WO2016190459A1 - Dispositif d'inspection d'écran d'affichage - Google Patents
Dispositif d'inspection d'écran d'affichage Download PDFInfo
- Publication number
- WO2016190459A1 WO2016190459A1 PCT/KR2015/005228 KR2015005228W WO2016190459A1 WO 2016190459 A1 WO2016190459 A1 WO 2016190459A1 KR 2015005228 W KR2015005228 W KR 2015005228W WO 2016190459 A1 WO2016190459 A1 WO 2016190459A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- shaft
- case
- motor
- display panel
- sensor module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B17/00—Details of cameras or camera bodies; Accessories therefor
- G03B17/02—Bodies
- G03B17/12—Bodies with means for supporting objectives, supplementary lenses, filters, masks, or turrets
Definitions
- the present invention relates to an inspection camera used for vision inspection of a display panel.
- Liquid crystal display device which is widely used for TVs and monitors due to its high contrast ratio, is advantageous for moving image display and has high optical anisotropy and polarization.
- a general liquid crystal display device includes a liquid crystal panel in which a liquid crystal panel is bonded between first and second substrates having an array layer for driving a liquid crystal and a color filter layer for color implementation. It is an essential component, which causes the difference in transmittance by changing the arrangement direction of the liquid crystal molecules by the electric field inside.
- the difference in transmittance of the liquid crystal panel is the color of the color filter through the light of the back light placed on the back side. The combination is reflected and displayed in the form of a color image.
- a general liquid crystal display manufacturing process may be divided into a substrate manufacturing process for obtaining the first and second substrates, a cell process for completing the liquid crystal panel, and a module process for integrating the liquid crystal panel and the backlight.
- a dual substrate manufacturing process an array layer and a color filter layer are formed on each substrate by repeating thin film deposition, photo-lithography, etching, and the like several times.
- the completed liquid crystal panel is a polarizing plate in the module process
- the driving circuit and the like are attached, they are integrated with the backlight to form a liquid crystal display device.
- a test image is implemented by applying an electrical signal by a probe contact to the liquid crystal panel before the driving circuit is attached, and a visual test for confirming whether or not there is a defect is confirmed.
- the liquid crystal panel inspection step of determining is performed.
- Another object may be to provide the camera with different polarization angles.
- Another object may be to automatically provide a polarizing filter to the camera.
- Still another object may be to provide a rotating polarizing filter to the camera.
- Still another object may be to easily inspect an image of a defect of a display panel.
- a case A sensor module installed inside the case; A lens mounted to the case and providing light to the sensor module; And, there is provided a display panel inspection camera including a polarization filter positioned between the sensor module and the lens.
- the shaft is installed in the case;
- the polarizing filter may be fitted to the shaft to be rotatable.
- the senor module and the lens may have the same optical axis, and the polarization filter may be located on the optical axis.
- the shaft is installed in the case;
- the plate may be inserted into the shaft so as to be rotatable and disposed between the sensor module and the lens.
- the plate may further include a polarization filter.
- the motor is further provided; the polarization filter may be rotated by the motor.
- the shaft is installed in the case; And a plate fitted to the shaft and positioned between the sensor module and the lens, wherein the motor rotates the shaft, the shaft rotates the plate, and the polarization filter comprises the plate. It may be provided in.
- the shaft is installed in the case; And a belt for mechanically connecting the motor and the shaft, wherein the motor and the shaft may be spaced apart from each other.
- the polarizing filter may be a plurality.
- each of the plurality of polarizing filters may have different polarization angles.
- the sensor module may include an image sensor.
- the motor is installed in the case;
- the apparatus may further include a belt that mechanically connects the motor and the front shaft.
- the motor and the shaft may be spaced apart from each other.
- the controller is located outside the case, electrically connected to the sensor module, the controller for analyzing the image received by the image sensor to read whether the display panel is defective or not; have.
- different polarization angles may be provided to the camera.
- the polarizing filter may be automatically provided to the camera.
- FIG. 1 to 3 illustrate an example of a display panel inspecting apparatus according to an exemplary embodiment of the present invention.
- FIG. 4 and 5 illustrate an example of a display panel inspection camera according to an exemplary embodiment of the present invention.
- FIG. 6 shows an example of a side of a display panel inspection camera according to an embodiment of the present invention.
- FIG. 7 shows an example of a polarizing filter according to an embodiment of the present invention.
- FIG. 8 illustrates an example of a side of a display panel inspection camera according to an exemplary embodiment of the present invention.
- FIG 9 shows an example of a polarizing filter and a driving system according to an embodiment of the present invention.
- FIG. 10 shows another example of the polarization filter and the drive system according to the embodiment of the present invention.
- FIG. 11 illustrates an example of a front surface of a display test panel camera according to an exemplary embodiment of the present invention.
- FIG. 12 shows another example of the front of a display inspection panel camera according to an embodiment of the present invention.
- 1 illustrates an example of an apparatus for inspecting a display panel according to an exemplary embodiment of the present invention. 1 shows a vision inspection unit 100 and an inspection table 200.
- the vision inspection unit 100 may obtain and process information about the object.
- the test table 200 may be provided with a display panel, and the vision inspection unit 100 may photograph the display panel opposite to the vision inspection unit 100.
- 2 illustrates an example of a display panel inspecting apparatus according to an exemplary embodiment of the present invention. 2 shows the transfer line 130, the camera 110, and the controller 140.
- the vision inspection unit 100 described with reference to FIG. 1 may include a transfer line 130, a camera 110, and a controller 140.
- the transfer line 130 may be installed on the upper portion of the inspection table 200 described with reference to FIG. 1.
- Camera 110 is installed on the transfer line 130, it may be installed to be movable. In another aspect, the camera 110 may be fixed if the examination table 200 may move, or if the display panel may move on the examination table 200.
- the controller 140 may check whether the panel is defective by reading an image of the display panel captured by the camera 110.
- the camera 110 may be provided with a CCD or CMOS sensor, for example.
- the camera 110 may be, for example, a line camera that scans a panel for each line, or may be an area camera that can scan the panel for a predetermined area.
- 3 shows an example of a display panel inspecting apparatus according to an exemplary embodiment of the present invention. 3 illustrates a camera 110, a controller 140, a panel 150, a backlight 160, and a diffusion plate 170.
- the display panel 150 may be, for example, an LCD panel and an inspection object, and may be located between the camera 110 and the backlight 160.
- the backlight 160 may provide light to the display panel 150, and the camera 110 may receive light from the backlight 160 through the display panel 150.
- the diffuser plate 170 may be positioned between the display panel 150 and the backlight 160 so that the light provided from the backlight 160 is soft and widely spread.
- the controller 140 may read the image information transmitted by the camera and check whether the display panel 150 is defective.
- the sensor module 200 may include a module housing 210, a PCB 230, an image sensor 250, and a shutter unit 270.
- the module housing 210 may block external light.
- the module housing 210 may be formed in a cylindrical shape or a polygonal pillar shape.
- the interior of the module housing 210 may be darkened to prevent light from being scattered.
- the inside of the module housing 210 may be black.
- the PCB 230 may be installed inside the module housing 210, and the image sensor 250 may be mounted on the PCB 230.
- the image sensor 250 may be, for example, a CMOS or a CCD.
- the shutter unit 270 may be installed in the module housing 210 to selectively introduce light from the outside of the module housing 210. That is, by the operation of the shutter unit 270, light may be received or blocked by the image sensor 250.
- 5 illustrates an example of a display panel inspection camera according to an exemplary embodiment of the present invention. 5 shows a lens housing 310, a lens group 330, and a filter 350.
- the lens housing 310 may block external light.
- the lens housing 310 may be formed in a cylindrical shape.
- the interior of the lens housing 310 may be darkened to prevent light from being scattered.
- the inside of the lens housing 310 may be black.
- the lens group 330 may be installed in the lens housing 310.
- the lens group 330 may be provided in various ways according to the zoom ratio.
- the lens group 330 may include a spherical lens, an aspherical lens, a concave lens, and the like.
- the filter 350 may be, for example, a UV filter.
- 6 shows an example of a side of a display panel inspection camera according to an embodiment of the present invention. 6 shows a case 400, mount 410, shaft 450, plate 470, and motor 490.
- the case 400 may include a mount hole 430 on one side.
- the case 400 may be separated from the inside and the outside, and the mount hole 430 may connect the inside and the outside of the case 400.
- the mount 410 may be formed or installed around the mount hole 430.
- the mount 410 is for fixing the lens to the case 400, and the mount hole 430 may be the mount 410 directly.
- Mount 410 may be, for example, a flange.
- the shaft 450 may be installed in the case 400, and may be installed around the mount hole 430.
- the shaft 450 may be installed to be rotatable in the case 400.
- the shaft 450 may have a front shaft 454 and a rear shaft 452.
- the front shaft 454 and the rear shaft 452 may rotate integrally.
- the plate may be fitted to the shaft 450.
- the plate 470 may be, for example, in the shape of a disc.
- the plate 470 may be fitted to the shaft 450 to rotate with the shaft 450.
- the plate 470 may be fitted to the rear axle 452.
- an axial groove 472 forming a shape of the rear axle 452 may be located at the center of the plate 470.
- the rear shaft 452 and the plate 470 may be screwed or riveted, for example.
- the rear shaft 452 may be located inside the case 400, and the front shaft 454 may be located outside the case 400.
- the motor 490 may be installed at one side of the case 400, and the driving force of the motor 490 may be transmitted to the shaft 450.
- the plate 470 can rotate.
- the motor 490 may include a body 494 and a motor shaft 492.
- the motor shaft 492 and the shaft 450 are fitted with a belt, which will be described later, so that the driving force of the motor 490 can be transmitted to the shaft 450 and the plate 470 by the belt.
- the belt may be a chain, for example, or may be a rubber belt.
- 7 shows an example of a polarizing filter according to an embodiment of the present invention. 7 shows a plate 470, a shaft groove 472, and polarization filters 471, 473, 475, and 477.
- the plate 470 may be generally disc shaped.
- the shaft groove 472 may be formed at the center of rotation of the plate 470.
- Polarization filters 471, 473, 475, and 477 may be provided around the shaft groove 472.
- the polarization filters 471, 473, 475, and 477 may have different polarization angles.
- the polarization filters 471, 473, 475, and 477 may be, for example, 90 degrees, 180 degrees, 45 degrees, or ⁇ 45 degrees.
- various polarization angles can be easily provided to the camera.
- FIG. 8 shows an example of a side of a display panel inspection camera according to an embodiment of the present invention.
- the sensor module 200, the lens 310, the case 400, the mount 410, the shaft 450, the plate 470, the motor 490, and the polarization filters 471 and 473 are shown.
- the lens 310 may provide the sensor module 200 with light flowing from the outside. Therefore, the sensor module 200 and the lens 310 may have the same optical axis LA and may be installed in the case 400. At this time, the light path of the light introduced through the lens 310 from the outside may be changed and received by the sensor module 200.
- a prism or a reflection mirror may be interposed between the lens 310 and the sensor module 200. Having the same optical axis LA means that light introduced through the lens 310 can be received by the sensor module 200 from the outside, and thus the optical path may not be limited to be maintained on the same axis.
- the mount 410 may be provided in the case 400, and the lens 310 may be fitted to the mount 410. If necessary, various lenses may be used to change the angle of view or brightness of the lens.
- the polarization filter 473 may be located between the sensor module 200 and the lens 310.
- the polarization filter 473 positioned between the sensor module 200 and the lens 310 may mean that the polarization filter 473 is positioned on the same optical axis LA as the sensor module 200 and the lens 310.
- the plate 470 may be located between the sensor module 200 and the lens 310, and polarization filters 473 and 471 may be provided on the plate.
- the plate 470 may be for maintaining the position or shape of the polarization filters 473 and 471, and may not be provided in the plate 470 if the polarization filters 473 and 471 can maintain their position or shape.
- the polarization filters 473 and 471 may be provided with a plurality of 471, 473, 475, and 477 to polarize light at various angles.
- the plurality of polarization filters 471, 473, 475, 477 may rotate to be positioned on the same optical axis LA as the lens 310 and the sensor module 200.
- the plurality of polarization filters 471, 473, 475, and 477 may be provided on the plate 470, and the plate 470 may be installed in the case 400 to be rotatable. That is, the shaft 450 may be installed in the case 400.
- the shaft 450 may have a front shaft 454 and a rear shaft 452.
- the front shaft 454 is located outside the case, the rear shaft 452 may be installed to be located inside the case.
- the position of the shaft 450 for example, the positions of the front shaft 454 and the rear shaft 452, may be variously changed. If the shaft 450 is installed in the case 400 and the plate 470 can be rotated, the configuration is not
- the motor 490 may be installed in the case 400.
- the motor 490 may drive the polarization filter 473.
- the motor 490 may drive the plate 470.
- the motor 490 may have a motor shaft 492.
- the motor shaft 492 may be located outside the case 400.
- the motor shaft 492 may be mechanically connected to the shaft 450. Accordingly, the position of the motor shaft 492 may be variously changed according to the position of the shaft 450.
- the motor shaft 492 may be mechanically connected to the front shaft 454.
- the belt 480 may connect the motor shaft 492 and the front shaft 454.
- the belt 480 may transmit the driving force of the motor shaft 492 to the front shaft 454, and the polarization filter 473 may rotate as the front shaft 454 rotates.
- the belt 480 transmits the driving force of the motor shaft 492 to the front shaft 454, the plate 470 may rotate as the front shaft 454 rotates, the polarization filter 473 may rotate.
- the polarization filter 473 may be replaced with the polarization filter 471.
- the polarization filter 473 and the polarization filter 471 may have different polarization angles. Accordingly, polarization filters 471 and 473 having various polarization angles may be provided on the same optical axis LA between the lens 310 and the sensor module 200.
- 9 shows an example of a polarizing filter and a driving system according to an embodiment of the present invention.
- 9 shows a shaft 450, a transmission shaft 460, a plate 470, a motor 490, a motor shaft 492, polarization filters 471, 473, 475, 477, and a belt 480.
- the transmission shaft 460 may be provided.
- the transmission shaft 460 may be installed in the case 400.
- the shaft 450, the motor shaft 492, and the transmission shaft 460 may form a triangle.
- the belt 480 may be fitted to the shaft 450, the motor shaft 492, and the transmission shaft 460.
- the transmission shaft 460 may provide a predetermined tension to the belt 480.
- the motor 490 rotates, and the belt 480 transmits the rotational force of the motor 490 to the plate 470 so that the polarization filters 471, 473, 475, and 477 rotate. Accordingly, polarization filters 471, 473, 475, and 477 having various polarization angles may be provided to the optical axis LA described with reference to FIG. 8.
- 10 shows another example of the polarization filter and the drive system according to the embodiment of the present invention. 10 shows the shaft 450, the transmission shaft 460, the plate 470, the motor 490, the motor shaft 492, the polarization filter 479, and the belt 480.
- the polarization filter 479 may have one polarization angle.
- the polarization filter 479 may rotate. As the polarization filter 479 having one polarization angle rotates, various polarization angles may be provided to the optical axis LA described with reference to FIG. 8.
- the polarization filter 479 may be provided on the plate 470. In this case, the polarization filter 479 may rotate while the plate 470 rotates by the motor 490.
- FIG. 11 illustrates an example of a front surface of a display test panel camera according to an exemplary embodiment of the present invention.
- the transmission shaft 460 may be provided.
- the transmission shaft 460 may be installed in the case 400.
- the shaft 450, the motor shaft 492, and the transmission shaft 460 may form a triangle.
- the belt 480 may be fitted to the shaft 450, the motor shaft 492, and the transmission shaft 460.
- the transmission shaft 460 may provide a predetermined tension to the belt 480.
- the motor 490 rotates, and the belt 480 transmits the rotational force of the motor 490 to the plate 470 so that the polarization filters 471, 473, 475, and 477 rotate. Accordingly, polarization filters 471, 473, 475, and 477 having various polarization angles may be provided to the optical axis LA.
- 12 shows another example of the front of a display inspection panel camera according to an embodiment of the present invention.
- 12 shows a lens housing 310, a lens group 330, a shaft 450, a transmission shaft 460, a plate 470, a motor 490, a motor shaft 492, a polarization filter 479, and a belt. (480) is shown.
- the transmission shaft 460 may be provided.
- the transmission shaft 460 may be installed in the case 400.
- the shaft 450, the motor shaft 492, and the transmission shaft 460 may form a triangle.
- the belt 480 may be fitted to the shaft 450, the motor shaft 492, and the transmission shaft 460.
- the transmission shaft 460 may provide a predetermined tension to the belt 480.
- the motor 490 rotates, and the belt 480 transmits the rotational force of the motor 490 to the plate 470 so that the polarization filter 479 rotates. Accordingly, various polarization angles may be provided to the optical axis LA.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Analytical Chemistry (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Blocking Light For Cameras (AREA)
Abstract
Caméra d'inspection d'écran d'affichage. La caméra d'inspection d'écran d'affichage selon la présente invention comprend: un boîtier; un module capteur situé sur le boîtier; un objectif monté dans le boîtier et envoyant de la lumière au module capteur; et un filtre de polarisation positionné entre le module capteur et l'objectif.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2015-0072692 | 2015-05-26 | ||
| KR1020150072692A KR20160139075A (ko) | 2015-05-26 | 2015-05-26 | 디스플레이 패널 검사 카메라 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2016190459A1 true WO2016190459A1 (fr) | 2016-12-01 |
Family
ID=57393902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2015/005228 Ceased WO2016190459A1 (fr) | 2015-05-26 | 2015-05-26 | Dispositif d'inspection d'écran d'affichage |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20160139075A (fr) |
| WO (1) | WO2016190459A1 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023157396A1 (fr) * | 2022-02-15 | 2023-08-24 | 富士フイルム株式会社 | Dispositif de lentille, dispositif de traitement d'informations, programme et procédé de fabrication de dispositif d'imagerie |
| WO2025041200A1 (fr) * | 2023-08-18 | 2025-02-27 | 株式会社ニコン | Dispositif d'imagerie et système d'imagerie |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08292406A (ja) * | 1995-04-24 | 1996-11-05 | Advantest Corp | Lcdパネル検査装置 |
| JPH10160628A (ja) * | 1996-11-29 | 1998-06-19 | Advantest Corp | Lcdパネルの画質検査装置 |
| JPH10301075A (ja) * | 1997-04-30 | 1998-11-13 | Hitachi Electron Eng Co Ltd | 液晶パネルの位置検出装置 |
| KR20120133672A (ko) * | 2011-05-31 | 2012-12-11 | 엘지디스플레이 주식회사 | 입체영상 디스플레이의 검사장치 |
| KR20150054495A (ko) * | 2013-11-12 | 2015-05-20 | 삼성디스플레이 주식회사 | 결함 검사 장치 및 이를 이용한 결함 검사 방법 |
-
2015
- 2015-05-26 WO PCT/KR2015/005228 patent/WO2016190459A1/fr not_active Ceased
- 2015-05-26 KR KR1020150072692A patent/KR20160139075A/ko not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08292406A (ja) * | 1995-04-24 | 1996-11-05 | Advantest Corp | Lcdパネル検査装置 |
| JPH10160628A (ja) * | 1996-11-29 | 1998-06-19 | Advantest Corp | Lcdパネルの画質検査装置 |
| JPH10301075A (ja) * | 1997-04-30 | 1998-11-13 | Hitachi Electron Eng Co Ltd | 液晶パネルの位置検出装置 |
| KR20120133672A (ko) * | 2011-05-31 | 2012-12-11 | 엘지디스플레이 주식회사 | 입체영상 디스플레이의 검사장치 |
| KR20150054495A (ko) * | 2013-11-12 | 2015-05-20 | 삼성디스플레이 주식회사 | 결함 검사 장치 및 이를 이용한 결함 검사 방법 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023157396A1 (fr) * | 2022-02-15 | 2023-08-24 | 富士フイルム株式会社 | Dispositif de lentille, dispositif de traitement d'informations, programme et procédé de fabrication de dispositif d'imagerie |
| WO2025041200A1 (fr) * | 2023-08-18 | 2025-02-27 | 株式会社ニコン | Dispositif d'imagerie et système d'imagerie |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160139075A (ko) | 2016-12-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110657946B (zh) | 屏幕缺陷检测系统、屏幕检测线以及屏幕缺陷检测方法 | |
| TWI264532B (en) | Substrate inspection device | |
| WO2011059122A1 (fr) | Appareil de test de module de caméra et de commande de focalisation | |
| WO2006059647A1 (fr) | Dispositif et procede d'inspection de surface | |
| WO2017204560A1 (fr) | Procédé et appareil de détection de particules sur une surface supérieure de verre, et procédé d'exposition à un rayonnement de lumière incidente | |
| CN111044524B (zh) | 实现半导体晶粒相对两表面等光程成像的光学检测装置及方法 | |
| KR100279260B1 (ko) | 액정 셀의 액정 주입 및 액정 주입구 봉입검사 시스템 | |
| KR100446080B1 (ko) | 시트 부재들 사이의 정렬방법, 정렬방법, 기판조립방법,및 정렬장치 | |
| WO2015167104A1 (fr) | Appareil et procede de detection d'un materiau etranger sur la surface superieure d'un substrat transparent a l'aide de lumiere polarisee | |
| WO2016190459A1 (fr) | Dispositif d'inspection d'écran d'affichage | |
| WO2011083989A2 (fr) | Dispositif de contrôle de défaut | |
| WO2021187775A1 (fr) | Terminal de communication mobile | |
| WO2012134001A1 (fr) | Procédé permettant de tester des motifs, dispositif permettant de tester des motifs pour substrat par dessus lequel est formée une couche de motifs | |
| WO2013022190A1 (fr) | Procédé et appareil pour fixer des panneaux d'affichage stéréoscopiques automatiques | |
| WO2022059915A1 (fr) | Dispositif d'inspection d'échantillon pour détection de la fluorescence de l'échantillon | |
| JP2000275596A (ja) | セル検査装置及びセル検査方法 | |
| CN101661189A (zh) | 电光学装置及电子设备 | |
| JP4664463B2 (ja) | 基板検査装置 | |
| WO2018030603A1 (fr) | Procédé et dispositif d'inspection de défauts dans un film optique | |
| WO2019245313A1 (fr) | Système d'inspection de matières étrangères d'unité d'affichage | |
| WO2012134002A1 (fr) | Procédé permettant de tester des motifs, dispositif permettant de tester des motifs pour substrat par dessus lequel est formée une couche de motifs | |
| WO2014148781A1 (fr) | Dispositif de mesure de forme tridimensionnelle susceptible de mesurer des informations de couleurs | |
| CN110412804B (zh) | 布线基板以及显示面板 | |
| WO2019059613A1 (fr) | Appareil d'inspection de système optique transmissif et procédé d'inspection de défaut de film l'utilisant | |
| WO2022234950A1 (fr) | Système de détection confocale |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 15893411 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 15893411 Country of ref document: EP Kind code of ref document: A1 |