.
  • the second comparison test fixture 30 is generated by using the test fixture 10 as described with reference to FIG. 1C, and includes all elements of the test fixture 10, but includes a second comparison. It has a structure that further includes a transmission line 31 for.
  • the first comparison test fixture 20 and the second comparison test fixture 30 are generated using the test fixture 10, and the first comparison test fixture 20 is generated by using the test fixture 10.
  • the comparison transmission line 21 and the second comparison transmission line 31 are added to each other to generate a structure.
  • first and second comparison test fixtures 20 and 30 may be deformed into a through structure, as shown in FIGS. 1D and 1E, respectively.
  • 200 includes two consecutive first comparison test fixtures 20 as shown in FIG. 1D, and the second comparison test fixture 300 of the through structure is shown in FIG. 1E.
  • the test apparatus includes two consecutive second comparison test fixtures 30.
  • the first comparison test fixture 200 having the through structure adds the first comparison test fixture 20 in the opposite direction to each other, and the second comparison test fixture 300 having the through structure also has a second structure.
  • the comparison test fixtures 30 are added in opposite directions to form a continuous structure.
  • the actual circuit diagrams of the first and second comparison test fixtures 200 and 300 of the through structure including the first and second comparison test fixtures 20 and 30 in the form of through in succession are shown in FIGS. 2A and 2B.
  • the first comparison test fixture 200 having the through structure has a shape of a fixture through which two first comparison test fixtures 20 are continuous as shown in FIG. 2A.
  • each of the first comparison test fixtures 20 includes a first comparison transmission line 21, two first comparisons are used in the middle of the first comparison test fixture 200 having a through structure.
  • the transmission line 21 includes a continuous portion.
  • the transmission line TL1 positioned on the left side of two consecutive first comparison transmission lines TL3 21 formed in the center portion of the first comparison test fixture 200 having a through structure is compared to one first comparison.
  • the first transmission line 11a included in the test fixture 20 for use, and the transmission line TL2 positioned on the right side of two consecutive first comparison transmission lines TL3 21 are compared with one another.
  • the first transmission line 11b included in the test fixture 20 may be used.
  • the comparison test fixture 300 is connected to each of the second comparison test fixtures 30 on both sides thereof based on two consecutive second comparison transmission lines TL3 31.
  • the transmission line TL1 positioned on the left side of two consecutive second comparison transmission lines TL3 31 is the first transmission line 11b included in one second comparison test fixture 30.
  • the transmission line TL2 located on the right side of two consecutive second comparison transmission lines TL3 31 is the first transmission line 11b included in the other second comparison test fixture 30. Can be.
  • two consecutive second comparison transmission lines TL3 and 31 are formed to have a length corresponding to twice the length of two consecutive first comparison transmission lines TL3 and 21. to be.
  • the first and second comparison test fixtures 20 and 30 are formed by adding L1 or L2 comparison transmission lines 21 and 31, respectively.
  • 1 Comparative test fixtures 20 are continuously formed to form a through structure, or the second comparison test fixtures 30 are continuously formed to form a through structure, whereby the comparison transmission lines 21 and 31 in the through structure are formed. Is formed between the discontinuous section 12 and the comparison transmission line (21, 31), thereby forming a structure that can easily extract the test fixture through the time domain channel characterization method (TCC) do.
  • TCC time domain channel characterization method
  • the test fixture extraction method for de-embedded is a first comparison test fixture 20, a second comparison from a single test fixture A first test fixture 200 having a through structure and a second comparison test fixture having a through structure from the first and second comparison test fixtures 20 and 30. An operation of extracting a test fixture using the first comparison test fixture 200 having the through structure and the second comparison test fixture 300 having the through structure is described.
  • the first comparison transmission included in the first comparison test fixture 20 is calculated by calculating the first and second comparison test fixtures 20 and 30 illustrated in FIGS. 1B and 1C. Extract the line 21.
  • the first comparison test fixture 20 is regarded as F1 and the second comparison test fixture 30 is regarded as F2 to perform a multiplication operation.
  • the first and second comparison test fixtures 20 and 30 are generated by being derived from one test fixture 10, but only the additional comparison transmission lines 21 and 31 are different, the first and second comparisons are performed. By computing the test fixtures 20 and 30, an operation result in which only the first comparison transmission line 21 remains is derived.
  • the inverse value of the first comparison transmission line 21 generated from the calculation of the first and second comparison test fixtures 20 and 30 is multiplied by the first comparison test fixture 20 to generate the first value.
  • the first comparison transmission line 21 By removing the first comparison transmission line 21 from the first comparison test fixture 20, only the characteristics of the test fixture 10 may be extracted.
  • the test fixture 10 extracted from the method described with reference to FIGS. 1, 2A and 2B is a graph of insertion loss characteristics of the de-embedded test fixture 10 shown in FIG. As shown in the graph of return loss characteristics of the de-embedded test fixture 10 shown in b), the insertion loss and return loss characteristics of the test fixture 10 extracted from the test fixture extraction method for de-embedding according to the present invention are It can be seen that the characteristics of the actual test fixture are closer to the insertion loss characteristics and the return loss characteristics of the test fixture extracted from the de-embedding method according to the prior art.
  • a test fixture extraction method for de-embedding according to an embodiment of the present invention will be described as an example of a 4-port type test fixture instead of a single test fixture.
  • a four-port type test fixture includes two test fixtures in series and includes a pair including a structure including a comparison transmission line therebetween, and ports at both ends of each structure. Is formed to have a structure comprising a total of four ports.
  • the two test fixtures are continuously formed by forming a test fixture through structure, and the comparison transmission line has a discontinuity section of two test fixtures having a test fixture through structure. Are connected to each other.
  • each comparison test fixture includes the same comparison transmission line and the comparison transmission line.
  • the first comparison transmission lines TL5 and TL6 21 may be formed to have a length shorter than the length of the transmission line already included in the test fixture.
  • the first comparison test fixture 20 generated by adding the first comparison transmission lines TL5 and TL6 21 to the test fixture having four ports has a structure as shown in FIG. 4A.
  • the second comparison transmission fixture 31 is added to the test fixture having four ports to generate the second comparison test fixture 30.
  • the second comparison test fixture 30 is formed of a test fixture structure having a four-port shape as shown in FIG. 4B.
  • test fixture with four ports transmits a comparison to an existing test fixture structure, except that the same first or second comparison transmission lines 21 and 31 are each added when forming a pair of comparison test fixtures. It is the same as that described above with reference to Figs. 1, 2A and 2B in that the lines are additionally formed. Accordingly, the test fixture structure of the 4-port type test fixture shown in FIGS. 4A and 4B may be de-embedded through the method described with reference to FIGS. 1, 2A, and 2B.
  • the existing test fixture for generating a test fixture having four ports as shown in Figures 4a and 4b is a pair of test fixture having four ports and two consecutive test fixtures connected in the form of a test.
  • the first comparison transmission line is added to each pair of test fixtures, and the second comparison transmission line is added to the other pair of test fixtures, respectively.
  • the inverse value of the first fixture F1 20, which is a pair of comparison test fixtures 20 each including the first comparison transmission line 21 shown in FIG. 4A, and FIG. 4B The first comparison transmission line 21 from the calculation (product) of the second fixture F2 (30) which is a pair of comparison test fixtures 30 each including the second comparison transmission line 31 shown in FIG. L1 (21), which is obtained by calculating the inverse value of the obtained first comparison transmission line (L1) 21 and a pair of comparison test fixtures (F1) 20 shown in FIG. 4A. To extract a pair of test fixtures (not shown).
  • the characteristic accuracy of the test fixture extracted through the 4-port type test fixture extraction method according to an embodiment of the present invention is as shown in Fig. 5, the insertion loss of the test fixture extracted from the de-embedding method according to the prior art. It can be seen that the characteristics of the actual test fixture are closer to those of the characteristics and the return loss characteristics.
  • a test fixture extraction method of extracting a test fixture by generating two different comparison test fixtures by adding an arbitrary transmission line and extracting the test fixtures in order to extract the characteristics of the test fixture is possible to accurately extract the characteristics of the test fixture to improve the accuracy of the component measurement of the device under measurement (DUT).
  • a first comparison is performed by adding a first transmission line 21 to the test fixture 10.
  • the test fixture 20 is generated (S100).
  • the test fixture 10 includes a transmission line 11 and a discontinuity section 12, and the first transmission line 21 to be added is added to be connected to the discontinuity section 12.
  • the first transmission line 21 may be any length having a length shorter than the transmission line 12 length of the test fixture 10 as the first length L1mm.
  • first comparison test fixtures 20 generated in step S100 are connected to each other to form a first comparison test fixture 200 having a through structure (S200).
  • the second transmission line 31 is added to the test fixture 10 to generate a second comparison test fixture 30 (S200), and the two second comparison test fixtures 30 are connected to each other.
  • a second comparison test fixture 300 having a through structure is formed (S400).
  • the first comparison test fixture 200 having the through structure formed from the above steps S200 and S400 and the second comparison test fixture 300 having the through structure are respectively subjected to TCC operation (S500) to perform the first operation.
  • TCC operation S500
  • the comparison test fixture 20 and the second comparison test fixture 30 are obtained.
  • the first transmission line 21 is obtained by multiplying the inverse value of the first comparison test fixture 20 and the second comparison test fixture 30 (S600).
  • the first comparison test fixture 20 is generated in the first step S100 and is regarded as the first fixture F1
  • the second comparison test fixture 300 is generated in the third step S300.
  • the first fixture F1 and the second fixture F2 in common when the inverse value of the first fixture F1 is multiplied by the second fixture F2.
  • the portion including the transmission line 11 and the discontinuity section 12, which are components of the test fixture 10, are canceled so that only the first comparison transmission line 21 remains.
  • the first comparison transmission line 21 corresponds to a part of the second comparison transmission line 31. More specifically, since it corresponds to 1/2 of the second comparison transmission line 31, the second comparison transmission line is obtained by multiplying the inverse value of the first fixture F1 by the second fixture F2. A part of the first comparison transmission line 21 is canceled at 31 so that only the first comparison transmission line 21 remains.
  • test fixture 10 is obtained by multiplying the inverse value of the first comparison transmission line 21 obtained from the step S600 with the first fixture F1 that is the first comparison test fixture 20. (S700).
  • the first fixture F1 which is the first comparison test fixture 20, transmits the first comparison transmission to the transmission line 11 and the discontinuity section 12, which are structures of the test fixture 10 to be extracted in the present invention. Since it has a structure including the line 21, the first comparison test fixture 20 for calculating the inverse value of the first transmission line obtained in the third step (S600) to the first fixture (F1) In part, the first comparison transmission line 21 is canceled to accurately extract the test fixture 10.
  • test fixture includes a discontinuity section from performing a series of steps (S100, S200, S300, S400, S500, S600, S700), it is possible to accurately extract the test fixture, thereby determining the exact characteristics of the test fixture. Therefore, the characteristics of the device to be measured (DUT) can also be accurately understood.
  • test fixture 11 transmission line

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Abstract

La présente invention concerne un procédé d'extraction d'un montage de test pour désintégration. Un procédé de désintégration du montage de test comprend les étapes consistant à : (a) générer un premier montage de test de comparaison par ajout d'une première ligne de transmission de comparaison à une section de discontinuité du montage de test comprenant une ligne de transmission et la section de discontinuité ; (b) générer un second montage de test de comparaison par ajout d'une seconde ligne de transmission de comparaison à la section de discontinuité du montage de test ; (c) obtenir une première ligne de transmission de comparaison en multipliant une valeur inverse du premier montage de test de comparaison par un second montage de test de comparaison ; et (d) obtenir le montage de test en multipliant la valeur inverse de la première ligne de transmission de comparaison obtenue à l'étape (c) par le premier montage de test de compraison. Par conséquent, les caractéristiques du montage de test peuvent être précisément extraites par la génération et l'utilisation du premier montage de test de comparaison et du second montage de test de comparaison. Ainsi, il est possible d'effectuer de façon précise une désintégration pour mesurer la valeur caractéristique d'un dispositif sous test (DUT) en utilisant la valeur caractéristique précise du montage de test.
PCT/KR2016/000771 2016-01-18 2016-01-25 Procédé d'extraction de montage de test pour désintégration Ceased WO2017126729A1 (fr)

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KR1020160006071A KR101717690B1 (ko) 2016-01-18 2016-01-18 디임베딩을 위한 테스트 픽스처 추출 방법
KR10-2016-0006071 2016-01-18

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CN115728623B (zh) * 2022-11-16 2025-06-03 中国船舶集团有限公司第七〇九研究所 高速集成电路测试加载板校准装置的损耗去嵌方法及系统

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US6838885B2 (en) * 2003-03-05 2005-01-04 Murata Manufacturing Co., Ltd. Method of correcting measurement error and electronic component characteristic measurement apparatus
US20080258738A1 (en) * 2007-04-20 2008-10-23 Anritsu Company Characterizing test fixtures
US7500161B2 (en) * 2003-06-11 2009-03-03 Agilent Technologies, Inc. Correcting test system calibration and transforming device measurements when using multiple test fixtures
US7865319B1 (en) * 2006-11-30 2011-01-04 Lecroy Corporation Fixture de-embedding method and system for removing test fixture characteristics when calibrating measurement systems
KR20130040689A (ko) * 2011-10-14 2013-04-24 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 디-임베딩을 위한 방법 및 장치

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JP2972176B1 (ja) * 1998-02-26 1999-11-08 ブレン・チャイルド株式会社 基板検査装置
WO2013068040A1 (fr) 2011-11-09 2013-05-16 Advantest (Singapore) Pte. Ltd. Concept pour extraire un signal qui est échangé entre un dispositif en cours de test et un équipement de test automatique

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6838885B2 (en) * 2003-03-05 2005-01-04 Murata Manufacturing Co., Ltd. Method of correcting measurement error and electronic component characteristic measurement apparatus
US7500161B2 (en) * 2003-06-11 2009-03-03 Agilent Technologies, Inc. Correcting test system calibration and transforming device measurements when using multiple test fixtures
US7865319B1 (en) * 2006-11-30 2011-01-04 Lecroy Corporation Fixture de-embedding method and system for removing test fixture characteristics when calibrating measurement systems
US20080258738A1 (en) * 2007-04-20 2008-10-23 Anritsu Company Characterizing test fixtures
KR20130040689A (ko) * 2011-10-14 2013-04-24 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 디-임베딩을 위한 방법 및 장치

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